| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 02/13/2013 | CN102922815A Water-cooled flat plate layered CuCrZr/OFHC-Cu/CVD-W plasma-facing part and manufacturing method thereof |
| 02/13/2013 | CN102345134B Preparation method for wettability controllable porous structure of titanium and titanium alloy surface |
| 02/13/2013 | CN102286743B Steel-based mosaic diamond coating and preparation method thereof |
| 02/13/2013 | CN102242336B Film preparation method for reducing stress of hard film |
| 02/13/2013 | CN101999173B Apparatus for manufacturing thin film solar cell |
| 02/13/2013 | CN101809197B Film forming apparatus |
| 02/13/2013 | CN101809187B Organosiloxane materials for selective area deposition of inorganic materials |
| 02/13/2013 | CN101802259B Device for very high frequency plasma assisted CVD under atmospheric pressure, and applications thereof |
| 02/13/2013 | CN101088150B Tensile and compressive stressed materials for semiconductors |
| 02/12/2013 | US8372483 Methods for forming thin films comprising tellurium |
| 02/12/2013 | US8372482 Methods and apparatus for controlled chemical vapor deposition |
| 02/12/2013 | US8372481 Methods of forming material on a substrate, and a method of forming a field effect transistor gate oxide on a substrate |
| 02/12/2013 | US8372239 Plasma processing apparatus |
| 02/12/2013 | US8372238 Multiple-electrode plasma processing systems with confined process chambers and interior-bussed electrical connections with the electrodes |
| 02/12/2013 | US8372205 Reducing electrostatic charge by roughening the susceptor |
| 02/12/2013 | US8372204 Susceptor for MOCVD reactor |
| 02/12/2013 | US8372203 Apparatus temperature control and pattern compensation |
| 02/12/2013 | US8372202 Film deposition apparatus |
| 02/12/2013 | US8372201 High temperature ALD inlet manifold |
| 02/12/2013 | US8372200 Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing method |
| 02/07/2013 | WO2013019041A2 Method for manufacturing solid electrolyte thin film and manufacturing device thereof |
| 02/07/2013 | WO2013018998A1 Plasma generation apparatus and plasma generation method |
| 02/07/2013 | WO2013018577A1 Organic ruthenium compound for chemical vapor deposition raw material and production method for said organic ruthenium compound |
| 02/07/2013 | WO2013018483A1 Method and apparatus for manufacturing substrate provided with thin film |
| 02/07/2013 | WO2013018413A1 Alkoxide compound and raw material for forming thin film |
| 02/07/2013 | WO2013018366A1 Nbon film, method for producing nbon film, hydrogen generation device, and energy system provided with same |
| 02/07/2013 | WO2013018319A1 Plasma cvd device |
| 02/07/2013 | WO2013018292A1 Film formation method |
| 02/07/2013 | WO2013018265A1 Feedstock gasification and supply device |
| 02/07/2013 | WO2013017514A1 Device and method for producing thin films |
| 02/07/2013 | WO2013017495A1 Tool and process for treating an object by plasma generators |
| 02/07/2013 | WO2013016950A1 Electric contact and method for preparing thereof |
| 02/07/2013 | WO2011046191A9 Jig for semiconductor production and method for producing same |
| 02/07/2013 | US20130034669 Methods of making cell carrier |
| 02/07/2013 | US20130034668 Method for Producing Plasma Flow, Method for Plasma Processing, Apparatus for Producing Plasma, and Apparatus for Plasma Processing |
| 02/07/2013 | US20130034667 Inorganic nanocoating primed organic film |
| 02/07/2013 | US20130034666 Inductive plasma sources for wafer processing and chamber cleaning |
| 02/07/2013 | US20130034663 Methods and systems relating to light sources for use in industrial processes |
| 02/07/2013 | US20130032829 Deposition source assembly, organic layer deposition apparatus, and method of manufacturing organic light-emitting display apparatus by using the organic layer deposition apparatus |
| 02/07/2013 | US20130032574 Capacitive-coupled plasma processing apparatus and method for processing substrate |
| 02/07/2013 | US20130032092 Apparatus for coating substrates using the eb/pvd method |
| 02/07/2013 | US20130032091 Cleaning method of film forming device and semiconductor manufacturing apparatus |
| 02/07/2013 | US20130031794 RAZOR BLADES WITH ALUMINUM MAGNESIUM BORIDE (AlMgB14)-BASED COATINGS |
| 02/07/2013 | DE102011052325A1 Reinigungsmodul und Reinigungsverfahren für Substrate und/oder Substratträger Cleaning module and cleaning process for substrates and / or substrate carrier |
| 02/06/2013 | EP2553144A1 Gas injection device with uniform gas velocity |
| 02/06/2013 | EP2553143A1 Modular gas injection device |
| 02/06/2013 | EP2553142A1 Surface treatment apparatus |
| 02/06/2013 | EP2553141A2 Metal nitride containing film deposition using combination of amino-metal and halogenated metal precursors |
| 02/06/2013 | EP2553140A1 Process and apparatus for deposition of multicomponent semiconductor layers |
| 02/06/2013 | EP2553139A1 Method of processing multilayer film |
| 02/06/2013 | EP2552828A2 Method for the supply of fluorine |
| 02/06/2013 | CN202717846U Special tool for installing wafer bracket |
| 02/06/2013 | CN202717845U Plate type PECVD (plasma enhanced chemical vapor deposition) coated carrier plate |
| 02/06/2013 | CN102918932A Microwave introduction mechanism, microwave plasma source and microwave plasma treatment device |
| 02/06/2013 | CN102918180A Tightly fitted ceramic insulator on large area electrode |
| 02/06/2013 | CN102918179A Apparatus and method for supplying electric power to a CVD - reactor |
| 02/06/2013 | CN102918178A Apparatus for forming metal oxide film, method for forming metal oxide film and metal oxide film |
| 02/06/2013 | CN102918177A Method for manufacturing a coated member |
| 02/06/2013 | CN102916093A Method for depositing high insulating property SiO2 film with low-damage PECVD (Plasma Enhanced Chemical Vapor Deposition) |
| 02/06/2013 | CN102916060A Silicon-based thin-film solar cell and preparation method thereof |
| 02/06/2013 | CN102915925A Method for depositing an amorphous carbon film with improved density and step coverage |
| 02/06/2013 | CN102915910A Method of manufacturing semiconductor device and substrate processing apparatus |
| 02/06/2013 | CN102912321A Gas distribution device of coating apparatus |
| 02/06/2013 | CN102912320A Deposition apparatus and deposition method |
| 02/06/2013 | CN102912319A Liquid material vaporizer |
| 02/06/2013 | CN102912318A Method of reducing contaminant particles in reaction chamber and chemical vapor deposition apparatus |
| 02/06/2013 | CN102912317A Method for manufacturing shape-controlled nanometer zinc and antimony alloy material |
| 02/06/2013 | CN102912316A Deposition source assembly and organic layer deposition apparatus |
| 02/06/2013 | CN102912315A Method for growing InN-base film material |
| 02/06/2013 | CN102912314A Amorphous Ge/Te deposition process |
| 02/06/2013 | CN102912313A Apparatus and method for controlling plasma potential |
| 02/06/2013 | CN102352510B Method for preparing high-performance silicon-doped type diamond film layer on magnesium alloy at low temperature |
| 02/06/2013 | CN102260857B Crystal silicon surface coating and method for preparing same |
| 02/06/2013 | CN102185217B Connecting member and method for radio-frequency power supply in silicon-based film battery deposition clamp |
| 02/06/2013 | CN101713066B Method for depositing film and film deposition apparatus |
| 02/06/2013 | CN101548364B Top panel and plasma processing apparatus |
| 02/06/2013 | CN101425551B Antireflective coatings for photovoltaic applications |
| 02/06/2013 | CN101367756B Tellurium (Te) precursor for manufacturing phase-change memory material |
| 02/05/2013 | US8367983 Apparatus including heating source reflective filter for pyrometry |
| 02/05/2013 | US8367866 Single-source precursor and methods therefor |
| 02/05/2013 | US8367566 Method for manufacturing semiconductor device and method for processing substrate |
| 02/05/2013 | US8367527 Method of fabricating polycrystalline silicon thin film |
| 02/05/2013 | US8367250 Device for storing electric power comprising a protective barrier layer for the collector |
| 02/05/2013 | US8367225 Coating, article coated with coating, and method for manufacturing article |
| 02/05/2013 | US8367207 Method of producing a hydrogenated amorphous carbon coating |
| 02/05/2013 | US8367166 Synthesis of higher diamondoids |
| 02/05/2013 | US8366892 Graphite electrode |
| 02/05/2013 | US8366871 Method and apparatus for cleaning and surface conditioning objects using plasma |
| 02/05/2013 | US8366869 Processing apparatus and processing method |
| 02/05/2013 | US8366868 Substrate processing apparatus |
| 02/05/2013 | US8366833 Plasma processing apparatus and plasma processing method |
| 02/05/2013 | US8366832 Driving shaft of effusion cell for deposition system and deposition system having the same |
| 02/05/2013 | US8366831 Evaporation source |
| 02/05/2013 | US8366830 Susceptor apparatus for inverted type MOCVD reactor |
| 02/05/2013 | US8366829 Multi-station decoupled reactive ion etch chamber |
| 02/05/2013 | US8366828 Shower head and substrate processing apparatus |
| 02/05/2013 | US8366827 Chamber inserts and apparatuses for processing a substrate |
| 02/05/2013 | US8366423 Method and arrangement for realizing a vacuum in a vacuum chamber |
| 02/05/2013 | US8366225 Image recording apparatus, its control method and storage medium recording its control program |
| 01/31/2013 | WO2013016532A1 Systems for and methods of controlling time-multiplexed deep reactive-ion etching processes |