| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/21/1995 | EP0658560A1 Process for removing impurities in organometallic compounds |
| 06/21/1995 | EP0658219A1 Fluidized bed reactor arrangement and method for forming a metal carbide coating on a substrate containing graphite or carbon |
| 06/21/1995 | EP0599869B1 Manufacture of a tool with wear-resistant diamond cutting edge |
| 06/21/1995 | CN1103900A Synthesis of diamond film with double cathode glow discharge |
| 06/21/1995 | CN1029016C Liquid coating composition and chemical vapor deposition method |
| 06/21/1995 | CA2132885A1 Method and apparatus for vaporization of liquid reactants |
| 06/20/1995 | US5426202 Alkyl tin compounds, their synthesis and electrically conductive and IR-reflecting layers |
| 06/20/1995 | US5425966 Sublimation at reduced pressure; contacting a substrate maintained at an elevated temperature |
| 06/20/1995 | US5425965 Process for deposition of ultra-fine grained polycrystalline diamond films |
| 06/20/1995 | US5425922 Apparatus for manufacturing microcrystal particles and manufacturing method for the microcrystal particles |
| 06/20/1995 | US5425842 Cleaning cycles containing fluorine and oxygen gas |
| 06/20/1995 | US5425812 Reaction chamber for a chemical vapor deposition apparatus and a chemical vapor deposition apparatus using such a reaction chamber |
| 06/20/1995 | US5425810 Removable gas injectors for use in chemical vapor deposition of aluminium oxide |
| 06/20/1995 | US5425803 Device for removing dissolved gas from a liquid |
| 06/20/1995 | CA1335950C Method of forming semiconducting amorphous silicon films from the thermal decomposition of dihalosilanes |
| 06/20/1995 | CA1335949C Method of securing adherent coatings by cvd from metal carbonyls, and articles thus obtained |
| 06/20/1995 | CA1335948C Sialon cutting tool composition |
| 06/14/1995 | DE4342463A1 Vacuum coating of optical substrates |
| 06/14/1995 | DE4341876A1 Electric field-assisted carbon soot deposition |
| 06/13/1995 | US5424131 Protecting surfaces against erosion by oxygen atom; applying coatings by glow discharge deposition |
| 06/13/1995 | US5424103 Method for making a semiconductor using corona discharge |
| 06/13/1995 | US5424096 HF-CVD method for forming diamond |
| 06/13/1995 | US5424095 Ceramic vapor deposited coating using a steam-containing carrier gas and non-alkoxy silane precursors |
| 06/13/1995 | US5423971 Arrangement for coating substrates |
| 06/13/1995 | US5423945 Using a fluorocarbon gas as etchant, and scavenger |
| 06/13/1995 | US5423918 Method for reducing particulate contamination during plasma processing of semiconductor devices |
| 06/13/1995 | US5423915 Plasma CVD apparatus including rotating magnetic field generation means |
| 06/13/1995 | US5423475 Diffusion bonding with interlayer of silicon |
| 06/13/1995 | US5423285 Applying metal carboxylate precursor in solvent of xylenes, methoxyethanol or butyl acetate to integrated circuit wafer, heating to form layer of metal compound |
| 06/08/1995 | WO1995015571A1 Stacked-type component and method for the manufacture of same |
| 06/08/1995 | WO1995015570A1 Method for the manufacture of a capacitor and capacitor obtained |
| 06/08/1995 | WO1995015258A1 Diamond-coated tools and process for making |
| 06/08/1995 | DE4340956A1 Working integrated circuits with high energy beam |
| 06/08/1995 | CA2177987A1 Method for the manufacture of a capacitor and capacitor obtained |
| 06/08/1995 | CA2177986A1 Stacked-type component and method for the manufacture of same |
| 06/07/1995 | EP0656431A2 Metal-organic chemical vapor-phase deposition process |
| 06/07/1995 | CN1028772C Method for vapor deposition of diamond |
| 06/06/1995 | US5422488 Reactor apparatus |
| 06/06/1995 | US5422185 Ethylene or alpha olefin and diene copolymer, silicon dioxide coating |
| 06/06/1995 | US5422139 Vapor deposition with one in-feed opening and one draw-off opening |
| 06/06/1995 | US5422081 Trap device for vapor phase reaction apparatus |
| 06/06/1995 | US5421957 Applying reactive gas comprising nitrogen trifluoride, chlorine trifluoride, sulfur hexafluoride, or carbon tetrafluoride to evacuated chamber |
| 06/06/1995 | US5421914 Surface modification of high temperature iron alloys |
| 06/06/1995 | US5421902 Using fluorine and nitrogen trifluoride to remove laminar deposits of silicon |
| 06/06/1995 | US5421895 Apparatus for vaporizing liquid raw material and apparatus for forming thin film |
| 06/06/1995 | US5421893 Susceptor drive and wafer displacement mechanism |
| 06/06/1995 | US5421892 Vertical heat treating apparatus |
| 06/06/1995 | US5421891 High density plasma deposition and etching apparatus |
| 06/06/1995 | US5421889 Method and apparatus for inverting samples in a process |
| 06/06/1995 | US5421888 Low pressure CVD apparatus comprising gas distribution collimator |
| 06/06/1995 | US5421401 Compound clamp ring for semiconductor wafers |
| 06/06/1995 | US5421288 Process for growing silicon epitaxial layer |
| 06/01/1995 | WO1995014698A1 Volatile organic lanthanide compounds and methods for the preparation of lanthanide-containing layered materials from these compounds |
| 06/01/1995 | WO1995014645A1 Method for densifying a porous structure using boron nitride, and porous structure densified with boron nitride |
| 05/31/1995 | EP0655780A1 Method for forming an aluminum contact |
| 05/31/1995 | EP0655774A2 Method of forming polycrystalline silicon layer and surface treatment apparatus therefor |
| 05/31/1995 | EP0655516A1 Method of coating or surface treatment of solid particles by use of plasma and fluidized bed |
| 05/31/1995 | EP0655285A1 Optically improved diamond wire-drawing-die |
| 05/31/1995 | CN1028666C Fixture and method for bonding friction material |
| 05/30/1995 | US5420443 Microelectronic structure having an array of diamond structures on a nondiamond substrate and associated fabrication methods |
| 05/30/1995 | US5420437 Method and apparatus for generation and implantation of ions |
| 05/30/1995 | US5420044 Method for producing non-monocrystalline semiconductor device |
| 05/30/1995 | US5419924 Chemical vapor deposition method and apparatus therefore |
| 05/26/1995 | WO1995014115A1 Process and device for producing three-dimensional structures by the optically stimulated separation of material from a fluid compound |
| 05/26/1995 | WO1995013891A1 Making quantum dot particles of uniform size |
| 05/26/1995 | CA2176569A1 Making quantum dot particles of uniform size |
| 05/24/1995 | EP0654545A1 Semiconductor device thin film formation method |
| 05/24/1995 | EP0654544A2 Compounds useful as chemical precursors in chemical vapor deposition of silicon-based ceramic materials |
| 05/24/1995 | EP0489862B1 Chemical vapor deposition system cleaner |
| 05/24/1995 | EP0336979B1 Apparatus for thin film formation by plasma cvd |
| 05/24/1995 | DE4339326A1 Dressing roller for grinding discs |
| 05/23/1995 | US5418885 Three-zone rapid thermal processing system utilizing wafer edge heating means |
| 05/23/1995 | US5418063 Carbon-carbon composite and method of making |
| 05/23/1995 | US5418062 Zinc sulfide |
| 05/23/1995 | US5418019 Method for low temperature plasma enhanced chemical vapor deposition (PECVD) of an oxide and nitride antireflection coating on silicon |
| 05/23/1995 | US5418018 Chemical vapor deposition of diamond films using water-based plasma discharges |
| 05/23/1995 | US5417953 Apparatus and method for synthesizing diamond in supercritical water |
| 05/23/1995 | US5417934 Dry exhaust gas conditioning |
| 05/23/1995 | US5417823 Metal-nitrides prepared by photolytic/pyrolytic decomposition of metal-amides |
| 05/23/1995 | US5417803 Method for making Si/SiC composite material |
| 05/23/1995 | US5417770 Photovoltaic device and a forming method thereof |
| 05/23/1995 | US5417767 Wafer carrier |
| 05/23/1995 | US5417735 Interdiffused chromium/nickel corrosion-resistant coating for fiberglass spinner bores |
| 05/18/1995 | WO1995013282A1 F-series metal and metal amides for use in mocvd |
| 05/18/1995 | WO1995013189A1 Abrasion wear resistant coated substrate product |
| 05/18/1995 | WO1995013144A1 Process and apparatus for water-based plasma cvd of diamond films |
| 05/18/1995 | CA2172829A1 Abrasion wear resistant coated substrate product |
| 05/17/1995 | EP0653787A1 Method for preparation of silicon nitride gallium diffusion barrier for use in molecular beam epitaxial growth of gallium arsenide |
| 05/17/1995 | EP0653783A2 Method for forming insulating film |
| 05/17/1995 | EP0653782A2 Method for reforming insulating film |
| 05/17/1995 | EP0653779A1 Thermal treatment device for semiconductor substrates |
| 05/17/1995 | EP0653501A1 Plasma-CVD method and apparatus |
| 05/17/1995 | EP0653500A1 CVD reactor for improved film thickness uniformity deposition |
| 05/17/1995 | EP0653499A1 Coated cutting tool and method for producing the same |
| 05/17/1995 | EP0653394A1 Surface treatment of carbon material to ensure the adhesion of a diamond coating and diamond coated articles prepared therefrom |
| 05/17/1995 | EP0652828A1 Abrasion wear resistant coated substrate product |
| 05/17/1995 | EP0431160B1 Process for producing thin-film oxide superconductor |
| 05/16/1995 | US5415891 Forming an oxide coating on ceramic supports by oxidation of vapor deposited coating |
| 05/16/1995 | US5415674 Cemented carbide substrate having a diamond layer of high adhesive strength |
| 05/16/1995 | US5415585 Decompression apparatus |