| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 10/02/1996 | DE19600946A1 Verfahren zur Verbesserung der Qualität einer Titannitridschicht, die Kohlenstoff und Sauerstoff enthält Includes methods for improving the quality of a titanium nitride layer, the carbon and oxygen |
| 10/02/1996 | DE19547017A1 Selective face growth of cpd. semiconductor layer |
| 10/02/1996 | DE19513614C1 Bipolar pulsed plasma CVD of carbon@ layer on parts with complicated geometry |
| 10/02/1996 | DE19512323A1 Operating element for welding unit, esp. electrode holder or nozzle |
| 10/02/1996 | CN1132407A Surface treatment method and system |
| 10/02/1996 | CN1132267A Method of growing diamond film on large area of monocrystalline silicon |
| 10/01/1996 | US5561735 Rapid thermal processing apparatus and method |
| 10/01/1996 | US5561682 Semiconductor optical device and method for fabricating the same |
| 10/01/1996 | US5561612 For presetting and controlling a lamp heating system |
| 10/01/1996 | US5561087 Variations in temperature between central and edges portions |
| 10/01/1996 | US5560839 Etching to selectively remove portion of cobalt binder, cleaning surface, etching in second solution to remove surface carbide grains, cleaning, depositing diamond film |
| 10/01/1996 | US5560779 Apparatus for synthesizing diamond films utilizing an arc plasma |
| 10/01/1996 | US5560778 Apparatus for forming a dielectric layer |
| 10/01/1996 | US5560777 Apparatus for making a semiconductor |
| 09/26/1996 | WO1996029728A1 Integrated circuits having mixed layered superlattice materials and precursor solutions for use in a process of making the same |
| 09/26/1996 | WO1996029726A1 Uv radiation process for making electronic devices having low-leakage-current and low-polarization fatigue |
| 09/26/1996 | WO1996029446A1 Chemical vapor deposition of levitated objects |
| 09/26/1996 | WO1996029445A1 Chemical vapor deposition of rhenium on carbon substrates |
| 09/26/1996 | WO1996029441A2 High growth rate homoepitaxial diamond film deposition at high temperatures by microwave plasma-assisted chemical vapor deposition |
| 09/26/1996 | DE19545050A1 Plasma-aided layer pptn. of functional layers on substrate |
| 09/26/1996 | CA2214833A1 Integrated circuits having mixed layered superlattice materials and precursor solutions for use in a process of making the same |
| 09/26/1996 | CA2214563A1 Uv radiation process for making electronic devices having low-leakage-current and low-polarization fatigue |
| 09/25/1996 | EP0734064A2 Material for forming wiring layer and wiring forming method |
| 09/25/1996 | EP0734053A1 Improvements in or relating to electrostatic chucks for holding substrates in process chambers |
| 09/25/1996 | EP0734052A1 Improvements in or relating to electrostatic holding systems for holding substrates in processing chambers |
| 09/25/1996 | EP0733723A1 Thermal barrier coating system |
| 09/25/1996 | EP0733721A1 Process and apparatus for producing oxide films and chemical vapor deposition |
| 09/25/1996 | EP0733130A1 Apparatus for heating or cooling wafers |
| 09/25/1996 | EP0605703A4 Methods and apparatus for externally treating a container with application of internal bias gas. |
| 09/25/1996 | EP0601166A4 Methods and apparatus for depositing barrier coatings. |
| 09/25/1996 | EP0576559B1 Interfacial plasma bars for photovoltaic deposition apparatus |
| 09/24/1996 | US5559260 Precursors and processes for making metal oxides |
| 09/24/1996 | US5558946 Multilayered thin ferroelectric film |
| 09/24/1996 | US5558910 Uniform tungsten silicide films produced by chemical vapor deposition |
| 09/24/1996 | US5558789 Method of applying a laser beam creating micro-scale surface structures prior to deposition of film for increased adhesion |
| 09/24/1996 | US5558722 Plasma processing apparatus |
| 09/24/1996 | US5558721 Vapor phase growth system and a gas-drive motor |
| 09/24/1996 | US5558719 Plasma processing apparatus |
| 09/24/1996 | US5558717 CVD Processing chamber |
| 09/24/1996 | US5558687 Vertical, packed-bed, film evaporator for halide-free, silicon-containing compounds |
| 09/19/1996 | WO1996028587A1 Plasma chamber |
| 09/19/1996 | WO1996028586A1 Plasma enhanced chemical vapor deposition of titanium nitride using ammonia |
| 09/19/1996 | WO1996028585A1 Showerhead discharge assembly for delivery of source reagent vapor to a substrate, and cvd process |
| 09/19/1996 | WO1996028270A1 Guide bush and method for forming a hard carbon film on an internal circumferential surface of said bush |
| 09/19/1996 | DE19510853A1 Semiconductor prodn. esp. gas phase epitaxy appts. |
| 09/18/1996 | EP0732732A2 Method of removing native silicon oxide by sputtering |
| 09/18/1996 | EP0732429A1 Method of growing multilayer crystal films by metal organic vapor phase epitaxy |
| 09/18/1996 | EP0732422A2 Ferroelectric thin-film coated substrate, method for its manufacture and nonvolatile memory comprising such a substrate |
| 09/18/1996 | EP0732421A1 Method of making a graphite system |
| 09/18/1996 | EP0731975A1 Stacked-type component and method for the manufacture of same |
| 09/18/1996 | EP0731974A1 Method for the manufacture of a capacitor and capacitor obtained |
| 09/18/1996 | EP0731909A1 Sensors employing interference of electromagnetic waves passing through waveguides having functionalized surfaces |
| 09/18/1996 | EP0731751A1 Diamond-coated tools and process for making |
| 09/18/1996 | CN1131204A Deposited film forming apparatus and electrode for use in it |
| 09/17/1996 | US5556530 Flat panel display having improved electrode array |
| 09/17/1996 | US5556501 Silicon scavenger in an inductively coupled RF plasma reactor |
| 09/17/1996 | US5556476 Controlling edge deposition on semiconductor substrates |
| 09/17/1996 | US5556475 Microwave plasma reactor |
| 09/17/1996 | US5556474 Plasma processing apparatus |
| 09/17/1996 | US5556473 Poly-p-xylylene |
| 09/17/1996 | US5556275 Heat treatment apparatus |
| 09/17/1996 | US5556204 Method and apparatus for detecting the temperature of a sample |
| 09/12/1996 | WO1996027690A1 Method and apparatus for plasma deposition on a double-sided substrate |
| 09/12/1996 | DE19507206A1 Flexible prodn. of microstructures on large surfaces |
| 09/11/1996 | EP0731497A2 Diluted nitrogen trifluoride thermal cleaning process |
| 09/11/1996 | EP0731493A2 Method for formation of a polycrystalline semiconductor film |
| 09/11/1996 | EP0731190A1 Process for the formation of carbon coatings |
| 09/11/1996 | EP0730679A1 An epitaxial reactor, susceptor and gas-flow system |
| 09/11/1996 | EP0730671A1 Method and device for feeding precursors into a chemical vapour deposition chamber |
| 09/11/1996 | EP0730670A1 Coated body, its method of production and its use |
| 09/11/1996 | EP0730564A1 Method for densifying a porous structure using boron nitride, and porous structure densified with boron nitride |
| 09/11/1996 | EP0616729B1 Semiconductor device and microwave process for its manufacture |
| 09/11/1996 | CN1130924A Method of depositing thin group III A metal films |
| 09/11/1996 | CN1130561A Method for manufacturing plastic forming dies |
| 09/11/1996 | CN1032769C Depositing device by chemical and gas phase process with dual direct current plasma |
| 09/11/1996 | CN1032768C Low temp. deposition fine-particle diamond film by microwave method |
| 09/10/1996 | US5555154 CVD Raw Material for oxide-system dielectric thin film and capacitor produced by CVD method using the CVD raw material |
| 09/10/1996 | US5554570 Method of forming insulating film |
| 09/10/1996 | US5554418 Method of forming passivation film |
| 09/10/1996 | US5554415 Vaporization with lasers; coating |
| 09/10/1996 | US5554257 Cleaning or etching semiconductors by reacting gases in vacuum; explosion, combustion, projecting |
| 09/10/1996 | US5554255 Method of and apparatus for a direct voltage arc discharge enhanced reactive treatment of objects |
| 09/10/1996 | US5554249 Magnetron plasma processing system |
| 09/10/1996 | US5554226 Heat treatment processing apparatus and cleaning method thereof |
| 09/10/1996 | US5554222 Ionization deposition apparatus |
| 09/10/1996 | US5554220 Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities |
| 09/10/1996 | US5553395 Bubbler for solid metal organic source material and method of producing saturated carrying gas |
| 09/06/1996 | WO1996027032A1 Chemical vapor deposition utilizing a precursor |
| 09/04/1996 | EP0730298A2 A dielectric, a manufacturing method thereof, and semiconductor device using the same |
| 09/04/1996 | EP0730266A2 Apparatus for plasma-processing a disk substrate and method of manufacturing a magnetic disk |
| 09/04/1996 | EP0730048A1 Method for vapor-phase growth of single crystal silicon |
| 09/04/1996 | EP0730044A2 Boron-aluminum nitride coating and method of producing same |
| 09/04/1996 | EP0730043A1 Multilayer system comprising a diamond layer, an interphase and a metallic substrate |
| 09/04/1996 | EP0729394A1 Making quantum dot particles of uniform size |
| 09/04/1996 | EP0668938B1 Tool and process for coating a basic tool component |
| 09/03/1996 | US5552675 High temperature reaction apparatus |
| 09/03/1996 | US5552220 Thermostructural composite materials |
| 09/03/1996 | US5552181 Method for supplying liquid material and process for forming thin films using the liquid material supplying method |
| 09/03/1996 | US5552124 Stationary focus ring for plasma reactor |
| 09/03/1996 | US5552027 Working electrode for electrochemical enzymatic sensor systems |