Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
08/1990
08/14/1990US4948628 Method for plasma treatment of small diameter tubes
08/14/1990US4948627 Process for producing glass mold
08/14/1990US4948623 Decomposing vapor of complex containing phosphine, arsine, or amine ligand
08/14/1990US4948458 Radiofrequency resonant current induced in a planar coil; uniform flux; semiconductor wafer processing
08/14/1990US4947790 Arrangement for producing a gas flow which is enriched with the vapor of a low-volatile substance
08/14/1990US4947789 Apparatus for vaporizing monomers that flow at room temperature
08/14/1990CA1272662A1 Apparatus and process for controlling flow of fine particles
08/14/1990CA1272661A1 Reaction apparatus
08/09/1990WO1990008613A1 Cutting insert and process for manufacturing it
08/08/1990EP0381338A2 Method and apparatus for the transfer of wafers in a vertical cvd diffusion apparatus
08/08/1990EP0381110A1 Protection layer for electroactive passivation layers
08/08/1990EP0381046A2 Thin film material for sensing or actuating devices and process for producing the same
08/08/1990EP0380735A1 Fishhook and producing method of the same
08/08/1990EP0215134B1 Process for producing unidirectional silicon steel plate with extraordinarily low iron loss
08/07/1990US4947046 Method for preparation of radiographic image conversion panel and radiographic image conversion panel thereby
08/07/1990US4946714 Method for producing semiconductor devices
08/07/1990US4946370 From aromatic hydrocarbon
08/07/1990US4945856 Rotational vapor flow
08/07/1990US4945640 Multilayer; noble metal base, exterior overcoating of mixture of tunsten and tungsten carbide
08/07/1990CA2009369A1 Modular continuous vapor deposition system
08/03/1990WO1990008844A1 Forming a metal coating
08/03/1990CA2046335A1 Forming a metal coating
08/02/1990DE4002681A1 Glass press-moulding mould prodn. - involving ion coating with 1-carbon release film
08/02/1990DE4002269A1 Plasma deposition of boron-contg. carbon layers - using solid boron source, esp. for getter prodn. in nuclear fusion plant
08/01/1990EP0379994A1 Method of vapor-phase synthesizing diamond
08/01/1990EP0379972A1 Current passage for a vacuum chamber
08/01/1990EP0379594A1 Gas supply pipeline system for process equipment
07/1990
07/31/1990US4945254 Method and apparatus for monitoring surface layer growth
07/31/1990CA1272077A1 Hard surface coatings for metals in fluidized beds
07/25/1990EP0379220A1 Diamond coated sintered body
07/25/1990EP0378815A2 Continuous chemical vapour deposition system
07/25/1990EP0378543A1 Gas injector apparatus for chemical vapor deposition reactors.
07/25/1990EP0227692B1 Thin layer consisting essentially of ruthenium salt
07/24/1990US4943450 Method for depositing nitride-based composite coatings by CVD
07/24/1990US4943345 Plasma reactor apparatus and method for treating a substrate
07/20/1990CA2008185A1 Diamond coated sintered body
07/18/1990EP0378378A1 Making diamond composite coated cutting tools.
07/18/1990EP0378230A1 Method of and apparatus for producing diamond thin films
07/18/1990EP0377708A1 Plasma enhanced chemical vapor deposition wafer holding fixture
07/17/1990US4942062 Forming a layer on a substrate by vapor deposition, crystallization
07/17/1990US4942059 Method for hardfacing metal articles
07/17/1990US4942058 Crystallization, radiation, electromagnetic waves, films
07/17/1990US4942057 Making an amorphous layer
07/17/1990US4941429 Semiconductor wafer carrier guide tracks
07/17/1990CA1271649A1 Formable, temperature-resistant martensitic steel having enhanced resistance to wear
07/13/1990CA2007780A1 Method of and apparatus for producing diamond thin films
07/12/1990WO1990007587A1 Feeder for process gas
07/12/1990WO1990007586A1 Improved diamond deposition cell
07/12/1990WO1990007390A1 Methods and apparatus for material deposition
07/12/1990WO1990006380A3 Process for coating a metallic basic body with a non-conductive coating material
07/12/1990CA2005518A1 Making diamond composite coated cutting tools
07/11/1990EP0377137A1 Method for selective deposition of refractory metals on silicon substrates
07/11/1990EP0128169B1 Chemical vapor deposition of titanium nitride and like films
07/10/1990US4940522 Method for manufacturing plated steel sheet for cans
07/10/1990US4940477 Method for synthesizing topaz
07/10/1990US4940015 Microwave decomposition of methane and hydrogen reaction gas
07/07/1990CA2024606A1 Improved diamond deposition cell
07/04/1990EP0376694A2 A process for the vapor phase synthesis of diamond and highly crystalline diamond
07/04/1990EP0376141A1 Method and apparatus for coating extruded profiles with a polymer layer
07/03/1990US4939424 Apparatus for producing a plasma and for the treatment of substrates
07/03/1990US4939370 Method of and device for inspecting and/or controlling metallization processes
07/03/1990US4938999 Process for coating a metal substrate by chemical vapor deposition using a metal carbonyl
07/03/1990US4938996 Via filling by selective laser chemical vapor deposition
07/03/1990US4938993 Protective coatings for alloys
07/03/1990US4938940 Vapor-phase method for synthesis of diamond
07/03/1990US4938789 Raw material supplying device and process
06/1990
06/28/1990WO1990007019A1 Chemical vapor deposition reactor and method for use thereof
06/28/1990DE3942931A1 Tablet for wafers - with specified surface roughness parameters for the seating surfaces
06/27/1990EP0375051A1 Process and apparatus for chemical-vapour deposition using electronic and thermal activation
06/27/1990EP0374923A2 Diamond-coated tool member, substrate thereof and method for producing same
06/27/1990EP0374511A2 Heating lamp assembly for CCVD reactors
06/27/1990EP0188438B1 Improved silicon oxynitride material and process for forming same
06/27/1990CN1043348A Microwave plasma cvd apparatus for formation of large-area function deposited film
06/27/1990CN1008574B Improvement boron doped semiconductor materials and method for producing same
06/26/1990US4937095 Flowing decomposable gas around rotating substrate which is supported between two electrodes with different discharging frequencies
06/26/1990US4937094 Method of creating a high flux of activated species for reaction with a remotely located substrate
06/26/1990US4936252 Equipment for manufacturing semiconductor devices
06/26/1990US4936251 Vapor-phase reaction apparatus
06/26/1990US4936250 Decomposing a metal carbonyl to deposit metal values
06/20/1990EP0374080A1 Treatment of mold and use thereof for curing rubber
06/20/1990EP0373513A2 Fluorinated beta-ketoimines and beta-ketoiminato metal complexes
06/20/1990EP0373412A1 Process for coating tools, and tool produced thereby
06/20/1990EP0373377A1 Abrasion-resistant consumer article and process for its manufacture
06/19/1990US4935661 Pulsed plasma apparatus and process
06/19/1990US4935303 Novel diamond-like carbon film and process for the production thereof
06/14/1990WO1990006380A2 Process for coating a metallic basic body with a non-conductive coating material
06/14/1990WO1990006315A1 Organoaluminium, organogallium and organoindium compounds and their use for the gas-phase deposition of metal on substrates
06/14/1990WO1990006206A1 Microlaser beam machine for the treatment of thin film objects, in particular, for engraving or depositing material by chemical means in the presence of a reactive gas
06/14/1990WO1990006055A1 Antimicrobial agents and uses thereof
06/13/1990EP0372696A2 Method of producing a carbon-based film
06/13/1990EP0372645A2 Process for the production of an SIC mask support for radiation lithography masks
06/12/1990US4933207 Laser and thermal assisted chemical vapor deposition of mercury containing compounds
06/12/1990US4933203 Process for depositing amorphous hydrogenated silicon in a plasma chamber
06/12/1990US4932358 Perimeter wafer seal
06/12/1990US4932331 Novel single-bond carbon film and process for the production thereof
06/12/1990CA2004639A1 Fluorinated beta-ketoimines and beta-ketoiminato metal complexes
06/12/1990CA1270225A1 Composite articles made from substrates coated by plasma enhanced chemical vapor deposition
06/06/1990EP0371854A2 Method for selectively depositing refractory metal on semiconductor substrates
06/06/1990EP0371796A2 Apparatus and process for chemical vapor deposition
06/06/1990EP0371629A1 Optical fibre manufacture