| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/21/1998 | US5783492 Plasma processing method, plasma processing apparatus, and plasma generating apparatus |
| 07/21/1998 | US5783371 Process for manufacturing optical data storage disk stamper |
| 07/21/1998 | US5783335 Fluidized bed deposition of diamond |
| 07/21/1998 | US5783261 Using injector having steel surfaces coated with ion implanted stabilized amorphous carbon-based coating to reduce wear |
| 07/21/1998 | US5783257 Method for forming doped polysilicon films |
| 07/21/1998 | US5783255 Method for producing shaped article of silicon carbide |
| 07/21/1998 | US5783253 Two barium strontium titanate layers, each with different composition, one serves as nucleation layer |
| 07/21/1998 | US5782980 Semiconductor manufacture, reducing thermal expansions of the reactor thereby reducing flaking of deposits from the inner walls |
| 07/21/1998 | US5782979 Substrate holder for MOCVD |
| 07/21/1998 | US5782975 Method for providing a silicon and diamond substrate having a carbon to silicon transition layer and apparatus thereof |
| 07/21/1998 | US5782974 Method of depositing a thin film using an optical pyrometer |
| 07/21/1998 | CA2038072C Process for forming a folding or separation line in the manufacture of a composite material component |
| 07/16/1998 | WO1998030731A1 Method and apparatus for reducing deposition of material in the exhaust pipe of a reaction furnace |
| 07/16/1998 | WO1998030730A1 Vacuum coating system |
| 07/16/1998 | WO1998030360A1 Abrasive body |
| 07/16/1998 | WO1998030357A1 Abrasive body |
| 07/16/1998 | WO1998030338A1 Modular coating fixture |
| 07/16/1998 | DE19716560A1 Grinding body especially for glass grinding disc |
| 07/16/1998 | DE19700408A1 Vakuum-Beschichtungsanlage Vacuum coating machine |
| 07/15/1998 | EP0853138A1 Vapor-phase film growth apparatus and gas ejection head |
| 07/15/1998 | EP0853137A1 High pressure MOCVD reactor system |
| 07/15/1998 | EP0853134A1 Method for obtaining a coating with a uniform distribution of reactants |
| 07/15/1998 | EP0852970A2 Vapor feed supply system |
| 07/15/1998 | EP0852628A1 Process chamber with inner support |
| 07/15/1998 | EP0826131A4 Unibody crucible |
| 07/15/1998 | EP0748260A4 Ion beam process for deposition of highly abrasion-resistant coatings |
| 07/15/1998 | EP0748259A4 Highly abrasion-resistant, flexible coatings for soft substrates |
| 07/15/1998 | EP0737258A4 Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films |
| 07/15/1998 | EP0689619A4 Apparatus and method for delivering reagents in vapor form to a cvd reactor |
| 07/15/1998 | EP0684908B1 Safety document and process for producing the same |
| 07/15/1998 | EP0579756B1 Coated cutting tool |
| 07/15/1998 | CA2227529A1 Process and installation for developing a gaseous mixture comprising a carrier gas, an oxidizing gas and a silane |
| 07/14/1998 | US5781693 Gas introduction showerhead for an RTP chamber with upper and lower transparent plates and gas flow therebetween |
| 07/14/1998 | US5780851 Detection probe for scanning tunneling microscope |
| 07/14/1998 | US5780713 Post-fabrication tuning of acoustic resonators |
| 07/14/1998 | US5780360 Purge in silicide deposition processes dichlorosilane |
| 07/14/1998 | US5780313 Method of fabricating semiconductor device |
| 07/14/1998 | US5780163 A protective covering to prevent examination and analysis by competitors comprising silica ceramic, a silicon carbide coating, an opaque material-filled porous silica ceramic, a metal layer and another opaque silica ceramic |
| 07/14/1998 | US5780157 Composite structure |
| 07/14/1998 | US5780119 Treatments to reduce friction and wear on metal alloy components |
| 07/14/1998 | US5780106 Method for low temperature aluminum coating of an article |
| 07/14/1998 | US5780101 Method for producing encapsulated nanoparticles and carbon nanotubes using catalytic disproportionation of carbon monoxide |
| 07/14/1998 | US5779848 Corrosion-resistant aluminum nitride coating for a semiconductor chamber window |
| 07/14/1998 | US5779807 Electrically isolating the wafer-supporting grounded electrode in a vapor deposition enclosure and applying a bias voltage to launch electrostatically the particles into a suspension of gas flow |
| 07/14/1998 | US5779804 Gas feeding device for controlled vaporization of an organanometallic compound used in deposition film formation |
| 07/14/1998 | US5779797 Wafer boat for vertical diffusion and vapor growth furnace |
| 07/14/1998 | US5778968 For stabilizing the temperature of semiconductor wafers |
| 07/09/1998 | WO1998029901A1 Method and device for treating a semiconductor surface |
| 07/09/1998 | WO1998029704A1 Thermally conductive chuck for vacuum processor |
| 07/09/1998 | WO1998029211A1 Coated cutting insert or cutting insert blank and method for producing coated cutting inserts for chip-removal of metal |
| 07/09/1998 | WO1998029181A1 Effluent gas stream treatment system for oxidation treatment of semiconductor manufacturing effluent gases |
| 07/09/1998 | WO1998029178A1 Inlet structures for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system |
| 07/08/1998 | EP0852393A2 Thermal reaction chamber for semiconductor wafer processing operations |
| 07/08/1998 | EP0852229A2 Precursor with (methoxy) (methyl) silylolefin ligands to deposit copper and method for the same |
| 07/08/1998 | EP0852223A1 Method of sealing open-pore ceramic coatings, in particular thermal barriers |
| 07/08/1998 | CN1186873A Distribution plate for reaction chamber with multiple gas inlets and separate mass flow control loops |
| 07/07/1998 | US5777372 Used to detect chemical substances and biosubstances in medical care, food processing, industrial processes or environmental monitoring |
| 07/07/1998 | US5776819 Deposition of device quality, low hydrogen content, amorphous silicon films by hot filament technique using "safe" silicon source gas |
| 07/07/1998 | US5776588 Coated hard alloy tool |
| 07/07/1998 | US5776557 Method for forming a film on a substrate by activating a reactive gas |
| 07/07/1998 | US5776553 Method for depositing diamond films by dielectric barrier discharge |
| 07/07/1998 | US5776552 Gas mixture of hydrogen, inert with carbon compound and oxygen |
| 07/07/1998 | US5776359 Giant magnetoresistive cobalt oxide compounds |
| 07/07/1998 | US5776355 Method of preparing cutting tool substrate materials for deposition of a more adherent diamond coating and products resulting therefrom |
| 07/07/1998 | US5776255 Chemical vapor deposition apparatus |
| 07/07/1998 | US5776254 Apparatus for forming thin film by chemical vapor deposition |
| 07/07/1998 | US5776253 Apparatus for forming single-crystalline thin film by beam irradiator and beam reflecting device |
| 07/07/1998 | US5776246 Wide signel crystal; for semiconductors, surface acoustic lave devices |
| 07/07/1998 | US5776236 Mixed metal oxide film having an accelerant |
| 07/07/1998 | US5775889 Heat treatment process for preventing slips in semiconductor wafers |
| 07/07/1998 | US5775579 Refuse airlock |
| 07/07/1998 | CA2054050C Method and apparatus for making grit and abrasive media |
| 07/02/1998 | WO1998028784A1 Integrated circuit electrode structure and process for fabricating same |
| 07/02/1998 | WO1998028783A1 Method of nucleation used in semiconductor devices |
| 07/02/1998 | WO1998028465A1 Inductively coupled plasma cvd |
| 07/02/1998 | WO1998028464A1 Cubic boron nitride cutting tool |
| 07/02/1998 | WO1998028463A1 Semiconducting devices and method of making thereof |
| 07/02/1998 | WO1998028462A1 Composite body comprising a hard metal, cermet or ceramic substrate body and method of producing the same |
| 07/02/1998 | DE19752637A1 Metallic wiring production for semiconductor device |
| 07/02/1998 | DE19703848A1 Beschichteter Schneideinsatz oder Schneideinsatzrohling und Verfahren zur Herstellung von beschichteten Schneideinsätzen zum Zerspanen Coated cutting insert or cutting insert blank and method for producing coated cutting inserts for machining |
| 07/02/1998 | DE19703338A1 Workpieces preheating for vacuum coating |
| 07/01/1998 | EP0851467A2 Method and system for monocrystalline epitaxial deposition |
| 07/01/1998 | EP0851042A2 Crucible of pyrolytic boron nitride for molecular beam epitaxy |
| 07/01/1998 | EP0851040A1 Surface treatment apparatus using gas jet |
| 07/01/1998 | EP0850324A1 Coated turning insert |
| 07/01/1998 | EP0850323A1 Method and apparatus for cold wall chemical vapor deposition |
| 07/01/1998 | EP0850266A1 Method for obtaining a floor covering and product thus obtained |
| 07/01/1998 | CN2285301Y Vertical spraying chemical doposition device |
| 07/01/1998 | CN1186347A Photovoltaic element and method of and apparatus for manufacturing the same |
| 07/01/1998 | CN1186128A Dual vertical thermal processing furance |
| 07/01/1998 | CN1038948C Process and apparatus for plasma CVD coating or handle substrates |
| 06/30/1998 | US5773841 Self aligning vacuum seal assembly |
| 06/30/1998 | US5773830 CVD diamond radiation detector |
| 06/30/1998 | US5773639 Layer forming material and wiring forming method |
| 06/30/1998 | US5773363 Semiconductor processing method of making electrical contact to a node |
| 06/30/1998 | US5773357 Method for producing silicon film to bury contact hole |
| 06/30/1998 | US5773100 PECVD of silicon nitride films |
| 06/30/1998 | US5773088 Thin film packaging |
| 06/30/1998 | US5773086 Vapor depositing a gaseous mixture of a dialkylindium compound and oxygen onto the hot surface of gas |
| 06/30/1998 | US5772771 Deposition chamber for improved deposition thickness uniformity |