| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 02/14/1995 | US5389401 Chemical vapor deposition of metal oxides |
| 02/14/1995 | US5389400 Densifying preform of interwoven vapor grown carbon fibers by depositing pyrolytic carbon in interstices, depositing polycrystalline diamond film on carbon/carbon composite |
| 02/14/1995 | US5389396 InGaAsP/GaAs diode laser |
| 02/14/1995 | US5389152 Apparatus for densification of porous billets |
| 02/14/1995 | US5389118 Abrasive tool having film-covered CBN grits bonded by brazing to a substrate |
| 02/14/1995 | US5388944 Vertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatus |
| 02/09/1995 | WO1995004373A1 Shadow clamp |
| 02/09/1995 | WO1995004350A1 Substrate having a carbon rich coating |
| 02/09/1995 | WO1995004168A1 Method of depositing thin group iiia metal films |
| 02/09/1995 | WO1995004063A1 Organometallic complexes of aluminium, gallium and indium |
| 02/09/1995 | WO1994029493A3 Ceramic coatings produced by the use of a silent discharge excimer lamp |
| 02/09/1995 | CA2168214A1 Method of depositing thin group iiia metal films |
| 02/08/1995 | EP0637837A2 Method for fabricating a thin film transistor |
| 02/08/1995 | EP0637639A1 A process for the synthesis of diamond |
| 02/08/1995 | EP0637638A1 Tungsten metallization of CVD diamond |
| 02/08/1995 | CN1098329A Method and apparatus for forming film |
| 02/07/1995 | US5387777 Methods and apparatus for contamination control in plasma processing |
| 02/07/1995 | US5387557 Method for manufacturing semiconductor devices using heat-treatment vertical reactor with temperature zones |
| 02/07/1995 | US5387546 Method for manufacturing a semiconductor device |
| 02/07/1995 | US5387447 Method for producing uniform cylindrical tubes of CVD diamond |
| 02/07/1995 | US5387443 Selective high quality growth on any desired region of a base material at lower temperatures; diluting saturated hydrocarbon gas with hydrogen; controlling radiation |
| 02/07/1995 | US5387438 Vapor deposition from mixture of tungsten hexafluoride and hydrogen using process parameters calculated according to specified equation system |
| 02/07/1995 | US5387289 Film uniformity by selective pressure gradient control |
| 02/07/1995 | US5387288 Apparatus for depositing diamond and refractory materials comprising rotating antenna |
| 02/07/1995 | US5387265 Semiconductor wafer reaction furnace with wafer transfer means |
| 02/02/1995 | DE4425796A1 Coated tool and its use |
| 02/01/1995 | EP0637086A2 Light emitting semiconductor device and light enhanced deposition method for fabricating the same |
| 02/01/1995 | EP0637058A1 Gas inlets for wafer processing chamber |
| 02/01/1995 | EP0637055A1 Plasma processing apparatus |
| 02/01/1995 | EP0636709A1 Process for treating the surface of metallic parts |
| 02/01/1995 | EP0636707A2 Nitrogen trifluoride thermal cleaning apparatus and process |
| 02/01/1995 | EP0636706A2 Apparatus for chemical vapor deposition of diamond including graphite substrate holders |
| 02/01/1995 | EP0636705A2 A vertical type vapor phase growth apparatus |
| 02/01/1995 | EP0636704A1 Silicon nitride deposition |
| 02/01/1995 | EP0636629A2 Alkyltin compounds, their preparation and agents for the formation of conductif and IR-reflecting layers on glass-, glass-ceramic- or enamel coated surfaces |
| 02/01/1995 | EP0636575A1 Process for the preparation of transition metals as well as their oxides |
| 02/01/1995 | CN1098243A Microwave enhanced cvd system under magnetic field |
| 02/01/1995 | CN1027549C Microwave enhanced CVD system under magnetic field |
| 01/31/1995 | US5386121 In situ, non-destructive CVD surface monitor |
| 01/31/1995 | US5385763 Method for forming a film on a substrate by activating a reactive gas |
| 01/31/1995 | US5385751 Atmospheric pressure CVD process for preparing fluorine-doped tungsten oxide films |
| 01/31/1995 | US5385595 Titanium nitride diffusion barrier for platinum-coated fiberglass spinner bores |
| 01/31/1995 | CA2127167A1 Alkyl tin compounds, their synthesis and electrically conductive and ir-reflecting layers |
| 01/31/1995 | CA1334155C Process for restoring locally damaged parts, particularly anticathodes |
| 01/26/1995 | WO1995002897A1 Chemical vapor deposition process for fabricating layered superlattice materials |
| 01/26/1995 | WO1995002894A1 Superhard tips for micro-probe microscopy and field emission |
| 01/26/1995 | WO1995002711A1 Method and device for feeding precursors into a chemical vapour deposition chamber |
| 01/26/1995 | WO1995002710A1 Growing a nitrogen doped epitaxial ii-vi compound layer on a single crystal substrate |
| 01/25/1995 | EP0635878A1 Wiring forming, restoring and pattern changing method |
| 01/25/1995 | EP0635877A2 Apparatus and method for depositing borophosphosilicate glass on a substrate |
| 01/25/1995 | EP0635584A1 C V D Diamond radiation detector |
| 01/25/1995 | EP0635583A1 Liquid deposition source gas delivery system |
| 01/25/1995 | EP0635460A2 Gas producing apparatus and method and apparatus for manufacturing optical waveguide and optical fiber preform |
| 01/25/1995 | EP0635301A2 Carbon-clad inorganic oxide particles with a polymer coating thereon |
| 01/25/1995 | EP0635075A1 Method of coating substrates |
| 01/24/1995 | US5384289 Reductive elimination chemical vapor deposition processes utilizing organometallic precursor compounds in semiconductor wafer processing |
| 01/24/1995 | US5384167 Method for the surface treatment of a metal by atmospheric pressure plasma |
| 01/24/1995 | US5384151 InGaAsP/GaAs diode laser |
| 01/24/1995 | US5384008 Removing residues from backsides of semiconductor wafers, novel support, etching |
| 01/24/1995 | US5383971 Differential pressure CVD chuck |
| 01/24/1995 | US5383970 Chemical vapor deposition method for forming a deposited film with the use of a liquid raw material and apparatus suitable for practicing said method |
| 01/24/1995 | US5383969 Process and apparatus for supplying zinc vapor continuously to a chemical vapor deposition process from a continuous supply of solid zinc |
| 01/24/1995 | US5383512 Method for fabricating a substrate having spaced apart microcapillaries thereon |
| 01/19/1995 | WO1995002078A1 Diamond coated body |
| 01/19/1995 | WO1995002076A1 Method for forming thin film |
| 01/19/1995 | WO1995001843A1 Method for the improved microwave deposition of thin films |
| 01/19/1995 | DE4408250A1 Process for coating the surface of a substrate and coating material |
| 01/18/1995 | EP0634778A1 Hollow cathode array |
| 01/18/1995 | EP0634501A1 Vacuum film forming method and apparatus therefor |
| 01/18/1995 | EP0634494A2 Copper-carbon composite material with graded function and method for manufacturing the same |
| 01/18/1995 | EP0634378A1 Process for improving the oxydation resistance of a filtre-reinforced composite having a glass, ceramic or glass-ceramic matrix |
| 01/18/1995 | EP0633997A1 A rapid thermal processing apparatus for processing semiconductor wafers |
| 01/17/1995 | US5382911 Reaction chamber interelectrode gap monitoring by capacitance measurement |
| 01/17/1995 | US5382758 Diamond substrates having metallized vias |
| 01/17/1995 | US5382531 Method for continuously manufacturing a semiconductor device |
| 01/17/1995 | US5382453 Method of manufacturing a hollow silicon carbide fiber reinforced silicon carbide matrix component |
| 01/17/1995 | US5382419 Thermal decomposition of monosilane gas |
| 01/17/1995 | US5382311 Stage having electrostatic chuck and plasma processing apparatus using same |
| 01/17/1995 | US5382293 Plasma jet CVD apparatus for forming diamond films |
| 01/17/1995 | US5382274 Optical element |
| 01/17/1995 | US5381755 Method of synthesizing high quality, doped diamond and diamonds and devices obtained therefrom |
| 01/17/1995 | US5381605 Method and apparatus for delivering gas |
| 01/13/1995 | CA2126731A1 Hollow cathode array and method of cleaning sheet stock therewith |
| 01/12/1995 | DE4322740A1 Process for recovering tin metal from tin compounds RSn in the gaseous state |
| 01/12/1995 | DE4321817A1 Process for producing a layer system having at least one layer of a metal-oxidic superconducting material |
| 01/12/1995 | DE4321639A1 Plasma-supported, chemical vacuum-coating installation |
| 01/11/1995 | EP0633713A1 Plasma reactor for a deposition and etching method |
| 01/11/1995 | EP0633605A2 Thin film for semiconductor device and manufacturing method of thin film for semiconductor device |
| 01/11/1995 | EP0633328A1 Method for depositing conductive metal traces on diamond |
| 01/11/1995 | EP0632850A1 Composite body and its use. |
| 01/11/1995 | EP0632846A1 Arrangement for vacuum coating bulk goods. |
| 01/11/1995 | EP0611331A4 Chemical vapor deposition of diamond films using water-based plasma discharges. |
| 01/11/1995 | EP0576559A4 Interfacial plasma bars for photovoltaic deposition apparatus. |
| 01/10/1995 | US5380566 Method of limiting sticking of body to susceptor in a deposition treatment |
| 01/10/1995 | US5380557 Carbon fluoride compositions |
| 01/10/1995 | US5380551 Supporting lenses at four points of contact at an intersection of a pair of trenches |
| 01/10/1995 | US5380516 Process for synthesizing diamond in a vapor phase |
| 01/10/1995 | US5380474 Methods for patterned deposition on a substrate |
| 01/10/1995 | US5380370 Method of cleaning reaction tube |
| 01/10/1995 | US5380367 Vapour generator for chemical vapour deposition systems |