| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/07/1998 | CN1169694A Glass coating method and glass coated thereby |
| 01/06/1998 | US5705283 Tungsten-copper composite material with rhenium protective layer, and its preparation |
| 01/06/1998 | US5705271 Good adhesion and wear resistance, tools |
| 01/06/1998 | US5705267 Protective layer of silicon oxide |
| 01/06/1998 | US5705263 Coated cutting tool |
| 01/06/1998 | US5705262 Surface treatment of carbonaceous material for making a subsequent deposit of diamond adherent and diamond-covered pieces obtained |
| 01/06/1998 | US5705235 Decompounding gaseous compound in focus of laser beam |
| 01/06/1998 | US5705224 Mixing hydride gas, adsorption and applying pulsation of light from flash lamp and decomposition |
| 01/06/1998 | US5705080 Plasma-inert cover and plasma cleaning process |
| 01/06/1998 | US5705008 Needle punching |
| 01/06/1998 | US5704986 Semiconductor substrate dry cleaning method |
| 01/06/1998 | US5704984 Chemical vapor deposition apparatus with a heat radiation structure |
| 01/06/1998 | US5704983 Methods and apparatus for depositing barrier coatings |
| 01/06/1998 | US5704982 Technique for depositing coatings by pyrolysis/decomposition of precursor gas or gases |
| 01/06/1998 | US5704981 Processing apparatus for substrates to be processed |
| 01/06/1998 | US5704975 Metalorganic vapor phase epitaxial growth, hcl |
| 01/06/1998 | US5704214 Vacuum exhaust system for sucking and discharging exhaust gas |
| 01/06/1998 | CA2027657C Method for preparing laminates of znse and zns |
| 01/02/1998 | DE19625977A1 CVD of poorly conductive or non-conductive thin film, used to produce e.g. ceramic |
| 12/31/1997 | CN1169094A Plasma source |
| 12/31/1997 | CN1036860C Process for forming metal deposiled film contg. aluminium as main component by using alkyl aluminium hydride |
| 12/30/1997 | US5702808 Al2 O2 -coated cutting tool preferably for near net shape machining |
| 12/30/1997 | US5702770 Applying a barrier film to interior wall of plastic substrate |
| 12/30/1997 | US5702764 Method for the preparation of pyrolytic boron nitride-clad double-coated article |
| 12/30/1997 | US5702532 MOCVD reactor system for indium antimonide epitaxial material |
| 12/30/1997 | US5702531 Apparatus for forming a thin film |
| 12/30/1997 | US5702530 Distributed microwave plasma reactor for semiconductor processing |
| 12/30/1997 | US5702529 Method of making doped semiconductor film having uniform impurity concentration on semiconductor substrate and apparatus for making the same |
| 12/29/1997 | EP0814497A2 Device structure with layer for facilitating passivation of surface states |
| 12/29/1997 | EP0814177A2 Vaporizer apparatus and film deposition apparatus therewith |
| 12/29/1997 | EP0814176A2 Method and apparatus for depositing diamond film |
| 12/29/1997 | EP0814175A2 CVD of metals using iodide precursor |
| 12/29/1997 | EP0814062A1 Process for producing a thin film of a metal fluoride on a substrate |
| 12/29/1997 | EP0813923A1 Guide bush and method for forming a hard carbon film on an internal circumferential surface of said bush |
| 12/29/1997 | EP0706425A4 Selective plasma deposition |
| 12/29/1997 | EP0680384A4 Microwave energized process for the preparation of high quality semiconductor material. |
| 12/29/1997 | EP0667921A4 Microwave apparatus for depositing thin films. |
| 12/24/1997 | WO1997048836A1 Hard graphite-like material bonded by diamond-like framework |
| 12/24/1997 | WO1997048662A1 Densification of a porous structure (iii) |
| 12/24/1997 | WO1997048661A1 Densification of a porous structure (ii) |
| 12/24/1997 | WO1997048660A1 Densification of a porous structure (i) |
| 12/24/1997 | WO1997048552A1 Diamond film deposition |
| 12/24/1997 | WO1997048499A1 GaAs SUBSTRATE WITH A PASSIVATING EPITAXIAL GALLIUM SULFIDE FILM AND METHODS FOR FORMING SAME |
| 12/24/1997 | CN1168489A Light receiving member having surface protective layer with specific outermost surface and process for production thereof |
| 12/24/1997 | CN1168422A Microwave plasma processing apparatus and method therefor |
| 12/24/1997 | CN1168421A Preparation of insulating layer on the surface of non-corrosive steel and alloy |
| 12/24/1997 | CA2249288A1 Diamond film deposition |
| 12/23/1997 | US5701578 Providing sintered substrate that includes hard grains bonded by metallic binder, annealing to reduce stress, resintering, adherently depositing coating |
| 12/23/1997 | US5700992 Zigzag heating device with downward directed connecting portions |
| 12/23/1997 | US5700741 Plasma purge method for plasma process particle control |
| 12/23/1997 | US5700738 Forming adhesion layer on front of silicon substrate, forming silicon oxide film on side and rear of silicon substrate, forming metal film on adhesion layer while feeding inactive gas |
| 12/23/1997 | US5700719 Semiconductor device and method for producing the same |
| 12/23/1997 | US5700569 Wear resistance |
| 12/23/1997 | US5700526 Insulator deposition using focused ion beam |
| 12/23/1997 | US5700520 Increasing pressure within single substrate chemical vapor deposition chamber greatly increases rate of deposition |
| 12/23/1997 | US5700518 Fabrication method for diamond-coated cemented carbide cutting tool |
| 12/23/1997 | US5700517 Process for the densification of a porous structure by boron nitride |
| 12/23/1997 | US5700326 Microwave plasma processing apparatus |
| 12/23/1997 | CA2121423C Process for barrier coating of plastic objects |
| 12/18/1997 | WO1997047789A1 Diamond film and process for preparing the same |
| 12/18/1997 | WO1997047785A1 Cutting tool and manufacturing method therefor |
| 12/18/1997 | WO1997047783A1 Methodology and apparatus for in-situ doping of aluminum coatings |
| 12/18/1997 | WO1997047370A1 Microfabricated filter and method of making same |
| 12/18/1997 | DE19622701A1 Cantilever chip for atomic force microscopy |
| 12/17/1997 | EP0813227A2 RF plasma processors |
| 12/17/1997 | EP0812932A2 Production of diamond film |
| 12/17/1997 | EP0549585B1 Binder enriched cvd and pvd coated cutting tool |
| 12/17/1997 | CN1167914A Polygonal planar multipass cell, system and apparatus including same, and method of use |
| 12/16/1997 | US5698473 From high energy plasma and densified in presence of oxygen to form highly planar interlevel dielectric |
| 12/16/1997 | US5698328 Substrate is positioned between carbon cathode and anode, applying direct current between anode and cathode to form hydrogen plasma, adding dopant, transporting carbon from cathode to anode substrate, depositing doped diamond film |
| 12/16/1997 | US5698272 Method for lubrication of diamond-like carbon surfaces |
| 12/16/1997 | US5698262 Method for forming tin oxide coating on glass |
| 12/16/1997 | US5698261 Feeding gas-vapor mixture of trichloromethylsilane and hydrogen into reactor, decomposing mixture on heated substrate to form silicon carbide layer, separating, recovering, recycling decomposition products |
| 12/16/1997 | US5698062 Plasma treatment apparatus and method |
| 12/16/1997 | US5698037 Integrated delivery system for chemical vapor from non-gaseous sources for semiconductor processing |
| 12/16/1997 | US5698036 Plasma processing apparatus |
| 12/16/1997 | US5698035 Corrosion/shock and electrical resistance; improve thermoconductivity; consists of atleast one of zrconium bromide and titanium bromide, boron nitride and aluminum nitride |
| 12/16/1997 | US5698022 Metal oxide chemical vapor deposition |
| 12/11/1997 | WO1997047049A1 Series of layers and substrate-buffer system, and process for the production thereof |
| 12/11/1997 | WO1997046842A1 Vertical heat treatment device |
| 12/11/1997 | WO1997046730A1 Temperature controlling method and apparatus for a plasma processing chamber |
| 12/11/1997 | WO1997046484A1 Method for forming conformal diamond-type carbon coatings, hard diamond-type carbon coating and porous filtration element using the same |
| 12/11/1997 | DE19622823A1 Verbundwerkstoff und Verfahren zu seiner Herstellung Composite material and process for its preparation |
| 12/10/1997 | EP0812013A2 Multilayer coating for microelectronic devices |
| 12/10/1997 | EP0811709A2 Method and apparatus for enhancing the efficiency of radiant energy sources used in rapid thermal processing of substrates by energy reflection |
| 12/10/1997 | EP0811704A1 Surface modification of magnetic heads |
| 12/10/1997 | EP0811703A2 Apparatus for treatment of a substrate |
| 12/10/1997 | EP0811702A2 Method and apparatus for depositing a layer by CVD |
| 12/10/1997 | EP0811413A2 Evacuation system |
| 12/10/1997 | EP0811367A2 Glass container particularly for storing pharmaceutical or diagnostic solutions |
| 12/10/1997 | EP0811084A1 Process of diamond growth from c 70? |
| 12/10/1997 | EP0811082A1 Cvd diamond burrs for odontological and related uses |
| 12/10/1997 | EP0799557A4 High frequency induction plasma method and apparatus |
| 12/10/1997 | CN1167508A High density flash evaporator |
| 12/10/1997 | CA2207154A1 Inductively coupled source for deriving substantially uniform plasma flux |
| 12/09/1997 | US5696428 Apparatus and method using optical energy for specifying and quantitatively controlling chemically-reactive components of semiconductor processing plasma etching gas |
| 12/09/1997 | US5696384 Composition for formation of electrode pattern |
| 12/09/1997 | US5695832 Vacuum deposition; forming plasma |
| 12/09/1997 | US5695831 CVD method for forming a metallic film on a wafer |
| 12/09/1997 | US5695830 Surface oxidation; vapor deposition of aluminum chloride andaluminum nitride |