Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
06/1990
06/06/1990EP0371582A1 Production of photoconductive device with ZnO electrode layer
06/06/1990EP0371145A1 Process for vapor-phase synthesis of diamond
06/06/1990EP0371086A1 Deposition apparatus.
06/06/1990EP0371065A1 Surface deposition or surface treatment reactor.
06/05/1990US4931756 High power microwave transmissive window assembly
06/05/1990US4931692 Luminescing member, process for preparation thereof, and electroluminescent device employing same
06/05/1990US4931425 Process for chemical vapor deposition of superconductive oxide
06/05/1990US4931308 Process for the preparation of functional tin oxide thin films
06/05/1990US4931240 Method for the production of a carbon electrode
06/05/1990US4930442 Microwave plasma CVD apparatus having an improved microwave transmissive window
06/05/1990US4930439 Mask-repairing device
06/05/1990CA1270070A1 Fabrication of semiconductor devices utilizing patterned metal layers
06/05/1990CA1269950A1 Glow-discharge decomposition apparatus
05/1990
05/31/1990DE3938956A1 Verfahren zur plasmaablagerung von mehreren schichten aus amorphem material mit variabler zusammensetzung Method for plasma deposition of several layers of amorphous material with variable composition
05/31/1990DE3837306A1 Machine element consisting of a metallic material
05/31/1990CA2003137A1 Method for selectively depositing refractory metal on semiconductor substrates
05/30/1990EP0370925A1 Process and apparatus for the plasma surface treatment of a substrate borne by an electrode
05/30/1990EP0370912A1 Laser micro-beam intervention machine for thin layer objects, in particular for etching or chemically depositing matter in the presence of a reactive gas
05/30/1990EP0370701A1 Method for making pigment flakes
05/30/1990EP0370542A1 Sealing element for feeding through at least one elongated object such as wire and a vacuum apparatus provided with one or more of such sealing elements
05/30/1990EP0370387A2 Superconducting material
05/30/1990EP0370311A2 Chemical vapor deposition system and reactant delivery section therefor
05/30/1990EP0370027A1 Apparatus for coating a substrate.
05/29/1990US4929468 Formation of amorphous metal alloys by chemical vapor deposition
05/29/1990US4929328 Electrolytic production of aluminum
05/29/1990US4928627 Apparatus for coating a substrate
05/29/1990US4928626 Reactant gas injection for IC processing
05/29/1990US4928423 Titanium carbide and/or nitride film
05/29/1990CA1269637A1 Producing substrates coated with inorganic films by plasma enhanced chemical vapor deposition
05/25/1990CA2003847A1 Mind-array laser device for thin surface objects, especially for engraving or chemical deposit using a reaction gas
05/23/1990EP0369602A1 Glass coating apparatus
05/23/1990EP0369297A1 Volatile fluorinated beta-ketoimines and associated metal complexes
05/23/1990EP0369143A1 Process for the production of thin molybdenum sulphide films
05/23/1990DE3907857C1 Method for preparing a layer of amorphous silicon carbide
05/22/1990US4927786 Process for the formation of a silicon-containing semiconductor thin film by chemically reacting active hydrogen atoms with liquefied film-forming raw material gas on the surface of a substrate
05/22/1990US4927713 Tungsten and tungsten carbide
05/22/1990US4927704 Abrasion-resistant plastic articles and method for making them
05/22/1990US4927670 Chemical vapor deposition of mixed metal oxide coatings
05/22/1990US4926793 Method of forming thin film and apparatus therefor
05/22/1990US4926791 Microwave plasma apparatus employing helmholtz coils and ioffe bars
05/17/1990WO1990005202A1 A method for the production of thin film perovskite phase lead scandium tantalate
05/17/1990WO1990005160A1 Thin film chemiresistive sensors
05/16/1990EP0368490A1 A process for the synthesis of granular diamond
05/16/1990EP0231262B1 Photochemical vapor deposition process for depositing oxide layers
05/16/1990CN1042138A Coating of glass
05/16/1990CA2001578A1 Sealing elements for feeding through at least one elongated object such as wire and a vacuum apparatus provided with one or more of such sealing element
05/15/1990US4925701 Processes for the preparation of polycrystalline diamond films
05/15/1990US4925388 Apparatus for heat treating substrates capable of quick cooling
05/15/1990US4924936 Multiple, parallel packed column vaporizer
05/15/1990US4924807 Apparatus for chemical vapor deposition
05/15/1990CA1269061A1 Process for the production of diamond-like carbon coatings
05/09/1990EP0367289A2 Plasma chemical vapor deposition apparatus
05/09/1990EP0367004A1 Deposition of silicon-containing films using organosilicon compounds and nitrogen trifluoride
05/09/1990EP0366924A2 Ceramic thermal barrier coating with alumina interlayer
05/09/1990CN1007915B Process for the production of multimetallic amorphous alloy coatings
05/08/1990US4923717 Pretreatment with group ivb or vb metal complex; exposure to aluminum hydride comples
05/08/1990US4923716 Chemical vapor desposition of silicon carbide
05/08/1990US4923715 Method of forming thin film by chemical vapor deposition
05/08/1990US4923526 Reacting gas and metal; semiconductors, integrated circuits
05/08/1990US4922853 Stripe coating on glass by chemical vapor deposition
05/08/1990CA1268688A1 Chemical vapor deposition method for the thin film of semiconductor
05/08/1990CA1268673A1 Method of producing transparent, haze-free tin oxide coatings
05/07/1990CA2002420A1 Process for preparing a polymerizable compound
05/02/1990EP0366510A1 Process for preparing superconductor of compound oxide of Bi-Sr-Ca-Cu system
05/02/1990EP0365645A1 A method of manufacturing perovskite lead scandium tantalate.
05/02/1990CN1041790A Plasma processing method and products thereof
05/02/1990CN1041747A Process for coating glass
05/01/1990US4921725 Process for coating carbon fibers with a carbide
05/01/1990US4921724 Process for coating a substrate with an organic coating having gradated hardness
05/01/1990US4921722 Method for forming deposited film
05/01/1990US4920920 Apparatus for producing semiconductor devices
05/01/1990US4920918 Pressure-resistant thermal reactor system for semiconductor processing
05/01/1990US4920917 Reactor for depositing a layer on a moving substrate
05/01/1990US4920908 Method and apparatus for deposition of tungsten silicides
04/1990
04/25/1990EP0365366A1 Continuous thin diamond film and method for making same
04/25/1990EP0365240A1 Coating glass
04/25/1990EP0365239A1 Process for coating glass
04/24/1990US4920014 Corrosion resistance, thermal insulation and heat resistance
04/24/1990US4920012 Durable heat resistant x-ray targets
04/24/1990US4919974 Low pressure chemical vapor deposition in presence of atomic hydrogen; controlling temperature, nucleation
04/24/1990US4919304 Bubbler cylinder device
04/24/1990US4919077 Semiconductor producing apparatus
04/24/1990CA1268241A1 Electric insulation thin layer containing carbon
04/24/1990CA1268103A1 Surface treating method and apparatus
04/19/1990WO1990004320A2 Vapor deposition patterning method and products thereof
04/19/1990WO1990004045A1 Semiconductor wafer processing method and apparatus
04/19/1990WO1990004042A1 Iron/cobalt alloy filaments
04/17/1990US4918033 PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides
04/17/1990US4918028 Capillaries; fixed and labelled reagents
04/17/1990US4917968 High temperature corrosion resistant composite structure
04/17/1990US4917961 Method of producing corrosion-, heat- and wear-resistant member, and the member produced
04/17/1990US4917953 Heating and evaporating organic material in vacuum while implanting ions of gas element
04/17/1990US4917717 Pyrolytically forming metal oxide coating
04/17/1990US4917136 Process gas supply piping system
04/17/1990US4917044 Electrical contact apparatus for use with plasma or glow discharge reaction chamber
04/17/1990US4916828 Providing a introducing and discharging apertures to cylinder, a tube connected to either of these
04/17/1990CA1267864A1 Plasma-depositing insulation layer on metal and then electrode by sputtering or vaporization
04/14/1990CA2000267A1 Glass coating apparatus
04/14/1990CA2000266A1 Process for coating glass
04/12/1990DE3841731C1 Process for coating a tool base, and tool produced by this process