| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/18/1995 | US5433812 Apparatus for enhanced inductive coupling to plasmas with reduced sputter contamination |
| 07/18/1995 | US5433790 Chemical vapor deposition with discharge plasma from microwave source |
| 07/18/1995 | US5433789 Methods and apparatus for generating plasma, and semiconductor processing methods using mode restricted microwaves |
| 07/18/1995 | US5433788 Apparatus for plasma treatment using electron cyclotron resonance |
| 07/18/1995 | US5433787 Apparatus for forming deposited film including light transmissive diffusion plate |
| 07/18/1995 | US5433786 Apparatus for plasma enhanced chemical vapor deposition comprising shower head electrode with magnet disposed therein |
| 07/18/1995 | US5433785 Thermal treatment apparatus, semiconductor device fabrication apparatus, load-lock chamber |
| 07/18/1995 | US5433784 Vertical treating apparatus having a restricting means for avoiding misalignment |
| 07/18/1995 | US5433780 Vacuum processing apparatus and exhaust system that prevents particle contamination |
| 07/18/1995 | US5433238 Pumping system for evacuating reactor chambers |
| 07/18/1995 | US5433170 Bis/magnesium cyclopentadienyl derivatives |
| 07/13/1995 | WO1995019038A1 Method and apparatus for generating ions |
| 07/13/1995 | WO1995018878A1 Flexible, corrosion-resistant coated aluminium-based strip_______ |
| 07/13/1995 | WO1995018772A1 Coatings on glass |
| 07/13/1995 | CA2180481A1 Flexible, corrosion-resistant coated aluminium-based strip_______ |
| 07/13/1995 | CA2155823A1 Coatings on glass |
| 07/12/1995 | EP0662025A1 Coated grinding tools and methods for their preparation |
| 07/12/1995 | EP0640244A4 Plasma treatment apparatus and method in which a uniform electric field is induced by a dielectric window. |
| 07/12/1995 | EP0607415A4 Hollow-anode glow discharge apparatus. |
| 07/12/1995 | CN1105180A Method and apparatus for coating a glass substrate |
| 07/12/1995 | CN1029296C System and process for conversion of harmful matter to inert solid matrix |
| 07/11/1995 | US5432003 Continuous thin diamond film and method for making same |
| 07/11/1995 | US5431968 Method for simultaneously coating a plurality of filaments |
| 07/11/1995 | US5431965 Coreless refractory fibers |
| 07/11/1995 | US5431964 Method of pretreating the deposition chamber and/or the substrate for the selective deposition of tungsten |
| 07/11/1995 | US5431963 Method for adhering diamondlike carbon to a substrate |
| 07/11/1995 | US5431958 Metalorganic chemical vapor deposition of ferroelectric thin films |
| 07/11/1995 | US5431957 Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids |
| 07/11/1995 | US5431800 Layered electrodes with inorganic thin films and method for producing the same |
| 07/11/1995 | US5431769 Method and system for plasma treatment |
| 07/11/1995 | US5431737 Interchangeable CVD chuck surface |
| 07/11/1995 | US5431736 Method for transforming a liquid flow into a gas flow and a device for implementing the method |
| 07/11/1995 | US5431734 Aluminum oxide low pressure chemical vapor deposition (LPCVD) system-fourier transform infrared (FTIR) source chemical control |
| 07/11/1995 | US5431733 Low vapor-pressure material feeding apparatus |
| 07/11/1995 | CA1336249C Procedure for the deposition of firmly adhering silver films |
| 07/06/1995 | WO1995018460A1 Thin film formation method |
| 07/06/1995 | WO1995018249A1 Method and apparatus for processing surface with plasma under atmospheric pressure, method of producing semiconductor device and method of producing ink-jet printing head |
| 07/06/1995 | WO1995018247A1 Method of forming oxidized passive film, ferrite system stainless steel, fluid feed system and fluid contact component |
| 07/05/1995 | EP0661760A2 Method and apparatus for forming deposited film |
| 07/05/1995 | EP0661732A2 A method of forming silicon oxy-nitride films by plasma-enhanced chemical vapor deposition |
| 07/05/1995 | EP0661731A2 A single chamber CVD process for thin film transistors |
| 07/05/1995 | EP0661387A2 Apparatus and method for depositing a substance on a rotating surface |
| 07/05/1995 | EP0661386A1 A film deposition method |
| 07/05/1995 | EP0661385A1 Method for forming oxide film |
| 07/05/1995 | EP0660886A1 Growing a nitrogen doped epitaxial ii-vi compound layer on a single crystal substrate |
| 07/05/1995 | EP0467914B1 Method for producing a heatable and refrigerable element for a system handling small quantities of liquid, and an element manufactured by the method |
| 07/05/1995 | EP0311696B1 Method and apparatus for processing with plasma |
| 07/04/1995 | US5429998 Hardness, oxidation resistance, thermoconductivity, adhesion |
| 07/04/1995 | US5429995 Method of manufacturing silicon oxide film containing fluorine |
| 07/04/1995 | US5429994 Wiring forming method, wiring restoring method and wiring pattern changing method |
| 07/04/1995 | US5429991 Method of forming thin film for semiconductor device |
| 07/04/1995 | US5429870 Boron carbide coated refractory fibers |
| 07/04/1995 | US5429730 Smoothing semiconductor bump by depositing thin film and then etching to flatten |
| 07/04/1995 | US5429498 Thermal processing system |
| 07/04/1995 | US5429070 High density plasma deposition and etching apparatus |
| 07/04/1995 | US5429069 Method for growing diamond crystals utilizing a diffusion fed epitaxy |
| 07/04/1995 | CA1336180C Substrate-treating apparatus and method |
| 07/04/1995 | CA1336150C Method and apparatus for surface treatment |
| 07/04/1995 | CA1336149C Superconducting thin film and a method for preparing the same |
| 06/29/1995 | WO1995017766A1 A method for fabricating integrated circuits |
| 06/29/1995 | WO1995017541A1 Dents for reed in high-speed weaving machine, and method of manufacturing same |
| 06/29/1995 | WO1995017537A1 Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films |
| 06/29/1995 | WO1995017263A1 Method and apparatus for coating glassware |
| 06/29/1995 | CA2179724A1 Method and apparatus for coating glassware |
| 06/28/1995 | EP0660400A1 Thermoconductive element, utilized in electronics as a printed circuit support or as a component and its method of fabrication |
| 06/28/1995 | EP0660030A2 Purgeable connection for gas supply cabinet |
| 06/28/1995 | EP0659911A1 Method to form a polycrystalline film on a substrate |
| 06/28/1995 | EP0659910A2 Semiconductor device and method of fabricating the same |
| 06/28/1995 | EP0659905A1 Plasma chemical vapor deposition device capable of suppressing generation of polysilane powder |
| 06/28/1995 | EP0659904A2 Vaporized hydrogen silsesquioxane for depositing a coating |
| 06/28/1995 | EP0659903A1 Alumina coated cutting tool |
| 06/28/1995 | EP0659902A1 Method for deposition of thin silica films at low temperature |
| 06/28/1995 | EP0659820A2 Composite media with selectable radiation-transmission properties |
| 06/28/1995 | EP0659700A2 Interdiffused chromium/nickel corrosion-resistant coating for fiberglass spinner bores |
| 06/28/1995 | EP0659698A1 Method and apparatus for vaporization of liquid reactants |
| 06/28/1995 | CN1104264A Hot-wall sealed low-temp-pressure silicon dioxide thin-film deposition technology |
| 06/28/1995 | CN1104263A Tool and method for forming coated layer of body of same |
| 06/28/1995 | CN1029135C Method and apparatus for vapor deposition of diamond |
| 06/27/1995 | US5427986 Oxidation resistance |
| 06/27/1995 | US5427985 Amorphous, hydrogenated carbon as an insulator in device fabrication |
| 06/27/1995 | US5427843 Ceramic-coated metal sheet |
| 06/27/1995 | US5427827 Electron cyclotron resonance plasma vapor deposition of amorphous hydrogenated carbon; low temperature |
| 06/27/1995 | US5427826 Method for forming a superhard carbonaceous protective film on articles |
| 06/27/1995 | US5427824 CVD apparatus |
| 06/27/1995 | US5427669 Thin film DC plasma processing system |
| 06/27/1995 | US5427659 Process for the manufacture of devices |
| 06/27/1995 | US5427630 A silicon or silicon-germanium alloy crystal growth inhibitor comprising an oxide of rare earth metal |
| 06/27/1995 | US5427625 Method for cleaning heat treatment processing apparatus |
| 06/27/1995 | US5427621 Cleaning the interior surface of vapor depositing chemical reactor by sudden change in magnetic flux density of magnetic field |
| 06/27/1995 | US5427620 Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
| 06/27/1995 | US5427054 Vapor deposition by decomposing hydrocarbon, oxygen and hydrogen source and/or boron source for doping |
| 06/22/1995 | WO1995016809A1 Knitting parts for knitting machine and surface coating method therefor |
| 06/22/1995 | WO1995016804A1 Gas diffuser plate assembly and rf electrode |
| 06/22/1995 | WO1995016803A1 Porous substrate densification method |
| 06/22/1995 | WO1995016802A1 Use of an excited gas forming apparatus |
| 06/22/1995 | WO1995016801A1 Use of an excited gas forming apparatus |
| 06/22/1995 | WO1995016800A1 Apparatus for heating or cooling wafers |
| 06/22/1995 | CA2177605A1 Gas diffuser plate assembly and rf electrode |
| 06/21/1995 | EP0658967A2 Magnetic circulation pump for agressive fluids |
| 06/21/1995 | EP0658918A2 Plasma processing apparatus |