| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
|---|
| 05/06/1997 | US5626679 Method and apparatus for preparing a silicon oxide film |
| 05/06/1997 | US5626677 Atmospheric pressure CVD apparatus |
| 05/02/1997 | EP0770704A1 Method of producing thin film |
| 05/02/1997 | EP0770703A2 A seal and a chamber having a seal |
| 05/02/1997 | EP0770702A1 Process for increasing the corrosion-resistance of TiAl based alloys |
| 05/02/1997 | EP0770265A1 Integrated circuit capacitors and process for making the same |
| 05/02/1997 | EP0769980A1 Membrane reparation and pore size reduction using interfacial ozone assisted chemical vapor deposition |
| 05/02/1997 | EP0663963A4 Improvements in the method and apparatus of vacuum deposition. |
| 05/02/1997 | EP0648215B1 Process for the preparation of trialkyl compounds of group 3a metals |
| 05/01/1997 | WO1997015699A2 Method and apparatus for the deposition of parylene af4 onto semiconductor wafers |
| 05/01/1997 | WO1997015698A1 Gas injection system for semiconductor processing |
| 05/01/1997 | WO1997015411A1 Anchored oxide coatings on hard metal cutting tools |
| 04/30/1997 | DE19640247A1 Gas distribution control system in a chemical vapour coating process |
| 04/29/1997 | US5624720 Process for forming a deposited film by reacting between a gaseous starting material and an oxidizing agent |
| 04/29/1997 | US5624719 Process for synthesizing diamond in a vapor phase |
| 04/29/1997 | US5624718 Diamond-like carbon based electrocatalytic coating for fuel cell electrodes |
| 04/29/1997 | US5624707 Method of forming ABO3 films with excess B-site modifiers |
| 04/29/1997 | US5624499 CVD apparatus |
| 04/29/1997 | US5624498 Showerhead for a gas supplying apparatus |
| 04/29/1997 | US5624068 Diamond tools for rock drilling, metal cutting and wear part applications |
| 04/24/1997 | WO1997014555A1 Diamond-like nanocomposite thin films for automotive powertrain component coatings |
| 04/24/1997 | WO1997008356A3 Modified metalorganic chemical vapor deposition of group III-V thin layers |
| 04/24/1997 | DE19635848C1 Simple application of firmly-adhering, heat-resistant layer containing silicon, by CVD |
| 04/23/1997 | EP0769571A1 Method for low temperature aluminum coating of an article |
| 04/23/1997 | EP0769570A1 Method of regenerating extrusion die for ceramic honeycomb structural bodies |
| 04/23/1997 | EP0769079A1 Apparatus for uniformly heating a substrate |
| 04/23/1997 | CN1148105A Plasma etching apparatus utilizing plasma confinement |
| 04/23/1997 | CN1148100A Oxide coated cutting tool with increased wear resistance |
| 04/23/1997 | CN1147983A Mold for pressing and molded glass substrate for computer memory by using it |
| 04/22/1997 | US5622750 Reacting aerosol of liquid droplets by passing through a flame to form particles, depositing on substrate, sintering, finishing |
| 04/22/1997 | US5622639 Heat treating apparatus |
| 04/22/1997 | US5622635 Method for enhanced inductive coupling to plasmas with reduced sputter contamination |
| 04/22/1997 | US5622606 Gas inlet arrangement |
| 04/22/1997 | US5622593 Plasma processing apparatus and method |
| 04/22/1997 | US5622566 Semiconductors |
| 04/22/1997 | US5622565 Reduction of contaminant buildup in semiconductor apparatus |
| 04/17/1997 | WO1997014180A1 Semiconductor processing using vapor mixtures |
| 04/17/1997 | WO1997014172A1 Method and apparatus for plasma processing |
| 04/17/1997 | WO1997013892A1 Improved method for the preparation of nanocrystalline diamond thin films |
| 04/17/1997 | WO1997013886A1 Method for deposition of diamondlike carbon films |
| 04/17/1997 | WO1997013802A1 Coated plastic substrate |
| 04/17/1997 | WO1997013646A1 Cleaning method |
| 04/16/1997 | EP0768702A1 Gas injection slit nozzle for a plasma process reactor |
| 04/16/1997 | EP0768525A2 System for monitoring chamber exit gases by means of absorption spectroscopy, and semiconductor processing system incorporating the same |
| 04/16/1997 | EP0768523A2 Method and system for sensitive detection of molecular species in a vacuum by harmonic spectroscopy |
| 04/16/1997 | EP0768521A1 Polygonal planar multipass cell, system and apparatus including same, and method of use |
| 04/16/1997 | EP0768389A1 Pyrolytic boron nitride compact and method of manufacture |
| 04/16/1997 | EP0768388A2 Method and apparatus for forming amorphous carbon film |
| 04/16/1997 | EP0682718B1 METHOD OF MAKING CVD Si3N4 |
| 04/16/1997 | CN1147693A Plasama processing method and apparatus |
| 04/15/1997 | US5620754 Method of treating and coating substrates |
| 04/15/1997 | US5620745 Method for coating a substrate with diamond film |
| 04/15/1997 | US5620743 Coating or surface treatment of solid particles by means of a plasma fluidized bed |
| 04/15/1997 | US5620739 Thin film capacitors on gallium arsenide substrate and process for making the same |
| 04/15/1997 | US5620615 Method of etching or removing W and WSix films |
| 04/15/1997 | US5620526 Step-wise etching process with nitrogen trifluoride |
| 04/15/1997 | US5620525 Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate |
| 04/15/1997 | US5620524 Apparatus for fluid delivery in chemical vapor deposition systems |
| 04/15/1997 | US5620521 Method for surface treatment |
| 04/15/1997 | US5620512 Diamond film growth from fullerene precursors |
| 04/13/1997 | CA2185203A1 Method and apparatus for forming amorphous carbon thin film by plasma chemical vapor deposition |
| 04/10/1997 | WO1997012757A1 Method for preserving precision edges using diamond-like nanocomposite film |
| 04/10/1997 | DE19603127C1 Vaporiser for semi-conductor production |
| 04/10/1997 | CA2233671A1 Method for preserving precision edges using diamond-like nanocomposite film |
| 04/09/1997 | EP0767254A1 Method and apparatus for cleaning a vacuum line in a CVD system |
| 04/09/1997 | EP0767001A1 Surface treatment method by gas jetting and surface treatment device |
| 04/09/1997 | EP0570484B1 System for generating a high density plasma |
| 04/09/1997 | CN1147026A Method of cleaning vacuum processing apparatus |
| 04/09/1997 | CN1147024A Liquid methyltin halide compositions |
| 04/08/1997 | US5618758 High energy electrodeposition to inhibit polysilane formation |
| 04/08/1997 | US5618625 CVD diamond coated cutting tools and method of manufacture |
| 04/08/1997 | US5618619 Coating comprises carbon, silicon, hydrogen, oxygen; formed by plasma deposition using organosiloxanes or organosilazanes and oxygen |
| 04/08/1997 | US5618580 Method for producing ceramic fine particles and apparatus used therefor |
| 04/08/1997 | US5618579 Process for the vapor deposition of a metal nitride-based layer on a transparent substrate |
| 04/08/1997 | US5618395 Method of plasma-activated reactive deposition of electrically conducting multicomponent material from a gas phase |
| 04/08/1997 | US5618350 Processing apparatus |
| 04/08/1997 | US5618349 Thermal treatment with enhanced intra-wafer, intra-and inter-batch uniformity |
| 04/03/1997 | WO1997012502A1 Methods and apparatus for generating plasma |
| 04/03/1997 | WO1997012075A1 Method and apparatus for deposition of diamond-like carbon on drills |
| 04/03/1997 | WO1996041036A3 Method and apparatus for silicon deposition in a fluidized-bed reactor |
| 04/03/1997 | DE19604461C1 Coating substrate surface having microelectronic structures |
| 04/02/1997 | EP0766338A1 Multicontact for window antenna |
| 04/02/1997 | EP0766304A2 Method for coating heterogeneous substrates with homogeneous layers |
| 04/02/1997 | EP0766291A1 Integrated circuit insulator and method |
| 04/02/1997 | EP0766289A2 Susceptor for deposition apparatus |
| 04/02/1997 | EP0765845A1 Method for vapor filtration of impurities during optical fiber preform manufacture |
| 04/02/1997 | EP0733130A4 Apparatus for heating or cooling wafers |
| 04/02/1997 | EP0330679B2 Sialon cutting tool composition |
| 04/02/1997 | CN1146428A Method for production of coated silicon carbide fibre and reactor thereof |
| 04/01/1997 | US5616754 Organo disilazane or trisilazane chemical intermediates |
| 04/01/1997 | US5616518 Process for fabricating integrating circuits |
| 04/01/1997 | US5616374 Method for deposition of amorphous hard carbon films |
| 04/01/1997 | US5616373 Electrodepositing by gas discharges |
| 04/01/1997 | US5616369 Vapor deposition of silicon oxide film by reacting organosilicon compounds and oxygen plasma in an evacuated chamber |
| 04/01/1997 | US5616264 Method and apparatus for controlling temperature in rapid heat treatment system |
| 04/01/1997 | US5616225 Use of multiple anodes in a magnetron for improving the uniformity of its plasma |
| 04/01/1997 | US5616208 Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus |
| 04/01/1997 | US5616179 Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films |
| 04/01/1997 | US5616024 Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles |
| 03/27/1997 | WO1997011587A1 Method and device for measuring ion flow in a plasma |