| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/10/2013 | US20130011578 Method and apparatus for applying a coating at a high rate onto non-line-of-sight regions of a substrate |
| 01/10/2013 | US20130011574 Graphene production method and graphene production apparatus |
| 01/10/2013 | US20130011558 Process for producing polysilicon |
| 01/10/2013 | US20130011557 Microcontact printed films as an activation layer for selective atomic layer deposition |
| 01/10/2013 | US20130011556 Crucible, vapor deposition system and method using the crucible |
| 01/10/2013 | US20130011550 Method for forming silicon film and method for manufacturing power storage device |
| 01/10/2013 | US20130011440 Method and device for depositing thin layers, especially for the production of multiple layers, nanolayers, nanostructures and nanocomposites |
| 01/10/2013 | US20130008984 Apparatuses and methods for atomic layer deposition |
| 01/10/2013 | US20130008871 Methods for automatically determining capacitor values and systems thereof |
| 01/10/2013 | US20130008610 Surface treatment apparatus |
| 01/10/2013 | US20130008603 Coaxial cable and substrate processing apparatus |
| 01/10/2013 | US20130008382 Thin-film forming device |
| 01/10/2013 | US20130008381 Trap apparatus and substrate processing apparatus |
| 01/10/2013 | US20130008379 Organic layer deposition apparatus |
| 01/10/2013 | US20130008378 Depositing conformal boron nitride films |
| 01/10/2013 | US20130008345 Novel Metal Complexes for Metal-Containing Film Deposition |
| 01/10/2013 | DE102011107480A1 Coating of substrate for e.g. preparing light reflective system, involves winding coil in flat beam shape, continuously unwinding, rolling coating film and applying application-specific layer system on substrate by wet-chemical process |
| 01/10/2013 | DE102011106859A1 Verfahren und Vorrichtung zur kontinuierlichen Beschichtung von Substraten Method and apparatus for continuous coating of substrates |
| 01/10/2013 | DE102011078727A1 Schutzvorrichtung für Elektrodenhalterungen in CVD Reaktoren Protection device for electrode holders in CVD reactors |
| 01/10/2013 | DE102011078673A1 Processing substrate, comprises applying material on substrate and/or removing material from substrate, and transferring heat between heating or cooling body and substrate simultaneously and/or at different times, by array of blades |
| 01/10/2013 | DE102011051707A1 Verfahren zum Herstellen einer Solarzelle A method of manufacturing a solar cell |
| 01/09/2013 | EP2544240A1 Semiconductor transistor |
| 01/09/2013 | EP2544223A1 Thin film forming apparatus |
| 01/09/2013 | EP2543754A1 Semiconductor epitaxial substrate |
| 01/09/2013 | EP2543633A1 Method for fixation onto layer comprising amorphous carbon film, and laminate |
| 01/09/2013 | EP2543508A1 Layered product and process for producing same |
| 01/09/2013 | EP2543063A2 Wafer carrier with sloped edge |
| 01/09/2013 | EP2542709A1 Cleaning solvent and cleaning method for metallic compound |
| 01/09/2013 | CN202658229U Charging boat for producing coating blades |
| 01/09/2013 | CN202658228U Automatic loading and unloading PECVD (Plasma Enhanced Chemical Vapor Deposition) graphite boat protection system |
| 01/09/2013 | CN202658227U Device for detecting substrate fragments in chemical vapor deposition (CVD) equipment |
| 01/09/2013 | CN202658226U Improved nitrogen protection cover |
| 01/09/2013 | CN202658225U Double-side laminating equipment suitable for passive element |
| 01/09/2013 | CN202658223U Coating fixture for optical filter |
| 01/09/2013 | CN202658222U Film coating clamp for optical filters |
| 01/09/2013 | CN102869810A Isolation chamber and method of using isolation chamber to make solar cell material |
| 01/09/2013 | CN102869809A Source and arrangement for processing a substrate |
| 01/09/2013 | CN102867775A Filling method of deep groove |
| 01/09/2013 | CN102864482A Method for inhibiting generation of titanium carbide in porous titanium base boron-doped diamond membrane electrode |
| 01/09/2013 | CN102864440A Protective device for an electrode holder in cvd reactors |
| 01/09/2013 | CN102864439A Method for preparing antireflection film with potential induced degradation (PID) effect resistance |
| 01/09/2013 | CN102864438A Plasma-assistant deposition method and equipment for carrying out same |
| 01/09/2013 | CN102864437A Rotating device for reaction chamber |
| 01/09/2013 | CN102864436A Improved method for preparing silicon nitride anti-reflecting film of crystalline silicon solar cell |
| 01/09/2013 | CN102864435A Method for preparing composite type millipore filtration membrane for filtering organic waste water |
| 01/09/2013 | CN102861917A Preparation method of polycrystalline diamond compact covered by strong-combination chemical vapor deposition (CVD) diamond layer |
| 01/09/2013 | CN102330074B Plating film supplementing process of double-layer film |
| 01/09/2013 | CN102176410B Method for synthesizing Si/IIB-VIB group semiconductor nano p-n junction with one-step method |
| 01/09/2013 | CN101831630B Method for preparing doped zinc oxide by adopting metallic source chemical vapor deposition technology |
| 01/09/2013 | CN101765679B Conformal doping using high neutral plasma implant |
| 01/09/2013 | CN101736348B Method for carrying out surface activation treatment on marine climate-resisting engineering parts |
| 01/09/2013 | CN101556917B Method for forming quantum well structure and method for manufacturing semiconductor light emitting element |
| 01/09/2013 | CN101528759B New group v metal containing precursors and their use for metal containing film deposition |
| 01/09/2013 | CN101523357B Apparatus and method for substrate clamping in a plasma chamber |
| 01/09/2013 | CN101457349B Film coating correction plate |
| 01/09/2013 | CN101306295B Fluid purification device |
| 01/08/2013 | US8349722 Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device |
| 01/08/2013 | US8349408 Method of protecting reactor components from fouling |
| 01/08/2013 | US8349404 Methods for growing and harvesting carbon nanotubes |
| 01/08/2013 | US8349403 Vapor-phase process apparatus, vapor-phase process method, and substrate |
| 01/08/2013 | US8349402 Applying vapour phase aluminide coating on airfoil internal cavities using improved method |
| 01/08/2013 | US8349401 Film formation apparatus and method for using same |
| 01/08/2013 | US8349145 Method of burying metal and apparatus of depositing metal in concave portion |
| 01/08/2013 | US8349128 Method and apparatus for stable plasma processing |
| 01/08/2013 | US8349126 Apparatus for etching edge of wafer |
| 01/08/2013 | US8349086 Non-stick masking fixtures and methods of preparing same |
| 01/08/2013 | US8349085 Substrate processing apparatus |
| 01/08/2013 | US8349084 Apparatus and systems for intermixing cadmium sulfide layers and cadmium telluride layers for thin film photovoltaic devices |
| 01/08/2013 | US8349083 Vapor-phase process apparatus, vapor-phase process method, and substrate |
| 01/08/2013 | US8349082 Vacuum processing apparatus |
| 01/08/2013 | US8349081 Gas distributor with pre-chambers arranged in planes |
| 01/08/2013 | US8349076 Method of fabricating GaN substrate |
| 01/08/2013 | US8347915 Load-lock technique |
| 01/08/2013 | US8347814 Method and apparatus for coating a curved surface |
| 01/08/2013 | CA2525064C High purity electrolytic sulfonic acid solutions |
| 01/08/2013 | CA2497786C Diffusion barrier coatings having graded compositions and devices incorporating the same |
| 01/06/2013 | CA2779221A1 Protective device for electrode holders in cvd reactors |
| 01/03/2013 | WO2013003203A1 Projected plasma source |
| 01/03/2013 | WO2013003083A1 Method of growing graphene nanocrystalline layers |
| 01/03/2013 | WO2013002334A1 Product having traceability displayed thereon and method for displaying traceability of product |
| 01/03/2013 | WO2013002285A1 Method for forming alumina film and solar cell element |
| 01/03/2013 | WO2013001833A1 Plasma treatment device |
| 01/03/2013 | WO2013001024A1 Jet-spouted bed reactor having a specific profile |
| 01/03/2013 | WO2013001023A1 Temperable and non-temperable transparent nanocomposite layers |
| 01/03/2013 | WO2012150763A3 Method for manufacturing high quality graphene using continuous heat treatment chemical vapor deposition method |
| 01/03/2013 | WO2012134084A3 Plasma enhanced chemical vapor deposition apparatus and method for controlling the same |
| 01/03/2013 | WO2012134083A3 Plasma enhanced chemical vapor deposition apparatus and method for controlling the same |
| 01/03/2013 | WO2012118887A3 Apparatus and process for atomic layer deposition |
| 01/03/2013 | WO2010032978A3 Method for depositing amorphous silicon thin film by chemical vapor deposition |
| 01/03/2013 | US20130005076 Thermal jet printhead |
| 01/03/2013 | US20130005063 Substrate treating device using plasma and manufacturing method of organic light emitting diode display using the substrate treating device |
| 01/03/2013 | US20130005057 Apparatus for atomic layer deposition |
| 01/03/2013 | US20130004760 Biodegradable moisture barrier film |
| 01/03/2013 | US20130004756 Sliding element, in particular a piston ring, and method for coating a sliding element |
| 01/03/2013 | US20130004736 Method of protecting patterned magnetic materials of a stack |
| 01/03/2013 | US20130004682 Method and device for plasma-treating workpieces |
| 01/03/2013 | US20130004681 Mini blocker plate with standoff spacers |
| 01/03/2013 | US20130004261 Coated fastener |
| 01/03/2013 | US20130002850 Inspection of a component |
| 01/03/2013 | US20130001515 Direct growth of graphene on substrates |