| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/17/2013 | WO2013008896A1 Method for manufacturing layered-film-bearing glass substrate |
| 01/17/2013 | WO2013008461A1 Iii nitride epitaxial substrate and method for manufacturing same |
| 01/17/2013 | WO2013008372A1 Raw material gas supply device for semiconductor manufacturing device |
| 01/17/2013 | WO2013008369A1 Treatment tank for production process and method for producing same |
| 01/17/2013 | WO2013008344A1 Plasma processing apparatus |
| 01/17/2013 | WO2013007754A1 Methods and systems for monitoring and controlling silicon rod temperature |
| 01/17/2013 | WO2013007580A1 Gas inlet member of a cvd reactor |
| 01/17/2013 | WO2013007093A1 Film deposition method |
| 01/17/2013 | WO2012148085A3 Antimony amino alkoxide compound and method for preparing same, and method for forming a thin film containing antimony using the antimony amino alkoxide compound and an atomic layer deposition technique |
| 01/17/2013 | WO2012146828A3 Process and apparatus for coating |
| 01/17/2013 | WO2012112753A3 System, method and apparatus for thin film manufacturing |
| 01/17/2013 | US20130017690 Plasma nitriding method and plasma nitriding apparatus |
| 01/17/2013 | US20130017686 Plasma processing apparatus and plasma processing method |
| 01/17/2013 | US20130017633 Vapor deposition apparatus and method, and method of manufacturing organic light emitting display apparatus |
| 01/17/2013 | US20130017343 Vapor deposition apparatus, vapor deposition method, and method of manufacturing organic light-emitting display apparatus |
| 01/17/2013 | US20130017342 Method and apparatus for depositing nanostructured thin layers with controlled morphology and nanostructure |
| 01/17/2013 | US20130017328 Film forming method and film forming apparatus |
| 01/17/2013 | US20130017323 Preparation of Epitaxial Graphene Surfaces for Atomic Layer Deposition of Dielectrics |
| 01/17/2013 | US20130017318 Vapor Deposition Apparatus and Method, and Method of Manufacturing Organic Light Emitting Display Apparatus |
| 01/17/2013 | US20130017317 Load lock control method and apparatus |
| 01/17/2013 | US20130017315 Methods and apparatus for controlling power distribution in substrate processing systems |
| 01/17/2013 | US20130015935 Common mode filter with multi spiral layer structure and method of manufacturing the same |
| 01/17/2013 | US20130015444 Evaporation mask, method of manufacturing evaporation mask, electronic device, and method of manufacturing electronic device |
| 01/17/2013 | US20130015053 Inductively coupled rf plasma source with magnetic confinement and faraday shielding |
| 01/17/2013 | US20130014898 Plasma breakers and methods therefor |
| 01/17/2013 | US20130014896 Wafer-Supporting Device and Method for Producing Same |
| 01/17/2013 | US20130014894 Methods and apparatus for controlling power distribution in substrate processing systems |
| 01/17/2013 | US20130014699 Deposition apparatus and method for manufacturing film by using deposition apparatus |
| 01/17/2013 | US20130014698 Modular gas injection device |
| 01/17/2013 | US20130014697 Container Having Multiple Compartments Containing Liquid Material for Multiple Wafer-Processing Chambers |
| 01/17/2013 | DE112011100696T5 Verfahren und Vorrichtung für Abscheidungsprozesse Method and apparatus for deposition processes |
| 01/17/2013 | DE112007003640B4 Vorrichtung zur Erzeugung eines Plasmas mittels einer dielektrischen Barrierenentladung An apparatus for generating a plasma by means of a dielectric barrier discharge |
| 01/17/2013 | DE102012207510A1 Pyrometer arrangement for use in vacuum treatment plant, has slide valve arranged in tube outer side of vacuum chamber between chamber wall and pyrometer and vacuum-tightly locking vacuum chamber before pyrometer |
| 01/17/2013 | DE102011078942A1 Verfahren zur Herstellung höherer Silane mit verbesserter Ausbeute A process for the preparation of higher silanes with improved yield |
| 01/17/2013 | DE102011056589A1 Gaseinlassorgan eines CVD-Reaktors Gas inlet element of a CVD reactor |
| 01/17/2013 | DE102007031416B4 Substrat aus einem polymeren Werkstoff und mit einer wasser- und sauerstoff- undurchlässigen Barrierebeschichtung sowie dazugehöriges Herstellungsverfahren Substrate made of a polymer material and having a water and oxygen impermeable barrier coating and belonging to manufacturing method |
| 01/17/2013 | DE102004020185B4 Verfahren und Vorrichtung für die Innenbeschichtung von Hohlkörpern sowie Verwendung der Vorrichtung Method and apparatus for the internal coating of hollow bodies, as well as using the apparatus |
| 01/16/2013 | EP2546386A1 Vapor deposition apparatus, vapor deposition method, and method of manufacturing organic light-emitting display apparatus |
| 01/16/2013 | EP2546054A1 Laminate and process for production thereof |
| 01/16/2013 | EP2545978A1 Exhaust-gas treatment system |
| 01/16/2013 | EP2545197A2 Atomic layer deposition chamber with multi inject |
| 01/16/2013 | EP2545196A1 Method and device for plasma-treating workpieces |
| 01/16/2013 | EP2545195A2 Method for coating at least the inner face of a piston ring and piston ring |
| 01/16/2013 | CN202671657U Plasma corrosion resistant component |
| 01/16/2013 | CN202671654U Electrode |
| 01/16/2013 | CN202671653U Metal-organic chemical vapor deposition (MOCVD) equipment reactor spray header and connecting structure thereof |
| 01/16/2013 | CN202671652U Gas distributor for hole position distribution by use of Archimedes spiral |
| 01/16/2013 | CN202671651U Nozzle device and chemical gas phase sedimentary reactor |
| 01/16/2013 | CN202671650U Cooling table for operational procedures of plasma enhanced chemical vapor deposition method |
| 01/16/2013 | CN202671649U Molybdenum reaction chamber |
| 01/16/2013 | CN202671648U Balance radio frequency (RF) electric bridge assembly |
| 01/16/2013 | CN202671646U Glass fixture |
| 01/16/2013 | CN1685485B Substrate processing apparatus |
| 01/16/2013 | CN102884412A Vessel outgassing inspection methods |
| 01/16/2013 | CN102884224A Stage heater and method for producing shaft |
| 01/16/2013 | CN102884223A Plasma treatment device |
| 01/16/2013 | CN102883841A Surface-coated cutting tool |
| 01/16/2013 | CN102881631A Manufacturing method of semiconductor device |
| 01/16/2013 | CN102879556A Biochip with constant volume and preparation method thereof |
| 01/16/2013 | CN102877041A Film deposition method |
| 01/16/2013 | CN102877040A Air-supply device and chemical vapor deposition device using air-supply device |
| 01/16/2013 | CN102877039A Vapor deposition apparatus and method, and method of manufacturing organic light emitting display apparatus |
| 01/16/2013 | CN102314078B Photoetching method |
| 01/16/2013 | CN102227008B Preparation method of P type GaN layer of LED chip |
| 01/16/2013 | CN102157577B Nanometer silicon/monocrystalline silicon heterojunction radial nanowire solar cell and preparation method thereof |
| 01/16/2013 | CN102108494B Deposition method for microcrystalline silicon thin films and device for monitoring plasma assisted deposition |
| 01/16/2013 | CN102047066B Manufacturing apparatus for depositing a material and an electrode for use therein |
| 01/16/2013 | CN101969020B Deposition apparatus and method of manufacturing a semiconductor device |
| 01/16/2013 | CN101939827B Liquid material carburetor, and filming device using the carburetor |
| 01/16/2013 | CN101932753B Film deposition apparatus and film deposition method |
| 01/16/2013 | CN101649450B Improving water-barrier performance of an encapsulating film |
| 01/15/2013 | US8354623 Treatment apparatus, treatment method, and storage medium |
| 01/15/2013 | US8354146 Methods for repairing gas turbine engine components |
| 01/15/2013 | US8354138 Preparing method for coating PMMA particles with silicon dioxide |
| 01/15/2013 | US8354135 Thermal processing apparatus, method for regulating temperature of thermal processing apparatus, and program |
| 01/15/2013 | US8354001 Processing thin wafers |
| 01/15/2013 | US8353988 Rotating pressure distributor and carousel-type machine for treating hollow bodies which is equipped therewith |
| 01/15/2013 | US8353987 System and method for depositing a material on a substrate |
| 01/15/2013 | US8353986 Substrate processing apparatus |
| 01/10/2013 | WO2013006759A1 Synchronized and shortened master-slave rf pulsing in a plasma processing chamber |
| 01/10/2013 | WO2013006523A1 Cartridge reactor for production of materials via the chemical vapor deposition process |
| 01/10/2013 | WO2013006522A1 Deposition cartridge for production materials via the chemical vapor deposition process |
| 01/10/2013 | WO2013006464A2 Biodegradable moisture barrier film |
| 01/10/2013 | WO2013006031A1 A method of fabricating a nanocomposite thin film with metallic nanoparticles |
| 01/10/2013 | WO2013005726A1 Primer composition, structure comprising primer layer that is formed of primer composition, and method for producing structure |
| 01/10/2013 | WO2013005481A1 Susceptor apparatus and film-forming apparatus provided with same |
| 01/10/2013 | WO2013005435A1 Vacuum film formation device |
| 01/10/2013 | WO2013004851A1 Method and device for continuously coating substrates |
| 01/10/2013 | WO2013004440A1 Plasma treatment of hollow bodies |
| 01/10/2013 | WO2013004439A1 Device and method for plasma treatment of surfaces |
| 01/10/2013 | WO2012141484A3 Bowl-shaped structure, method for manufacturing same, and bowl array |
| 01/10/2013 | US20130012087 Cured Organopolysiloxane Resin Film Having Gas Barrier Properties and Method Of Producing The Same |
| 01/10/2013 | US20130012033 Silicon oxide film forming method and plasma oxidation apparatus |
| 01/10/2013 | US20130012029 Method and device for layer deposition |
| 01/10/2013 | US20130011692 Coated article having yttrium-containing coatings applied by physical vapor deposition and method for making the same |
| 01/10/2013 | US20130011631 Biaxially oriented bio-based polyester films and laminates |
| 01/10/2013 | US20130011582 Crucible, vapor deposition system and method using the crucible |
| 01/10/2013 | US20130011581 Protective device for electrode holders in cvd reactors |
| 01/10/2013 | US20130011580 Cyclopentadienyl transition metal precursors for deposition of transition metal-containing films |
| 01/10/2013 | US20130011579 Metal-Enolate Precursors For Depositing Metal-Containing Films |