| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/02/1994 | US5334263 Substrate stabilization of diffusion aluminide coated nickel-based superalloys |
| 08/02/1994 | US5334250 Vapor deposition apparatus for using solid starting materials |
| 07/28/1994 | DE4319387C1 Appts. for vaporising liq. |
| 07/27/1994 | EP0608162A1 SiO2 electret and its manufacturing process |
| 07/27/1994 | EP0608081A1 Coated articles and method for the prevention of fuel thermal degradation deposits |
| 07/27/1994 | EP0607987A2 Method of making diamond film and use of same |
| 07/27/1994 | EP0607797A1 An apparatus and method for enhanced inductive coupling to plasmas with reduced sputter contamination |
| 07/27/1994 | EP0607787A2 Device for coating or etching of substrates |
| 07/27/1994 | EP0607786A2 Apparatus for coating substrates |
| 07/27/1994 | EP0607651A1 Prevention of fuel thermal degradation deposits |
| 07/27/1994 | EP0607415A1 Hollow-anode glow discharge apparatus |
| 07/26/1994 | US5332880 Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field |
| 07/26/1994 | US5332597 Separation of oxygen from mixtures |
| 07/26/1994 | US5332555 Ozone beam generation apparatus and method for generating an ozone beam |
| 07/26/1994 | US5332443 Lift fingers for substrate processing apparatus |
| 07/26/1994 | US5332442 Surface processing apparatus |
| 07/21/1994 | WO1994016458A1 Enhanced thin film dc plasma processing system |
| 07/21/1994 | WO1994016275A1 Method and apparatus for delivering gas |
| 07/21/1994 | WO1994016125A1 Process for vapor-phase diamond synthesis |
| 07/21/1994 | WO1994016117A1 Device for the vacuum-plasma treatment of articles |
| 07/21/1994 | WO1994015707A2 Device for simultaneously letting in at least one process gas into a plurality of reaction chambers |
| 07/21/1994 | WO1994011548A3 Method for fabricating diamond films on nondiamond substrates and related structures |
| 07/20/1994 | EP0606751A1 Method for depositing polysilicon films having improved uniformity and apparatus therefor |
| 07/20/1994 | EP0606737A1 Process and apparatus for growing a silicon epitaxial layer, with a control of the mass flows of the reactive gases |
| 07/19/1994 | US5331454 Low reset voltage process for DMD |
| 07/19/1994 | US5330802 Plasma CVD of carbonaceous films on substrate having reduced metal on its surface |
| 07/19/1994 | US5330793 Metallo-organic precursors to titanium nitride |
| 07/19/1994 | US5330633 Semiconductors |
| 07/19/1994 | US5330611 Wear resistant semiconductor |
| 07/19/1994 | US5330578 Plasma treatment apparatus |
| 07/19/1994 | US5330577 Semiconductor fabrication equipment |
| 07/19/1994 | CA1330803C Volatile fluorinated beta-ketoimines and associated metal complexes |
| 07/16/1994 | CA2107430A1 Coated articles and method for the prevention of fuel thermal degradation deposits |
| 07/14/1994 | DE4400208A1 Vorrichtung und Verfahren zum Bilden einer Beschichtung durch Pyrolyse Apparatus and method for forming a coating by pyrolysis |
| 07/13/1994 | EP0606158A1 Photoluminescent plasma polymerized films |
| 07/13/1994 | EP0605992A1 Powertrain component with adherent film having a graded composition |
| 07/13/1994 | EP0605980A2 Method for depositing silicon nitride and silicon oxynitride films |
| 07/13/1994 | EP0605814A1 Diamond-like carbon films from a hydrocarbon helium plasma |
| 07/13/1994 | EP0605791A1 Apparatus for forming a film |
| 07/13/1994 | EP0605725A1 Apparatus for introducing gas, and apparatus and method for epitaxial growth |
| 07/13/1994 | EP0605703A1 Methods and apparatus for externally treating a container with application of internal bias gas |
| 07/13/1994 | EP0605534A1 Apparatus for rapid plasma treatments and method. |
| 07/12/1994 | US5329095 Thermal treatment apparatus utilizing heated lid |
| 07/12/1994 | US5328873 Process for forming deposited film by use of alkyl aluminum hydride |
| 07/12/1994 | US5328872 Method of integrated circuit manufacturing using deposited oxide |
| 07/12/1994 | US5328761 Diamond-coated hard material, throwaway insert and a process for the production thereof |
| 07/12/1994 | US5328737 Method of forming film by plasma CVD |
| 07/12/1994 | US5328722 Depositing a barrier layer on a surface then engaging the shadow ring to control gas flow and depositing a coating of material |
| 07/12/1994 | US5328720 Coating-fluidizing gas supply system and method for flat bottom coater |
| 07/12/1994 | US5328715 Process for making metallized vias in diamond substrates |
| 07/12/1994 | US5328713 Precise regulation of fluidized bed weight in pyrolytically coating substrates |
| 07/12/1994 | US5328676 Vapor deposition fullerenes and energizing to form ions then coating and growing |
| 07/12/1994 | US5328556 Wafer fabrication |
| 07/12/1994 | US5328515 Chemical treatment plasma apparatus for forming a ribbon-like plasma |
| 07/12/1994 | US5328514 Device for forming film by photo-chemical vapor deposition |
| 07/12/1994 | US5328513 Apparatus for producing dies for extruding ceramic honeycomb bodies |
| 07/12/1994 | US5327624 Method for forming a thin film on a semiconductor device using an apparatus having a load lock |
| 07/12/1994 | CA2113029A1 A device and method for forming a pyrolytic coating |
| 07/12/1994 | CA2113028A1 A device and method for forming a coating by pyrolysis |
| 07/09/1994 | CA2110563A1 Powertrain component with adherent film having a graded composition |
| 07/07/1994 | WO1994014998A1 Protective film for articles and method |
| 07/07/1994 | WO1994014530A1 Method of manufacturing fine ceramic particles and apparatus therefor |
| 07/06/1994 | EP0605205A1 Chemical vapor deposition apparatus |
| 07/06/1994 | EP0604775A1 Apparatus for forming a film |
| 07/06/1994 | EP0558485B1 Process for obtaining a coated cemented carbide cutting tool |
| 07/06/1994 | CN1025353C Plasma processing method and apparatus |
| 07/06/1994 | CN1025322C Method for preparing vaporized reactants for chemical vapor deposition |
| 07/05/1994 | US5327454 Bridge for connecting cores in a manufacturing equipment of polycrystal silicon |
| 07/05/1994 | US5326725 Clamping ring and susceptor therefor |
| 07/05/1994 | US5326723 Cleaning, removal of wafer and purging with silane and argon |
| 07/05/1994 | US5326652 Flexible battery package with polymer base and inorganic layer with seal of silicon nitride, aluminum nitride and aluminum oxide |
| 07/05/1994 | US5326425 Preparation of tertiarybutyldimethylantimony and use thereof |
| 07/05/1994 | US5326404 Plasma processing apparatus |
| 07/05/1994 | US5325747 Method of machining using coated cutting tools |
| 07/05/1994 | CA1330601C Apparatus for semiconductor process including photo-excitation process |
| 06/29/1994 | EP0603477A1 Method of forming a dielectric layer |
| 06/29/1994 | EP0603464A1 Process for coating substrates |
| 06/29/1994 | EP0603422A1 Wear component and method of making same |
| 06/28/1994 | US5324690 Semiconductor device having a ternary boron nitride film and a method for forming the same |
| 06/28/1994 | US5324553 Increasing surface mobility of species in plasma by coupling a low frequency alternating electrical field and magnetic energy; no intentional addition of thermal energy |
| 06/28/1994 | US5324540 System and method for supporting and rotating substrates in a process chamber |
| 06/28/1994 | US5324539 Method for forming CVD thin glass films |
| 06/28/1994 | US5324537 Exposing at an elevated temperature to a stream of gaseous fluorocarbon |
| 06/28/1994 | US5324362 Apparatus for treating substrates in a microwave-generated gas-supported plasma |
| 06/28/1994 | US5324361 Apparatus for coating cap-shaped substrates |
| 06/28/1994 | US5324360 Method for producing non-monocrystalline semiconductor device and apparatus therefor |
| 06/23/1994 | WO1994014303A1 Method and apparatus for atmospheric pressure glow discharge plasma treatment |
| 06/23/1994 | WO1994013852A1 Superhard film-coated material and method of producing the same |
| 06/23/1994 | WO1994013598A1 Boron carbide coating |
| 06/23/1994 | WO1994007613A3 Method for synthesizing solids such as diamond and products produced thereby |
| 06/22/1994 | EP0603144A1 Oxide coated cutting tool |
| 06/22/1994 | EP0602595A1 Vaporizing reactant liquids for CVD |
| 06/22/1994 | EP0348477B1 Vacuum deposition process |
| 06/21/1994 | US5322818 Method for forming an oxide superconducting material |
| 06/21/1994 | US5322712 Process for improved quality of CVD copper films |
| 06/21/1994 | US5322711 Continuous method of covering inorganic fibrous material with particulates |
| 06/21/1994 | US5322710 Pumping vapor generated in reservoir through gas line to vapor deposition chamber; controlling vapor flow |
| 06/21/1994 | US5322568 Multiple tubular structure to introduce two or more gaseous starting materials and a halogenic oxidizing agent; forms plural number of precursors in excited state |
| 06/21/1994 | US5322567 Particulate reduction baffle with wafer catcher for chemical-vapor-deposition apparatus |
| 06/21/1994 | CA1330249C High hardness fine grained tungsten-carbon alloys and process for making same |