| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 03/25/2004 | CA2497786A1 Diffusion barrier coatings having graded compositions and devices incorporating the same |
| 03/25/2004 | CA2441680A1 Titanium article having improved corrosion resistance |
| 03/24/2004 | EP1401014A1 Plasma processing device, and method of cleaning the same |
| 03/24/2004 | EP1401013A1 Plasma processing device |
| 03/24/2004 | EP1401008A1 Element for coupling electrical energy into a processing chamber and processing system comprising such an element |
| 03/24/2004 | EP1400490A1 Deposition of a solid by thermal decomposition of a gaseous substance in a bowl reactor |
| 03/24/2004 | EP1400456A1 MANUFACTURING DEVICE FOR DLC FILM COATED PLASTIC CONTAINER; DLC FILM COATED PLASTIC CONTAINER, AND METHOD OF MANUFACTURING THE DLC FILM COATED PLASTIC CONTAINER |
| 03/24/2004 | EP1400345A1 Process for preparation of a plastic product |
| 03/24/2004 | EP1399967A1 Method of making full color display panels |
| 03/24/2004 | EP1399955A1 Method for preparing low dielectric films |
| 03/24/2004 | EP1399384A2 Method for the selective production of ordered carbon nanotubes in a fluidised bed |
| 03/24/2004 | EP1133582B1 Method for preparing titanium coatings |
| 03/24/2004 | EP1125003B1 Excess cvd reactant control |
| 03/24/2004 | EP0966553B1 Process for low temperature cvd using bi-amides |
| 03/24/2004 | CN1484778A Thin film transistor substrate using low dielectric constant and method for manufacturing the same |
| 03/24/2004 | CN1484712A Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof |
| 03/24/2004 | CN1483855A High temp. -resisting plasma cavity resonator |
| 03/24/2004 | CN1483853A Method for forming metal film |
| 03/24/2004 | CN1483769A Metallic coating with oxidation resistance and fatigue resistance |
| 03/24/2004 | CN1483687A Method for mfg outside diameter variation reduced optical fibre prefabricated bar |
| 03/24/2004 | CN1483668A Carbon nano pipe array growth method |
| 03/23/2004 | US6709916 Method for forming capacitor of semiconductor device |
| 03/23/2004 | US6709721 Purge heater design and process development for the improvement of low k film properties |
| 03/23/2004 | US6709703 Method for fabricating a III-V nitride film and an apparatus for fabricating the same |
| 03/23/2004 | US6709610 Isotropic dry cleaning process for noble metal integrated circuit structures |
| 03/23/2004 | US6709525 Low pressure chemical vapor deposition apparatus of vertical type for fabricating semiconductor devices |
| 03/23/2004 | US6709522 Material handling system and methods for a multichamber plasma treatment system |
| 03/23/2004 | US6709520 Reactor and method for chemical vapor deposition |
| 03/23/2004 | US6709519 Method and apparatus for non-contact, in-situ temperature measurement of a substrate film during chemical vapor deposition of the substrate film |
| 03/23/2004 | US6709512 Method of growing a polycrystalline silicon layer, method of growing a single crystal silicon layer and catalytic CVD apparatus |
| 03/23/2004 | US6709267 Semiconductors |
| 03/23/2004 | US6708700 Cleaning of semiconductor processing chambers |
| 03/23/2004 | US6708645 Arc resistant high voltage feedthru fitting for a vacuum deposition chamber |
| 03/18/2004 | WO2004023525A2 Low temperature deposition of silicon based thin films by single-wafer hot-wall rapid thermal chemical vapor deposition |
| 03/18/2004 | WO2004023508A2 Accessory member for dispensers of alkali metals |
| 03/18/2004 | WO2004009867A3 Zirconium complex used for the cvd method and preparation method of a thin film using thereof |
| 03/18/2004 | WO2003091469A3 Method for joining a diamond layer to a substrate, and diamond-coated substrate |
| 03/18/2004 | WO2003025249A9 Method of forming nitride films |
| 03/18/2004 | WO2002080244A3 Improved process for deposition of semiconductor films |
| 03/18/2004 | US20040054114 Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane |
| 03/18/2004 | US20040053946 Cancer treatment method |
| 03/18/2004 | US20040053496 Method for forming metal films |
| 03/18/2004 | US20040053494 Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer |
| 03/18/2004 | US20040053493 Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer |
| 03/18/2004 | US20040053492 Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer |
| 03/18/2004 | US20040053486 Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer |
| 03/18/2004 | US20040053479 Method and device for plasma cvd |
| 03/18/2004 | US20040053472 Method for film formation of gate insulator, apparatus for film formation of gate insulator, and cluster tool |
| 03/18/2004 | US20040053460 Substrate for electronic devices, manufacturing method therefor, and electronic device |
| 03/18/2004 | US20040053459 Dielectric layer for a semiconductor device and method of producing the same |
| 03/18/2004 | US20040053428 Method and apparatus for the compensation of edge ring wear in a plasma processing chamber |
| 03/18/2004 | US20040053053 Carbon nanotube array and method for forming same |
| 03/18/2004 | US20040053024 Method and coating system for reducing carbonaceous deposits on surfaces exposed to hydrocarbon fuels at elevated temperatures |
| 03/18/2004 | US20040052972 Atomic layer deposition (ALD)/epitaxy |
| 03/18/2004 | US20040052971 Obtaining adamantine amorphous carbon films by using plasma consisting of a mixture of acetylene and argon maintained by power of a microwave source |
| 03/18/2004 | US20040052969 Comprises high temperature heat exchanger |
| 03/18/2004 | US20040052942 Method for coating substrates and mask holder |
| 03/18/2004 | US20040052618 Semiconductor device producing apparatus and producing method of semiconductor device |
| 03/18/2004 | US20040052004 Thin-film magnetic head, method for producing the same and magnetic disk device using the same |
| 03/18/2004 | US20040051464 Plasma device and plasma generating method |
| 03/18/2004 | US20040051463 Plasma generator using microwave |
| 03/18/2004 | US20040051175 Forming metal barrier for overcoating substrate; then nitriding; multilayer coating |
| 03/18/2004 | US20040050744 Plastic container for liquid medicine |
| 03/18/2004 | US20040050685 Having gas atmosphere control mechanism whereby used gas is exhausted from vicinity of treatment section and vicinity of treatment section is maintained under specified gas atmosphere; forming silicon, silicon nitride films |
| 03/18/2004 | US20040050495 Plasma processing apparatus and plasma processing method |
| 03/18/2004 | US20040050494 Plasma processing device |
| 03/18/2004 | US20040050492 Heated gas distribution plate for a processing chamber |
| 03/18/2004 | US20040050490 Anodization-adapted aluminum alloy and plasma-treating apparatus made thereof |
| 03/18/2004 | US20040050328 Film-forming system and film-forming method |
| 03/18/2004 | US20040050326 Apparatus and method for automatically controlling gas flow in a substrate processing system |
| 03/18/2004 | US20040050325 Apparatus and method for delivering process gas to a substrate processing system |
| 03/18/2004 | US20040050102 Silica glass jig for semiconductor industry and method for producing the same |
| 03/18/2004 | DE10240160A1 Corrosion-protected component used as a connecting element, such as a rivet, bolt or screw, comprises a base body made from a steel or light metal and a corrosion-inhibiting surface layer made from aluminum, alloy or compound |
| 03/18/2004 | DE10239875A1 Verfahren und Vorrichtung zur großflächigen Beschichtung von Substraten bei Atmosphärendruckbedingungen Method and device for large-area coating of substrates under atmospheric pressure conditions |
| 03/17/2004 | EP1398826A1 Microwave plasma processing device, plasma processing method, and microwave radiating member |
| 03/17/2004 | EP1398820A2 Plasma treatment apparatus |
| 03/17/2004 | EP1398819A2 Matching box, vacuum apparatus using the same, and vacuum processing method |
| 03/17/2004 | EP1398274A1 MOISTURE AND GAS BARRIER PLASTIC CONTAINER WITH PARTITION PLATES, AND DEVICE AND METHOD FOR MANUFACTURING THE PLASTIC CONTAINER |
| 03/17/2004 | EP1398079A2 Method and coating system for reducing carbonaceous deposits on surfaces exposed to hydrocarbon fuels at elevated temperatures |
| 03/17/2004 | EP1397833A2 System and method to form a composite film stack utilizing sequential deposition techniques |
| 03/17/2004 | EP1397830A2 Copper vias in low-k technology |
| 03/17/2004 | EP1397529A1 Application of dense plasmas generated at atmospheric pressure for treating gas effluents |
| 03/17/2004 | EP1397528A2 Device for depositing especially, crystalline layers on one or more substrates, especially substrates which are also crystalline |
| 03/17/2004 | EP1397527A1 Grain oriented electric sheet of metal with an electrically insulating coating |
| 03/17/2004 | EP1397526A2 Modified diamond-like carbon (dlc) layer structure |
| 03/17/2004 | EP1047807B1 A DEPOSITION METHOD FOR USING A Cu(hfac) PRECURSOR WITH A SUBSTITUTED PHENYLETHYLENE LIGAND |
| 03/17/2004 | EP0931176A4 Improved plasma jet system |
| 03/17/2004 | CN1482655A Metal film semiconductor device and a method for forming the same |
| 03/17/2004 | CN1482653A Precursor containing a nitrogen compound bound to hfcl4 for hafnium oxide layer and method for forming hafnium oxide film using the precursor |
| 03/17/2004 | CN1482275A Method for preparing diamond/carbon or nitride nano mix phase gradient composite material |
| 03/17/2004 | CN1482083A Raw material providing device for chemical vapor deposition process |
| 03/17/2004 | CN1142577C Dual-face shower head electrode for magnetron plasma generating apparatus |
| 03/17/2004 | CN1142318C Diamond-cobalt boron compound wear-resistant composite coating of carbide tool and preparation process thereof |
| 03/17/2004 | CN1142059C Low dielectric constant inorganic/organic hybrid films and method of making it |
| 03/16/2004 | US6707086 Method for forming crystalline silicon nitride |
| 03/16/2004 | US6707076 Semiconductor element |
| 03/16/2004 | US6707017 High-power microwave window |
| 03/16/2004 | US6706648 APCVD method of forming silicon oxide using an organic silane, oxidizing agent, and catalyst-formed hydrogen radical |
| 03/16/2004 | US6706647 Method of and apparatus for manufacturing semiconductors |
| 03/16/2004 | US6706645 Method of manufacturing a semiconductor device |