Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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09/26/1989 | CA1260334A1 Surface treatment of a molybdenum screening mask |
09/26/1989 | CA1259883A1 Gas supply device, particularly for manufacturing semiconductor elements |
09/21/1989 | WO1989008605A1 Process for producing thin-film oxide superconductor |
09/20/1989 | EP0333208A2 Thin film transistor with an amorphous carbon light protection and method to make this light protection |
09/20/1989 | EP0332784A2 A process of treating magnetic recording media |
09/19/1989 | US4868014 Method for forming thin film multi-layer structure member |
09/19/1989 | US4868005 Method and apparatus for photodeposition of films on surfaces |
09/19/1989 | US4867223 Using reaction gas containing metal compound |
09/19/1989 | CA1259530A1 Silicon oxynitride passivated semiconductor device and method of making same |
09/13/1989 | EP0331718A1 Multiple electrode plasma reactor power distribution system |
09/12/1989 | US4866746 Multilayer; absorber, permeable support |
09/12/1989 | US4865883 Method for forming a deposited film containing IN or SN |
09/08/1989 | WO1989008272A1 Hermetic coatings for non-silica based optical fibers |
09/06/1989 | EP0331448A2 Forming aluminium nitride films |
09/06/1989 | EP0331022A2 Radiation induced pattern deposition |
09/06/1989 | EP0330708A1 Apparatus for forming thin films |
09/06/1989 | EP0330679A1 Sialon cutting tool composition. |
09/05/1989 | US4863818 Graphite intercalation compound electrodes for rechargeable batteries and a method for the manufacture of the same |
09/05/1989 | US4863814 Electrode and a battery with the same |
09/05/1989 | US4863809 Surface treatment for sliders and carbon coated magnetic media |
09/05/1989 | US4863798 Refractory composite material and method of making such material |
09/05/1989 | US4863760 High speed chemical vapor deposition process utilizing a reactor having a fiber coating liquid seal and a gas sea; |
09/05/1989 | US4863756 Method and equipment for coating substrates by means of a plasma discharge using a system of magnets to confine the plasma |
09/05/1989 | US4863755 Plasma enhanced chemical vapor deposition of thin films of silicon nitride from cyclic organosilicon nitrogen precursors |
09/05/1989 | US4863549 Apparatus for coating or etching by means of a plasma |
09/05/1989 | CA1258993A1 Method of and device for coating the inside of tubes |
08/30/1989 | EP0330524A1 Improvements relating to the deposition of thin carbon films |
08/30/1989 | EP0329845A1 Process for the production of strongly adherent metallic structures on polyimide |
08/30/1989 | CN1035186A Light receiver with transition layer and manufactural method thereof |
08/29/1989 | US4861623 Method for forming deposited film by generating precursor with halogenic oxidizing agent |
08/29/1989 | US4861622 Method for forming a film coat on the inside of a depression |
08/29/1989 | US4861533 Chemical vapor deposition, machining |
08/29/1989 | US4861524 Apparatus for producing a gas mixture by the saturation method |
08/29/1989 | US4861345 Method of bonding a conductive layer on an electrode of an electrochemical cell |
08/29/1989 | US4860687 Device comprising a flat susceptor rotating parallel to a reference surface about a shift perpendicular to this surface |
08/24/1989 | WO1989007667A1 Methods and apparatus for depositing thin films |
08/24/1989 | WO1989007666A1 Method of forming superconducting materials |
08/24/1989 | WO1989007665A1 Cvd process for depositing a layer on an electrically conductive thin-layer structure |
08/23/1989 | EP0329174A2 Composite refractory material |
08/23/1989 | EP0329103A2 Process for manufacturing thin film of high-Tc superconducting oxide |
08/23/1989 | EP0329085A1 Heat treated chemically vapor deposited products and treatment method |
08/23/1989 | EP0329041A2 Method for preparing lubricated surfaces |
08/23/1989 | EP0328970A2 Method of depositing tungsten on silicon in a non-self-limiting CVD process and semi-conductor device manufactured thereby |
08/23/1989 | EP0328888A1 Thermostatic device for the safe and controlled vaporization of noxious or liquid source materials that are highly reactive in the air, especially for low pressure vapour discharge systems in the field of semiconductors |
08/22/1989 | US4859536 Optical coating |
08/22/1989 | US4859503 Process for coating carbon fibers with a carbide, and carbon fibers thus coated |
08/22/1989 | US4859496 Method of producing an electrically-conductive transparent film |
08/22/1989 | US4859493 Methods of forming synthetic diamond coatings on particles using microwaves |
08/22/1989 | US4859492 Process for forming an environmentally stable optical coating thereby |
08/22/1989 | US4859489 Method of coating a metal gas-pressure bottle or tank |
08/22/1989 | US4859375 Chemical refill system |
08/22/1989 | US4859279 Method for prescribed, structured deposition of micro-structures with laser light |
08/22/1989 | US4859277 Method for measuring plasma properties in semiconductor processing |
08/22/1989 | US4858558 Film forming apparatus |
08/22/1989 | US4858557 Epitaxial reactors |
08/22/1989 | CA1258605A1 Articles coated with adherent diamondlike carbon films |
08/16/1989 | EP0328417A1 Apparatus for semiconductor process including photo-excitation process |
08/16/1989 | EP0328333A2 Process for producing ceramic superconductors |
08/16/1989 | EP0328097A2 Method for producing electrophotographic photoreceptor |
08/16/1989 | EP0328084A2 Highly erosive and abrasive wear resistant composite coating system |
08/16/1989 | EP0327639A1 Abrasion-resistant plastic articles and method for making them |
08/15/1989 | US4857704 Apparatus for thermal treatments of thin parts such as silicon wafers |
08/15/1989 | US4857361 Vapor deposition of tin oxide by oxidation of tributyltin pivalate |
08/15/1989 | US4857270 Process for manufacturing silicon-germanium alloys |
08/15/1989 | US4857139 Method and apparatus for forming a layer |
08/15/1989 | US4857136 Reactor monitoring system and method |
08/15/1989 | US4857097 Method and apparatus for coating glass |
08/15/1989 | US4856544 Vessel and system for treating wafers with fluids |
08/15/1989 | US4856458 Photo CVD apparatus having no ultraviolet light window |
08/15/1989 | CA1258409A1 Oxidation resistant carbon body and method for making same |
08/09/1989 | EP0327406A2 Plasma processing method and apparatus for the deposition of thin films |
08/09/1989 | EP0327110A1 Method for producing sintered hard metal with diamond film |
08/09/1989 | EP0327051A1 Diamond and its preparation by chemical vapor deposition method |
08/09/1989 | EP0327034A2 Process for the formation of a functional deposited film containing groups II and VI atoms as the main constituent atoms by microwave plasma chemical vapor deposition process |
08/09/1989 | EP0326998A2 Microwave chemical vapor deposition apparatus |
08/09/1989 | EP0326986A1 Process for the formation of a functional deposited film containing groups III and V atoms as the main constituent atoms by microwave plasma chemical vapor deposition process |
08/08/1989 | US4855210 Electrophotographic photosensitive member, process and apparatus for the preparation thereof |
08/08/1989 | US4855188 Highly erosive and abrasive wear resistant composite coating system |
08/08/1989 | US4855000 Boron nitride lubricant for shield |
08/08/1989 | US4854266 Cross-flow diffusion furnace |
08/08/1989 | US4854263 Inlet manifold and methods for increasing gas dissociation and for PECVD of dielectric films |
08/08/1989 | CA1258206A1 Method and apparatus for forming doped optical preforms |
08/02/1989 | EP0326405A2 Plasma chemical vapour reaction apparatus |
08/02/1989 | EP0326217A1 Method of manufacturing a semiconductor device |
08/02/1989 | EP0325663A1 Film forming apparatus |
08/02/1989 | EP0325659A1 Complex compounds for forming thin film of oxide superconductor and process for forming thin film of oxide superconductor |
08/02/1989 | EP0325651A1 Cyclic or bicyclic aluminium, gallium or indium organic compounds and their use for vapour deposition of metals on substrates |
08/01/1989 | US4853514 Beam apparatus and method |
08/01/1989 | US4853257 Chemical vapor deposition of tin oxide on float glass in the tin bath |
08/01/1989 | US4853251 Process for forming deposited film including carbon as a constituent element |
08/01/1989 | CA1258089A1 Method for the glow-discharge-activated reactive deposition of electrically conductive material from a gaseous phase |
07/26/1989 | EP0325319A1 Method for producing a gas stream enriched with the vapour of a low-volatility substance |
07/26/1989 | EP0324812A1 Material-saving process for producing crystalline solid solutions |
07/26/1989 | EP0324811A1 Gas inlet for a plurality of various reaction gases in reaction vessels |
07/26/1989 | EP0324810A1 Quartz glass reactor for mocvd installations |
07/26/1989 | CN1034285A Method and device for forming superconducting oxide material |
07/25/1989 | US4851808 Heat-generating resistor and heat-generating resistance device by use of said heat-generating resistor |
07/25/1989 | US4851367 Passing silane and dopant gas through plasma on conductive substrate; forming blocking and photoconductive layers of hydrogenated silicon and silicon passivation layer |
07/25/1989 | US4851297 Blending concentrate |
07/25/1989 | US4851296 Vapor deposition |