| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/09/2003 | US6616987 Procedure and device for specific particle manipulation and deposition |
| 09/09/2003 | US6616986 Sequential chemical vapor deposition |
| 09/09/2003 | US6616985 Contoured plate or profiler is provided for modifying the distribution. |
| 09/09/2003 | US6616973 The build-up of residue in a stainless steel injection valve used to inject liquid triethyl phosphate or trimethyl- or triethylphosphine is reducedby using a low nickel, high chromium stainless steel |
| 09/09/2003 | US6616972 Using as a precursor one or more of, and preferably a combination of, (RRN)xM(=NR)y and (RRN)xM(-R-N=C(R)(R))y where each R is H, alkyl or aryl and M is tantalum,niobium, tungsten or molydenum |
| 09/09/2003 | US6616969 Apparatus and method for selectively coating internal and external surfaces of an airfoil |
| 09/09/2003 | US6616870 Method of producing high aspect ratio domes by vapor deposition |
| 09/09/2003 | US6616857 Ferroelectric |
| 09/09/2003 | US6616818 Apparatus and method for coating substrates |
| 09/09/2003 | US6616767 High temperature ceramic heater assembly with RF capability |
| 09/09/2003 | US6616766 Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processes |
| 09/09/2003 | US6616081 Belt retractor with switchable force limiter |
| 09/09/2003 | US6615871 Fluid control apparatus |
| 09/09/2003 | US6615547 Lock for vacuum chamber |
| 09/04/2003 | WO2003073490A1 Shower head structure for processing semiconductor |
| 09/04/2003 | WO2003073486A1 Heat treatment device and heat treatment method |
| 09/04/2003 | WO2003072859A1 Direct synthesis of long single-walled carbon nanotube strands |
| 09/04/2003 | WO2003072850A1 Semiconductor or liquid crystal producing device |
| 09/04/2003 | WO2003072497A1 Method and apparatus for the production of carbon nanostructures |
| 09/04/2003 | WO2003072268A1 Bladder-based apparatus and method for dispensing coatings |
| 09/04/2003 | WO2003064718A3 Method for selectively coating a portion of a substrate with a gas-carried substance |
| 09/04/2003 | WO2002097864A3 Low temperature load and bake |
| 09/04/2003 | US20030166346 Methods of fabricating capacitors including TA2O5 layers in a chamber including changing a TA2O5 layer to heater separation or chamber pressure |
| 09/04/2003 | US20030166304 Method of forming a ferroelectric film and fabrication process of a semiconductor device having a ferroelectric film |
| 09/04/2003 | US20030165696 Silicon oxide membrane |
| 09/04/2003 | US20030165635 Method for selectively removing hydrogen from molecules |
| 09/04/2003 | US20030165633 Plating method of metal film on the surface of polymer |
| 09/04/2003 | US20030165632 Method of reducing stress induced defects in an HDP-CVD process |
| 09/04/2003 | US20030165620 Precoat film forming method, idling method of film forming device, loading table structure, film forming device and film forming method |
| 09/04/2003 | US20030165619 Chemical vapor deposition process for depositing titanium nitride films from an organo-metallic compound |
| 09/04/2003 | US20030165618 Method of depositing a low k dielectric barrier film for copper damascene application |
| 09/04/2003 | US20030165615 Vapor deposition with electroconductive metal, or alloy thereof; oxidation |
| 09/04/2003 | US20030164362 Pre-heating and loadlock pedestal material for high temperature CVD liquid crystal and flat panel display applications |
| 09/04/2003 | US20030164226 Wafer processing apparatus and a wafer stage and a wafer processing method |
| 09/04/2003 | US20030164225 Processing apparatus, exhaust processing process and plasma processing |
| 09/04/2003 | US20030164224 Method and apparatus for cleaning a semiconductor wafer processing system |
| 09/04/2003 | US20030164177 CVD chamber cleaning using mixed PFCs from capture/recycle |
| 09/04/2003 | US20030164143 Batch-type remote plasma processing apparatus |
| 09/04/2003 | US20030164142 Plasma processing apparatus |
| 09/03/2003 | EP1341219A2 Method of fabricating semiconductor device |
| 09/03/2003 | EP1340838A1 Method and device for atmospheric plasma processing |
| 09/03/2003 | EP1340837A1 Process for diamond coating of an iron-based substrate |
| 09/03/2003 | EP1340835A2 Object coated with carbon film and method of manufacturing the same |
| 09/03/2003 | EP1340269A2 Thin films for magnetic devices |
| 09/03/2003 | EP1340247A1 Method of forming dielectric films |
| 09/03/2003 | EP1340245A2 Method for incorporating silicon into cvd metal films |
| 09/03/2003 | EP1339895A1 Method and device for treating the surface of electrically insulating substrates |
| 09/03/2003 | EP1339892A1 Method of making coated cemented carbide cutting tools |
| 09/03/2003 | EP1339625A1 Throughput enhancement for single wafer reactor |
| 09/03/2003 | EP1144718A4 Indium source reagent compositions |
| 09/03/2003 | EP0964741B1 Method for improving vacuum in a very high vacuum system |
| 09/03/2003 | CN2571128Y Nondestructive heat-proof plasma resonant chamber |
| 09/03/2003 | CN1440563A Semiconductor processing equipment having improved particle performance |
| 09/03/2003 | CN1440465A Carbide coated steel articles and method of making them |
| 09/03/2003 | CN1440417A Organometallic compounds and their use as precursors for forming films and powders of metal or metal derivatives |
| 09/03/2003 | CN1120521C Formation of non-nomogenous device layer using inert gas shield |
| 09/03/2003 | CN1120249C Method and apparatus for fabrication of thin films by chemical vapor deposition |
| 09/02/2003 | US6614977 Use of deuterated gases for the vapor deposition of thin films for low-loss optical devices and waveguides |
| 09/02/2003 | US6614181 UV radiation source for densification of CVD carbon-doped silicon oxide films |
| 09/02/2003 | US6614107 Thin-film heat sink and method of manufacturing same |
| 09/02/2003 | US6613696 Method of forming composite silicon oxide layer over a semiconductor device |
| 09/02/2003 | US6613695 Surface preparation prior to deposition |
| 09/02/2003 | US6613685 Method for supporting a semiconductor wafer during processing |
| 09/02/2003 | US6613656 Sequential pulse deposition |
| 09/02/2003 | US6613587 Method of replacing at least a portion of a semiconductor substrate deposition chamber liner |
| 09/02/2003 | US6613442 Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof |
| 09/02/2003 | US6613434 Method for treating polymer surface |
| 09/02/2003 | US6613432 Plasma-deposited coatings, devices and methods |
| 09/02/2003 | US6613394 Method of surface treating or coating of materials |
| 09/02/2003 | US6613393 Depositing a wear protection matrix with the aid of a PECVD method, and incorporating optically functional inclusions in the form of particles or intermediate layers with the aid of a PVD process. The chemistry of the inclusion is influenced by |
| 09/02/2003 | US6613385 Highly spin-polarized chromium dioxide thin films prepared by CVD using chromyl chloride precursor |
| 09/02/2003 | US6613383 Atomic layer controlled deposition on particle surfaces |
| 09/02/2003 | US6613242 Process for treating solid surface and substrate surface |
| 09/02/2003 | US6613189 Apparatus for controlling the temperature of a gas distribution plate in a process reactor |
| 09/02/2003 | US6612787 Chromium-containing cemented tungsten carbide coated cutting insert |
| 08/28/2003 | WO2003071588A1 Production method of sic monitor wafer |
| 08/28/2003 | WO2003071504A1 Device for depositing thin layers with a wireless detection of process parameters |
| 08/28/2003 | WO2003071011A1 Method and device for depositing semi-conductor layers |
| 08/28/2003 | WO2003071003A1 Gas shower head, film forming device, and film forming method |
| 08/28/2003 | WO2003044843A3 Forming low k dielectric layers |
| 08/28/2003 | WO2003012835A3 Substrate support and method of fabricating the same |
| 08/28/2003 | WO2002019363A3 Pre-polycoating of glass substrates |
| 08/28/2003 | US20030163198 Methods for surface modification |
| 08/28/2003 | US20030162412 Low-dielectric silicon nitride film and method of forming the same, semiconductor device and fabrication process thereof |
| 08/28/2003 | US20030162410 Method of depositing low K films |
| 08/28/2003 | US20030162408 Insulation film on semiconductor substrate and method for forming same |
| 08/28/2003 | US20030162394 Method of fabricating semiconductor device |
| 08/28/2003 | US20030162373 Semiconductor thin film, semiconductor device employing the same, methods for manufacturing the same and device for manufacturing a semiconductor thin film |
| 08/28/2003 | US20030162365 Epitaxial thin film forming method |
| 08/28/2003 | US20030162346 Silicon oxide co-deposition/etching process |
| 08/28/2003 | US20030162042 Titanium alloy vacuum container and vacuum part |
| 08/28/2003 | US20030162034 Organofluorosilicate glass films containing both organic species and inorganic fluorines, exclusive of significant amounts of fluorocarbon species; insulating layers for integrated circuits and associated electronic devices |
| 08/28/2003 | US20030161970 Method and apparatus for manufacturing ultra fine three-dimensional structure |
| 08/28/2003 | US20030161954 Selecting precursor of deposit material and solvent, wherein precursor dissociates under conditions at which solvent is supercritical fluid, dissolving precursor, exposing substrate to solution under conditions at which precursor dissociates |
| 08/28/2003 | US20030161952 Alternately adsorbing a tungsten-containing compound and a nitrogen-containing compound on a substrate; reduced resistivity, lower concentration of fluorine |
| 08/28/2003 | US20030161951 Cyclic introduction of a silicon-containing precursor gas and an oxidizing gas separated by an intervening purge step |
| 08/28/2003 | US20030161950 Direct synthesis of long single-walled carbon nanotube strands |
| 08/28/2003 | US20030161948 Selective deposition of hydrous ruthenium oxide thin films |
| 08/28/2003 | US20030161695 Chromium-containing cemented carbide body having a surface zone of binder enrichment |
| 08/28/2003 | US20030161081 Electronic microcomponent including a capacitive structure, and process for producing it |