| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/10/1995 | US5380349 Molding glass lenses and prisms |
| 01/10/1995 | US5379718 Method for forming a titanium thin film |
| 01/04/1995 | EP0632144A2 Method of purging and pumping vacuum chamber to ultra-high vacuum |
| 01/04/1995 | EP0582691A4 Method for coating glass substrates. |
| 01/04/1995 | EP0573640A4 Coated glass article. |
| 01/04/1995 | EP0573639A4 Coating composition for glass. |
| 01/03/1995 | US5378639 Method for manufacturing a thin-film photovoltaic conversion device |
| 01/03/1995 | US5378541 Silicon thin film member |
| 01/03/1995 | US5378510 Silicon oxide from organosilicon vapor under influence of electric field, container interior |
| 01/03/1995 | US5378507 Smoothness |
| 01/03/1995 | US5378501 Method for chemical vapor deposition of titanium nitride films at low temperatures |
| 01/03/1995 | US5378500 Coating fibers with multilayer metals/alloys/intermetallics by vapor phase deposition |
| 01/03/1995 | US5378285 Apparatus for forming a diamond-like thin film |
| 01/03/1995 | US5378284 Apparatus for coating substrates using a microwave ECR plasma source |
| 01/03/1995 | US5378283 Treating device |
| 01/03/1995 | US5378145 Treatment system and treatment apparatus |
| 01/03/1995 | US5377616 Method for vaporizing and supplying organometal compounds |
| 01/03/1995 | US5377522 Diamond wire die with positioned opening |
| 01/03/1995 | US5377429 Method and appartus for subliming precursors |
| 01/03/1995 | CA1333786C Process for producing patterns in dielectric layers formed by plasma enhanced chemical vapor deposition (pecvd) |
| 01/03/1995 | CA1333763C Oxidation resistant, high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof |
| 12/28/1994 | EP0630994A1 Process for vapor-phase diamond synthesis |
| 12/28/1994 | EP0630990A2 Method of limiting sticking of body to a susceptor in a deposition treatment |
| 12/28/1994 | EP0630989A2 Method of plasma chemical vapor deposition of layer with improved interface |
| 12/28/1994 | EP0630988A1 Process for improved quality of CVD copper films |
| 12/28/1994 | EP0630987A1 Process for coating galvanized steel by cataphoretic painting |
| 12/28/1994 | EP0630744A1 Cutting material for cutting metal |
| 12/28/1994 | EP0630425A1 Process for coating carbon fibre reinforced carbon and product therewith obtained |
| 12/28/1994 | EP0630424A1 Ferroelectric thin films made by metalorganic chemical vapor deposition |
| 12/28/1994 | EP0630422A1 Process for producing thin films of inorganic oxides of controlled stoichiometry. |
| 12/28/1994 | EP0454843A4 Method and apparatus for the rapid deposition by chemical vapor deposition with low vapor pressure reactants |
| 12/28/1994 | EP0363437B1 Heating system for reaction chamber of chemical vapor deposition equipment |
| 12/27/1994 | US5377071 Sensor apparatus and method for real-time in-situ measurements of sheet resistance and its uniformity pattern in semiconductor processing equipment |
| 12/27/1994 | US5376777 Control apparatus and method for a substrate tray on an in-line sputtering apparatus |
| 12/27/1994 | US5376628 Method of improving or producing oxide superconductor |
| 12/27/1994 | US5376413 Treatment of textile fibers |
| 12/27/1994 | US5376409 Process and apparatus for the use of solid precursor sources in liquid form for vapor deposition of materials |
| 12/27/1994 | US5376405 Chemical vapor deposition technique for depositing titanium silicide on semiconductor wafers |
| 12/27/1994 | US5376213 Etching reactor having cryogenic coolant hermetically sealed between wafer support and cooling blocks; improved heat exchanging |
| 12/22/1994 | WO1994029494A1 Microwave plasma reactor |
| 12/22/1994 | WO1994029493A2 Ceramic coatings produced by the use of a silent discharge excimer lamp |
| 12/21/1994 | EP0629716A2 Susceptor for vapor deposition |
| 12/21/1994 | CN1096548A Method for making single crystal diamond diaphragm |
| 12/20/1994 | US5374613 Depositing oxide superconductor thin film on a substrate and supplying excited oxygen to the thin film deposition site |
| 12/20/1994 | US5374594 Introducing inert gas onto backside of wafers being processed to avoid deposition of material on backside |
| 12/20/1994 | US5374471 Tungsten carbide base; multiple hard coatings deposited on cobalt-enriched surface layer |
| 12/20/1994 | US5374414 Self-supporting diamond filaments |
| 12/20/1994 | US5374412 Produced by high temperature vapor deposition |
| 12/20/1994 | US5374315 Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
| 12/20/1994 | US5374314 Methods and apparatus for externally treating a container with application of internal bias gas |
| 12/20/1994 | US5374313 Magnetic roller gas gate employing transonic sweep gas flow to isolate regions of differing gaseous composition or pressure |
| 12/20/1994 | US5374159 Robotically loaded epitaxial deposition apparatus |
| 12/20/1994 | US5373993 Apparatus and process for depositing hard coating in a nozzle orifice |
| 12/20/1994 | CA1333547C Metal coating of inorganic fibers and solid particulates |
| 12/20/1994 | CA1333515C Liquid coating composition comprising an organic di-or tricarboxylate and an organic fluoroacid, and chemical vapor deposition method for forming a fluorine-doped tin oxide coating on glass having low bulk resistivity and low haze values |
| 12/15/1994 | DE4420262A1 Amorphous hard carbon film and process for its production |
| 12/15/1994 | DE4319118A1 Process and apparatus for disposing of fluorocarbons and other fluorine-containing compounds |
| 12/14/1994 | EP0628985A1 Control of particle generation within a reaction chamber |
| 12/14/1994 | EP0628644A2 Improvements in or relating to susceptors suitable for use in chemical vapour deposition devices |
| 12/14/1994 | EP0628643A1 Triangular deposition chamber for a vapor deposition system |
| 12/14/1994 | EP0628642A1 Superhard film-coated material and method of producing the same |
| 12/14/1994 | EP0628212A1 Enhanced thin film dc plasma processing system |
| 12/14/1994 | EP0628091A1 A method of coating a piezoelectric substrate with a semi-conducting material and a method of producing a droplet ejector arrangement including the coating method. |
| 12/14/1994 | EP0628048A1 Metallo-organic precursors |
| 12/14/1994 | EP0517724B1 Device for producing films of mixed metal oxides |
| 12/14/1994 | CN1096331A Method and apparatus for chemically gas phase sedimenting coating of inner surface of essentially semilspheric stroma |
| 12/13/1994 | USRE34806 Vacuum chamber having plasma generator and electromagnets used to accelerate plasma beam toward target; efficiency; vapor deposition, semiconductors, solar cells, spacecraft propulsion |
| 12/13/1994 | US5372850 Vaporizing organometallic compound in inert gas with low boiling solvent, oxidizing with reactant gas to deposit metal oxide on substrate; capacitors, computers |
| 12/13/1994 | US5372849 Using a volatile ligand-containing metal tetracarbonyl complex ; decomposing by heat at low temperature or by radiation |
| 12/13/1994 | US5372839 Process for preparing an electroluminescent film |
| 12/13/1994 | US5372836 Method of forming polycrystalling silicon film in process of manufacturing LCD |
| 12/13/1994 | US5372799 Process for the synthesis of granular diamond |
| 12/13/1994 | US5372754 Liquid vaporizer/feeder |
| 12/13/1994 | US5372648 Plasma CVD system |
| 12/13/1994 | US5372645 Method for determining thickness of chemical vapor deposited layers |
| 12/13/1994 | CA1333461C Method of depositing textured tin oxide |
| 12/08/1994 | WO1994028192A1 Fluidized bed reactor arrangement and method for forming a metal carbide coating on a substrate containing graphite or carbon |
| 12/08/1994 | WO1994028191A1 Coated cutting tool and method for producing the same |
| 12/08/1994 | WO1994027745A1 Method and device for producing a polymer coating inside hollow plastic articles |
| 12/08/1994 | DE4318086A1 Process and device for producing a polymeric outer layer in plastic blow mouldings |
| 12/08/1994 | DE4318084A1 Process and device for producing a polymeric outer layer in plastic blow mouldings |
| 12/08/1994 | CA2164223A1 A procedure and a device for producing a plastic coating on hollow plastic articles |
| 12/07/1994 | EP0627761A2 Epitaxial overgrowth method and devices |
| 12/07/1994 | EP0627498A1 Ceramic-based substrate, and methods for producing same |
| 12/07/1994 | EP0498887B1 Core wire connecting bridge for polycrystalline silicon manufacturing apparatuses |
| 12/07/1994 | EP0474796B1 Process for depositing hard coating in a nozzle orifice |
| 12/07/1994 | EP0379594B1 Gas supply pipeline system for process equipment |
| 12/06/1994 | US5371828 System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure |
| 12/06/1994 | US5371257 Preparation of diisopropyl stibines and use thereof |
| 12/06/1994 | US5370912 Utilizing a tuneable microwave cavity with adjustable height and antenna |
| 12/06/1994 | US5370855 Conversion of fullerenes to diamond |
| 12/06/1994 | US5370739 Downwardly facing showerhead directs gas mixture from a cooled mixing chamber; smooth interior surface minimizes turbulence; lip reduces thermal gradients |
| 12/06/1994 | US5370738 Controlling thickness and composition; laminar flow of gases |
| 12/06/1994 | US5370736 Horizontal reactor hardware design |
| 12/06/1994 | US5370709 Semiconductor wafer processing apparatus having a Bernoulli chuck |
| 12/06/1994 | US5370371 Heat treatment apparatus |
| 12/01/1994 | DE4416525A1 Process for increasing the wear resistance of workpiece surfaces and a workpiece treated by this process |
| 11/30/1994 | EP0626683A1 Optical recording medium and process for producing the same |
| 11/30/1994 | EP0626360A1 Method of making a composite material having a lamellary microtextured pyrolytic carbon interphase between reinforcing fibres and matrix, and material obtained by the process |
| 11/30/1994 | EP0626214A1 Purgeable connection for gas cylinders |