Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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04/09/1998 | WO1998014633A1 Liquid vaporizer system and method |
04/09/1998 | WO1998014632A1 Conveyor and delivery device |
04/09/1998 | WO1998014506A1 Plastic substrate and method of manufacturing the same, and ink jet printer head and method of manufacturing the same |
04/09/1998 | WO1998014322A1 Doped barium/strontium titanate thin films and method of doping |
04/08/1998 | EP0834597A1 Process for depositing barrier film on three-dimensional articles |
04/08/1998 | EP0834192A1 Method for forming salicides |
04/08/1998 | EP0833960A1 Use of plasma polymer layer sequences as functional layers in material transport or heat exchanger systems |
04/08/1998 | EP0833672A1 Treatments to reduce thrombogeneticity in heart valves made from titanium and its alloys |
04/08/1998 | EP0755327A4 Barrier films having carbon-coated surfaces |
04/08/1998 | CN1178263A Apparatus and method for forming thin diamond-like films |
04/08/1998 | CN1178257A Method for forming hard carbon film over inner surface of guide bush |
04/08/1998 | CN1178204A Thermal insulation coating components, their manufacture and gas turbine parts using them |
04/07/1998 | US5736423 Plama enhanced chemical vapor deposition using high frequency power and pressure and increasing the time duration of precoat and soak time steps; applying silane, nitrous oxide and introgen as reactant gases |
04/07/1998 | US5736252 Cutting tools; formed by vapor deposition of gas activated by electric arcs |
04/07/1998 | US5736226 Wafer and method of producing a wafer |
04/07/1998 | US5736207 Sequentially arranged barrier layers of polymer and inorganic oxides or oxynitrides |
04/07/1998 | US5736198 Forming a base member comprising ceramics, metal and carbon/carbon composites, a self-recovering protective layer isolating base member and exposed to oxidation environment comprises exterior oxide, interior boride reactive layer |
04/07/1998 | US5736192 Embedded electroconductive layer and method for formation thereof |
04/07/1998 | US5735961 For controlling native oxide layer within load-lock chamber |
04/07/1998 | US5735960 Apparatus and method to increase gas residence time in a reactor |
04/07/1998 | US5735896 Biocompatible prosthesis |
04/02/1998 | DE19716707A1 Halbleiterkristallscheiben -Wärmebehandlungsvorrichtung Semiconductor crystal wafers -Wärmebehandlungsvorrichtung |
04/02/1998 | DE19641397A1 Manufacturing process for heat conducting printed circuit boards |
04/02/1998 | DE19640528A1 Method and apparatus for treatment of components by vacuum technology processes |
04/02/1998 | DE19638501A1 Capillary especially micro-capillary production |
04/02/1998 | CA2186984A1 Coated chain saw nose sprocket |
04/01/1998 | EP0833367A2 Inductively coupled plasma reactor with symmetrical parallel multiple coils having a common RF terminal |
04/01/1998 | EP0833366A2 Apparatus for depositing barrier film on three-dimensional articles |
04/01/1998 | EP0832992A1 Cyclone evaporator |
04/01/1998 | EP0832863A2 Pressure gradient CVI/CVD apparatus, process, and product |
04/01/1998 | EP0832407A1 Passive gas substrate thermal conditioning apparatus and method |
04/01/1998 | EP0832312A2 Method and apparatus for silicon deposition in a fluidized-bed reactor |
04/01/1998 | EP0832311A1 Process for plasma enhanced anneal of titanium nitride |
04/01/1998 | EP0832310A1 Electrically tunable coatings |
04/01/1998 | EP0831963A1 Micromachined porous membranes with bulksupport |
04/01/1998 | EP0801606A4 Cleaning method |
04/01/1998 | EP0677595B1 Device for the vacuum-plasma treatment of articles |
04/01/1998 | EP0668937B1 Diamond-coated shaped articles and production thereof |
04/01/1998 | EP0616649B1 Apparatus and method for delivery of involatile reagents |
04/01/1998 | EP0573645B1 Method for coating a surface with a resistant facing by chemical-vapor deposition |
04/01/1998 | CN1177937A Guide bush and method for forming a hard carbon film on an internal circumferential surface of said bush |
03/31/1998 | US5733669 Oxycarbides,-borides, and -nitrides; microelectronics |
03/31/1998 | US5733668 Cutting, abrasion and sliding tools |
03/31/1998 | US5733611 Method for densification of porous billets |
03/31/1998 | US5733610 Atmospheric pressure plasma reaction method of forming a hydrophobic film |
03/31/1998 | US5733609 Pulsed beams focused by reflector with aperture |
03/31/1998 | US5733405 Plasma processing apparatus |
03/31/1998 | US5733375 Apparatus for supplying a treatment material |
03/31/1998 | US5732744 Method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components |
03/31/1998 | CA2134426C Method of feeding gas into a chamber |
03/26/1998 | DE19652634A1 Internal coating of metal workpieces |
03/25/1998 | EP0831680A1 Device and method for plasma treatment |
03/25/1998 | EP0831523A2 Semi-selective chemical vapor deposition of conducting material |
03/25/1998 | EP0831521A2 Method for forming a silicide region |
03/25/1998 | EP0831516A2 Device and method for processing a plasma to alter the surface of a substrate using neutrals |
03/25/1998 | EP0830708A1 Plasma processing system with reduced particle contamination |
03/25/1998 | CN1177168A Surface modification of magnetic heads |
03/25/1998 | CN1037862C Proces for chemical vapor deposition of diamond coating for hard alloy tool |
03/24/1998 | US5731046 Fabrication of diamond and diamond-like carbon coatings |
03/24/1998 | US5731045 Intermetallic interface; bonding strength |
03/24/1998 | US5730808 Producing solar cells by surface preparation for accelerated nucleation of microcrystalline silicon on heterogeneous substrates |
03/24/1998 | US5730804 Process gas supply apparatus |
03/24/1998 | US5730803 Apparatus and method for transferring heat from a hot electrostatic chuck to an underlying cold body |
03/24/1998 | US5730802 Vapor growth apparatus and vapor growth method capable of growing good productivity |
03/19/1998 | WO1998011270A1 Process and device for coating the internal face of metal buildings components |
03/19/1998 | DE19735962A1 Guide bush and method for coating its inner surface with a hard carbon film |
03/19/1998 | DE19652633A1 Verfahren und Vorrichtung zum Innenbeschichten metallischer Bauteile Method and apparatus for coating the inside of metal components |
03/19/1998 | DE19637220A1 Passivation of surface defects on diamond |
03/18/1998 | EP0830052A1 Device and method for plasma treatment |
03/18/1998 | EP0829910A2 Method and device for forming semiconductor thin films, and photovoltaic elements |
03/18/1998 | EP0829560A2 A susceptor for a gas phase growth apparatus |
03/18/1998 | EP0828999A1 Semiconductor substrate processing system and method providing shielded optical pyrometry |
03/18/1998 | EP0828867A2 Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities |
03/18/1998 | EP0789671A4 The combinatorial synthesis of novel materials |
03/18/1998 | CN1176486A Surface wave plasma processing apparatus |
03/18/1998 | CN1176317A Gas injection system for CVD reactors |
03/17/1998 | USRE35746 Battery package and method using flexible polymer films having a deposited layer of an inorganic material |
03/17/1998 | US5728629 Process for preventing deposition on inner surfaces of CVD reactor |
03/17/1998 | US5728602 Semiconductor wafer manufacturing process with high-flow-rate low-pressure purge cycles |
03/17/1998 | US5728465 Diamond-like nanocomposite corrosion resistant coatings |
03/17/1998 | US5728425 Method for chemical vapor deposition of semiconductor films by separate feeding of source gases and growing of films |
03/17/1998 | US5728278 Plasma processing apparatus |
03/17/1998 | US5728224 Apparatus and method for manufacturing a packaging material using gaseous phase atmospheric photo chemical vapor deposition to apply a barrier layer to a moving web substrate |
03/17/1998 | US5728223 Reactant gas ejector head and thin-film vapor deposition apparatus |
03/17/1998 | US5728222 Apparatus for chemical vapor deposition of aluminum oxide |
03/17/1998 | US5728215 Method for forming a film by selective area MOCVD growth |
03/12/1998 | WO1998010288A1 Improvements in or relating to sensors |
03/12/1998 | WO1998010119A1 Coated cutting insert |
03/12/1998 | WO1998010118A1 Process for coating substrates with a silicium-containing protective layer by chemical vapour deposition |
03/12/1998 | WO1998010117A1 Diamond-like coating |
03/12/1998 | WO1998010116A1 Ultrasonic nozzle feed for plasma deposited film networks |
03/12/1998 | WO1998010115A1 Silicon-doped diamond-like carbon coatings for magnetic transducers and for magnetic recording media |
03/12/1998 | WO1998009902A1 A drive mechanism for transporting a tow at constant speed |
03/12/1998 | DE19635737C1 Cubic crystalline boron, carbon and nitrogen ceramic layer production |
03/12/1998 | CA2259989A1 A drive mechanism for transporting a tow at constant speed |
03/11/1998 | EP0828301A2 Photovoltaic element and method of and apparatus for manufacturing the same |
03/11/1998 | EP0828015A2 Hard carbon film-coated substrate and method for fabricating the same |
03/11/1998 | EP0828014A2 Hard carbon film |
03/11/1998 | EP0828013A2 Method for coating a substrate with diamond |
03/11/1998 | EP0828012A1 Method for vaporizing liquid feed and vaporizer therefor |