| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 03/05/1991 | US4996942 Rotatable substrate supporting susceptor with temperature sensors |
| 03/05/1991 | CA1281082C Apparatus for producing a plasma and for the treatment of substrates therein |
| 03/01/1991 | WO1991003328A1 Chemical vapor deposition system cleaner |
| 03/01/1991 | CA2065329A1 Chemical vapor deposition system cleaner |
| 02/28/1991 | DE3927726A1 Epitaxial layer deposition - using reactor in room partitioned by wall from clean room for loading-unloading |
| 02/27/1991 | EP0414562A2 A method of monitoring a process of growing a film of silicon dioxide doped with phosphorus |
| 02/27/1991 | EP0414270A2 Fuel cell utilizing solidous electrolyte |
| 02/27/1991 | EP0414267A2 Process for deposition of a tungsten layer on a semiconductor wafer |
| 02/27/1991 | EP0414038A2 Process and apparatus for removing deposits from backside and end edge of semiconductor wafer while preventing removal of materials from front surface of wafer |
| 02/27/1991 | EP0413974A1 Method of making a single crystal CVD diamond |
| 02/27/1991 | EP0413834A1 Diamond-covered member and process for producing the same |
| 02/27/1991 | CN1049530A Method and apparatus for continuously forming functional deposited films with large area by microwave plasma cvd method |
| 02/26/1991 | US4996079 Method of depositing thin films consisting mainly of carbon |
| 02/26/1991 | US4996077 Electron cyclotron resonance apparatus; multiple energy/ excitation source; intergrated circuits |
| 02/26/1991 | US4995341 Microwave plasma CVD apparatus for the formation of a large-area functional deposited film |
| 02/26/1991 | US4995340 Glass coating apparatus |
| 02/26/1991 | CA2023221A1 Synthetic diamond articles and their method of manufacture |
| 02/21/1991 | WO1991002107A1 Method for laser induced chemical vapor deposition on a substrate |
| 02/21/1991 | WO1991002105A1 Device for depositing a material on a heat-conducting substrate |
| 02/21/1991 | WO1991002104A1 Process for making cages for the vapour-deposition of thin films |
| 02/21/1991 | WO1991001623A1 Process and apparatus for coating small solids |
| 02/21/1991 | DE3927135A1 Chemical vapour depositing microcrystalline solid particles - by sucking plasma gas through opening or pores of substrate to concentrate energy supply and increase pptn. field |
| 02/21/1991 | DE3927132A1 Free-standing thin film prodn. - by gas phase precipitating onto loose particulate ancillary substrate |
| 02/20/1991 | EP0413617A1 Method for depositing thin layers |
| 02/20/1991 | EP0413394A1 Method for obtaining polycrystallinic diamond layers |
| 02/20/1991 | EP0413389A1 Process for the deposition of microcrystalline solid particles from the gas phase by chemical vapour deposition |
| 02/20/1991 | EP0413282A2 Method and apparatus for producing magnetically-coupled planar plasma |
| 02/20/1991 | EP0413023A1 A method and an apparatus for disposing epitaxial silicon and silicides |
| 02/20/1991 | CN2071649U Apparatus for descaling and coating organic film for rb-fe-b products |
| 02/19/1991 | US4994301 ACVD (chemical vapor deposition) method for selectively depositing metal on a substrate |
| 02/19/1991 | US4994221 Method for the production of a carbon electrode |
| 02/19/1991 | US4994141 Method of manufacturing a mask support of SiC for radiation lithography masks |
| 02/19/1991 | US4993361 Chemical vapor deposition |
| 02/19/1991 | US4993360 Vapor growth apparatus having a diffuser section containing a flow regulating member |
| 02/19/1991 | US4993358 Chemical vapor deposition reactor and method of operation |
| 02/19/1991 | US4993355 Susceptor with temperature sensing device |
| 02/13/1991 | EP0412644A2 Low temperature low pressure thermal CVD process for forming conformal group III and/or group V-doped silicate glass coating of uniform thickness on integrated structure |
| 02/13/1991 | EP0412301A1 Boron nitride membrane in wafer structure |
| 02/12/1991 | US4992306 Heating in a source of oxygen; low temperature process |
| 02/12/1991 | US4992305 Decomposign organometallic compound by contact with heated substrate |
| 02/12/1991 | US4992299 Low pressure chemical vapor deposition |
| 02/12/1991 | US4992082 Method of toughening diamond coated tools |
| 02/12/1991 | US4991822 Valve having ceramic valve bodies with low friction coatings |
| 02/12/1991 | US4991542 Method of forming a thin film by plasma CVD and apapratus for forming a thin film |
| 02/12/1991 | US4991541 Device and process for treating fine particles |
| 02/12/1991 | US4991540 Quartz-glass reactor for MOCVD systems |
| 02/12/1991 | CA1280055C Vapor deposition apparatus |
| 02/06/1991 | EP0411910A2 Lightweight structures and methods for the fabrication thereof |
| 02/06/1991 | EP0411875A1 Method of producing finely divided particles or powder, vapour or fine droplets, and apparatus therefor |
| 02/06/1991 | EP0411795A1 Anisotropic deposition of silicon dioxide |
| 02/06/1991 | EP0411646A1 High erosion/wear resistant multi-layered coating system |
| 02/06/1991 | EP0411435A1 Apparatus for synthesizing diamondlike thin film |
| 02/06/1991 | EP0411424A1 Apparatus for synthetic diamond deposition including spring tensioned filaments |
| 02/06/1991 | EP0411317A2 Method and apparatus for continuously forming functional deposited films with a large area by microwave plasma CVD |
| 02/06/1991 | EP0411298A1 Method for improving adhesion of synthetic diamond coatings to substrates |
| 02/06/1991 | EP0411079A1 Method for the deposition of at least one thickness of at least one decorative material to an object, and decorative object obtained by such method. |
| 02/05/1991 | US4990403 Diamond coated sintered body |
| 02/05/1991 | US4990374 Selective area chemical vapor deposition |
| 02/05/1991 | US4990372 Vapor deposition of tungsten, then tungsten carbide |
| 02/05/1991 | US4990371 Process for coating small solids |
| 02/05/1991 | US4990365 Vapor depositing in alternating electromagnetic field |
| 02/05/1991 | US4990363 Method of producing very adhesive metallic structures on fluorine polymers and thermoplastic synthetic materials |
| 02/05/1991 | US4990362 Removing surface layer titanium plate; forming a nonmagnetic transition metal film |
| 02/05/1991 | US4990286 Zinc oxyfluoride transparent conductor |
| 02/05/1991 | US4990229 High density plasma deposition and etching apparatus |
| 02/05/1991 | US4989544 Apparatus for forming functional deposited films by way of hybrid excitation |
| 02/05/1991 | US4989543 Process and means for producing films for use in electronics and/or optoelectronics using plasma |
| 02/05/1991 | US4989542 Apparatus for synthesizing diamond |
| 02/05/1991 | US4989541 Thin film forming apparatus |
| 02/05/1991 | US4989540 Apparatus for reaction treatment |
| 02/03/1991 | CA2022065A1 High erosion/wear resistant multi-layered coating system |
| 02/03/1991 | CA2019697A1 Lightweight structures and methods for the fabrication thereof |
| 02/03/1991 | CA2015513A1 Apparatus for synthetic diamond deposition including spring-tensioned filaments and substrate cooling means |
| 02/03/1991 | CA2014922A1 Apparatus for synthetic diamond deposition including curved filaments and substrate cooling means |
| 01/31/1991 | DE3923968A1 Sepn. layer contg. metalloid and transition metal cpds. - for protecting dental alloys against temp. corrosion of oxygen and nitrogen |
| 01/31/1991 | CA2014913A1 Method for improving adhesion of synthetic diamond coatings to substrates |
| 01/30/1991 | EP0410781A1 Process for preparing carbon material |
| 01/30/1991 | EP0410706A2 Low-temperature plasma processor |
| 01/30/1991 | EP0410442A1 Chemical vapor deposition reactor and method of operation |
| 01/30/1991 | EP0410401A1 Method for coating a surface of a substrate |
| 01/30/1991 | EP0156857B1 Method and apparatus for coating a substrate |
| 01/29/1991 | US4988642 Supporting a substrate, vapor deposition, transportation, microwaves and magnetism, electrical discharging |
| 01/29/1991 | US4988640 Method of doping and implanting using arsine, antimony, and phosphine substitutes |
| 01/29/1991 | US4988573 Medium related members |
| 01/29/1991 | US4988564 Metal carbide, nitride, or carbonitride whiskers coated with metal carbides, nitrides, carbonitrides, or oxides |
| 01/29/1991 | US4988533 Method for deposition of silicon oxide on a wafer |
| 01/29/1991 | US4988421 Vapor deposition, diamond particles, adhesion, binders, sputtering |
| 01/29/1991 | US4988415 Method of producing an anti-wear coating including a chromium layer on a surface of a structural part of titanium or titanium-based alloy |
| 01/29/1991 | US4987856 High throughput multi station processor for multiple single wafers |
| 01/29/1991 | US4987855 Reactor for laser-assisted chemical vapor deposition |
| 01/23/1991 | EP0409733A1 Carbonaceous material protected against oxidation by boron carbonitrides |
| 01/23/1991 | EP0409693A1 Method of obtaining an insulating coating of chromium oxide between the pellets and the cladding of a nuclear fuel element and nuclear fuel element having such an insulating coating |
| 01/23/1991 | EP0409603A1 Process and apparatus for chemical vapour deposition |
| 01/23/1991 | EP0408753A1 Process for forming superconducting thin film |
| 01/23/1991 | EP0182889B1 Method for producing diamond-like carbon layers |
| 01/23/1991 | CN2070037U Photochemical vapour deposition equipment |
| 01/22/1991 | US4987016 Component for producing semiconductor devices and process of producing it |
| 01/22/1991 | US4987010 Method for manufacturing a film resistor |
| 01/22/1991 | US4987005 Chemical vapor processing method for deposition or etching on a plurality of substrates |
| 01/22/1991 | US4987004 Sputtering hard carbon films |