| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 04/23/1991 | US5009928 Vapor deposition of first and second metal oxide film on textured substrate; electrode for solar cell; good trans-mission, orientation and low specific resistance |
| 04/23/1991 | US5009920 Vapor deposition |
| 04/23/1991 | US5009485 Multiple-notch rugate filters and a controlled method of manufacture thereof |
| 04/23/1991 | CA1283282C Mask assembly having mask stress relieving feature |
| 04/23/1991 | CA1283281C Apparatus and method for registration of shadow masked thin film patterns |
| 04/20/1991 | CA2027883A1 Diffusion-plasma-assisted chemical treatment apparatus |
| 04/20/1991 | CA2011037A1 Composite material of boron nitride and method for the preparation thereof |
| 04/18/1991 | WO1991005074A1 Surface-coated hard member having excellent abrasion resistance |
| 04/18/1991 | CA2027761A1 Method for preparing vaporized reactants for chemical vapor deposition |
| 04/17/1991 | EP0422815A2 Reflectors for lamps |
| 04/17/1991 | EP0422243A1 Method of forming polycrystalline film by chemical vapor deposition |
| 04/16/1991 | US5008415 Volatile fluorinated β-ketoimines and associated metal complexes |
| 04/16/1991 | US5008160 Method of securing adherent coatings by CVD from metal carbonyls, and articles thus obtained |
| 04/16/1991 | US5008002 Hard carbon film formation by ionization plating of hydrocarbon |
| 04/16/1991 | US5007689 Vapor-deposited boron phosphide |
| 04/16/1991 | US5007374 Apparatus for forming thin films in quantity |
| 04/16/1991 | US5007373 Plasma assisted deposition of diamond films |
| 04/16/1991 | CA1283006C Method of making a device comprising a patterned aluminum layer |
| 04/13/1991 | CA2027285A1 Method of forming a thin copper film by low temperature cvd |
| 04/10/1991 | EP0421834A1 Process for depositing an amorphous, inorganic, protective coating on an organic polymer substrate |
| 04/10/1991 | EP0421397A1 Diamond semiconductor device and method of manufacture |
| 04/10/1991 | EP0421348A1 Film forming apparatus |
| 04/10/1991 | EP0421276A2 Process and apparatus for coating parts with cubic bornitride or diamond |
| 04/10/1991 | EP0421203A1 An integrated circuit structure with a boron phosphorus silicate glass composite layer on semiconductor wafer and improved method for forming same |
| 04/10/1991 | EP0421075A1 Low pressure, low-temperature process for depositing silicondioxide |
| 04/10/1991 | EP0228394B1 An apparatus for coating substrates by plasma discharge |
| 04/10/1991 | EP0198842B1 Reactor apparatus for semiconductor wafer processing |
| 04/09/1991 | US5006371 Depositing layer of tungsten, then layer of tungsten and tungsten carbide, repeating alternating layers |
| 04/09/1991 | US5006363 Plasma assited MO-CVD of perooskite dalectric films |
| 04/09/1991 | US5006203 Nucleating diamond film on polysilicon substrate by ion beam deposition or hydrocarbon pyrolysis, etching to remove graphitically bonded materials |
| 04/09/1991 | US5005519 Reaction chamber having non-clouded window |
| 04/09/1991 | CA1282732C Treatment of reaction gases by radio frequency plasma |
| 04/04/1991 | WO1991004572A1 Substrate support device for cvd apparatus |
| 04/04/1991 | WO1991004353A1 Vapor deposited diamond synthesizing method on electrochemically treated substrate |
| 04/03/1991 | EP0420596A1 Gas feeding device and deposition film forming apparatus employing the same |
| 04/03/1991 | EP0420595A2 Deposited film formation method utilizing selective deposition by use of alkyl aluminum hydride |
| 04/03/1991 | EP0420117A2 Microwave plasma generating apparatus and process for the preparation of diamond thin film utilizing same |
| 04/03/1991 | EP0419939A1 Apparatus for vaporizing and supplying organometal compounds |
| 04/03/1991 | EP0419930A2 Particulate contamination prevention scheme |
| 04/03/1991 | EP0419507A1 Dry exhaust gas conditioning |
| 04/03/1991 | EP0419461A1 Wafer handling system with bernoulli pick-up |
| 04/02/1991 | US5004708 Pyrolytic boron nitride with columnar crystalline morphology |
| 04/02/1991 | CA1282367C Glow discharge metal deposition on non-conductor from organometallic compound |
| 04/02/1991 | CA1282234C Apparatus for forming deposited film |
| 03/28/1991 | DE3931189A1 Gas flow contg. vapour of low volatility powder for CVD - obtd. using device where process can be continuous and containers having little residual powder can be refilled without disturbing gas flow |
| 03/27/1991 | EP0419090A1 Carbon electrode |
| 03/27/1991 | EP0419087A1 A process for the production of abrasives |
| 03/27/1991 | EP0419053A1 Dielectric film deposition method and apparatus |
| 03/27/1991 | EP0418837A1 Diamond synthesizing apparatus |
| 03/27/1991 | EP0418592A1 Cleaning process for removal of deposits from the susceptor of a chemical vapor deposition apparatus |
| 03/27/1991 | EP0418554A2 Chemical vapor deposition apparatus |
| 03/27/1991 | EP0418468A1 Method for producing an ultra-thin dielectric for microelectronics applications |
| 03/27/1991 | CA2026175A1 Microwave plasma generating apparatus and process for the preparation of diamond thin film utilizing same |
| 03/26/1991 | US5003152 Microwave transforming method and plasma processing |
| 03/26/1991 | US5003092 Forming complexes which are precursors for semiconductors |
| 03/26/1991 | US5002804 Carbon black coating |
| 03/26/1991 | US5002796 Process for forming functional zinc oxide films using alkyl zinc compound and oxygen-containing gas |
| 03/26/1991 | US5002793 Vapor deposition, decomposition, microwaving; semiconductors |
| 03/26/1991 | US5002011 Vapor deposition apparatus |
| 03/26/1991 | US5002010 Vacuum vessel |
| 03/21/1991 | WO1991003323A1 Plasma deposition of superconducting thick films |
| 03/20/1991 | EP0418091A2 Preparation of high-purity thin film |
| 03/20/1991 | EP0417997A1 Process for forming metal deposited film containing aluminum as main component by use of alkyl aluminum hydride |
| 03/20/1991 | EP0417924A1 Synthetic diamond articles and their method of manufacture |
| 03/20/1991 | EP0417512A1 Transparent diamond films and method for making |
| 03/20/1991 | EP0417434A1 Apparatus for synthetic diamond deposition including curved filaments and substrate cooling means |
| 03/20/1991 | EP0417306A1 Method of producing thin film |
| 03/20/1991 | EP0417253A1 Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates |
| 03/20/1991 | EP0417202A1 Process for thermally depositing silicon nitride and silicon dioxide films onto a substrate. |
| 03/20/1991 | EP0417190A1 Silicon dioxide films on diamond |
| 03/20/1991 | EP0417067A1 Energy intensive surface reactions using a cluster beam. |
| 03/19/1991 | US5000831 Method of production of amorphous hydrogenated carbon layer |
| 03/19/1991 | US5000113 Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process |
| 03/19/1991 | CA1281541C Installation for the chemical vapor infiltration of a refractory material other than carbon |
| 03/16/1991 | WO1991004104A1 Converting organic/organometallic gaseous or vaporizable compounds to inert solids |
| 03/16/1991 | CA2040436A1 Converting organic/organometallic gaseous or vaporizable compounds to inert solids |
| 03/15/1991 | CA2021113A1 Transparent diamond films and method for making |
| 03/13/1991 | EP0416887A2 Ceramic-coated metal sheet |
| 03/13/1991 | EP0416824A2 Ceramics coated cemented carbide tool with high fracture resistance |
| 03/13/1991 | EP0416813A2 Method to prevent backside growth on substrates in a vapor deposition system |
| 03/13/1991 | EP0416400A1 Cleaning method for semiconductor wafer processing apparatus |
| 03/13/1991 | EP0416251A2 Controlled method of manufacture of multiple-notch rugate filters |
| 03/13/1991 | CN1049870A Process for continuously forming large area functional deposited film by microwave pcvd method and apparatus suitable for practicing same |
| 03/12/1991 | US4999458 Electrical current lead-in device at a vacuum chamber |
| 03/12/1991 | US4999223 Chemical vapor deposition and chemicals with diarsines and polyarsines |
| 03/12/1991 | US4998979 Method for washing deposition film-forming device |
| 03/12/1991 | US4998968 Plasma CVD apparatus |
| 03/12/1991 | US4998503 Apparatus for forming functional deposited film by microwave plasma CVD process |
| 03/07/1991 | WO1991003075A1 Gas substrate processing module |
| 03/06/1991 | EP0415716A1 Synthetic resin window for automotive vehicles or the like |
| 03/06/1991 | EP0415253A2 Thin film forming apparatus |
| 03/06/1991 | EP0415217A1 Thermal land bound machine comprising a heat resistant member, a heat resistant composite structure and a method of producing the heat resistant composite structure. |
| 03/06/1991 | EP0415191A1 System for controlling epitaxial grow rate in vertical provided with a frustum pyramid susceptor |
| 03/06/1991 | EP0415122A2 Method and apparatus for film formation by high pressure microwave plasma chemical vapour deposition |
| 03/06/1991 | EP0414842A1 Improved diamond deposition cell. |
| 03/06/1991 | EP0414841A1 Diamond synthesis |
| 03/06/1991 | EP0414797A1 Contactless heating of thin filaments. |
| 03/06/1991 | EP0259414B1 Apparatus for thermal treatments of thin parts such as silicon wafers |
| 03/05/1991 | US4997678 Trichloromethylsilane, oxidation, graphitization, carbiding |
| 03/05/1991 | US4997677 Intermetallics |