Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
05/1996
05/17/1996WO1996014448A1 Method for depositing a hard protective coating
05/15/1996EP0711847A1 Arc assisted CVD method and apparatus
05/15/1996EP0711846A1 Titanium nitride deposited by chemical vapor deposition
05/15/1996EP0711455A1 Shadow clamp
05/15/1996EP0619847B1 Method of coating metal using low temperature plasma and electrodeposition
05/15/1996EP0594676A4 Diamond membranes for x-ray lithography
05/15/1996EP0536394B1 Method of producing polycrystalline silicon rods for semiconductors and thermal decomposition furnace therefor
05/15/1996DE19501733C1 Gas flow distributor
05/15/1996CN1122379A Passivation of metallic product of super alloy based on nickel and iron
05/15/1996CN1122378A Laser chemical gas-phase deposition process of diamond film
05/14/1996US5517594 Thermal reactor optimization
05/14/1996US5516588 Aluminum oxide layer on cutting tools, combustion chamber linings, movable parts
05/14/1996US5516367 Chemical vapor deposition chamber with a purge guide
05/14/1996US5516366 Supply control system for semiconductor process gasses
05/14/1996US5516363 Specially doped precursor solutions for use in methods of producing doped ABO3 -type average perovskite thin-film capacitors
05/14/1996US5516283 Apparatus for processing a plurality of circular wafers
05/14/1996US5515986 Plasma treatment apparatus and method for operating same
05/09/1996WO1996013623A1 Method and apparatus for depositing a substance with temperature control
05/09/1996WO1996013622A1 Platinum aluminide cvd coating method
05/09/1996DE4439924A1 Carbon@ cladding layer for electrostatic spraying
05/09/1996DE4439056A1 Appts. for chemical vapour deposition on fibres
05/09/1996CA2204164A1 Method and apparatus for depositing a substance with temperature control
05/08/1996EP0711100A1 Plasma production device, allowing a dissociation between microwave propagation and absorption zones
05/08/1996EP0710977A1 Surface treatment method and system
05/08/1996EP0630422B1 Process for producing thin films of inorganic oxides of controlled stoichiometry
05/08/1996EP0628091B1 A method of coating a piezoelectric substrate with a semi-conducting material and a method of producing a droplet ejector arrangement including the coating method
05/08/1996CN1121963A Method for forming diamond film
05/07/1996US5514822 Precursors and processes for making metal oxides
05/07/1996US5514453 Method of manufacturing a composite
05/07/1996US5514439 Wafer support fixtures for rapid thermal processing
05/07/1996US5514425 Plasma vapor deposition on bottom of tapered groove, etching undesired film from sidewalls, integrated circuits
05/07/1996US5514410 Pyrocarbon and process for depositing pyrocarbon coatings
05/07/1996US5514276 Permselective hollow fiber fluid separation membranes having plasma-polymerized lumen-side coatings
05/07/1996US5514217 Microwave plasma CVD apparatus with a deposition chamber having a circumferential wall comprising a curved moving substrate web and a microwave applicator means having a specific dielectric member on the exterior thereof
05/02/1996WO1996012831A1 Chemical vapour deposition
05/02/1996DE4438992A1 Method and appts. for application of antistatic transparent surface coatings on electrically insulating products
05/02/1996DE4438777A1 Verfahren zur Herstellung elektrischer Schaltungsträger A process for producing electrical circuit carriers
05/01/1996EP0710055A1 Plasma reactors for processing semi-conductor wafers
05/01/1996EP0709875A1 A processing chamber gas distribution manifold
05/01/1996EP0709489A1 Method and apparatus for vapor phase growth
05/01/1996EP0709488A1 Method and apparatus for thin film growth
05/01/1996EP0709487A1 Aerosol process for the manufacture of planar waveguides
05/01/1996EP0709486A1 Substrate processing reactors
05/01/1996EP0709485A1 Plastic container with barrier coating and process for its production
05/01/1996EP0709484A1 Coated tungsten carbide-based cemented carbide blade member
05/01/1996EP0709483A2 Multilayer material
05/01/1996EP0708983A1 Chemical vapor deposition process for fabricating layered superlattice materials
05/01/1996EP0708688A1 Method for the improved microwave deposition of thin films
05/01/1996CN1121537A Coated hard alloy blade member
04/1996
04/30/1996US5512873 Highly-oriented diamond film thermistor
04/30/1996US5512515 Reacting mixture of tri(or di-)alkyl aluminum compounds, copper complexes and mono-, di- or tri-silanes near heated substrate surface yields smooth, uniform thin film
04/30/1996US5512510 Method of manufacturing amorphous silicon electrophotographic photosensitive member
04/30/1996US5512330 Vaporizing and pyrolyzing dimeric paraxylene to form monomeric paraxylene, polymerizing to form parylene film, upon bombardment with ion beam parylene film is converted into diamond-like carbon coating
04/30/1996US5512320 Batch heating, cooling
04/30/1996US5512318 Surface roughning for improved adhesion of coating and surface
04/30/1996US5512155 Film forming apparatus
04/30/1996US5512102 Microwave enhanced CVD system under magnetic field
04/25/1996WO1996012392A1 Process for manufacturing electrical circuit bases
04/25/1996WO1996012386A1 Thermal reactor optimization
04/25/1996WO1996012055A1 Apparatus for growing metal oxides using organometallic vapor phase epitaxy
04/25/1996WO1996012051A1 Process for separating metal coatings
04/25/1996WO1996012048A2 Conformal titanium-based films and method for their preparation
04/25/1996WO1996011878A1 The combinatorial synthesis of novel materials
04/25/1996WO1996011802A1 Glass coating method and glass coated thereby
04/25/1996WO1996011797A1 Wafer support fixtures for rapid thermal processing
04/25/1996DE4438791A1 Deposition of metal layers on polyimide substrates
04/25/1996CA2203172A1 Process for manufacturing electrical circuit bases
04/25/1996CA2203024A1 Process for plating metal coatings
04/25/1996CA2202387A1 Conformal titanium-based films and method for their preparation
04/25/1996CA2202286A1 The combinatorial synthesis of novel materials
04/25/1996CA2201905A1 Apparatus for growing metal oxides using organometallic vapor phase epitaxy
04/24/1996EP0708478A1 Plasma guard for use in a vacuum process chamber
04/24/1996EP0708477A1 Controlling edge deposition on semiconductor substrates
04/24/1996EP0708065A1 Plasma fluorine resistant polycristalline alumina ceramic material and method of making
04/24/1996EP0708062A1 Pyrolytic coating technique of gaseous precursor compositions
04/24/1996EP0707665A1 Diamond coated body
04/24/1996EP0665903B1 Apparatus for chemical vapour phase deposition activated by a microwave plasma
04/24/1996CN1121303A Spiral wave plasma processing method and device
04/24/1996CN1121260A Production of semiconductor unit
04/23/1996US5510297 Process for uniform deposition of tungsten silicide on semiconductor wafers by treatment of susceptor having aluminum nitride surface thereon with tungsten silicide after cleaning of susceptor
04/23/1996US5510186 Cladding, diamond like carbon and semiconductor layers; hardness; wear resistance
04/23/1996US5510157 Method of producing diamond of controlled quality
04/23/1996US5510155 Method to reduce gas transmission
04/23/1996US5510151 Establishing enclosed film-forming chamber by curving and projecting moving substrate web to form cylindrical wall, feeding raw material gas into resulting space to deposit film on inner face of wall
04/23/1996US5510146 Low pressure process
04/23/1996US5510088 Low temperature plasma film deposition using dielectric chamber as source material
04/23/1996US5510007 Reacting solid precursor material including silicon in electrochemical cell with generated hydrogen ions to form silane, depositing silicon, alloy or compound from silane
04/23/1996US5509189 Method for making an electrochemical cell
04/18/1996WO1996011289A1 Low surface energy coatings
04/18/1996DE19505720C1 Coating a substrate with a film of amorphous, hydrogen-free carbon
04/17/1996EP0707344A2 Semiconductor device using a polysilicium thin film and production thereof
04/17/1996EP0707337A1 Solid annular gas discharge electrode
04/17/1996EP0706425A1 Selective plasma deposition
04/17/1996EP0706318A1 Method of pretreating metal surfaces for subsequent polymer coating
04/17/1996EP0643619B1 Pyrolytic deposition in a fluidized bed
04/17/1996EP0489914B1 Method of forming titanium nitride coating and pan made by this method
04/16/1996US5508368 Ion beam process for deposition of highly abrasion-resistant coatings
04/16/1996US5508092 Abrasion wear resistant coated substrate product
04/16/1996US5508071 CVD diamond coating annulus components and method of their fabrication
04/16/1996US5508067 From a precursor gas mixture of a silane, a nitrogen-containing organosilane and a nitrogen-containing gas under pressure at low temperature