| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/09/1998 | EP0863536A2 Method and apparatus for substrate processing |
| 09/09/1998 | EP0863228A1 Vertical type CVD apparatus |
| 09/09/1998 | EP0863227A1 Method and apparatus for forming laminated thin films or layers |
| 09/09/1998 | EP0862664A2 Method and apparatus for the deposition of parylene af4 onto semiconductor wafers |
| 09/09/1998 | EP0862663A1 Method and device for sterilising, deodorising and protecting the inner surfaces of containers and tubes |
| 09/09/1998 | EP0862543A2 Cutting tool, process for coating a cutting tool, and use thereof |
| 09/09/1998 | EP0647163B1 A plasma cleaning method for removing residues in a plasma treatment chamber |
| 09/09/1998 | CN1192789A Treatment of cemented carbide substrate to receive CVD diamond film |
| 09/09/1998 | CN1192788A System for plasma treatment of large area substrates |
| 09/09/1998 | CN1192787A Electrically tunable coatings |
| 09/09/1998 | CN1192538A Specular surface body |
| 09/09/1998 | CN1192490A Method and system for monocrystalline epitaxial deposition |
| 09/09/1998 | CN1192484A Plasma CVD device |
| 09/09/1998 | CN1039727C Alumina coated cutting tool |
| 09/08/1998 | US5805973 Coated articles and method for the prevention of fuel thermal degradation deposits |
| 09/08/1998 | US5805380 Overcoat magnetic head slider having overcoat and magnetic disk device |
| 09/08/1998 | US5804923 Plasma processing apparatus having a protected microwave transmission window |
| 09/08/1998 | US5804509 Filling spaces the metal interconnectors by vapor depositing tetraethoxysilane and ozone gas |
| 09/08/1998 | US5804259 Method and apparatus for depositing a multilayered low dielectric constant film |
| 09/08/1998 | US5804249 Blanket depositing a first bulk layer of tungsten on dielectric layer and partially filling via; blanket depositing amorphous layer of tungsten followed by a second bulk layer of tungsten |
| 09/08/1998 | US5804042 Reduces or eliminates secondary plasma around backplane |
| 09/08/1998 | US5803977 Apparatus for full wafer deposition |
| 09/08/1998 | US5803975 Microwave plasma processing apparatus and method therefor |
| 09/08/1998 | US5803974 Chemical vapor deposition apparatus |
| 09/08/1998 | US5803973 Apparatus for coating a substrate by chemical vapor deposition |
| 09/08/1998 | US5803971 Modular coating fixture |
| 09/08/1998 | US5803967 Repeatedly cycling between first and second growth parameters; etching at intermediate stages to remove defects |
| 09/08/1998 | US5803961 Integrated circuits having mixed layered superlattice materials and precursor solutions for use in a process of making the same |
| 09/08/1998 | US5803938 Liquid vaporizing apparatus |
| 09/03/1998 | WO1998038674A1 Methods and apparatus for forming a high dielectric film and the dielectric film formed thereby |
| 09/03/1998 | WO1998037958A1 Arrangement and method for improving vacuum in a very high vacuum system |
| 09/03/1998 | DE19708341A1 Treatment of workpieces |
| 09/02/1998 | EP0862352A2 A heating element with a diamond sealing material |
| 09/02/1998 | EP0861922A1 Spinning rind and traveller for a ring spinning machine |
| 09/02/1998 | EP0861683A2 Process and apparatus for abating effluent gases |
| 09/02/1998 | EP0861338A1 Surface treatment method and device therefor |
| 09/02/1998 | EP0778837B1 Preparation of metalorganic compounds |
| 09/02/1998 | EP0419461B1 Wafer handling system with bernoulli pick-up |
| 09/02/1998 | CN1192265A Passive gas substrate thermal conditioning apparatus and method |
| 09/01/1998 | US5801915 For holding a substrate in a process chamber |
| 09/01/1998 | US5801634 Signal tower controller |
| 09/01/1998 | US5800880 Process for coating the interior wall of a container with a SiOx barrier layer |
| 09/01/1998 | US5800879 Deposition of high quality diamond film on refractory nitride |
| 09/01/1998 | US5800877 Method for forming a fluorine containing silicon oxide film |
| 09/01/1998 | US5800868 Method for making a coated cutting tool |
| 09/01/1998 | US5800753 Chemical vapor deposition method |
| 09/01/1998 | US5800686 Chemical vapor deposition chamber with substrate edge protection |
| 09/01/1998 | US5800623 Semiconductor wafer support platform |
| 09/01/1998 | US5800622 Vapor-phase growth apparatus and compound semiconductor device fabricated thereby |
| 09/01/1998 | US5800621 Plasma source for HDP-CVD chamber |
| 09/01/1998 | US5800620 Plasma treatment apparatus |
| 09/01/1998 | US5800618 Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof |
| 09/01/1998 | US5800617 Method to deposit highly conformal CVD films |
| 09/01/1998 | US5800616 For depositing thin films on substrates |
| 08/27/1998 | WO1998037579A1 Process of tungsten chemical vapor deposition onto titanium nitride substrate |
| 08/27/1998 | WO1998037259A1 Method and apparatus for producing plastic container having carbon film coating |
| 08/27/1998 | WO1998037258A1 A rapid thermal processing barrel reactor for processing substrates |
| 08/27/1998 | WO1998037254A2 Thin films |
| 08/27/1998 | WO1998021744A9 Gas panel |
| 08/27/1998 | DE19746332A1 Plasma=assisted chemical vapour deposition apparatus with reduced heating |
| 08/26/1998 | EP0860855A1 Antenna for generating a plasma and HDP-CVD processing chamber having such antenna |
| 08/26/1998 | EP0860640A1 Valved coupling for ultra high purity gas distribution systems |
| 08/26/1998 | EP0860515A1 Diamond-coated body |
| 08/26/1998 | EP0859669A1 Coating of glass |
| 08/26/1998 | EP0800592B1 Method of producing boron-doped monocrystalline silicon carbide |
| 08/26/1998 | CN2288975Y Equipment for preparing conductive film by using thermal atomizing adhesive method |
| 08/26/1998 | CN1191243A Infrared anti-reflection filter window of diamond and its preparing method |
| 08/25/1998 | US5798143 CVD process for making a hollow diamond tube |
| 08/25/1998 | US5798142 CVD method of depositing a silica coating on a heated glass substrate |
| 08/25/1998 | US5798139 Apparatus for and method of manufacturing plastic container coated with carbon film |
| 08/25/1998 | US5798137 Chemical vapor deposition on seed particles generated in reactor having inlet zone where beads are maintained in submerged spouted bed, upper zone with bubbling fluidized bed |
| 08/25/1998 | US5798042 Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters |
| 08/25/1998 | US5797195 Nitrogen trifluoride thermal cleaning apparatus and process |
| 08/25/1998 | CA2010482C Process for the fabrication of devices; utilizing electrochemically generated gases |
| 08/20/1998 | WO1998036106A1 OPTIMIZATION OF SiO2, FILM CONFORMALITY IN ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION |
| 08/20/1998 | DE19718516C1 Diamond deposition by low temperature plasma arc CVD |
| 08/19/1998 | EP0859355A1 Thin film magnetic head |
| 08/19/1998 | EP0859155A2 Fluid control apparatus |
| 08/19/1998 | EP0859070A1 Coating of inside of vacuum chambers |
| 08/19/1998 | EP0858579A1 Modification of metal surfaces |
| 08/19/1998 | EP0783599A4 Apparatus for growing metal oxides using organometallic vapor phase epitaxy |
| 08/19/1998 | EP0723601A4 A method for chemical vapor deposition of titanium nitride films at low temperatures |
| 08/19/1998 | CN1190774A Thin-film magnetic head |
| 08/18/1998 | US5796074 Wafer heater assembly |
| 08/18/1998 | US5795824 Method for nucleation of CVD tungsten films |
| 08/18/1998 | US5795672 Diamond-like carbon based electrocatalytic coating for fuel cell electrodes |
| 08/18/1998 | US5795653 Method for polishing a diamond or carbon nitride film by reaction with oxygen transported to the film through a superionic conductor in contact with the film |
| 08/18/1998 | US5795648 Method for preserving precision edges using diamond-like nanocomposite film coatings |
| 08/18/1998 | US5795452 Dry process system |
| 08/18/1998 | US5795399 Semiconductor device manufacturing apparatus, method for removing reaction product, and method of suppressing deposition of reaction product |
| 08/18/1998 | US5795396 Apparatus for forming crystalline film |
| 08/18/1998 | US5795385 Method of forming single-crystalline thin film by beam irradiator |
| 08/18/1998 | US5794801 Material compositions |
| 08/18/1998 | US5794659 Zero dead-leg valve structure |
| 08/18/1998 | CA2118356C Method for preparation of silicon nitride gallium diffusion barrier for use in molecular beam epitaxial growth of gallium arsenide |
| 08/13/1998 | WO1998035531A1 Model based temperature controller for semiconductor thermal processors |
| 08/13/1998 | WO1998035071A1 Hard material coating of a cemented carbide or carbide containing cermet substrate |
| 08/13/1998 | DE19706556C1 Plasma etching or cutting arrangement |
| 08/12/1998 | EP0857796A2 Apparatus for the low temperature etching of cold-wall CVD reactors |
| 08/12/1998 | EP0857795A1 Method for coating a surface |