| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/07/1993 | EP0549801A1 Diamond-covered member and production thereof |
| 07/07/1993 | EP0549585A1 Binder enriched cvd and pvd coated cutting tool |
| 07/07/1993 | EP0549584A1 Cvd and pvd coated cutting tools |
| 07/06/1993 | USH1210 Surface hardening of reprographic machine components by coating or treatment processes |
| 07/06/1993 | US5226067 Coating for preventing corrosion to beryllium x-ray windows and method of preparing |
| 07/06/1993 | US5225926 Durable optical elements fabricated from free standing polycrystalline diamond and non-hydrogenated amorphous diamond like carbon (dlc) thin films |
| 07/06/1993 | US5225659 Method and apparatus for surface treating an axially symmetric substrate at atmosphere pressure |
| 07/06/1993 | US5225561 Source reagent compounds for MOCVD of refractory films containing group IIA elements |
| 07/06/1993 | US5225396 Method for forming an oxide superconducting film |
| 07/06/1993 | US5225378 Preheating second process gas before reacting with the first process gas |
| 07/06/1993 | US5225375 Plasma enhanced chemical vapor processing of semiconductor substrates |
| 07/06/1993 | US5225275 Method of producing diamond films |
| 07/06/1993 | US5225251 Method for forming layers by UV radiation of aluminum nitride |
| 07/06/1993 | US5225245 Chemical vapor deposition method for forming thin film |
| 07/06/1993 | US5224999 Heat treatment apparatus |
| 07/06/1993 | US5224513 Device for introducing reagents into an organometallic vapor phase deposition apparatus |
| 07/06/1993 | US5224441 Apparatus for rapid plasma treatments and method |
| 07/03/1993 | CA2086402A1 Method for manufacturing inorganic membranes by organometallic chemical vapor deposition |
| 07/03/1993 | CA2086388A1 Method for manufacturing inorganic membranes by organometallic chemical vapor infiltration |
| 07/03/1993 | CA2085660A1 Method of producing prestressed diamond composite films by chemical vapor deposition and articles produced therefrom |
| 07/01/1993 | CA2082794A1 Method of preparing uv absorbant and abrasion-resistant transparent plastic articles |
| 06/30/1993 | EP0549207A1 Diamond films |
| 06/30/1993 | EP0549187A1 Diamond films |
| 06/30/1993 | EP0549186A1 Diamond films |
| 06/30/1993 | EP0549034A1 Cathode and method of manufacture |
| 06/30/1993 | EP0548990A2 Chemical vapor deposition method for forming a deposited film with the use of a liquid raw material and apparatus suitable for practising said method |
| 06/30/1993 | EP0548944A1 Chemical vapor deposition method and apparatus making use of liquid starting material |
| 06/30/1993 | EP0548926A1 Apparatus for vaporizing liquid raw material and apparatus for forming thin film |
| 06/30/1993 | EP0548429A1 Method of fabricating lightweight honeycomb type structure |
| 06/30/1993 | EP0548407A1 Tungsten chemical vapor deposition method |
| 06/30/1993 | EP0484449A4 Process and apparatus for coating small solids |
| 06/29/1993 | US5224202 Apparatus for the evaporation of liquids |
| 06/29/1993 | US5223337 Durable cutting tool coated by plasma-activated chemical vapor deposition with carbides, nitrides or carbonitrides of titanium or zirconium with finite chlorine content |
| 06/29/1993 | US5223308 Low temperature plasma enhanced CVD process within tubular members |
| 06/29/1993 | US5223305 Forming dielectric film on semiconductor substrate; applicable to electroluminesce device |
| 06/29/1993 | US5223039 Illuminating apparatus and photo-excited process apparatus using same |
| 06/29/1993 | CA1319587C Metalorganic chemical vapor depositing growth of group ii-vi semiconductor materials having improved compositional uniformity |
| 06/29/1993 | CA1319586C Recovery of lower-boiling silanes in a cvd process |
| 06/29/1993 | CA1319497C Surface-coated cemented carbide and a process for the production of the same |
| 06/27/1993 | WO1993013393A1 Coating composition for glass |
| 06/27/1993 | CA2104592A1 Method for coating glass substrates |
| 06/24/1993 | WO1993012632A1 Method of monitoring atmospheric pressure glow discharge plasma |
| 06/24/1993 | WO1993012546A1 Semiconductor device and microwave process for its manufacture |
| 06/24/1993 | WO1993012538A1 Process for fabricating layered superlattice materials |
| 06/24/1993 | WO1993012470A1 Particles suitable for use as carrier particles in electrophotography |
| 06/24/1993 | WO1993012266A1 Apparatus and method for delivery of involatile reagents |
| 06/24/1993 | DE4142261A1 Coating and infiltration of substrates in a short time - by heating substrate using body which matches the component contour at gas outflow side and opt. gas entry side |
| 06/24/1993 | DE4142202A1 Magnetic recording head with wear resistant head - has surface coated with protective layer having crystalline diamond islands covered by carbon@ layer. |
| 06/24/1993 | CA2125657A1 Apparatus and method for delivery of involatile reagents |
| 06/24/1993 | CA2125479A1 Particles suitable for use as carrier particles in electrophotography |
| 06/23/1993 | EP0547868A1 Apparatus and method for controlling plasma size and position in plasma-activated chemical vapor deposition processes |
| 06/22/1993 | US5222074 Thermal decomposition cell |
| 06/22/1993 | US5221643 Enables deposition of uniform layers at low temperature |
| 06/22/1993 | US5221561 Process for the photochemical treatment of a material using a flash tube light source |
| 06/22/1993 | US5221556 Gas injectors for reaction chambers in CVD systems |
| 06/22/1993 | US5221501 Transparent diamond laminates |
| 06/22/1993 | US5221414 Process and system for stabilizing layer deposition and etch rates while simultaneously maintaining cleanliness in a water processing reaction chamber |
| 06/22/1993 | US5221403 Support table for plate-like body and processing apparatus using the table |
| 06/22/1993 | US5221356 Apparatus for manufacturing semiconductor wafers |
| 06/22/1993 | US5221355 Silicon carbide film forming apparatus |
| 06/22/1993 | US5221354 Apparatus and method for gas phase coating of hollow articles |
| 06/22/1993 | US5221353 Improved tensile strength |
| 06/17/1993 | DE4241932A1 CVD to deliver reaction gas to form film of given compsn. - in which reaction zone is insulated from ambient air and reaction zone is linked to outlet channel |
| 06/17/1993 | DE4140900A1 Als carrier fuer die elektrophotographie geeignete teilchen As a carrier for the electromagnetic photograph suitable particles |
| 06/16/1993 | EP0546921A1 Gas photonanograph for fabrication and optical analysis of nanometer scale patterns |
| 06/16/1993 | EP0546754A1 Method for producing CVD diamond film |
| 06/16/1993 | EP0546752A1 CVD diamond growth on hydride-forming metal substrates |
| 06/16/1993 | EP0546670A1 Metal nitride films |
| 06/16/1993 | EP0546669A1 Preparation of fluorine-doped tungstic oxide and glass coating process |
| 06/16/1993 | EP0546452A1 Coating process using dense phase gas |
| 06/16/1993 | EP0546012A1 Transition metal aluminum/aluminide coatings and method for making them |
| 06/16/1993 | EP0408753B1 Process for forming superconducting thin film |
| 06/15/1993 | US5220044 Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films |
| 06/14/1993 | CA2085025A1 Preparation of fluorine-doped tungstic oxide |
| 06/14/1993 | CA2082729A1 Method for producing cvd diamond film substantially free of thermal stress-induced cracks |
| 06/14/1993 | CA2082728A1 Method for producing flat cvd diamond film |
| 06/14/1993 | CA2082711A1 Cvd diamond growth on hydride-forming metal substrates |
| 06/13/1993 | CA2079629A1 Coating process using dense phase gas |
| 06/10/1993 | WO1993011276A1 Deposition apparatus and methods |
| 06/10/1993 | WO1993011275A1 Process and device for coating substrate bodies with hard substances |
| 06/10/1993 | WO1993011274A1 Process for treating sintered tungsten carbide parts and parts obtained such as cutting tools and wear parts |
| 06/10/1993 | WO1993011273A1 Diamond coated products and method of preparation |
| 06/10/1993 | WO1993011068A1 Conversion of fullerenes to diamond |
| 06/10/1993 | CA2124215A1 Deposition apparatus and methods |
| 06/09/1993 | EP0545748A1 Device for supplying a voltage to a substrate holder |
| 06/09/1993 | EP0545661A2 Substrate stabilization of diffusion aluminide coated nickel-based superalloys |
| 06/09/1993 | EP0545542A1 Apparatus for depositing a material on a substrate by chemical vapour deposition |
| 06/09/1993 | EP0545460A2 CVD process for coating extensive substrates |
| 06/09/1993 | DE4140158A1 Verfahren und vorrichtung zur hartstoffbeschichtung von substratkoerpern Method and device for hard material coating of substratkoerpern |
| 06/08/1993 | US5218232 Semiconductor device having two-level wiring |
| 06/08/1993 | US5217817 Steel tool provided with a boron layer |
| 06/08/1993 | US5217761 Sheet plasma CVD apparatus |
| 06/08/1993 | US5217756 Selective chemical vapor deposition of aluminum, aluminum CVD materials and process for preparing the same |
| 06/08/1993 | US5217755 Injecting gas flow into enclosure containing porous substrate |
| 06/08/1993 | US5217700 Process and apparatus for producing diamond film |
| 06/08/1993 | US5217501 Vertical wafer heat treatment apparatus having dual load lock chambers |
| 06/08/1993 | US5217340 Wafer transfer mechanism in vertical CVD diffusion apparatus |
| 06/04/1993 | CA2084268A1 Metal nitride films |
| 06/03/1993 | DE4138926A1 Prodn. of indium-tin oxide targets in CVD reactor - by depositing thermally decomposable tin and indium cpds. with addn. of oxygen@ onto substrate |
| 06/02/1993 | EP0544438A2 Method for selectively growing gallium-containing layers |