Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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08/22/1995 | US5443687 Method for manufacturing an ink jet head having an improved discharging port surface |
08/22/1995 | US5443686 Plasma CVD apparatus and processes |
08/22/1995 | US5443662 Iron nitride free surface |
08/22/1995 | US5443649 Silicon carbide carrier for wafer processing in vertical furnaces |
08/22/1995 | US5443648 Vertical heat treatment apparatus with a rotary holder turning independently of a liner plate |
08/22/1995 | US5443647 Method and apparatus for depositing a refractory thin film by chemical vapor deposition |
08/22/1995 | US5443646 Method and apparatus for forming thin film and multilayer film |
08/22/1995 | US5443645 Microwave plasma CVD apparatus comprising coaxially aligned multiple gas pipe gas feed structure |
08/22/1995 | US5443644 Gas exhaust system and pump cleaning system for a semiconductor manufacturing apparatus |
08/22/1995 | US5443455 Guidewire comprising metal core, plasma deposited hydrocarbon residue tie layer, covalently bonded outer polymer coating |
08/22/1995 | US5443033 Semiconductor crystal growth method |
08/22/1995 | CA2074482C Diamond-coated hard material, throwaway insert and a process for the production thereof |
08/17/1995 | WO1995021948A1 Hollow containers with inert or impermeable inner surface through plasma-assisted deposition of a primarily inorganic substance |
08/17/1995 | DE4404690A1 Method of forming two-layer gas and vapour barrier |
08/16/1995 | EP0667043A1 Process for sealing high-temperature fuel cells and fuel cells sealed according to this process. |
08/16/1995 | EP0514384B1 Device for treating substrates in a gas-based plasma produced by microwaves |
08/16/1995 | EP0468996B1 Method for providing a proportioned vapour flow and also apparatus for carrying it out |
08/15/1995 | US5442160 Microwave fiber coating apparatus |
08/15/1995 | US5441893 Method for monitoring the boron content of borophosphosilicate |
08/15/1995 | US5441768 Multi-step chemical vapor deposition method for thin film transistors |
08/15/1995 | US5441766 Method for the production of highly pure copper thin films by chemical vapor deposition |
08/15/1995 | US5441703 Having conicoidal interior contour which homogeneously widens flow of reactant gases |
08/15/1995 | US5441577 Thin film solar cell and production method therefor |
08/15/1995 | US5441570 Apparatus for low pressure chemical vapor deposition |
08/15/1995 | US5441569 Apparatus and method for laser deposition of durable coatings |
08/15/1995 | US5441568 Exhaust baffle for uniform gas flow pattern |
08/15/1995 | US5441013 Method for growing continuous diamond films |
08/15/1995 | US5440887 Liquid vaporizer-feeder |
08/15/1995 | CA1336704C Method of producing sintered hard metal with diamond film |
08/10/1995 | DE4404077A1 Plasma workpiece processing |
08/10/1995 | DE19502103A1 Blow-moulded, sterile, plasma-coated, plastic package |
08/09/1995 | EP0666340A1 Method for in-situ liquid flow rate estimation and verification |
08/09/1995 | EP0666339A1 Method and apparatus for cleaning a throttle valve |
08/09/1995 | EP0666338A1 Method of synthesizing and polishing a flat diamond film |
08/09/1995 | EP0666337A1 Method and apparatus for measuring the deposition rate of opaque films |
08/09/1995 | EP0665903A1 Apparatus for chemical vapour phase deposition activated by a microwave plasma. |
08/09/1995 | EP0665814A1 Precursors and processes for making metal oxides. |
08/09/1995 | CN1106470A Quick growth method of artificial diamond film |
08/09/1995 | CN1106469A Technique for prodn. of artificial diamond scalpel |
08/08/1995 | US5439880 Forming superconducting alloy, oxidizing alloy, shaping |
08/08/1995 | US5439850 Method for forming a layer of uniform thickness on a semiconductor wafer during rapid thermal processing |
08/08/1995 | US5439845 Process for fabricating layered superlattice materials and making electronic devices including same |
08/08/1995 | US5439844 Process for forming deposited film |
08/08/1995 | US5439753 Vapor deposition of diamond like carbon film on a substrate |
08/08/1995 | US5439715 Uniform films; temperature control; semiconductors; electrophotography, electronics |
08/08/1995 | US5439706 Method for manufacturing inorganic membranes by organometallic chemical vapor deposition |
08/08/1995 | US5439705 Encapsulated electroluminescent phosphor and method for making same |
08/08/1995 | US5439552 Process of fabricating an enlongated microstructure element on a substrate |
08/08/1995 | US5439524 Plasma processing apparatus |
08/08/1995 | US5439492 Wear resistance |
08/08/1995 | CA1336559C Refractory composite material and method of making such material |
08/08/1995 | CA1336558C Composite refractory material |
08/03/1995 | WO1995020823A1 Methods for improving semiconductor processing |
08/03/1995 | WO1995020688A1 Plasma modification of lumen surface of artificial tubing |
08/03/1995 | DE19502865A1 Sealed reactor used to produce silicon@ of semiconductor quality |
08/03/1995 | CA2181915A1 Plasma modification of lumen surface of artificial tubing |
08/02/1995 | EP0665577A1 Method and apparatus for monitoring the deposition rate of films during physical vapour deposition |
08/02/1995 | EP0665307A2 Film forming CVD-apparatus and method effected by the same |
08/02/1995 | EP0665306A1 Apparatus and method for igniting plasma in a process module |
08/02/1995 | EP0665305A1 Method of producing layers of silicon carbide and an associated product |
08/02/1995 | EP0665304A1 Method of manufacturing a tube having a film on its inner peripheral surface and apparatus for manufacturing the same |
08/02/1995 | EP0391906B1 Chemical vapor deposition system |
08/02/1995 | CN1029442C Method and system for manufacturing semiconductor devices |
08/01/1995 | US5437895 Intermittent generation the high frequency discharge, applying electrode to vapor deposition |
08/01/1995 | US5437891 Chemical vapor deposition of polycrystalline diamond with <100> orientation and <100> growth facets |
08/01/1995 | US5437728 Apparatus and method for chemical vapor deposition of diamond |
08/01/1995 | US5437725 Device for the continuous coating of a metallic material in motion with a polymer deposition having a composition gradient |
08/01/1995 | US5437542 Positive displacement pump system |
07/27/1995 | WO1995020253A2 Using lasers to fabricate coatings on substrates |
07/27/1995 | WO1995020127A1 Chemical refill system for high purity chemicals |
07/27/1995 | CA2181440A1 Using lasers to fabricate coatings on substrates |
07/26/1995 | EP0664592A1 Semiconductor laser with AlInP or AlGaInP burying layer and fabrication method thereof |
07/26/1995 | EP0664560A2 Method of forming insulating film |
07/26/1995 | EP0664346A1 Apparatus for chemical vapor deposition of diamond |
07/26/1995 | EP0664345A1 Insulating boards and method of manufacturing the same |
07/26/1995 | EP0664344A1 Process for barrier coating of plastic objects |
07/26/1995 | EP0664343A2 Method for improving substrate adhesion in fluoropolymer deposition processes |
07/26/1995 | EP0663963A1 Improvements in the method and apparatus of vacuum deposition |
07/26/1995 | EP0526644B1 Semiconductor manufacturing equipment |
07/25/1995 | US5436200 Increasing the adhesion of tungsten and silicon oxide layer by first forming a silicon layer, then tungsten silicide with tungsten fluoride, reducing to tungsten |
07/25/1995 | US5436071 Cermet cutting tool and process for producing the same |
07/25/1995 | US5436036 Method of synthesizing hard material |
07/25/1995 | US5435889 Preparation and coating of composite surfaces |
07/25/1995 | US5435881 Apparatus for producing planar plasma using varying magnetic poles |
07/25/1995 | US5435880 Plasma processing apparatus |
07/25/1995 | US5435849 Apparatus for plasma deposition |
07/25/1995 | US5435815 Cutting tool employing vapor-deposited polycrystalline diamond for cutting edge and method of manufacturing the same |
07/20/1995 | WO1995019457A1 Oxide coated cutting tool |
07/20/1995 | WO1995019456A1 Method for depositing a film consisting of a metal or semi-metal and an oxide thereof |
07/20/1995 | DE4446992A1 Appts. for depositing layers in gas phase on substrate |
07/19/1995 | EP0663457A1 System for depositing material on a substrate |
07/19/1995 | EP0663456A1 Method of producing coated particles |
07/19/1995 | EP0662868A1 Method for synthesizing diamond and products produced thereby |
07/19/1995 | EP0662025A4 Titanium-nitride and titanium-carbide coated grinding tools and method therefor. |
07/19/1995 | CN1105366A Alkyzin compound and preparation and application of same |
07/18/1995 | US5434110 Methods of chemical vapor deposition (CVD) of tungsten films on patterned wafer substrates |
07/18/1995 | US5434102 Process for fabricating layered superlattice materials and making electronic devices including same |
07/18/1995 | US5434090 Processing chamber for processing semiconductor substrates |
07/18/1995 | US5433977 Enhanced adherence of diamond coatings by combustion flame CVD |
07/18/1995 | US5433975 Deposition of tungsten films from mixtures of tungsten hexafluoride organohydrosilanes and hydrogen |