| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/28/1995 | DE4429422A1 Welding appts. with ceramic coatings |
| 09/28/1995 | DE4410369A1 Plasma priming of light metal useful in electrical, electronics and aircraft industry |
| 09/27/1995 | EP0674337A1 Magnetron sputtering methods and apparatus |
| 09/27/1995 | EP0674335A1 Plasma processing method and plasma processing apparatus |
| 09/27/1995 | EP0674018A1 Method of reproducing dies for extruding ceramic honeycomb structural bodies |
| 09/26/1995 | US5453494 Vapor deposition of metals form complexes |
| 09/26/1995 | US5453304 Method and apparatus for coating glassware |
| 09/26/1995 | US5453303 Low substrate temperature deposition of diamond coatings derived from glassy carbon |
| 09/26/1995 | US5453298 Method for forming H2-permselective oxide membranes |
| 09/26/1995 | US5453233 Vapor deposition on supports and plates |
| 09/26/1995 | US5453124 Programmable multizone gas injector for single-wafer semiconductor processing equipment |
| 09/24/1995 | CA2143777A1 Use of multiple anodes in a magnetron for improving the uniformity of its plasma |
| 09/21/1995 | DE4408947A1 Vacuum treatment installation with a valve arrangement |
| 09/20/1995 | EP0673063A2 Method for forming a silane based boron phosphorous silicate planarization structure |
| 09/20/1995 | EP0673055A1 Method for forming a superhard carbonaceous protective film on articles |
| 09/20/1995 | EP0598762B1 Tool with wear-resistant cutting edge made of cubic boron nitride or polycrystalline cubic boron nitride, a method of manufacturing the tool and its use |
| 09/20/1995 | CN1108805A Method of forming a dielectric and an apparatus therefor |
| 09/19/1995 | US5451435 Method for forming dielectric |
| 09/19/1995 | US5451434 MOCVD process using alkaline earth metal-heptane dionate compounds |
| 09/19/1995 | US5451430 Method for enhancing the toughness of CVD diamond |
| 09/19/1995 | US5451261 Metal film deposition apparatus and metal film deposition method |
| 09/19/1995 | US5451260 Method and apparatus for CVD using liquid delivery system with an ultrasonic nozzle |
| 09/19/1995 | US5451258 Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber |
| 09/19/1995 | CA1337033C Deposition of silicon oxide films using alkylsilane liquid sources |
| 09/14/1995 | WO1995024736A1 High vertical aspect ratio thin film structures |
| 09/14/1995 | WO1995024515A1 An improved module in an integrated delivery system for chemical vapors from liquid sources |
| 09/14/1995 | WO1995024472A1 Microfabricated capsules for isolation of cell transplants |
| 09/14/1995 | WO1995024275A2 Highly abrasion-resistant, flexible coatings for soft substrates |
| 09/14/1995 | WO1995024264A1 Regulation of pyrocarbon coating |
| 09/14/1995 | WO1995024261A1 Microfabricated particle filter |
| 09/14/1995 | CA2184729A1 Regulation of pyrocarbon coating |
| 09/13/1995 | EP0671484A1 Gas flow system for CVD reactor |
| 09/13/1995 | EP0671483A1 Ceramic vapor deposited coating using a steam-containing carrier gas and non-alkoxy silane precursors |
| 09/13/1995 | EP0671482A1 Toughened chemically vapor deposited diamond |
| 09/13/1995 | EP0671481A1 Apparatus and method for chemical vapor deposition of diamond |
| 09/13/1995 | EP0671367A1 Process and apparatus for continuous or semi-continuous coating of spectacle lenses |
| 09/12/1995 | US5449880 Process and apparatus for forming a deposited film using microwave-plasma CVD |
| 09/12/1995 | US5449799 Complexes for copper deposition |
| 09/12/1995 | US5449532 Method of manufacturing silicon substrate |
| 09/12/1995 | US5449531 Method of fabricating oriented diamond films on nondiamond substrates and related structures |
| 09/12/1995 | US5449412 Apparatus and method for controlling plasma size and position in plasma-activated chemical vapor deposition processes |
| 09/12/1995 | US5449411 Microwave plasma processing apparatus |
| 09/12/1995 | US5449410 Plasma processing apparatus |
| 09/12/1995 | US5449294 method for purging and vacuum testing a semiconductor process system |
| 09/12/1995 | CA2057934C Method of fabricating lightweight honeycomb type structure |
| 09/08/1995 | WO1995023652A1 Ion beam process for deposition of highly abrasion-resistant coatings |
| 09/07/1995 | DE4407377A1 Modified reaction chamber for rapid heating system |
| 09/07/1995 | DE4407095A1 Brief plasma-dynamic treatment appts. |
| 09/06/1995 | EP0670666A1 Plasma generating apparatus and plasma processing apparatus |
| 09/06/1995 | EP0670589A1 Method for manufacturing a substrate for manufacturing silicon semiconductor elements |
| 09/06/1995 | EP0670192A1 CVD diamond cutting tools |
| 09/06/1995 | EP0670055A1 Method of deposition. |
| 09/06/1995 | EP0652828A4 Abrasion wear resistant coated substrate product. |
| 09/06/1995 | CN1107901A Alumina coated cutting tool |
| 09/06/1995 | CN1107900A Technology for processing diamond film by hot cathode glow plasma chemical deposition |
| 09/05/1995 | US5447909 Metalorganic chemical vapor deposition of superconducting oxide films |
| 09/05/1995 | US5447908 Protective coating of carbides or nitrides |
| 09/05/1995 | US5447816 Hydrogenated amorphous silicon or silicon carbide, reduced surface wetting for less blurring, electrophotographic |
| 09/05/1995 | US5447804 Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating |
| 09/05/1995 | US5447803 Method for forming titanium nitride film and vessel coated by same |
| 09/05/1995 | US5447799 Polymerization process |
| 09/05/1995 | US5447744 Measuring density, inhibition of by-product boranes |
| 09/05/1995 | US5447570 Purge gas in wafer coating area selection |
| 09/05/1995 | US5447569 MOCVD system for forming superconducting thin films |
| 09/05/1995 | US5447568 Chemical vapor deposition method and apparatus making use of liquid starting material |
| 09/02/1995 | CA2142649A1 Cvd diamond cutting tools |
| 08/31/1995 | WO1995023428A2 Chemical vapor deposition chamber |
| 08/31/1995 | WO1995023155A1 Method for the deposition of nickel and/or nickel oxide from the gas phase, and novel nickel compounds having stable vaporisation characteristics |
| 08/30/1995 | EP0669644A2 Electrostatic chuck |
| 08/30/1995 | EP0669637A1 Plasma process apparatus |
| 08/30/1995 | EP0669408A1 Process for forming diamond coatings |
| 08/30/1995 | EP0669287A1 Method and apparatus for supplying gaseous raw material |
| 08/30/1995 | EP0668938A1 Tool and process for coating a basic tool component. |
| 08/30/1995 | EP0668937A1 Diamond-coated shaped articles and production thereof |
| 08/29/1995 | US5446825 High performance multi-zone illuminator module for semiconductor wafer processing |
| 08/29/1995 | US5445992 Process for forming a silicon carbide film |
| 08/29/1995 | US5445887 Diamond coated microcomposite sintered body |
| 08/29/1995 | US5445699 Processing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support surface |
| 08/29/1995 | US5445677 Apparatus for manufacturing semiconductor and method of manufacturing semiconductor |
| 08/29/1995 | US5445676 Method and apparatus for manufacturing semiconductor devices |
| 08/29/1995 | US5445675 Semiconductor processing apparatus |
| 08/29/1995 | US5445521 Heat treating method and device |
| 08/29/1995 | US5445491 Method for multichamber sheet-after-sheet type treatment |
| 08/29/1995 | US5445106 Method for making high thermal conducting diamond |
| 08/29/1995 | CA2090312C Binder enriched cvd and pvd coated cutting tool |
| 08/24/1995 | WO1995022413A1 Hollow containers with inert or impermeable inner surface through plasma-assisted surface reaction or on-surface polymerization |
| 08/24/1995 | WO1995020253A3 Using lasers to fabricate coatings on substrates |
| 08/24/1995 | DE4412674C1 Method and appts. for vacuum coating in a large coating chamber |
| 08/23/1995 | EP0668608A1 Electrostatic chuck with erosion-resistant electrode connection |
| 08/23/1995 | EP0668607A1 Erosion resistant electrostatic chuck |
| 08/23/1995 | EP0668372A1 Semi-transparent diamond film |
| 08/23/1995 | EP0668371A1 Semi-transparent diamond film |
| 08/23/1995 | EP0667921A1 Microwave apparatus for depositing thin films |
| 08/23/1995 | EP0556183B1 Textile fiber treatment and device therefor' |
| 08/23/1995 | CA2143071A1 Apparatus and method for the controlled delivery of vaporized chemical precursor to an lpcvd reactor |
| 08/22/1995 | US5444259 Plasma processing apparatus |
| 08/22/1995 | US5444217 Rapid thermal processing apparatus for processing semiconductor wafers |
| 08/22/1995 | US5443888 Magnetic recording medium having a carbon protective layer and partially fluorinated alkyl carboxylic acid lubricant layer |
| 08/22/1995 | US5443861 Burning hydrocarbon gases in oxidation resistant atmosphere |
| 08/22/1995 | US5443860 Semiconductor processing |