| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/13/2012 | US20120315396 Apparatus and method for combinatorial plasma distribution through a multi-zoned showerhead |
| 12/13/2012 | US20120315395 Thin-film manufacturing equipment, method for manufacturing thin film, and method for maintaining thin-film manufacturing equipment |
| 12/13/2012 | US20120315394 Film forming apparatus, film forming method, method for optimizing rotational speed, and storage medium |
| 12/13/2012 | US20120315379 Component protective overmolding using protective external coatings |
| 12/13/2012 | US20120315378 Slot Die Position Adjustment Control |
| 12/13/2012 | US20120312474 Methods of and hybrid factories for thin-film battery manufacturing |
| 12/13/2012 | US20120312236 Point source assembly for thin film deposition devices and thin film deposition devices employing the same |
| 12/13/2012 | US20120312235 Manufacturing method of semiconductor apparatus |
| 12/13/2012 | US20120312234 Process gas diffuser assembly for vapor deposition system |
| 12/13/2012 | US20120312233 Magnetically Enhanced Thin Film Coating Method and Apparatus |
| 12/13/2012 | US20120312232 Inline deposition apparatus |
| 12/13/2012 | US20120312231 Apparatus for thin-film deposition |
| 12/13/2012 | DE112010004362T5 Epitaxialwafer und verfahren zur herstellung desselben The same epitaxial wafer and methods for preparing |
| 12/13/2012 | DE102012209244A1 Eine Vorrichtung zum Dünnfilm-Abschneiden An apparatus for thin-cutting |
| 12/12/2012 | EP2532767A1 Process for making a ternary metal chalcogenide film |
| 12/12/2012 | EP2531885A1 Strengthened structural module and method of fabrication |
| 12/12/2012 | EP2531634A1 Dynamic fluid valve and method for establishing the same |
| 12/12/2012 | CN202601553U Reel-to-reel glow discharge generating device for modifying surface of flexible material |
| 12/12/2012 | CN202595271U Production device of amorphous silicon thin film |
| 12/12/2012 | CN202595270U Gas spraying structure |
| 12/12/2012 | CN202590560U Gas filtration treatment structure and tail gas treatment system |
| 12/12/2012 | CN102822396A Process for producing epitaxial single-crystal silicon carbide substrate and epitaxial single-crystal silicon carbide substrate obtained by process |
| 12/12/2012 | CN102822384A Method and apparatus for depositing atomic layers on a substrate |
| 12/12/2012 | CN102822383A Anti-arc zero field plate |
| 12/12/2012 | CN102822382A Dynamic fluid valve and method for establishing the same |
| 12/12/2012 | CN102822088A Method for the supply of fluorine |
| 12/12/2012 | CN102821825A Method for manufacturing electronic devices with purified fluorine |
| 12/12/2012 | CN102820222A Film forming method |
| 12/12/2012 | CN102820206A Heat reflection device and semiconductor processing device |
| 12/12/2012 | CN102817073A Method for growing In-rich nonpolar A-surface InGaN film |
| 12/12/2012 | CN102817014A Control method for silicon-based gas in chemical vapor deposition apparatus |
| 12/12/2012 | CN102817013A Photochemical deposition device for solar cells |
| 12/12/2012 | CN102817012A Apparatus for thin-film deposition |
| 12/12/2012 | CN102817011A Silicon nitride film deposition device and deposition method |
| 12/12/2012 | CN102817010A Single-arm lifting device and dual-arm lifting device |
| 12/12/2012 | CN102817009A Binary and ternary metal chalcogenide materials and method of making and using the same |
| 12/12/2012 | CN102817008A Preparation method of Ag-Ti-codoped diamond like carbon (DLC) film |
| 12/12/2012 | CN102199762B Method for increasing hardness and abrasion resistance of surface of iron and steel material |
| 12/12/2012 | CN102112659B Apparatus and method for high-throughput atomic layer deposition |
| 12/12/2012 | CN102097541B Method for enhancing efficiency of industrial single-chamber deposited amorphous silicon-based solar cell |
| 12/12/2012 | CN102011106B Method for flattening diamond film by using composite process |
| 12/12/2012 | CN101818334B ALD apparatus and method |
| 12/12/2012 | CN101553601B Method of forming a zinc oxide coated article |
| 12/11/2012 | US8329256 Method and device for the production of moulded pieces from a layer of polyurethane |
| 12/11/2012 | US8329253 Method for forming a transparent conductive film by atomic layer deposition |
| 12/11/2012 | US8329252 Method for the growth of SiC, by chemical vapor deposition, using precursors in modified cold-wall reactor |
| 12/11/2012 | US8329001 forming a film on the substrate in a non-equilibrium state by means of a material individually or integrally containing SinGe1-n (where 0 <== n <== 1) and the element (Li, Na, Mg, K, Ca, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Rb, Sr, Y, Zr, Nb, Mo, Ru, Rh, Pd, Cs, Ba, La); phase separtion; porosity |
| 12/11/2012 | US8328982 Low-temperature, converging, reactive gas source and method of use |
| 12/11/2012 | US8328946 Conveyor assembly with removable rollers for a vapor deposition system |
| 12/11/2012 | US8328945 Coating apparatus and method with indirect thermal stabilization |
| 12/11/2012 | US8328943 Film forming apparatus and method |
| 12/11/2012 | US8328942 Wafer heating and temperature control by backside fluid injection |
| 12/11/2012 | US8328941 Apparatus for clamping and stretching a mask |
| 12/11/2012 | US8328940 Apparatus for transferring a substrate |
| 12/11/2012 | US8328939 Diffuser plate with slit valve compensation |
| 12/11/2012 | US8327796 Plasma processing apparatus and plasma processing method |
| 12/11/2012 | US8327795 Microwave plasma processing apparatus and method of supplying microwaves using the apparatus |
| 12/11/2012 | DE202012008591U1 System zur druckgepulsten chemischen Gasphasenabscheidung System for druckgepulsten chemical vapor deposition |
| 12/06/2012 | WO2012167060A2 Compositions and processes for depositing carbon-doped silicon-containing films |
| 12/06/2012 | WO2012166514A1 Metal catalyst composition |
| 12/06/2012 | WO2012166364A1 Gas distribution showerhead for inductively coupled plasma etch reactor |
| 12/06/2012 | WO2012165944A1 Hot wire chemical vapour deposition process for producing an inorganic-polymer multi-layer stack |
| 12/06/2012 | WO2012165696A1 Coating layer for cutting tool |
| 12/06/2012 | WO2012165583A1 Cvd device, and cvd film production method |
| 12/06/2012 | WO2012165263A1 Method for forming gate insulating film, and device for forming gate insulating film |
| 12/06/2012 | WO2012165174A1 Device and method for detecting degradation of resistance heating heater |
| 12/06/2012 | WO2012165166A1 Method for manufacturing semiconductor device, substrate processing method, and substrate processing apparatus |
| 12/06/2012 | WO2012165124A1 Method for manufacturing molybdenum oxide-containing thin film, starting material for forming molybdenum oxide-containing thin film, and molybdenum amide compound |
| 12/06/2012 | WO2012164827A1 Vapor phase epitaxy method and light emitting element substrate manufacturing method |
| 12/06/2012 | WO2012164767A1 Film forming apparatus and film forming method |
| 12/06/2012 | WO2012164163A1 A method and a structure for protecting a passivating layer |
| 12/06/2012 | WO2012163977A1 Method and device for coating a float glass strip |
| 12/06/2012 | WO2012163540A1 Apparatus for surface treatment with process steam |
| 12/06/2012 | WO2012142408A3 Substrate holders and methods of substrate mounting |
| 12/06/2012 | WO2012136876A8 Atomic layer deposition with plasma source |
| 12/06/2012 | WO2012136875A8 Deposition reactor with plasma source |
| 12/06/2012 | WO2012134082A3 Plasma enhanced chemical vapor deposition apparatus and method for controlling the same |
| 12/06/2012 | WO2012125439A3 Precursors and methods for the atomic layer deposition of manganese |
| 12/06/2012 | WO2012118947A3 Apparatus and process for atomic layer deposition |
| 12/06/2012 | US20120309887 Carbon nanofiber, method for production thereof, method for production of carbon fiber composite material using carbon nanofiber, and carbon fiber composite material |
| 12/06/2012 | US20120308844 Multi-coated metallic products and methods of making the same |
| 12/06/2012 | US20120308807 Porous Materials |
| 12/06/2012 | US20120308775 Hydrophilic surfaces and process for preparing |
| 12/06/2012 | US20120308762 Method for the Application of a Conformal Nanocoating by Means of a Low Pressure Plasma Process |
| 12/06/2012 | US20120308740 Beam-Induced Deposition of Low-Resistivity Material |
| 12/06/2012 | US20120308739 Methods for deposition of alkaline earth metal fluoride films |
| 12/06/2012 | US20120308735 Ultra low dielectric constant material with enhanced mechanical properties |
| 12/06/2012 | US20120308733 Method of manufacturing a thermal barrier coating structure |
| 12/06/2012 | US20120308714 Reduced pressure deposition apparatus and reduced pressure deposition method |
| 12/06/2012 | US20120307353 DURABLE MgO-MgF2 COMPOSITE FILM FOR INFRARED ANTI-REFLECTION COATINGS |
| 12/06/2012 | US20120305955 Luminescent Particles, Methods and Light Emitting Devices Including the Same |
| 12/06/2012 | US20120305300 Methods for manufacturing an electric contact pad and electric contact |
| 12/06/2012 | US20120304935 Bubbler assembly and method for vapor flow control |
| 12/06/2012 | US20120304934 Porous ceramic gas distribution for plasma source antenna |
| 12/06/2012 | US20120304933 Parallel plate reactor for uniform thin film deposition with reduced tool foot-print |
| 12/06/2012 | US20120304932 Method for manufacturing microcrystalline semiconductor film and method for manufacturing semiconductor device |
| 12/06/2012 | US20120304931 Carbon-Based Containment System |
| 12/06/2012 | US20120304928 Apparatus and methods for positioning a substrate using capacitive sensors |
| 12/06/2012 | US20120304926 Heated wafer carrier profiling |
| 12/06/2012 | US20120304762 Method for making a pyrolytic boron nitride article |