| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/24/2013 | WO2013011297A1 Method |
| 01/24/2013 | WO2013010864A2 Device and method for determining the vapour pressure of a starting substance vaporized in a carrier gas stream |
| 01/24/2013 | WO2012167060A3 Compositions and processes for depositing carbon-doped silicon-containing films |
| 01/24/2013 | US20130023670 Heteroleptic Pyrrolecarbaldimine Precursors |
| 01/24/2013 | US20130023669 Heteroleptic Pyrrolecarbaldimine Precursors |
| 01/24/2013 | US20130023172 Textile including fibers deposited with material using atomic layer deposition for increased rigidity and strength |
| 01/24/2013 | US20130023129 Pressure transmitter for a semiconductor processing environment |
| 01/24/2013 | US20130023110 Method and apparatus for forming amorphous silicon film |
| 01/24/2013 | US20130023062 Thin film manufacturing apparatus, thin film manufacturing method and method for manufacturing semiconductor device |
| 01/24/2013 | US20130022995 Metal nanowire including gold nanoclusters on a surface thereof for binding target material and method of binding the target material to the metal nanowire |
| 01/24/2013 | US20130022813 Method for preparing graphene nanoribbon on insulating substrate |
| 01/24/2013 | US20130022761 Organic Silver Complexes, Their Preparation Methods and Their Methods for Forming Thin Layers |
| 01/24/2013 | US20130022760 Plasma nitriding method |
| 01/24/2013 | US20130022759 Plasma processing method and apparatus |
| 01/24/2013 | US20130022752 Methods for treating a surface of a substrate by atmospheric plasma processing |
| 01/24/2013 | US20130022745 Silane blend for thin film vapor deposition |
| 01/24/2013 | US20130022744 Method of forming noble metal layer using ozone reaction gas |
| 01/24/2013 | US20130022743 Vapor growth apparatus and vapor growth method |
| 01/24/2013 | US20130022658 Depositing material with antimicrobial properties on permeable substrate using atomic layer deposition |
| 01/24/2013 | US20130020711 Interconnect Pillars with Directed Compliance Geometry |
| 01/24/2013 | US20130020281 Nanoimprinting method, method for producing a droplet arrangement pattern, and method for fabricating substrates |
| 01/24/2013 | US20130019953 System and method for depositing a material on a substrate |
| 01/24/2013 | US20130019863 Method of manufacturing a medicament dispenser device |
| 01/24/2013 | US20130019805 Deposition source and deposition apparatus including the same |
| 01/24/2013 | US20130019803 Methods and apparatus for the deposition of materials on a substrate |
| 01/24/2013 | US20130019802 Nozzle arrangement and cvd-reactor |
| 01/24/2013 | US20130019801 Film deposition apparatus and substrate processing apparatus |
| 01/24/2013 | DE112011100871T5 Beschichteter PcBN-Schneideinsatz, diesen beschichteten PcBN-Schneideinsatz verwendendes beschichtetes PcBN-Schneidwerkzeug und Verfahren zur ihrer Herstelllung PcBN coated cutting insert, these coated PCBN cutting insert-use coated PCBN cutting tool and process for their Manufacture |
| 01/24/2013 | DE102012205604A1 Selbstschmierende struktur und verfahren zur herstellung derselben Self-lubricating structure and method of producing same |
| 01/24/2013 | DE102012106146A1 Verfahren zur chemischen Gasphasenabscheidung und Verfahren zur Herstellung lichtabgebender Vorrichtungen, das dieses nutzt A process for chemical vapor deposition and methods of preparing lichtabgebender devices that uses this |
| 01/24/2013 | DE102011079327A1 Turbinenschaufel aus Faserverbundwerkstoff Turbine blade made of fiber composite material |
| 01/24/2013 | DE102011051931A1 Vorrichtung und Verfahren zum Bestimmen des Dampfdrucks eines in einem Trägergasstrom verdampften Ausgangsstoffes Apparatus and method for determining the vapor pressure of a vaporized in a carrier gas stream starting material |
| 01/23/2013 | EP2549840A1 Plasma processing device, plasma processing method, and method for manufacturing a semiconductor element |
| 01/23/2013 | EP2549527A1 Deposition method |
| 01/23/2013 | EP2549524A1 Thin-film forming device |
| 01/23/2013 | EP2549522A1 Semiconductor thin-film manufacturing method, seminconductor thin-film manufacturing apparatus, susceptor, and susceptor holding tool |
| 01/23/2013 | EP2548995A1 Manufacturing method for transparent conductive carbon film, and transparent conductive carbon film |
| 01/23/2013 | EP2547806A1 A palette system for thin film deposition facilities for collecting and recovering deposited materials |
| 01/23/2013 | EP2547624A2 System and method for polycrystalline silicon deposition |
| 01/23/2013 | CN202695519U Equipment for preparing vertical GaN (gallium nitride) based LED (light emitting-diode) chip by using metal substrate |
| 01/23/2013 | CN202695373U Cam-locked showerhead electrode and assembly thereof |
| 01/23/2013 | CN202689775U Door hinge positioning device for coating machine |
| 01/23/2013 | CN202688448U PECVD (plasma enhanced chemical vapor deposition) equipment with automatic control system for heat exhaust fan |
| 01/23/2013 | CN202688447U Heat exchange sleeve |
| 01/23/2013 | CN202688446U Plate type PECVD (plasma enhanced chemical vapor deposition) heating carrying plate |
| 01/23/2013 | CN202688445U Metal organic compound chemical vapor deposition heater |
| 01/23/2013 | CN202688444U Graphite boat |
| 01/23/2013 | CN202688443U Convenient and fast graphite boat |
| 01/23/2013 | CN202688442U Easily-inserted graphite boat |
| 01/23/2013 | CN202688441U Novel graphite boat |
| 01/23/2013 | CN202688440U Efficient graphite boat |
| 01/23/2013 | CN202688439U Conveying system for gas pipeline |
| 01/23/2013 | CN202688438U Special gas tank for plasma enhanced chemical vapor deposition (PECVD) coating equipment |
| 01/23/2013 | CN202688437U Special gas pipeline and hot-line plasma enhanced chemical vapor deposition equipment with same |
| 01/23/2013 | CN202688436U Detachable special gas hole |
| 01/23/2013 | CN202688435U Gas distributing device for metal organic chemical gas phase deposition reaction device and reaction device |
| 01/23/2013 | CN202688434U Guide rail of plasma enhanced chemical vapor deposition (PECVD) carrier plate |
| 01/23/2013 | CN202688433U Equipment for coating crystalline silicon solar cells |
| 01/23/2013 | CN202688432U Crystalline silicon solar battery two-layer coating equipment |
| 01/23/2013 | CN202688426U Chip shelling resistant lower film coating blocking sheet |
| 01/23/2013 | CN102892922A Method and apparatus for remote plasma source assisted silicon-containing film deposition |
| 01/23/2013 | CN102892921A A method for producing a deposit and a deposit on a surface of a silicon substrate |
| 01/23/2013 | CN102892920A Method of processing multilayer film |
| 01/23/2013 | CN102892919A Manufacturing method for transparent conductive carbon film, and transparent conductive carbon film |
| 01/23/2013 | CN102892706A Method for fixation onto layer comprising amorphous carbon film, and laminate |
| 01/23/2013 | CN102891077A Method for preparing high k-gate dielectrics on surface of graphene by utilizing water-based atomic layer deposition technology |
| 01/23/2013 | CN102891073A Preparation method of low-temperature plasma auxiliary aluminum induced polycrystalline silicon carbide film |
| 01/23/2013 | CN102888596A Chamber device and plasma treatment equipment provided with same |
| 01/23/2013 | CN102888595A Film deposition apparatus and substrate processing apparatus |
| 01/23/2013 | CN102888594A Chemical vapor deposition method and method of manufacturing light-emitting device |
| 01/23/2013 | CN102888593A Device for coating pyrolytic carbon on graphite sphere surface and gas-phase carbon depositing method |
| 01/23/2013 | CN102888592A Guide roller supporting device of film plating machine |
| 01/23/2013 | CN101909819B Method for manufacturing an extremely hydrophobic surface |
| 01/23/2013 | CN101905126B Method and apparatus to help promote contact of gas with vaporized material |
| 01/23/2013 | CN101899653B Flange for transmitting process gas |
| 01/23/2013 | CN101842514B Method and apparatus for sealing an opening of a processing chamber |
| 01/23/2013 | CN101813236B Gas transmission device and transmission method |
| 01/23/2013 | CN101701333B Rectangular chemical vapour deposition reactor |
| 01/23/2013 | CN101665927B Film deposition apparatus, substrate processor, film deposition method |
| 01/23/2013 | CN101473061B Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts |
| 01/23/2013 | CN101139092B Method for preparing nanometer carbon tube on the aluminum foil |
| 01/22/2013 | US8357815 Metal compound, material for chemical vapor phase growth, and process for forming metal-containing thin film |
| 01/22/2013 | US8357614 Ruthenium-containing precursors for CVD and ALD |
| 01/22/2013 | US8357435 Flowable dielectric equipment and processes |
| 01/22/2013 | US8357430 Chemical vapor deposition of gaseous trisilylamine and gaseous ammonia, mono, di or tri carbylamino compounds; relatively low temperatures and relatively high growth rates |
| 01/22/2013 | US8357429 Methods for forming articles having apertures and articles having substantially reduced residual compressive stress |
| 01/22/2013 | US8357425 Process of making a coated substrate by crosslinking nanoparticles |
| 01/22/2013 | US8357265 Cleaning method and a vacuum processing apparatus |
| 01/22/2013 | US8357264 Plasma reactor with plasma load impedance tuning for engineered transients by synchronized modulation of a source power or bias power RF generator |
| 01/22/2013 | US8357262 Corrosion-resistant member, treatment apparatus and sample treatment method using the member, and method for manufacture of corrosion-resistant member |
| 01/22/2013 | US8357241 Method of organic material vacuum evaporation and apparatus thereof |
| 01/22/2013 | US8356575 Ion source and plasma processing apparatus |
| 01/22/2013 | US8356572 Clamping unit for depositing thin film solar cell and signal feed-in method |
| 01/22/2013 | US8356571 Applicator and application method for applying a sealant to a flanged seam |
| 01/22/2013 | CA2577151C Focusing nozzle |
| 01/22/2013 | CA2445996C Method of making fluid diffusion layers and electrodes having reduced surface roughness |
| 01/18/2013 | CA2783266A1 Metal dusting protection for welded pipe assemblies |
| 01/17/2013 | WO2013009913A2 Mixed metal oxide barrier films and atomic layer deposition method for making mixed metal oxide barrier films |
| 01/17/2013 | WO2013009794A1 Methods of dechucking and system thereof |
| 01/17/2013 | WO2013009184A1 Floating substrate monitoring and control device, and method for the same |