| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 10/09/1997 | WO1997037053A1 Barrier films having vapor coated high energy surfaces |
| 10/09/1997 | CA2250543A1 Process for manufacturing optical data storage disk stamper |
| 10/08/1997 | EP0800206A2 Method of simultaneously forming a contact/via plug and an interconnect |
| 10/08/1997 | EP0799907A1 Liquid material vaporizer apparatus and gas ejection device |
| 10/08/1997 | EP0799906A1 Semiconductor device |
| 10/08/1997 | EP0799557A1 High frequency induction plasma method and apparatus |
| 10/08/1997 | EP0799494A1 Apparatus for surface conditioning |
| 10/08/1997 | EP0614497B1 Apparatus and method for treating a wafer of semiconductor material |
| 10/08/1997 | CN2264191Y Multistation gas-phase synthetizing diamond film appts. |
| 10/08/1997 | CN1161476A Process for producing light-receiving member, electrophotographic apparatus having light-receiving member, and electrophotographic method using light-receiving member |
| 10/08/1997 | CN1161386A Apparatus and method for plasma processing |
| 10/08/1997 | CN1036079C Apparatus for rapid plasma treatments |
| 10/08/1997 | CN1036078C Microwave enhanced CVD method for depositing carbon |
| 10/07/1997 | US5675028 Used for metal organic chemical vapor deposition of gallium, indium and aluminum nitrides on semiconductor substrates |
| 10/07/1997 | US5674786 Method of heating and cooling large area glass substrates |
| 10/07/1997 | US5674620 Passivated cobalt matrix holding tungsten carbide to improve adhesion by preventing reaction between cobalt and diamond |
| 10/07/1997 | US5674599 Coating of inorganic buffer layer on plastic substrate, the stress of buffer layer is maintained at a preferential range; switching element for flat panel display for office automation equipments and television; high reliability |
| 10/07/1997 | US5674574 Vapor delivery system for solid precursors and method regarding same |
| 10/07/1997 | US5674573 Irradiation of hydrocarbon gas plasma generated in first vacuum vessel onto substrate within second vessel at lower pressure due to gas flow resistance between vessels |
| 10/07/1997 | US5674572 Enhanced adherence of diamond coatings employing pretreatment process |
| 10/07/1997 | US5674564 Alumina-coated sintered body |
| 10/07/1997 | US5674563 Method for ferroelectric thin film production |
| 10/07/1997 | US5674320 Susceptor for a device for epitaxially growing objects and such a device |
| 10/07/1997 | US5674304 Method of heat-treating a glass substrate |
| 10/07/1997 | US5673750 Vacuum processing method and apparatus |
| 10/07/1997 | CA2039345C Process for shaping preforms in the manufacture of thermostructural composite material components, especially web-like components or panels |
| 10/07/1997 | CA2033389C Diamond-coated bodies and process for preparation thereof |
| 10/02/1997 | WO1997036462A1 Device and method for plasma treatment |
| 10/02/1997 | WO1997036461A1 Device and method for plasma treatment |
| 10/02/1997 | WO1997036320A1 Vapor phase growth apparatus and vapor phase growth method |
| 10/02/1997 | WO1997036022A1 Plasma producing method and apparatus including an inductively-coupled plasma source |
| 10/02/1997 | DE19709980A1 Coated cemented carbide tool for cast iron milling |
| 10/02/1997 | DE19611923A1 Golf club, used especially as pitch wedge |
| 10/01/1997 | EP0798777A2 Method of metallizing submicronie (e.g. micronie) contact holes in semiconductor body |
| 10/01/1997 | EP0798401A2 Laminate and method for preparing same |
| 10/01/1997 | EP0797838A1 Method and apparatus for plasma processing |
| 10/01/1997 | EP0797753A1 Rapid thermal processing apparatus and method |
| 10/01/1997 | EP0797689A1 Gas removal device |
| 10/01/1997 | EP0797688A1 Method for deposition of diamondlike carbon films |
| 10/01/1997 | EP0797480A1 Fluidized bed with uniform heat distribution and multiple port nozzle |
| 10/01/1997 | EP0649479A4 Method and apparatus for coating a glass substrate. |
| 10/01/1997 | CN1161106A Process for preparing thin-film transistor, process for preparing active matrix substrate, and liquid crystal display |
| 09/30/1997 | US5672430 CVD diamond radiation detector |
| 09/30/1997 | US5672411 Insulating boards and method of manufacturing the same |
| 09/30/1997 | US5672395 Heating, pressure |
| 09/30/1997 | US5672388 Membrane reparation and poer size reduction using interfacial ozone assisted chemical vapor deposition |
| 09/30/1997 | US5672385 Titanium nitride film-MOCVD method incorporating use of tetrakisdialkylaminotitanium as a source gas |
| 09/30/1997 | US5672383 Plasma enhanced chemical vapor deposition |
| 09/30/1997 | US5672382 Composite powder particle, composite body and method of preparation |
| 09/30/1997 | US5672204 Apparatus for vapor-phase epitaxial growth |
| 09/30/1997 | CA2110647C Vapour generator for chemical vapour deposition systems |
| 09/25/1997 | WO1997035045A1 Interiorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor deposition |
| 09/24/1997 | EP0797249A1 Single step process for blanket-selective CVD metal deposition |
| 09/24/1997 | EP0797241A2 Substrate processing apparatus |
| 09/24/1997 | EP0796930A1 Use of a layer containing elementary carbon on cutting tools |
| 09/24/1997 | EP0796355A1 Apparatus for generating plasma by plasma-guided microwave power |
| 09/24/1997 | CN1160089A Method and apparatus for large area high-speed thermal filament chemical vapor deposition of diamond |
| 09/24/1997 | CN1035956C Coating method, workpiece with hard coating and use thereof |
| 09/23/1997 | USRE35614 Process for improved quality of CVD copper films |
| 09/23/1997 | US5671323 Zigzag heating device with downward directed connecting portions |
| 09/23/1997 | US5671117 Electrostatic chuck |
| 09/23/1997 | US5670793 Depositing pure silicon, then impurity layer at interface; heat treatment |
| 09/23/1997 | US5670421 Process for forming multilayer wiring |
| 09/23/1997 | US5670420 Ion-implanting an insulating film in the surface of an oxide film; corrosion and oxidation resistance |
| 09/23/1997 | US5670224 Modified silicon oxide barrier coatings produced by microwave CVD deposition on polymeric substrates |
| 09/23/1997 | US5670218 Method for forming ferroelectric thin film and apparatus therefor |
| 09/23/1997 | US5669976 CVD method and apparatus therefor |
| 09/23/1997 | US5669975 Plasma producing method and apparatus including an inductively-coupled plasma source |
| 09/23/1997 | US5669583 Method and apparatus for covering bodies with a uniform glow discharge plasma and applications thereof |
| 09/23/1997 | CA2112103C Methods and apparatus for externally treating a container with application of internal bias gas |
| 09/19/1997 | CA2173676A1 Diamond film deposition |
| 09/18/1997 | WO1997034320A1 Method and apparatus for fabricating silicon dioxide and silicon glass layers in integrated circuits |
| 09/17/1997 | EP0795897A2 Low pressure CVD system |
| 09/17/1997 | EP0795626A1 Method for suppressing detrimental effects of conductive deposits on interior surfaces of a plasma reactor |
| 09/17/1997 | EP0795625A1 Thin film deposition method and gas sensor made by the method |
| 09/17/1997 | EP0795622A1 Amorphous multi-layered structure and method of making the same |
| 09/17/1997 | EP0795042A1 Process for producing an oxide layer |
| 09/17/1997 | EP0794821A1 Process and device for transforming a liquid stream into a gas stream |
| 09/17/1997 | EP0707665B1 Diamond coated body |
| 09/17/1997 | CN1159863A Process for manufacturing optical data storage disk stamper |
| 09/16/1997 | US5668054 Process for fabricating tantalum nitride diffusion barrier for copper matallization |
| 09/16/1997 | US5667852 Plasma jet CVD method of depositing diamond or diamond-like films |
| 09/16/1997 | US5667622 In-situ wafer temperature control apparatus for single wafer tools |
| 09/16/1997 | US5667592 Process chamber sleeve with ring seals for isolating individual process modules in a common cluster |
| 09/16/1997 | US5667344 CVD diamond cutting tools with oriented crystal grain boundaries |
| 09/12/1997 | WO1997033114A1 A method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components |
| 09/12/1997 | WO1997033013A1 Misted precursor deposition apparatus and method with improved mist and mist flow |
| 09/12/1997 | WO1997032672A1 Method for bulk coating using a plasma process |
| 09/12/1997 | WO1997015699A3 Method and apparatus for the deposition of parylene af4 onto semiconductor wafers |
| 09/11/1997 | DE19649684C1 Titanium mono:phosphide layer formation |
| 09/11/1997 | DE19636525A1 Coating a carrier with layer of synthetic diamond phase |
| 09/11/1997 | DE19608885A1 Heating silicon@ substrates in precipitation reactor |
| 09/10/1997 | EP0794569A2 Amorphous carbon film, formation process thereof, and semiconductor device making use of the film |
| 09/10/1997 | EP0794568A2 Blanket-selective deposition of cvd aluminum and reflectivity improvement using a self-aligning ultra-thin layer |
| 09/10/1997 | EP0794014A1 Process and apparatus for high frequency plasma polymerization |
| 09/10/1997 | EP0793855A1 Plasma processor for large workpieces |
| 09/10/1997 | EP0793736A1 Process for preparing micromechanical components having free-standing microstructures or membranes |
| 09/10/1997 | EP0793735A1 Packing element, in particular for shutting-off and regulating means, and process for producing the same |
| 09/10/1997 | EP0493609B1 Method and device for manufacturing diamond |
| 09/10/1997 | CN1158912A Deposited-film forming process and deposited-film forming apparatus |