| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 04/04/2013 | WO2013046517A1 Vaporizer |
| 04/04/2013 | WO2013046286A1 Plasma film forming apparatus |
| 04/04/2013 | WO2013046157A1 Nickel bis diazabutadiene precursors, their synthesis, and their use for nickel containing film depositions |
| 04/04/2013 | WO2013046155A1 Tungsten diazabutadiene precursors, their synthesis, and their use for tungsten containing film depositions |
| 04/04/2013 | WO2013045788A1 Loading device for densification via chemical infiltration in steam phase in directed flow of three-dimensional porous substrates |
| 04/04/2013 | WO2013045311A1 Euv mirror comprising an oxynitride capping layer having a stable composition, euv lithography apparatus, and operating method |
| 04/04/2013 | WO2013044746A1 Preparation method of copper-containing composite coating on metal part of medical device and medical device |
| 04/04/2013 | WO2013023110A3 Uniform coatings produced by suspensions of anisotropic particles |
| 04/04/2013 | WO2013022306A3 Apparatus for plasma generation, method for manufacturing rotating electrodes for plasma generation apparatus, method for plasma treatment of substrate, and method for forming thin film of mixed structure using plasma |
| 04/04/2013 | WO2013019041A9 Method for manufacturing solid electrolyte thin film and manufacturing device thereof |
| 04/04/2013 | WO2013016229A3 Heteroleptic pyrrolecarbaldimine precursors |
| 04/04/2013 | WO2013002605A3 Composite particles for a photoactive layer of a solar cell and method for manufacturing same |
| 04/04/2013 | US20130084669 In-line deposition system and process for deposition of a thin film layer |
| 04/04/2013 | US20130084668 Temporary arc inducement of glass substrate during diffusive transport deposition |
| 04/04/2013 | US20130084657 Plasma Density Control |
| 04/04/2013 | US20130084465 Stainless Steel and Silver Colored PVD Coatings |
| 04/04/2013 | US20130084430 Mirror feature in devices |
| 04/04/2013 | US20130084410 Method for diffusing metal particles within a composite layer |
| 04/04/2013 | US20130084409 Method and Device for Atmospheric Pressure Plasma Treatment |
| 04/04/2013 | US20130084408 Vacuum processing apparatus and plasma processing method |
| 04/04/2013 | US20130084407 Plasma-enhanced deposition of copper-containing films for various applications using amidinate copper precursors |
| 04/04/2013 | US20130084391 Nozzle unit, and apparatus and method for treating substrate with the same |
| 04/04/2013 | US20130084390 Film-forming apparatus and film-forming method |
| 04/04/2013 | US20130084389 Method and ceramic component |
| 04/04/2013 | US20130084208 Aluminum-based alloys |
| 04/04/2013 | US20130083457 System and method for manufacturing a display panel or other patterned device |
| 04/04/2013 | US20130082219 Method for Producing Highly Conformal Transparent Conducting Oxides |
| 04/04/2013 | US20130081762 Plasma Tuning Rods in Microwave Processing Systems |
| 04/04/2013 | US20130081571 Organic vapor jet printing system |
| 04/04/2013 | DE102011114593A1 Transporteinrichtung zum Transportieren mehrerer Substrate in den Bereich einer Substrat-Behandlungseinrichtung Transport means for transporting a plurality of substrates in the area of a substrate-treatment device |
| 04/04/2013 | DE102008052098B4 Verfahren zur Herstellung photokatalytisch aktiver Titandioxidschichten Process for the preparation of photocatalytically active titanium dioxide layers |
| 04/04/2013 | CA2849876A1 A device for loading porous substrates of three-dimensional shape in order to be densified by directed flow chemical vapor infiltration |
| 04/03/2013 | EP2574685A1 Sliding element with DLC coating |
| 04/03/2013 | EP2574611A1 Halogenated Organoaminosilane Precursors and Methods for Depositing Films Comprising Same |
| 04/03/2013 | CN202849542U Polygonal graphite boat staple bolt |
| 04/03/2013 | CN202849541U Detachable novel graphite depositing tank |
| 04/03/2013 | CN202849540U Exhaust gas cooling and enclosing device compatible with gas phase reaction equipment |
| 04/03/2013 | CN202849536U Cooling and heating system |
| 04/03/2013 | CN202849534U Plasma physical and chemical codeposition device |
| 04/03/2013 | CN103026473A Interlayer insulating layer formation method and semiconductor device |
| 04/03/2013 | CN103025915A Low-temperature synthesis of silica |
| 04/03/2013 | CN103022290A Light-emitting diode (LED) epitaxial structure with quaternary InAlGaN and method for preparing same |
| 04/03/2013 | CN103022259A Solar cell film-coating method |
| 04/03/2013 | CN103018811A Method for preparing wrinkle negative optical filter by using atomic layer deposition technique |
| 04/03/2013 | CN103014679A System for carrying out silicon thin-film plating by using carrier jacking chip-delivering technology |
| 04/03/2013 | CN103014678A Silicon film plating by using unique transmission mechanism sheet transmission technology |
| 04/03/2013 | CN103014677A Plasma monitoring and minimizing stray capacitance |
| 04/03/2013 | CN103014676A Preparation method of ZnO transparent conducting film by ECR-PEMOCVD (electron cyclotron resonance-plasma-enhanced metal-organic chemical vapor deposition) system low-temperature deposition |
| 04/03/2013 | CN103014675A Device for forming AZO (ZnO:Al) film on substrate |
| 04/03/2013 | CN103014674A Solar photovoltaic glass coating preheating device |
| 04/03/2013 | CN103014673A Electromagnetic heating device for metal organic chemical vapor deposition (MOCVD) reaction chamber |
| 04/03/2013 | CN103014672A Coating method and device |
| 04/03/2013 | CN103014671A Film deposition apparatus and substrate processing apparatus |
| 04/03/2013 | CN103014670A Reaction source delivery apparatus |
| 04/03/2013 | CN103014669A Chemical vapor deposition (CVD) device |
| 04/03/2013 | CN103014668A Chemical vapor deposition (CVD) device |
| 04/03/2013 | CN103014667A Chemical vapor deposition (CVD) device |
| 04/03/2013 | CN103014666A Chemical vapor deposition (CVD) device |
| 04/03/2013 | CN103014665A Chemical vapor deposition apparatus for metallorganic compounds and gas conveying method thereof |
| 04/03/2013 | CN103014664A Chemical vapor deposition apparatus |
| 04/03/2013 | CN103014663A Method for adjusting PECVD airflow outlet position for improving film uniformity under large area |
| 04/03/2013 | CN103014662A Gas path apparatus for precisely controlling reactant flow rate in chemical vapor deposition equipment |
| 04/03/2013 | CN103014661A Showerhead air flow design for plating uniform silicon film |
| 04/03/2013 | CN103014660A PECVD (plasma enhanced chemical vapor deposition) coating device and connecting device of radio-frequency power supply and vacuum chamber thereof |
| 04/03/2013 | CN103014659A Method and apparatus for depositing a layer on a semiconductor wafer by vapor deposition in a process chamber |
| 04/03/2013 | CN103014658A Heating flat plate for coating silicon thin film by performing lifting action |
| 04/03/2013 | CN103014657A PECVD vacuum chamber built-in sealing device |
| 04/03/2013 | CN103014656A Nickel silicide layer forming method and semiconductor device forming method |
| 04/03/2013 | CN103014655A Preparation method of Ga/Al-codoped ZnO film by ECR-PEMOCVD (electron cyclotron resonance-plasma-enhanced metal-organic chemical vapor deposition) low-temperature deposition |
| 04/03/2013 | CN103014654A Preparation method of AlN/ZnO/InGaN/diamond/Si multilayer-structure surface acoustic wave filter |
| 04/03/2013 | CN103014653A Preparation method of surface acoustic wave filter in AlN/GAZO/self-supporting diamond film structure |
| 04/03/2013 | CN103014652A Device for preparing carbon film on inner wall of quartz ampoule used for monocrystal growth |
| 04/03/2013 | CN103014649A Optical fiber coating technology |
| 04/03/2013 | CN103014648A Miniaturized supporting and fine-tuning device, and application thereof |
| 04/03/2013 | CN103014625A Method for preparing tetragonal-phase room-temperature multi-ferroic material BiFeO3 |
| 04/03/2013 | CN103014617A Thin film forming apparatus |
| 04/03/2013 | CN103012457A Halogenated organoaminosilane precursors and methods for depositing films comprising same |
| 04/03/2013 | CN103008696A Surface-coated cutting tool with excellent cutter breakage resistance by hard coating layer |
| 04/03/2013 | CN102505113B Preparation method of large-area graphene based on Cl2 reaction |
| 04/03/2013 | CN102321876B Preparation method of carbon nanotube |
| 04/03/2013 | CN102051595B Chemical vapor deposition device and spray nozzle thereof |
| 04/03/2013 | CN101978095B Coaxial microwave assisted deposition and etch systems |
| 04/03/2013 | CN101765680B Treating-gas supply system and treating apparatus |
| 04/02/2013 | US8410001 Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus |
| 04/02/2013 | US8409659 Nanowire supported catalysts for fuel cell electrodes |
| 04/02/2013 | US8409400 Inductive plasma chamber having multi discharge tube bridge |
| 04/02/2013 | US8409399 Reduced maintenance chemical oxide removal (COR) processing system |
| 04/02/2013 | US8409398 Control of ion angular distribution function at wafer surface |
| 04/02/2013 | US8409355 Low profile process kit |
| 04/02/2013 | US8409354 Vapor based combinatorial processing |
| 04/02/2013 | US8409353 Water cooled gas injector |
| 04/02/2013 | US8409352 Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus |
| 04/02/2013 | US8408025 Raw material recovery method and trapping mechanism for recovering raw material |
| 03/28/2013 | WO2013043507A1 Metal-aluminum alloy films from metal pcai precursors and aluminum precursors |
| 03/28/2013 | WO2013043501A1 Metal-aluminum alloy films from metal amidinate precursors and aluminum precursors |
| 03/28/2013 | WO2013043122A1 A reinforced filter with a metallic filtering layer |
| 03/28/2013 | WO2013042863A1 Nano particle complex and method of fabricating the same |
| 03/28/2013 | WO2013042790A1 Surface-coated cutting tool |
| 03/28/2013 | WO2013042355A1 Thin-film formation method, thin-film formation device, object to be treated having coating film formed thereon, die and tool |
| 03/28/2013 | WO2013041840A1 Process for forming a silica coating on a glass substrate |