| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/25/1989 | US4851295 Low resistivity tungsten silicon composite film |
| 07/25/1989 | US4851262 Method of making carbide, nitride and boride powders |
| 07/25/1989 | US4851256 Coaxial cylindrical electrodes; uniform films; vapor deposition |
| 07/25/1989 | US4851254 Method and device for forming diamond film |
| 07/19/1989 | EP0324538A1 Vapor-phase method for synthesis of diamond |
| 07/19/1989 | EP0324523A2 Process for the plasma-activated reactive deposition of a multi-component conductive material from a gas phase |
| 07/19/1989 | EP0324504A2 Method for forming uniformly large-diameter polycrystalline rods by the pyrolysis of silane and a reactor system therefor |
| 07/18/1989 | US4849290 Alumina coated with diamond |
| 07/18/1989 | US4849288 Composite superconducting fiber |
| 07/18/1989 | US4849260 Method for selectively depositing metal on a substrate |
| 07/18/1989 | US4849259 Method of forming silicon and oxygen containing layers |
| 07/18/1989 | US4849249 Deposited film forming process and deposited film forming device |
| 07/18/1989 | US4849199 Vaporization, photolysis |
| 07/18/1989 | US4849146 Vapor phase reaction boron halide and ammonia; uniform structure |
| 07/18/1989 | US4848272 Apparatus for forming thin films |
| 07/13/1989 | WO1989006437A1 Device for forming thin film |
| 07/11/1989 | US4847469 Controlled flow vaporizer |
| 07/11/1989 | US4847215 Method for forming silicon carbide semiconductor film |
| 07/11/1989 | US4846102 Reaction chambers for CVD systems |
| 07/11/1989 | US4846101 Apparatus for plasma treatment of small diameter tubes |
| 07/11/1989 | CA1257403A1 Chemical vapour deposition method to produce an electronic device having a multi-layer structure |
| 07/05/1989 | EP0323434A1 Wear part and process for the production thereof |
| 07/05/1989 | EP0323190A2 Superconductive metal oxide material |
| 07/05/1989 | EP0323145A1 Equipment and method for supply of organic metal compound |
| 07/05/1989 | EP0322812A2 Hard outer coatings deposited on titanium or titanium alloys |
| 07/05/1989 | EP0322655A2 Plated steel sheet for cans |
| 07/05/1989 | EP0322619A1 Superconductor and process for its production |
| 07/05/1989 | EP0322466A1 PECVD (plasma enhanced chemical vapor deposition) method for deposition of tungsten or layers containing tungsten by in situ formation of tungsten fluorides |
| 07/04/1989 | US4845054 Low temperature chemical vapor deposition of silicon dioxide films |
| 07/04/1989 | US4845043 Method for fabricating photovoltaic device having improved short wavelength photoresponse |
| 07/04/1989 | US4844986 Method for preparing lubricated surfaces and product |
| 07/04/1989 | US4844951 Wean resistant coating deposited on a cemented carbide or hard ceramic substrate |
| 07/04/1989 | US4844950 Oxidation of transition metal compound with fluorine |
| 07/04/1989 | US4844949 Method of surface treatment and apparatus used therefor |
| 07/04/1989 | US4844945 Patterned metal electrode |
| 07/04/1989 | US4844785 Bombarding carbon coating with accelerated particles of inert gas |
| 07/04/1989 | US4844774 Phototreating method and apparatus therefor |
| 07/04/1989 | US4844719 Vinyl ether sulfonic acid fluorocopolymer |
| 07/04/1989 | US4844006 Apparatus to provide a vaporized reactant for chemical-vapor deposition |
| 07/04/1989 | CA1256755A1 Gas-sensitive composite material comprising metal and dielectric and process for producing same |
| 07/04/1989 | CA1256754A1 Method of depositing silicon films with reduced structural defects |
| 06/29/1989 | WO1989006045A1 Polysilicon thin film process and product |
| 06/29/1989 | WO1989005872A1 Vacuum deposition process |
| 06/29/1989 | WO1989005871A1 Deposition apparatus |
| 06/29/1989 | WO1989005696A1 Chemical vapor deposition of mixed oxide films |
| 06/28/1989 | EP0321734A1 Process for the production of strongly adhering metallic structures on fluoropolymers and thermoplastic materials |
| 06/27/1989 | US4843039 Sintered body for chip forming machining |
| 06/27/1989 | US4843030 Semiconductor processing by a combination of photolytic, pyrolytic and catalytic processes |
| 06/27/1989 | US4842945 Stainless steel coated with thin film of carbon containing specified amount in a state of diamond and having an adjustable black transparent color tone |
| 06/27/1989 | US4842937 Method of depositing a wear-protective layer on a cutting tool and wear protective layer produced by the method |
| 06/27/1989 | US4842897 Oxidation of starting material on substrate using gaseous halogen oxidizer |
| 06/27/1989 | US4842892 Vapor deposition |
| 06/27/1989 | US4842891 Method of forming a copper film by chemical vapor deposition |
| 06/27/1989 | US4842827 Semiconductors |
| 06/27/1989 | US4842686 Wafer processing apparatus and method |
| 06/27/1989 | US4841908 Multi-chamber deposition system |
| 06/27/1989 | CA1256593A1 Optical chemical vapor deposition method to produce an electronic device having a multi-layer structure |
| 06/27/1989 | CA1256330A1 Methods of and apparatus for vapor delivery control in optical preform manufacture |
| 06/22/1989 | DE3742525A1 Metallalkyl, verfahren zu dessen herstellung und seine verwendung Metal alkyl, process for its preparation and its use |
| 06/22/1989 | DE3741708A1 Device for depositing material from the gas phase |
| 06/22/1989 | DE3741706A1 Method for producing spiral thin-film flat coils |
| 06/21/1989 | EP0320724A2 Process and apparatus for the surface treatment of substrates |
| 06/21/1989 | EP0320657A1 Improved diamond growth process |
| 06/20/1989 | US4840139 Apparatus for the formation of a functional deposited film using microwave plasma chemical vapor deposition process |
| 06/20/1989 | CA1255976A1 Ion-blocking coating on glass |
| 06/15/1989 | WO1989005303A1 Process for producing metallic alkyl compounds |
| 06/15/1989 | DE3741292A1 Process for producing hard multi-ply layers |
| 06/14/1989 | EP0319926A2 A Method for the preparation of a diamond-clad machining tool |
| 06/14/1989 | EP0319585A1 Process for forming thin film of oxide superconductor |
| 06/13/1989 | US4839196 Photochemical film-forming method |
| 06/13/1989 | US4839195 Coating blade for microtome and method for the preparation thereof |
| 06/13/1989 | US4839145 Substrates mounted on rotatable susceptor; semiconductors |
| 06/13/1989 | US4838990 Using gas mixture of fluorine source, fluorosilane, bromine source, weak oxygen source |
| 06/13/1989 | US4838983 Advancing semiconductor substrate along circular path |
| 06/13/1989 | CA1255547A1 Coating process for making non-iridescent glass structure |
| 06/13/1989 | CA1255546A1 Multilayer coating and method |
| 06/08/1989 | DE3840042A1 Vorrichtung zum chemischen bedampfen mittels laser unter verwendung von lichtleitfasern Chemical vapor deposition apparatus using a laser using optical fibers |
| 06/08/1989 | DE3827069A1 Method for producing a superconductor |
| 06/07/1989 | EP0319021A2 Apparatus for laser chemical vapour deposition |
| 06/07/1989 | EP0318486A1 Organotin compounds containing fluorine useful for forming fluorine-doped tin oxide coating. |
| 06/06/1989 | US4837185 Pulsed dual radio frequency CVD process |
| 06/06/1989 | US4837113 Method for depositing compound from group II-VI |
| 06/06/1989 | US4837048 Vapor deposition using gaseous silicon compound and gaseous halogen oxidizing agent |
| 06/06/1989 | US4836233 Method and apparatus for venting vacuum processing equipment |
| 06/06/1989 | US4836140 Photo-CVD apparatus |
| 06/06/1989 | US4836138 Heating system for reaction chamber of chemical vapor deposition equipment |
| 06/06/1989 | US4836136 Developer supplying member |
| 06/01/1989 | WO1989004881A1 Ic processed piezoelectric microphone |
| 05/31/1989 | EP0318395A2 An apparatus for metal organic chemical vapor deposition and a method using the same |
| 05/31/1989 | EP0318008A2 High purity doping alloys |
| 05/30/1989 | US4835114 Method for LPCVD of semiconductors using oil free vacuum pumps |
| 05/30/1989 | US4835040 Continuous vapor deposition method for producing a coated glass article |
| 05/30/1989 | US4835005 Silicon halide, silane, amorphous silicon, semiconductors, electrography |
| 05/30/1989 | US4834023 Apparatus for forming deposited film |
| 05/30/1989 | US4834022 CVD reactor and gas injection system |
| 05/30/1989 | US4834020 Atmospheric pressure chemical vapor deposition apparatus |
| 05/30/1989 | EP0270656A4 Vapour deposition of monomer fluids. |
| 05/24/1989 | EP0317134A2 Coated article and method of manufacturing the article |
| 05/24/1989 | EP0317019A2 Process for glow-discharge-activated reactive deposition of metal from the gas phase |
| 05/24/1989 | EP0316598A1 Method and apparatus for controlling and/or monitoring a metal-plating process |