| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
|---|
| 08/12/1997 | US5656329 Surface-mediated reaction between two precursors releases a volatile ester and deposits an intermediate compound film; annealing; crystallization; perovskite-phase film |
| 08/12/1997 | US5656123 Dual-frequency capacitively-coupled plasma reactor for materials processing |
| 08/12/1997 | US5656122 Shadow clamp |
| 08/06/1997 | EP0788148A1 Method of producing semiconductor device |
| 08/06/1997 | EP0787839A1 Process for calibrating the temperature of an epitaxy reactor |
| 08/06/1997 | EP0787828A2 Apparatus and method for plasma processing |
| 08/06/1997 | EP0787827A2 Blood collection tube assembly |
| 08/06/1997 | EP0787826A1 Blood collection tube assembly |
| 08/06/1997 | EP0787825A1 Blood collection tube assembly |
| 08/06/1997 | EP0787824A2 Non-Ideal Barrier coating sequence composition |
| 08/06/1997 | EP0787823A2 Blood collection tube assembly |
| 08/06/1997 | EP0787822A1 Process and apparatus for producing SiC by CVD with improved gas consumption |
| 08/06/1997 | EP0787821A2 Blood collection tube assembly |
| 08/06/1997 | EP0787820A2 Methods of preparing cutting tool substrates for coating with diamond and products resulting therefrom |
| 08/06/1997 | EP0787683A1 Titanium nitride substituted with boron, coating based on this new compound of a substrate and shaped bodies comprising such a coating |
| 08/06/1997 | EP0787224A1 Process for separating metal coatings |
| 08/06/1997 | EP0787223A1 Chemical vapour deposition |
| 08/06/1997 | EP0787222A1 Method for depositing a hard protective coating |
| 08/06/1997 | EP0787221A1 Platinum aluminide cvd coating method |
| 08/06/1997 | EP0787220A1 Packing element, in particular for shutting-off and regulating means, and process for producing the same |
| 08/06/1997 | EP0663023B1 Heteroepitaxially deposited diamond |
| 08/05/1997 | US5654904 Control and 3-dimensional simulation model of temperature variations in a rapid thermal processing machine |
| 08/05/1997 | US5654456 Precursors and processes for making metal oxides |
| 08/05/1997 | US5654059 Fiber-reinforced carbon and graphite articles and method for the production thereof |
| 08/05/1997 | US5654044 Diamond film deposition on graphite |
| 08/05/1997 | US5654035 Method of coating a body with an α-alumina coating |
| 08/05/1997 | US5653813 For vapor deposition chamber |
| 08/05/1997 | US5653812 Method and apparatus for deposition of diamond-like carbon coatings on drills |
| 08/05/1997 | US5653811 System for the plasma treatment of large area substrates |
| 08/05/1997 | US5653810 Apparatus for forming metal film and process for forming metal film |
| 08/05/1997 | US5653808 Gas injection system for CVD reactors |
| 08/05/1997 | US5653807 Low temperature vapor phase epitaxial system for depositing thin layers of silicon-germanium alloy |
| 08/05/1997 | US5653806 Showerhead-type discharge assembly for delivery of source reagent vapor to a substrate, and CVD process utilizing same |
| 08/05/1997 | US5653803 Method of manufacturing a substrate for manufacturing silicon semiconductor elements |
| 07/31/1997 | WO1997027346A1 Misted precursor deposition method and apparatus with uv radiation applied to mist |
| 07/31/1997 | WO1997027345A1 Process for producing wear-resistant boride layers on metal material surfaces |
| 07/31/1997 | WO1997027002A1 Application of diamond-like carbon coatings to cobalt-cemented tungsten carbide components |
| 07/31/1997 | DE19603093A1 Rod electrode with corrosion protection layer |
| 07/31/1997 | DE19602639A1 Verfahren zur Herstellung von verschleißfesten Boridschichten auf metallischen Werkstoffoberflächen A process for producing wear-resistant boride layers on metallic material surfaces |
| 07/31/1997 | CA2194636A1 Blood collection tube assembly |
| 07/31/1997 | CA2194634A1 Blood collection tube assembly |
| 07/31/1997 | CA2194633A1 Blood collection tube assembly |
| 07/31/1997 | CA2194632A1 Blood collection tube assembly |
| 07/31/1997 | CA2194318A1 Non-ideal barrier coating sequence composition |
| 07/30/1997 | EP0786819A1 Process for preparing thin-film transistor, process for preparing active matrix substrate, and liquid crystal display |
| 07/30/1997 | EP0786804A2 Apparatus and method for processing substrates |
| 07/30/1997 | EP0786795A2 Method for manufacturing thin film, and deposition apparatus |
| 07/30/1997 | EP0786793A2 Workpiece surface treatment device |
| 07/30/1997 | EP0786537A1 Dry cleaning of semi-conductor processing chambers |
| 07/30/1997 | EP0786536A1 Coated cutting tool |
| 07/30/1997 | EP0786423A1 Trap door for refuse containers |
| 07/30/1997 | EP0785868A1 Glass coating method and glass coated thereby |
| 07/30/1997 | EP0730564B1 Method for densifying a porous structure using boron nitride |
| 07/30/1997 | EP0717785B1 Device with miniaturized photoionic head for the treatment of a material |
| 07/29/1997 | US5652061 Devices comprising films of β-C3 N4 |
| 07/29/1997 | US5652045 Coated tungsten carbide-based cemented carbide blade member |
| 07/29/1997 | US5652030 Carbiding, pyrolysis |
| 07/29/1997 | US5652029 Electrode arrangement, protective carbon coating on polyimide film |
| 07/29/1997 | US5652021 Combustion chemical vapor deposition of films and coatings |
| 07/29/1997 | US5651900 Microfabricated particle filter |
| 07/29/1997 | US5651867 Plasma processing method and apparatus |
| 07/29/1997 | US5651827 Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same |
| 07/29/1997 | US5651826 Plasma processing apparatus |
| 07/29/1997 | US5651825 Plasma generating apparatus and plasma processing apparatus |
| 07/29/1997 | US5651670 Heat treatment method and apparatus thereof |
| 07/23/1997 | EP0785569A2 Plasma reactor |
| 07/23/1997 | EP0785475A2 Light receiving member having a surface protective layer with a specific outermost surface and process for the production thereof |
| 07/23/1997 | EP0784861A1 Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber |
| 07/23/1997 | EP0784715A1 Al 2?O 3?-COATED CUTTING TOOL PREFERABLY FOR NEAR NET SHAPE MACHINING |
| 07/23/1997 | EP0784714A1 Low surface energy coatings |
| 07/23/1997 | EP0784713A1 Conformal titanium-based films and method for their preparation |
| 07/23/1997 | EP0504420B1 Steam supplier |
| 07/23/1997 | CN1155228A Method for triggering-igniting CVD-plasma, and apparatus thereof |
| 07/22/1997 | US5650361 Low temperature photolytic deposition of aluminum nitride thin films |
| 07/22/1997 | US5650198 Vapor deposition a group iii metalorganic by forming nitrides from nitrogen, hydrogen, alkylamine, ammonia or hydrazine |
| 07/22/1997 | US5650082 Profiled substrate heating |
| 07/22/1997 | US5650059 Method of making cemented carbide substrate |
| 07/22/1997 | US5650032 Apparatus for producing an inductive plasma for plasma processes |
| 07/22/1997 | US5650013 Chemical vapor deposition, cleaning |
| 07/22/1997 | CA2024159C Synthetic resin window for automotive vehicles or the like |
| 07/16/1997 | EP0784106A1 Epitaxial growth method |
| 07/16/1997 | EP0784103A1 Method of manufacturing coated cutting tools |
| 07/16/1997 | EP0783599A1 Apparatus for growing metal oxides using organometallic vapor phase epitaxy |
| 07/16/1997 | EP0783596A1 Composite body, use of this composite body and process for its preparation |
| 07/16/1997 | CN2257823Y Chemical gaseous phase deposition furnace with eccentric inlet |
| 07/16/1997 | CN1154644A Chamber etching of plasma processing apparatus |
| 07/16/1997 | CN1154422A Method for forming ferroelectric thin film and apparatus therefor |
| 07/15/1997 | US5648175 Chemical vapor deposition reactor system and integrated circuit |
| 07/15/1997 | US5648127 Method of applying, sculpting, and texturing a coating on a substrate and for forming a heteroepitaxial coating on a surface of a substrate |
| 07/15/1997 | US5648119 Process for making diamond coated tools and wear parts |
| 07/15/1997 | US5648114 Chemical vapor deposition process for fabricating layered superlattice materials |
| 07/15/1997 | US5648113 Aluminum oxide LPCVD system |
| 07/15/1997 | US5648006 Heater for chemical vapor deposition equipment |
| 07/15/1997 | US5647964 Diamond film synthesizing apparatus and method thereof using direct current glow discharge plasma enhanced chemical vapor deposition |
| 07/15/1997 | US5647953 Plasma cleaning method for removing residues in a plasma process chamber |
| 07/15/1997 | US5647945 Pressure reducing valve for keeping cleaning gas supply pipe at a lower pressure than atmospheric when supplying cleaning gas to chamber |
| 07/15/1997 | US5647911 Gas diffuser plate assembly and RF electrode |
| 07/10/1997 | WO1997024755A1 Semiconductor structure using modulation doped silicate glasses |
| 07/10/1997 | WO1997024470A1 Process for coating a metal substrate |
| 07/10/1997 | DE19627605C1 Increasing corrosion resistance of titanium-aluminium alloy |