| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 10/07/1993 | DE4305487A1 Spring-type holding frame for disc-shaped workpieces - which minimises covered areas on workpiece surface |
| 10/06/1993 | EP0564156A1 Method and apparatus of synthesizing diamond in vapor phase |
| 10/06/1993 | EP0563748A2 Method of forming film by plasma CVD |
| 10/06/1993 | EP0563557A2 Volatile rate earth metal alkoxides, especially for the preparation of rare earth metal oxides, and alcohols for the synthesis of volatile compounds |
| 10/06/1993 | EP0378543B1 Gas injector apparatus for chemical vapor deposition reactors |
| 10/05/1993 | US5250740 Precursors for metal fluoride deposition and use thereof |
| 10/05/1993 | US5250473 Uniform layer thickness; reacting a monochlorosilane with an oxidizing agent |
| 10/05/1993 | US5250463 Method of making doped semiconductor film having uniform impurity concentration on semiconductor substrate |
| 10/05/1993 | US5250367 Toughness, wear resistance, shock resistance |
| 10/05/1993 | US5250329 Method of depositing conductive lines on a dielectric |
| 10/05/1993 | US5250328 Process and apparatus for plasma CVD coating or plasma treating substrates |
| 10/05/1993 | US5250323 Reactor for forming surface layer on semiconductor substrate |
| 10/05/1993 | US5250149 Method of growing thin film |
| 10/05/1993 | US5250092 Exhaust apparatus for epitaxial growth system |
| 10/05/1993 | US5249554 Amorphous hydrogenated carbon film for internal combustion engine |
| 09/30/1993 | WO1993019223A1 Bubblers |
| 09/30/1993 | WO1993019222A1 Treatment chamber |
| 09/30/1993 | WO1993019217A1 Arrangement for vacuum coating bulk goods |
| 09/30/1993 | DE4209975A1 Verbundkörper und dessen Verwendung Composite and its use |
| 09/29/1993 | EP0562764A1 Water jet mixing tubes |
| 09/29/1993 | EP0562625A2 A semiconductor device and process |
| 09/29/1993 | EP0562035A1 Minimization of particle generation in cvd reactors and methods |
| 09/29/1993 | EP0552249A4 Flame or plasma synthesis of diamond under turbulent and transition flow conditions |
| 09/29/1993 | EP0454686B1 Cutting insert and process for manufacturing it |
| 09/28/1993 | US5248787 Volatile organic barium, strontium and calcium compounds |
| 09/28/1993 | US5248636 Semiconductors |
| 09/28/1993 | US5248380 Method of treating surface of rotating wafer using surface treating gas |
| 09/28/1993 | US5248371 Hollow-anode glow discharge apparatus |
| 09/28/1993 | US5248253 Thermal processing furnace with improved plug flow |
| 09/28/1993 | CA2090371A1 Water jet mixing tubes used in water jet cutting devices and method of preparation thereof |
| 09/22/1993 | EP0561588A1 Multilayer CVD diamond films |
| 09/22/1993 | EP0561522A1 Method for electropolishing mandrels |
| 09/22/1993 | EP0561511A2 Preheater for CVD diamond reactor |
| 09/22/1993 | EP0561371A2 Method and apparatus for producing glass thin film |
| 09/22/1993 | EP0561243A1 Plasma CVD apparatus and method therefor |
| 09/22/1993 | EP0248883B1 Selective deposition process |
| 09/22/1993 | CN1076552A New application of using diamond-like thin film as optical anti-reflection film |
| 09/21/1993 | US5246887 Dielectric deposition |
| 09/21/1993 | US5246881 Low-pressure chemical vapor deposition process for depositing high-density, highly-conformal, titanium nitride films of low bulk resistivity |
| 09/21/1993 | US5246768 Multilayer coating for polycarbonate substrate and process for preparing same |
| 09/21/1993 | US5246745 Laser-induced chemical vapor deposition of thin-film conductors |
| 09/21/1993 | US5246744 Method of forming thin film of amorphous silicon by plasma cvd |
| 09/21/1993 | US5246736 Process for the manufacture of a refractory composite material protected against corrosion |
| 09/21/1993 | US5246500 Vapor phase epitaxial growth apparatus |
| 09/21/1993 | US5246198 Diamond crystal coated mold for forming optical elements |
| 09/21/1993 | US5245736 Vacuum process apparatus |
| 09/21/1993 | CA2089288A1 Multilayer cvd diamond films |
| 09/16/1993 | WO1993018203A1 Process for coating carbon fibre reinforced carbon |
| 09/16/1993 | WO1993018202A1 Ferroelectric thin films made by metalorganic chemical vapor deposition |
| 09/16/1993 | WO1993018200A1 Process for producing thin films of inorganic oxides of controlled stoichiometry |
| 09/16/1993 | CA2131791A1 Process for producing thin films of inorganic oxides of controlled stoichiometry |
| 09/15/1993 | EP0560617A2 Method of manufacturing insulating film on semiconductor device and apparatus for carrying out the same |
| 09/15/1993 | EP0560287A1 Diamond cutting tool and method of manufacturing the same |
| 09/15/1993 | EP0560029A1 Process for making alkyl arsine compounds |
| 09/15/1993 | EP0559787A1 Defect-induced control of the structure of boron nitride |
| 09/14/1993 | US5245157 Microwave plasma processing or semiconductor devices |
| 09/14/1993 | US5244742 Reduced leakage current properties; lead titanate, lead titanate zirconate, lanthanum-containing lead titanate zirconate |
| 09/14/1993 | US5244698 Process for forming deposited film |
| 09/14/1993 | US5244501 Apparatus for chemical vapor deposition |
| 09/14/1993 | US5244500 Process control system of semiconductor vapor phase growth apparatus |
| 09/13/1993 | CA2073824A1 Elastic metallized film and process to make the same |
| 09/10/1993 | CA2091141A1 Process for making alkyl arsine compounds |
| 09/08/1993 | EP0559329A2 Method for producing uniform cylindrical tubes of CVD diamond |
| 09/08/1993 | EP0559326A1 Compound semiconductor vapor phase epitaxial device |
| 09/08/1993 | EP0559259A1 Method for transforming a liquid flow into a gas flow, and device for implementing the method |
| 09/07/1993 | US5243170 Method for deposition of hexagonal diamond using hydrogen plasma jet |
| 09/07/1993 | US5243169 Multiple torch type plasma generation device and method of generating plasma using the same |
| 09/07/1993 | US5242753 Wear and erosion resistance; high microhardness |
| 09/07/1993 | US5242740 Having hydrogenated silicon nitride and hydrogenated silica layers, glass substitute for automobile headlight lenses |
| 09/07/1993 | US5242711 Microstructure |
| 09/07/1993 | US5242663 Dielectric insulation of tubes and vacuum deposition and microwaves |
| 09/07/1993 | US5242561 Semiconductors |
| 09/07/1993 | US5242530 Receptive areas on a substrate, thin film transistors |
| 09/07/1993 | US5242501 Susceptor in chemical vapor deposition reactors |
| 09/07/1993 | US5242477 Apparatus for coating optical fibers |
| 09/07/1993 | US5242264 Machine on ground provided with heat resistant wall used for isolating from environment and heat resistant wall used therefor |
| 09/07/1993 | US5241987 Process gas supplying apparatus |
| 09/07/1993 | CA1322031C Contactless heating of thin filaments |
| 09/05/1993 | CA2089280A1 Method for producing articles by chemical vapor deposition and the articles produced therefrom |
| 09/05/1993 | CA2089274A1 Method for making smooth substrate mandrels for use in fabricating cvd diamond water jet nozzles |
| 09/02/1993 | WO1993017147A1 A method of coating a piezoelectric substrate with a semi-conducting material and a method of producing a droplet ejector arrangement including the coating method |
| 09/02/1993 | WO1993016811A1 Method for depositing a thin film on a semiconductor circuit |
| 09/02/1993 | DE4217328C1 Diamond layer CVD appts. - has closed gas circuit contg. carbon reactor for process gas regeneration |
| 09/01/1993 | EP0557281A1 Halogen-assisted chemical vapor deposition of diamond |
| 08/31/1993 | US5241245 Optimized helical resonator for plasma processing |
| 08/31/1993 | US5240749 Method for growing a diamond thin film on a substrate by plasma enhanced chemical vapor deposition |
| 08/31/1993 | US5240739 Injecting gaseous titanium tetrachloride and silane compound with carrier gas into reactor, heating at low pressure |
| 08/31/1993 | US5240736 Method and apparatus for in-situ measuring filament temperature and the thickness of a diamond film |
| 08/31/1993 | US5240556 Surface-heating apparatus and surface-treating method |
| 08/31/1993 | US5240505 Method of an apparatus for forming thin film for semiconductor device |
| 08/31/1993 | CA2023278C Method to prevent backside growth on substrates in a vapor deposition system |
| 08/29/1993 | CA2087771A1 Preheater for cvd diamond reactor |
| 08/25/1993 | EP0556615A2 Method of making synthetic diamond |
| 08/25/1993 | EP0556517A1 Diamond films |
| 08/25/1993 | EP0556183A1 Textile fiber treatment, devices therefore as well as products obtained with the process. |
| 08/25/1993 | CN1021886C Method and system for vapor extraction from gases |
| 08/24/1993 | US5238866 Hydrogenated silicon carbide from silane and methane; improved blood compatibility |
| 08/24/1993 | US5238710 Microwave energy-assisted chemical vapor infiltration |
| 08/24/1993 | US5238705 Carbonaceous protective films and method of depositing the same |
| 08/24/1993 | US5238499 Gas-based substrate protection during processing |