C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes

Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
10/1994
10/25/1994	US5358743 Using an organosilicon compound
10/25/1994	US5358603 Preheating polysilicon discharge tube by insertion of heater, then etching with mineral acid
10/25/1994	US5358596 Method and apparatus for growing diamond films
10/25/1994	CA1332720C Production of polymer-metal compounds and the production of said compounds by discharge in the glow-discharge zones
10/22/1994	CA2120460A1 Plasma polymerization and surface modification inside hollow micro-substrates
10/20/1994	DE4331654C1 Organoarsenido and organophosphido metallanes, preparation thereof and use thereof
10/19/1994	EP0620291A1 High purity bulk chemical delivery system
10/19/1994	EP0620290A1 Process for forming a film on a substrate by reactive sputtering
10/19/1994	EP0586579A4 Window for microwave plasma processing device.
10/18/1994	US5356727 Carbonaceous material with external coating of solid solution of carbon, boron and nitrogen and outer ceramic layer
10/18/1994	US5356722 Depositing first silicon oxide layer doped with nitrogen, depositing second silicon oxide layer
10/18/1994	US5356718 Amorphous; mixed oxides dispersed with elemental phosphorus, aluminum or boron
10/18/1994	US5356673 Evaporation system and method for gas jet deposition of thin film materials
10/18/1994	US5356672 Method for microwave plasma assisted supersonic gas jet deposition of thin films
10/18/1994	US5356661 Heat transfer insulated parts and manufacturing method thereof
10/18/1994	US5356608 Mounting substrate, removing air and moisture, mixing gases of organoaluminum compouns and ammonia to deposit to desire thickness, cooling
10/18/1994	US5356478 Using gas mixture of oxygen and chlorine
10/18/1994	US5356477 Device for providing a substrate with a surface layer from a vapor
10/18/1994	US5356476 Semiconductor wafer processing method and apparatus with heat and gas flow control
10/18/1994	US5356475 Ceramic spacer assembly for ASM PECVD boat
10/18/1994	US5356474 Apparatus and method for making aligned Hi-Tc tape superconductors
10/18/1994	US5356451 Method and apparatus for vaporization of liquid reactants
10/18/1994	US5355832 Forming polymeric material from vaporizable monomers on surface of substrate at low pressure
10/18/1994	US5355637 Abrasive medium
10/13/1994	WO1994023440A1 Reactive dc sputtering system
10/13/1994	WO1994023088A1 Device for producing a plasma polymer protection layer on workpieces, in particular headlamp reflectors
10/13/1994	WO1994023087A1 Method for producing easily releasable diamond sheets by chemical vapor deposition
10/13/1994	DE4311773A1 Process for coating surfaces with soot by means of combustion
10/13/1994	DE4311396A1 Vacuum-coating installation
10/12/1994	EP0619694A1 Method of monitoring atmospheric pressure glow discharge plasma
10/12/1994	EP0619576A2 Optical recording medium and process for manufacturing it
10/12/1994	EP0619450A1 Zero Dead-Leg Gas Cabinet
10/12/1994	EP0619385A1 Process and apparatus to control the content of boron in borophosphosilicates
10/12/1994	EP0619384A1 Method and apparatus for forming structures by chemical vapor deposition
10/12/1994	EP0619383A1 Process and apparatus for supplying metal vapor continuously to a chemical vapor deposition
10/12/1994	EP0619382A1 Hard sintered tool and manufacturing method thereof
10/12/1994	EP0619381A1 Chemical vapor deposition chamber
10/12/1994	EP0619378A1 Diamond reinforced composite material and method of preparing the same
10/12/1994	EP0619282A2 Diamond/carbon/carbon composite useful as an integral dielectric heat sink and method for making same
10/12/1994	CN1093299A Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition
10/11/1994	US5354715 Exposing heated substrate surface to plasma of ozone, oxygen, tetraethyl orthosilicate in chamber at specified pressure
10/11/1994	US5354708 Method of nitrogen doping of II-VI semiconductor compounds during epitaxial growth using an amine
10/11/1994	US5354584 In situ low energy ion doping of materials grown by CVD
10/11/1994	US5354580 Easy separation of material with minimum of post deposition machining
10/11/1994	US5354575 Ellipsometric approach to anti-reflection coatings of semiconductor laser amplifiers
10/11/1994	US5354433 Method for producing a flow of triisobutylaluminum from liquid triisobutylaluminum containing isobutene
10/11/1994	US5354387 Void-free surface resistant to loss of boron in subsequent etching steps
10/11/1994	US5353737 Method for forming boron-doped semiconducting diamond films
10/11/1994	CA1332281C Temperature controlled distributor beam for chemical vapor deposition
10/10/1994	CA2097252A1 Hard sintered tool and manufacturing method thereof
10/05/1994	EP0618628A1 Mechanical sensor
10/05/1994	EP0617997A1 Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition
10/05/1994	EP0353254B1 Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
10/05/1994	EP0348496B1 Chemical vapor deposition of mixed oxide films
10/05/1994	CN1026133C Microwave plasma CVD apparatus for the formation of a large-area functional deposited film
10/05/1994	CN1026132C Process for forming functional zinc oxide film using alkyl zinc compound and oxygen-containing gas
10/04/1994	US5352902 Method for controlling plasma surface-treatments with a plurality of photodetectors and optical filters
10/04/1994	US5352656 Method for the chemical vapor deposition of group IB and group VIIIB metal barrier layers
10/04/1994	US5352636 In situ method for cleaning silicon surface and forming layer thereon in same chamber
10/04/1994	US5352505 Plasma enhanced chemical vapor deposition of oxide film stack
10/04/1994	US5352493 Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
10/04/1994	US5352490 Blowing gas through nozzles at sufficient velocity to remove reacted products and deposit uniform film
10/04/1994	US5352489 Method for manufacturing a rotary anode for X-ray tube
10/04/1994	US5352488 Chemical vapor deposition process employing metal pentadienyl complexes
10/04/1994	US5352487 Process for the formation of SiO2 films
10/04/1994	US5352330 Process for producing nanometer-size structures on surfaces using electron beam induced chemistry through electron stimulated desorption
10/04/1994	US5352294 Alignment of a shadow frame and large flat substrates on a support
10/04/1994	US5352293 Tube apparatus for manufacturing semiconductor device
10/04/1994	US5352261 Apparatus for the production of hermetically coated optical fiber
09/1994
09/29/1994	WO1994021841A1 Method and apparatus for the combustion chemical vapor deposition of films and coatings
09/29/1994	WO1994021840A1 Apparatus and method for delivering reagents in vapor form to a cvd reactor
09/29/1994	WO1994021557A1 Conversion of fullerenes to diamond
09/29/1994	CA2158434A1 Apparatus and method for delivering reagents in vapor form to a cvd reactor
09/28/1994	EP0617462A2 Hydrogen containing amorphous carbon
09/28/1994	EP0617147A2 Diamond crystal forming method
09/28/1994	EP0617143A1 Method and apparatus for continuous coating of metallic material
09/28/1994	EP0617142A1 Preparation of silica thin films
09/28/1994	EP0617141A1 Improved method for growing continuous diamond films
09/28/1994	EP0617140A1 Substrate body of hard alloy with diamond coating of excellent adhesive strength
09/28/1994	EP0616729A1 Semiconductor device and microwave process for its manufacture.
09/28/1994	EP0616723A1 Process for fabricating layered superlattice materials
09/28/1994	EP0616649A1 Apparatus and method for delivery of involatile reagents
09/28/1994	EP0503001B1 Process for chemical vapor deposition of transition metal nitrides
09/28/1994	CN1092820A Apparatus and method for sedimentation of solid material, particularly fine particles and application of same
09/27/1994	US5350720 Silicon nitride, graphite
09/27/1994	US5350545 Chemical vapor infiltration of ceramics, heat exchangers
09/27/1994	US5350454 Plasma processing apparatus for controlling plasma constituents using neutral and plasma sound waves
09/27/1994	US5350453 Device for producing thin films of mixed metal oxides from organic metal compounds on a substrate
09/27/1994	US5349922 Free standing diamond sheet and method and apparatus for making same
09/22/1994	DE4409199A1 Method and device for automatic cleaning of a vacuum metallisation container
09/22/1994	DE4401156A1 Apparatus for simultaneous admission of at least one process gas into a plurality of reaction chambers
09/21/1994	EP0616047A1 Polycrystalline diamond substrate and process for producing the same
09/21/1994	EP0615966A1 Process for making ceramic fiber reinforced metal matrix composite articles
09/21/1994	EP0615552A1 Process and device for coating substrate bodies with hard substances.
09/21/1994	EP0422243B1 Method of forming polycrystalline film by chemical vapor deposition
09/21/1994	EP0368900B1 Improved reaction chambers and methods for cvd
09/20/1994	US5348911 Material-saving process for fabricating mixed crystals
09/20/1994	US5348774 Method of rapidly densifying a porous structure
09/20/1994	US5348765 Method of forming composite articles from CVD gas streams and solid particles or fibers
09/20/1994	US5348631 Method and apparatus for synthesizing lead β-diketonates

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