| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/24/1996 | EP0693574A1 Aluminium oxide coated tool |
| 01/24/1996 | EP0693573A1 Synthesizing diamond film |
| 01/24/1996 | EP0693137A1 Hollow containers with inert or impermeable inner surface through plasma-assisted deposition of a primarily inorganic substance |
| 01/24/1996 | EP0516804B1 Method of depositing a silicon oxide film bonded to a polymer substrate |
| 01/23/1996 | US5487127 Rapid thermal heating apparatus and method utilizing plurality of light pipes |
| 01/23/1996 | US5486423 SiO2 electrets and process of making it |
| 01/23/1996 | US5486380 Apparatus and method for depositing a substance on a rotating surface |
| 01/23/1996 | US5486235 Plasma dry cleaning of semiconductor processing chambers |
| 01/23/1996 | US5485804 Enhanced chemical vapor deposition of diamond and related materials |
| 01/18/1996 | DE19522574A1 Reactor for coating flat substrates |
| 01/17/1996 | EP0692553A1 Vaporization sequence for multiple liquid precursors |
| 01/17/1996 | EP0692138A1 Reactive dc sputtering system |
| 01/17/1996 | EP0585343A4 Primary flow cvd apparatus and method |
| 01/17/1996 | EP0450016B1 Method for preparing vaporized reactants for chemical vapor deposition |
| 01/17/1996 | CN1030722C Process for continuously forming large area functional deposited film by microwave PCVD method and apparatus suitable for practicing same |
| 01/16/1996 | US5484749 Manufacturing method of semiconductor device |
| 01/16/1996 | US5484658 Containing a semiconductor device |
| 01/16/1996 | US5484629 Coating apparatus and method |
| 01/16/1996 | US5484484 Thermal processing method and apparatus therefor |
| 01/16/1996 | US5484468 Cemented carbide with binder phase enriched surface zone and enhanced edge toughness behavior and process for making same |
| 01/16/1996 | CA2021584C Carbonaceous material protected against oxidation by boron carbonitride |
| 01/11/1996 | WO1996000804A1 Apparatus for uniformly heating a substrate |
| 01/11/1996 | WO1996000803A1 Charged particle deposition of electrically insulating films |
| 01/11/1996 | WO1995033082A3 Plasma treatment and apparatus in electronic device manufacture |
| 01/11/1996 | DE4423891A1 Layer structure and method of prodn. for motor vehicle industries |
| 01/11/1996 | DE4423833A1 Organic prepn. layer for coating with hard cover layer |
| 01/11/1996 | DE4212053C1 Metal surgical instrument for HF or laser surgery |
| 01/11/1996 | DE19523181A1 Controlling selected carbon@ doping concn. |
| 01/11/1996 | DE19522372A1 Coating sintered metal carbide substrates with diamond film |
| 01/10/1996 | EP0691715A1 Optical waveguide for fibre-optic amplifier for wavelengths around 1550 nm |
| 01/10/1996 | EP0691420A1 Plasma-inert cover and plasma cleaning process and apparatus employing same |
| 01/10/1996 | EP0691413A2 Diamond reinforced composite material and method of preparing the same |
| 01/10/1996 | EP0691313A1 Precursor for producing SiO2TiO2 |
| 01/10/1996 | EP0665305A4 Method of producing layers of silicon carbide and an associated product. |
| 01/10/1996 | EP0615552B1 Process and device for coating substrate bodies with hard substances |
| 01/09/1996 | US5483084 Diamond covered member and process for producing the same |
| 01/09/1996 | US5482749 Preventing contamination of coated substrate, improving receptivity to silicide coating of first substrate treated after cleaning chamber |
| 01/09/1996 | US5482748 Bbowl shape substrate coated with microwave plasma |
| 01/09/1996 | US5482739 Silicon nitride deposition |
| 01/09/1996 | US5482557 Silicon, silane gases and oxidizing agent |
| 01/06/1996 | CA2153184A1 Method of making synthetic diamond film with reduced bowing |
| 01/06/1996 | CA2153019A1 Single source volatile precursor for sio2 tio2 powders and films |
| 01/04/1996 | WO1996000314A2 Reactor and process for coating flat substrates |
| 01/03/1996 | EP0690666A1 Structure and method for semiconductor processing |
| 01/03/1996 | EP0690487A1 Methods for forming oxide films |
| 01/03/1996 | EP0689619A1 Apparatus and method for delivering reagents in vapor form to a cvd reactor |
| 01/03/1996 | EP0689618A1 Method and apparatus for the combustion chemical vapor deposition of films and coatings |
| 01/03/1996 | EP0632846B1 Arrangement for vacuum coating bulk goods |
| 01/03/1996 | EP0502128B1 Anionically polymerizable monomers, polymers thereof, and use of such polymers in photoresists |
| 01/02/1996 | US5481081 Method and apparatus of synthesizing diamond in vapor phaase |
| 01/02/1996 | US5480687 Vapor deposition |
| 01/02/1996 | US5480686 Process and apparatus for chemical vapor deposition of diamond films using water-based plasma discharges |
| 01/02/1996 | US5480684 Method of reducing carbon incorporation into films produced by chemical vapor deposition involving organometallic precursor compounds |
| 01/02/1996 | US5480678 Apparatus for use with CVI/CVD processes |
| 01/02/1996 | US5480489 Reactor for uniform heating of a substrate |
| 01/02/1996 | US5480488 Apparatus for supplying CVD coating devices |
| 01/02/1996 | US5479875 Microwave plasma vapor deposition, nucleation |
| 01/02/1996 | US5479874 CVD diamond production using preheating |
| 01/02/1996 | CA1337855C Processes for the preparation of polycrystalline diamond films |
| 12/27/1995 | EP0689232A2 Process for deposition of a tungsten layer on a semiconductor wafer |
| 12/27/1995 | EP0689231A2 Process for deposition of a tungsten layer on a semi-conductor wafer |
| 12/27/1995 | EP0688889A1 Method for passivating nickel and iron based superalloy parts |
| 12/27/1995 | EP0688888A2 Apparatus and method for substrate processing |
| 12/27/1995 | EP0688887A1 Wafer processing reactor |
| 12/27/1995 | EP0688305A1 Coatings on glass |
| 12/27/1995 | EP0527133B1 Plasma reaction chamber having conductive diamond-coated surfaces |
| 12/27/1995 | EP0444205B1 Substrate support device for cvd apparatus |
| 12/27/1995 | CN1113965A Method for gas phase synthetizing diamond |
| 12/26/1995 | US5478610 Metalorganic chemical vapor deposition of layered structure oxides |
| 12/26/1995 | US5478608 Plasma assisted chemical vapor deposition in tube having substrate holders with walls which act as liners to confine arc between anode and cathode |
| 12/26/1995 | US5478513 CVD diamond growth on hydride-forming metal substrates |
| 12/26/1995 | US5478400 Apparatus for fabricating semiconductor devices |
| 12/26/1995 | US5478399 Unitary wafer plasma enhanced chemical vapor deposition holding device |
| 12/26/1995 | US5478397 Heat treating device |
| 12/26/1995 | US5478396 Production of high-purity polycrystalline silicon rod for semiconductor applications |
| 12/26/1995 | US5478395 Process for supplying a gas, especially of diborane and silane |
| 12/26/1995 | CA2026958C Methods of and apparatus for coating optical fibers |
| 12/21/1995 | WO1995034698A1 Photo-assigned nitrogen doping of ii-vi semiconductor compounds during epitaxial growth using an amine |
| 12/21/1995 | WO1995034376A1 Surface treatment method by gas jetting and surface treatment device |
| 12/21/1995 | DE4421103A1 Potential guiding electrode for plasma supported thin layer deposition for mfg. electric-electronic thin film components |
| 12/21/1995 | CA2192349A1 Surface treatment method by gas jetting and surface treatment device |
| 12/20/1995 | EP0688045A1 Cleaning method |
| 12/20/1995 | EP0687753A1 A synthesis process of diamond, synthesis apparatus and synthetic diamond |
| 12/20/1995 | EP0687749A1 Apparatus for chemical vapour deposition |
| 12/20/1995 | EP0687748A1 Boron nitride films and process of making same |
| 12/20/1995 | EP0687747A1 Apparatus and method for chemical vapor deposition of diamond |
| 12/20/1995 | EP0687677A1 Stabilization of precursors for thin film deposition |
| 12/19/1995 | US5476694 Decomposing a germanium halogen compound in activation chamber; chemical interaction with second compound containing silicon and hydrogen; excitation |
| 12/19/1995 | US5476693 Method for the deposition of diamond film by high density direct current glow discharge |
| 12/19/1995 | US5476549 Process for an improved laminate of ZnSe and ZnS |
| 12/19/1995 | US5476548 Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring |
| 12/19/1995 | US5476547 Gas feeding device for controlled vaporization of an organometallic compound used in deposition film formation |
| 12/19/1995 | US5476359 Robotically loaded epitaxial deposition apparatus |
| 12/17/1995 | CA2151650A1 Hard, transparent amorphous hydrogenated boron nitride films and process of making same |
| 12/15/1995 | CA2150739A1 Method of depositing a composite diamond coating onto a hard substrate |
| 12/14/1995 | WO1995033868A1 Method and apparatus for low temperature deposition of cvd and pecvd films |
| 12/14/1995 | WO1995033867A1 Method and apparatus for producing thin films |
| 12/14/1995 | WO1995033866A1 Method and apparatus for producing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor |
| 12/14/1995 | WO1995033865A1 Low temperature plasma-enhanced formation of integrated circuits |
| 12/14/1995 | WO1995033864A1 Carbon-coated barrier films whith increased concentration |