Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
03/1989
03/08/1989EP0306140A1 Ultralightweight high operating temperature structures
03/08/1989EP0306077A2 Process for the production of multilayer coated hard metal parts
03/08/1989EP0306069A2 A method of forming an oxide layer on a substrate
03/08/1989EP0305928A2 Method of depositing textured tin oxide
03/08/1989EP0305917A2 High hardness fine grained tungsten-carbon alloys and process for making same
03/08/1989EP0305903A1 Method for synthesis of diamond and apparatus therefor
03/08/1989EP0305790A1 Production of graphite intercalation compound and doped carbon films
03/08/1989EP0305573A1 Continuous composite coating apparatus for coating strip
03/08/1989CN1031570A Method and apparatus for surface treatment
03/07/1989US4810673 Integrated circuits
03/07/1989US4810530 Method of coating metal carbide nitride, and carbonitride whiskers with metal carbides, nitrides, carbonitrides, or oxides
03/07/1989US4810526 Method of coating a recrystallized silicon carbide body with a compact silicon carbide coating
03/01/1989EP0305195A2 Continuous chemical vapor deposition growth of strain layer superlattices using conventional CVD reactors
03/01/1989EP0305102A2 Coating flat glass by chemical vapor deposition
02/1989
02/28/1989US4808554 Glow discharge chemical vapor deposition in vacuum
02/28/1989US4808553 Semiconductor device manufacturing method
02/28/1989US4808258 High frequency voltage, semiconductor manufacture
02/28/1989US4807562 Reactor for heating semiconductor substrates
02/23/1989WO1989001479A1 Cyclic or bicyclic aluminium, gallium or indium organic compounds and their use for vapour deposition of metals on substrates
02/23/1989DE3726568A1 Arrangement for manufacturing tubes consisting of semiconductor material
02/22/1989EP0304220A1 Thin film carbon material and method of depositing the same
02/22/1989EP0303911A1 Multiple, parallel packed column vaporizer
02/22/1989CN1031298A Semiconductor bottom material
02/21/1989US4806386 Method for forming deposited film
02/21/1989US4806321 Use of infrared radiation and an ellipsoidal reflection mirror
02/21/1989US4805556 Reactor system and method for forming uniformly large-diameter polycrystalline rods by the pyrolysis of silane
02/21/1989CA1250309A1 Organogold complexes and a method of gold deposition
02/15/1989EP0303508A2 Inlet manifold and methods for increasing gas dissociation and for PECVD of dielectric films
02/15/1989EP0303191A2 Method and apparatus for surface treatment
02/15/1989EP0303030A1 Processing apparatus and method
02/15/1989EP0302984A1 Coated hard metal body
02/14/1989US4804605 Electrophotographic superlattice photoreceptor
02/14/1989US4804560 Method of selectively depositing tungsten upon a semiconductor substrate
02/14/1989US4804558 Depositing on substrate zinc compounds, organic selenium or sulfur compounds, oxidizing using halogen gases
02/14/1989US4803948 Heat processing apparatus for semiconductor manufacturing
02/14/1989US4803947 Apparatus for forming deposited film
02/13/1989EP0301030A4 Hermetic coatings for optical fibers.
02/09/1989WO1989001237A1 Semiconductor base material
02/09/1989WO1989001055A1 Multiple, parallel packed column vaporizer
02/09/1989WO1989001054A1 Surface deposition or surface treatment reactor
02/08/1989EP0302552A2 Rotating anode for X-ray tubes
02/08/1989EP0302506A2 Method and apparatus for fabricating superconductive thin films
02/08/1989CN1030946A Apparatus for coating substate
02/07/1989US4803139 Electrophotographic photoreceptor
02/07/1989US4803127 Low temperature carbiding and nitriding, tools
02/07/1989US4803095 Chemical vapor reaction process by virtue of uniform irradiation
02/07/1989US4803093 Process for preparing a functional deposited film
02/07/1989US4802441 Double wall fast cool-down furnace
02/01/1989EP0301604A2 Apparatus for coating a substrate by plasma-chemical vapour deposition or cathodic sputtering, and process using the apparatus
02/01/1989EP0301567A2 Apparatus and method for the surface treatment of materials
02/01/1989EP0301296A1 Plasma coating vessel with a shortened cycling time and facilitated cleaning
02/01/1989EP0301030A1 Hermetic coatings for optical fibers.
01/1989
01/31/1989US4801474 Method for forming thin film multi-layer structure member
01/31/1989US4801468 Active materials, decomposition, germanium-halogen compound, discharging
01/31/1989US4801352 Processing of semiconductor wafer in the manufacture of integrated circuits
01/26/1989WO1989000549A1 Apparatus for coating a substrate
01/25/1989EP0300447A2 Method and apparatus for treating material by using plasma
01/25/1989EP0300217A2 Processing apparatus and method
01/25/1989CN1030616A Method of plasma enhanced silicon oxide deposition
01/25/1989CN1030615A Plasma thin film deposition process control
01/24/1989US4800174 Method for producing an amorphous silicon semiconductor device using a multichamber PECVD apparatus
01/24/1989US4800173 Process for preparing Si or Ge epitaxial film using fluorine oxidant
01/24/1989US4800105 Uniformity
01/24/1989US4799451 Chemical vapor processing apparatus
01/24/1989CA1249305A1 Method for synthesizing mgo-a1.sub.2o.sub.3- sio.sub.2 glasses and ceramics
01/18/1989EP0299879A2 A superconducting thin film and a method for preparing the same
01/18/1989EP0299754A2 Method of plasma enhanced silicon oxide deposition
01/18/1989EP0299753A2 Controlled flow vaporizer
01/18/1989EP0299752A2 Plasma thin film deposition process control
01/18/1989EP0299249A1 Processing apparatus and method
01/18/1989EP0299248A1 Processing apparatus and method
01/18/1989EP0299247A1 Processing apparatus and method
01/18/1989EP0299246A1 Processing apparatus and method
01/18/1989EP0299245A1 Processing apparatus and method
01/18/1989EP0299244A1 Processing apparatus and method
01/18/1989EP0299243A1 Processing apparatus and method
01/17/1989US4798739 Plasma-assisted method for thin film fabrication
01/17/1989US4798166 Apparatus for continuously preparing a light receiving element for use in photoelectromotive force member or image-reading photosensor
01/17/1989US4798165 Apparatus for chemical vapor deposition using an axially symmetric gas flow
01/12/1989WO1989000335A1 Material-saving process for producing crystalline solid solutions
01/12/1989WO1989000212A1 Quartz glass reactor for mocvd installations
01/12/1989WO1989000148A1 Process for metal nitride deposition
01/12/1989WO1989000080A1 Gas inlet for a plurality of various reaction gases in reaction vessels
01/12/1989WO1988010420A3 Process for determining the edge layer condition of objects
01/12/1989DE3721638A1 Materialsparendes verfahren zur herstellung von mischkristallen Material-saving process for preparing a mixed crystal
01/12/1989DE3721637A1 Gaseinlass fuer eine mehrzahl verschiedener reaktionsgase in reaktionsgefaesse Gas inlet for a plurality of different reactive gases in reaktionsgefaesse
01/11/1989EP0298866A2 A superconducting thin film and a method for preparing the same
01/11/1989EP0298729A1 Cutting tool
01/11/1989EP0298461A1 A superconducting coil and method for producing the same
01/11/1989EP0298420A2 Apparatus for plasma treatment
01/11/1989EP0298345A2 Method for preparing substrates for subsequent electroless metallization
01/11/1989EP0298155A2 Method of forming refractory metal film
01/11/1989EP0298126A1 Optical cvd process
01/11/1989CN1030192A Method and system for vapor extraction from gases
01/10/1989US4796562 Rapid thermal cvd apparatus
01/04/1989EP0297845A2 Plasma assisted apparatus and method of diamond synthesis
01/04/1989EP0297637A1 Method of treating surfaces of substrates with the aid of a plasma and a reactor for carrying out the method
01/04/1989EP0297348A1 Method for chemical vapor deposition of copper, silver, and gold using a cyclopentadienyl metal complex
01/04/1989CN2030203U Integrated fixture for crystal coating
01/03/1989USH566 Apparatus and process for deposition of hard carbon films