| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 04/16/1996 | US5508066 Method for forming a thin film |
| 04/16/1996 | US5508063 Reacting dihalotrialkoxytantalum compound with methylmetal compound yields trialkyldialkoxytantalum compound, simplicity, efficiency |
| 04/16/1996 | US5507987 Method of making a free-standing diamond film with reduced bowing |
| 04/16/1996 | US5507874 Performing in situ electrical or mechanical removal of contaminant particles in closed chamber while maintaining under controlled subatmospheric environment |
| 04/16/1996 | US5507639 Heat treatment apparatus and method thereof |
| 04/11/1996 | WO1996010659A2 An epitaxial reactor, susceptor and gas-flow system |
| 04/10/1996 | EP0705917A1 Method for making high thermal conducting diamond |
| 04/10/1996 | EP0705916A1 Diamond film structure with high thermal conductivity |
| 04/10/1996 | EP0705915A1 Electron emissive film |
| 04/10/1996 | EP0705914A1 Method for applying aluminum coating to fabricated catalytic exhaust system component |
| 04/10/1996 | EP0705913A1 Method for manufacturing plastic forming dies |
| 04/10/1996 | EP0705350A1 Apparatus and method for depositing diamond and refractory materials |
| 04/10/1996 | EP0705149A1 Method for producing a polymer coating inside hollow plastic articles |
| 04/09/1996 | US5506389 Thermal processing furnace and fabrication method thereof |
| 04/09/1996 | US5506038 Abrasion wear resistant coated substrate product |
| 04/09/1996 | US5505782 Integrated delivery system for chemical vapor from non-gaseous sources for semiconductor proccessing |
| 04/09/1996 | US5505781 Hydrophobic processing apparatus including a liquid delivery system |
| 04/09/1996 | US5505780 High-density plasma-processing tool with toroidal magnetic field |
| 04/09/1996 | US5505779 Integrated module multi-chamber CVD processing system and its method for processing substrates |
| 04/09/1996 | US5505778 Using thermally excited molecular beam to prevent flying of contaminant caused by heating source of sample by hermetic separation of heating source from sample |
| 04/09/1996 | CA2027680C Method and means for controlled-profile coating of glass containers |
| 04/07/1996 | CA2157741A1 Method for applying aluminum coating to fabricated catalytic exhaust system component |
| 04/04/1996 | WO1996010102A1 Composite body, use of this composite body and process for its preparation |
| 04/03/1996 | EP0704885A2 Method of depositing fluorine doped oxide |
| 04/03/1996 | EP0704554A1 Wafer supporting boat |
| 04/03/1996 | EP0704553A1 Electrochemical generation of silane |
| 04/03/1996 | EP0704552A1 Plasma processing method and plasma generator |
| 04/03/1996 | EP0704551A1 Method of processing a substrate in a vacuum processing chamber |
| 04/03/1996 | EP0704549A1 Method for deposition of aluminides containing easily oxidized metals |
| 04/03/1996 | EP0704548A1 Method for cleaning substrate and depositing protective coating |
| 04/03/1996 | EP0511294B1 Heating apparatus for semiconductor wafers or substrates |
| 04/03/1996 | CN1119868A Rare earth compounds and their preparation |
| 04/02/1996 | US5504195 Rare earth metal complexes with beta-diketone ligands and polyether or polyamine compounds; metal oxide precursors |
| 04/02/1996 | US5503963 Process for manufacturing optical data storage disk stamper |
| 04/02/1996 | US5503942 Inorganic skin film |
| 04/02/1996 | US5503913 Tool with wear-resistant cutting edge made of cubic boron nitride or polycrystalline cubic boron nitride, a method of manufacturing the tool and its use |
| 04/02/1996 | US5503881 Method of processing a semiconductor wafer |
| 04/02/1996 | US5503875 Film forming method wherein a partial pressure of a reaction byproduct in a processing container is reduced temporarily |
| 04/02/1996 | US5503874 Alternated coating an aluminum layer from aluminum alkyl halide precursor and a metal oxide layer from metal beta diketonate precursor, heating to diffuse, reacting with metal substrate |
| 04/02/1996 | US5503678 Vertical low pressure CVD apparatus with an adjustable nozzle |
| 04/02/1996 | US5503677 Process and device for coating the inner surface of greatly arched, essentially dome-shaped substrates by CVD |
| 04/02/1996 | US5503676 Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber |
| 04/02/1996 | US5503650 Method for producing a glass thin film with controlloing an oxide vapor of an additive |
| 04/02/1996 | CA1338202C Chemical vapor deposition of oxide films containing alkaline earth metals from metal-organic sources |
| 03/28/1996 | WO1996009641A1 Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber |
| 03/28/1996 | DE4434428A1 Verbundkörper, Verwendung dieses Verbundkörpers und Verfahren zu seiner Herstellung Composite body using this composite and process for its preparation |
| 03/28/1996 | DE19530318A1 Magnetic recording media prodn. |
| 03/27/1996 | EP0703187A2 Method and apparatus for generating ozone and methods of its use |
| 03/26/1996 | US5502442 Method of forming a durable wideband anti-reflection coating for infrared windows |
| 03/26/1996 | US5502381 Stress sensor using magnetostriction thin film |
| 03/26/1996 | US5502227 Liquid indium source |
| 03/26/1996 | US5502001 Method of forming light beam and method of fabricating semiconductor integrated circuits |
| 03/26/1996 | US5501909 Polycrystalline diamond substrate and process for producing the same |
| 03/26/1996 | US5501877 Patterned deposition of thin films |
| 03/26/1996 | US5501870 Method and apparatus for hydrophobic treatment |
| 03/26/1996 | US5501740 Microwave plasma reactor |
| 03/26/1996 | US5501739 Apparatus and method for forming thin film |
| 03/21/1996 | WO1996008587A1 Tantalum and niobium reagents useful in chemical vapor deposition processes, and process for depositing coatings using the same |
| 03/21/1996 | DE4432813A1 Chemical-vapour-deposition of monocrystal silicon-carbide film |
| 03/20/1996 | EP0702392A2 Plasma reactor |
| 03/20/1996 | EP0702098A1 Corrosion-resistant aluminum article for semiconductor processing equipment |
| 03/19/1996 | US5500539 Method of depositing diamond and diamond light emitting device |
| 03/19/1996 | US5500388 Heat treatment process for wafers |
| 03/19/1996 | US5500256 Dry process apparatus using plural kinds of gas |
| 03/19/1996 | US5500249 Uniform tungsten silicide films produced by chemical vapor deposition |
| 03/19/1996 | US5500047 Apparatus for adsorbing atomic hydrogen on surface |
| 03/19/1996 | US5499602 Apparatus for manfuacturing a semiconductor layer using rapid thermal processing |
| 03/19/1996 | US5499601 Method for vapor phase synthesis of diamond |
| 03/14/1996 | WO1996007771A1 Process for depositing pyrocarbon coatings in a fluidized bed |
| 03/14/1996 | WO1996007661A1 Formation of a metalorganic compound for growing epitaxial semiconductor layers |
| 03/14/1996 | WO1996007660A1 Metalorganic compounds |
| 03/13/1996 | EP0701273A2 Process for sputtering silicides in the fabrication of high-density integrated circuits |
| 03/13/1996 | EP0701006A1 Diamond-coated composite cutting tool and method of making |
| 03/13/1996 | EP0700720A1 Plastic articles of reduced gas transmission and method therefor |
| 03/13/1996 | CN1118587A Safety document and process for producing the same |
| 03/12/1996 | US5498768 Process for forming multilayer wiring |
| 03/12/1996 | US5498758 Stearic acid |
| 03/12/1996 | US5498446 Method and apparatus for producing high purity and unagglomerated submicron particles |
| 03/12/1996 | US5498442 Fluidized bed reactor and method for forming a metal carbide coating on a substrate containing graphite or carbon |
| 03/12/1996 | US5498292 Heating device used for a gas phase growing mechanism or heat treatment mechanism |
| 03/12/1996 | US5498291 Arrangement for coating or etching substrates |
| 03/12/1996 | US5497727 Cooling element for a semiconductor fabrication chamber |
| 03/07/1996 | WO1996007071A1 Rapid thermal processing apparatus and method |
| 03/07/1996 | WO1996006958A1 Hydrogen fluoride dopant source in the preparation of conductive coated substrate |
| 03/07/1996 | DE4430777A1 Refuse chute for refuse drums or dust bins with closable inlet and outlet with lock |
| 03/06/1996 | EP0699777A1 Method and apparatus of forming thin films |
| 03/06/1996 | EP0699776A1 Wafer and method of producing a wafer |
| 03/06/1996 | CN1118175A Knitting parts for knitting machine and surface coating method therefor |
| 03/05/1996 | US5496674 Magnetic core with molybdenum oxide or tungsten oxide shells for electrophotographic process |
| 03/05/1996 | US5496638 Diamond tools for rock drilling, metal cutting and wear part applications |
| 03/05/1996 | US5496596 Vapor deposition, void-free |
| 03/05/1996 | US5496595 Method for forming film by plasma CVD |
| 03/05/1996 | US5496594 Chemical vapor deposition apparatus and method wherein a corona discharge is generated inside a perforated cage which surrounds the substrate |
| 03/05/1996 | US5496586 Chemical vapor deposition of a coating from reaction gases |
| 03/05/1996 | US5496583 Hydrogen fluoride dopant source in the preparation of conductive coated substrate |
| 03/05/1996 | US5496582 Including luminescent layer comprising host material to which luminescent center element is added; forming host material by chemical vapor deposition to react gas of cyclopentadienyl alkaline earth compound with gas of group 6a compound |
| 03/05/1996 | US5496410 Plasma processing apparatus and method of processing substrates by using same apparatus |
| 03/05/1996 | US5496409 Particle contamination apparatus for semiconductor wafer processing |
| 03/05/1996 | US5496408 Mass flow controllers, vapor deposition onto semiconductor substrates |
| 02/29/1996 | WO1996006453A1 Electric lamp coated with an interference film |