| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
|---|
| 06/17/1994 | CA2103426A1 Method for determining thickness of chemical vapor deposited layers |
| 06/16/1994 | DE4311693C1 Locating fibrous constructions in a gas phase infiltration plant - using solid flanges which are attached to fibrous body by feeding side walls into grooves in flanges |
| 06/16/1994 | DE4242165A1 Recycling process gas from the production of diamond coatings in a plasma-CVD method - by suction removal of gas, measuring hydrocarbon content and hence determining hydrogen content and adding inert gas prior to exhausting |
| 06/15/1994 | EP0601461A1 Method and apparatus for servicing silicon deposition chamber using non-reactive gas-filled maintenance enclosure |
| 06/15/1994 | EP0601166A1 Methods and apparatus for depositing barrier coatings |
| 06/15/1994 | EP0601151A1 Process for regulating a hot cathode glow discharge. |
| 06/15/1994 | EP0298126B1 Optical cvd process |
| 06/15/1994 | CN1088002A Method and apparatus for manufacturing a liquid crystal display substrate, and apparatus and method for evaluating semiconductor crystals |
| 06/14/1994 | US5320982 Wafer cooling method and apparatus |
| 06/14/1994 | US5320978 Selective area platinum film deposition |
| 06/14/1994 | US5320880 Radio frequency vapor deposition of mixture of silicon source, titanium tetrachloride and carrier |
| 06/14/1994 | US5320878 Method of chemical vapor deposition of boron nitride using polymeric cyanoborane |
| 06/14/1994 | US5320877 Method for forming thin film and apparatus therefor |
| 06/14/1994 | US5320875 Plasma polymerizing organosilicon monomer in presence of excess oxygen |
| 06/14/1994 | US5320680 Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow |
| 06/14/1994 | CA1330191C Method for forming crystal and crystal article obtained by said method |
| 06/09/1994 | WO1994012682A1 Tool and process for coating a basic tool component |
| 06/08/1994 | EP0600533A1 Method for applying a diamond-like carbon coating on steel, iron or alloys thereof |
| 06/08/1994 | EP0600516A1 Diffusion furnace boat assembly and wafer support |
| 06/08/1994 | EP0600503A1 Vapour generator for chemical vapour deposition systems |
| 06/08/1994 | EP0600277A1 Abrasive tool having film-covered cubic boron nitride grits |
| 06/08/1994 | EP0600115A1 Multilayer coated hard alloy cutting tool |
| 06/08/1994 | EP0599991A1 Process for forming low resistivity titanium nitride films. |
| 06/08/1994 | CN1087750A Laser process |
| 06/07/1994 | US5319118 Stable complexes which evaporate cleanly when used in organometallic chemical vapor deposition |
| 06/07/1994 | US5318928 Method for the surface passivation of sensors using an in situ sputter cleaning step prior to passivation film deposition |
| 06/07/1994 | US5318809 Apparatus for depositing a material on a substrate by chemical vapor deposition |
| 06/07/1994 | US5318801 Substrate temperature control apparatus and technique for CVD reactors |
| 06/07/1994 | US5318634 Substrate supporting apparatus |
| 06/07/1994 | US5318633 Heat treating apparatus |
| 06/07/1994 | US5318632 Wafer process tube apparatus and method for vertical furnaces |
| 06/04/1994 | CA2109654A1 Vertical boat and wafer support |
| 06/01/1994 | EP0599730A2 Semiconductor device and method of producing the same |
| 06/01/1994 | EP0599682A1 Gaseous feeding process, paricularly for diborane and silane |
| 06/01/1994 | EP0599468A1 Chemical-vapor-deposition-produced silicon carbide |
| 06/01/1994 | EP0598762A1 Tool with wear-resistant cutting edge made of cubic boron nitride or polycrystalline cubic boron nitride, a method of manufacturing the tool and its use. |
| 06/01/1994 | DE4240016A1 Treating surfaces of objects using high pressure plasma - produced between two plasma accelerators having compression coils |
| 06/01/1994 | CN1024814C Plasma thin film deposition process control |
| 05/31/1994 | US5317492 Rapid thermal heating apparatus and method |
| 05/31/1994 | US5316842 Diamond/non-diamond materials with enhanced thermal conductivity |
| 05/31/1994 | US5316804 Depositing a cubic boron nitride film of a single phase on the surface of a substrate |
| 05/31/1994 | US5316796 Process for growing a thin metallic film |
| 05/31/1994 | US5316795 Halogen-assisted chemical vapor deposition of diamond |
| 05/31/1994 | US5316794 Method for servicing vacuum chamber using non-reactive gas-filled maintenance enclosure |
| 05/31/1994 | US5316793 Multilayer element formed by vapor deposition of coatings by injection of precursor gas |
| 05/31/1994 | US5316645 Plasma processing apparatus |
| 05/31/1994 | US5316639 Dielectric material used for an ozone generator and a method of forming a film to the dielectric material |
| 05/31/1994 | US5316585 Method for fabricating superconducting materials and superconductive thin films |
| 05/31/1994 | US5316579 Using rotating turbibe blades |
| 05/31/1994 | US5316472 Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus |
| 05/31/1994 | CA1329897C Ultrathin laminated oxide coatings and methods |
| 05/26/1994 | WO1994011787A1 Method of deposition |
| 05/26/1994 | WO1994011548A2 Method for fabricating diamond films on nondiamond substrates and related structures |
| 05/26/1994 | WO1994011545A1 Diamond-coated shaped articles and production thereof |
| 05/26/1994 | WO1994011544A1 Microwave apparatus for depositing thin films |
| 05/26/1994 | CA2149645A1 Method of deposition |
| 05/25/1994 | EP0598491A1 Coated filaments |
| 05/25/1994 | EP0598424A2 Device for removing dissolved gas from a liquid |
| 05/25/1994 | EP0598394A2 Method and apparatus for manufacturing a liquid crystal display substrate, and apparatus and method for evaluating semiconductor crystals |
| 05/25/1994 | EP0598361A1 Initiation and bonding of diamond and other thin films |
| 05/25/1994 | EP0598128A1 Plasma processing apparatus |
| 05/25/1994 | EP0584252A4 A process for depositing a sio x? film having reduced intrinsic stress and/or reduced hydrogen content |
| 05/25/1994 | EP0449821B1 Chemical vapor deposition reactor and method for use thereof |
| 05/25/1994 | CN1087132A Diamond film for reducing die and making method thereof |
| 05/24/1994 | US5314866 Ceramic oxide films on a semiconductor substrate |
| 05/24/1994 | US5314845 Vapor deposition by flowing gaseous mixture of oxygen source and tetraethylorthosilicate across wafer surface under reduced pressure, then repeating with lower pressure |
| 05/24/1994 | US5314727 Chemical vapor deposition of iron, ruthenium, and osmium |
| 05/24/1994 | US5314726 Process for forming a mixed layer of a plasma sprayed material and diamond |
| 05/24/1994 | US5314716 Reaction of stannic chloride and primary amine, coated glass with reduced solar energy transmission |
| 05/24/1994 | US5314652 Finishing substrate surface to roughness dependent on target film thickness, depositing interlayer, depositing synthetic diamond, cooling to release film from substrate |
| 05/24/1994 | US5314570 Process and apparatus for the production of diamond |
| 05/24/1994 | US5314540 Apparatus for forming diamond film |
| 05/24/1994 | US5314538 Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device |
| 05/24/1994 | US5313982 Gas supply piping device for a process apparatus |
| 05/24/1994 | CA1329756C Method for forming crystalline deposited film |
| 05/24/1994 | CA1329739C Multilayer ceramic coatings from silicate esters and metal oxides |
| 05/19/1994 | DE4238279A1 Plastic prods with transparent, scratch resistant surface layer - have surface layer contg silicon, carbon and oxygen, with at least 3 zones of different compsn and specific photoelectron binding energies |
| 05/18/1994 | EP0597526A2 Method of manufacturing a magnetic head, and magnetic head manufactured by means of said method |
| 05/18/1994 | EP0597445A2 Method of making synthetic diamond film |
| 05/18/1994 | EP0597103A1 Apparatus for neutralizing charged body |
| 05/18/1994 | EP0596936A1 Deposition of magnesium fluoride films. |
| 05/18/1994 | EP0301030B1 Hermetic coatings for optical fibers |
| 05/17/1994 | US5312983 Organometallic tellurium compounds useful in chemical vapor deposition processes |
| 05/17/1994 | US5312783 Process for the preparation of a high dielectric thin film using ECR plasma CVD |
| 05/17/1994 | US5312778 Etching |
| 05/17/1994 | US5312647 Reflective coatings |
| 05/17/1994 | US5312585 Corrosion inhibition in high temperature environment |
| 05/17/1994 | US5312529 Method of coating metal using low temperature plasma and electrodeposition |
| 05/17/1994 | US5312519 Method of cleaning a charged beam apparatus |
| 05/17/1994 | US5312509 Manufacturing system for low temperature chemical vapor deposition of high purity metals |
| 05/17/1994 | US5312490 Gas seal for continuous chemical vapor deposition reactors |
| 05/17/1994 | US5312489 Hollow chamber with ports which coats inside surfaces of hollow objects |
| 05/17/1994 | US5311896 Method for producing a heatable and refrigerable element for a system handling small quantities of liquid, and an element manufactured by the method |
| 05/17/1994 | CA1329567C Coated article and method of manufacturing the article |
| 05/11/1994 | WO1994010717A1 Process for sealing high-temperature fuel cells and fuel cells sealed according to this process |
| 05/11/1994 | WO1994010358A1 Process for producing a heating element |
| 05/11/1994 | WO1994010084A1 Precursors and processes for making metal oxides |
| 05/11/1994 | EP0596678A2 Vapor phase deposition of hydrogen silsesquioxane resin in the presence of nitrous oxide |
| 05/11/1994 | EP0596619A1 Diamond-coated article with integral wearout indicator |
| 05/11/1994 | EP0596458A1 Polyfunctional tertiary alcohols, method for their manufacture and their use as precursors in laying coatings of alkaline earth metal oxides by the chemical vapour deposition process |