| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
|---|
| 12/30/2004 | US20040261706 Method of growing a thin film onto a substrate |
| 12/30/2004 | US20040261705 Mass flow controller and gas supplying apparatus having the same |
| 12/30/2004 | US20040261704 Method and device for monitoring a CVD-process |
| 12/30/2004 | US20040261703 Apparatus and method for controlled application of reactive vapors to produce thin films and coatings |
| 12/30/2004 | US20040261702 Mechanically and thermodynamically stable amorphous carbon layers for temperature-sensitive surfaces |
| 12/30/2004 | DE10326734A1 Milling cutter tool with synthetic diamond layer 1 to 500 micron thick, containing milling edge, which comprises structured profile by dry chemical etching with diminishing layer thickness |
| 12/30/2004 | DE10323453A1 Plasma coating of plastic pipe, e.g. for lining drinking water pipe, involves moving the pipe relative to plasma zone to obtain gradient in coating |
| 12/30/2004 | DE10258678B4 Schnelles Verfahren zur Herstellung von Multilayer-Barriereschichten Rapid method for the production of multi-layer barrier layers |
| 12/29/2004 | WO2004114385A1 Evaporation method and evaporator |
| 12/29/2004 | WO2004114377A1 Heat treatment apparatus |
| 12/29/2004 | WO2004114366A2 Hdp-cvd multistep gapfill process |
| 12/29/2004 | WO2004113586A1 Coating for a mechanical part, comprising at least one hydrogenated amorphous carbon, and method of depositing one such coating |
| 12/29/2004 | WO2004113585A2 Atomic layer deposition of barrier materials |
| 12/29/2004 | WO2004113584A1 Method dor producing coated metal wire |
| 12/29/2004 | WO2004082008A8 Cvd apparatus and method for cleaning cvd apparatus |
| 12/29/2004 | WO2004080906A3 Method and system for coating a glass contacting surface with a thermal barrier and lubricous coating |
| 12/29/2004 | EP1492160A1 Vaporizer, various devices using the same, and vaporizing method |
| 12/29/2004 | EP1492159A1 Method of depositing cvd thin film |
| 12/29/2004 | EP1491655A2 Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane |
| 12/29/2004 | EP1491654A1 Proximity CVD deposition |
| 12/29/2004 | EP1491255A1 Method for carrying out homogeneous and heterogeneous chemical reactions using plasma |
| 12/29/2004 | EP1490896A1 Method of forming nanocrystals |
| 12/29/2004 | EP1490529A1 Vapor deposition of silicon dioxide nanolaminates |
| 12/29/2004 | EP1218558B1 Coated milling insert |
| 12/29/2004 | CN2666931Y Apparatus for growing metal organic compound vapour phase deposit of zinc oxide crystal film |
| 12/29/2004 | CN2666929Y Radio frequency electric power leading-in apparatus |
| 12/29/2004 | CN2666928Y Apparatus for chemical gas phase depositing diamond film by plasma heat wire method |
| 12/29/2004 | CN1559079A Heating system and method of reactor for heating atmosphere |
| 12/29/2004 | CN1559077A Procedure and device for the production of a plasma |
| 12/29/2004 | CN1558001A Substrate holder |
| 12/29/2004 | CN1182597C Controlled conversion of metal oxyfluorides into superconducting oxides |
| 12/29/2004 | CN1182273C Method for growing ZnO film by solid source chemical gas-phase deposition |
| 12/28/2004 | US6835995 Low dielectric constant material for integrated circuit fabrication |
| 12/28/2004 | US6835980 Semiconductor device with novel film composition |
| 12/28/2004 | US6835975 DRAM circuitry having storage capacitors which include capacitor dielectric regions comprising aluminum nitride |
| 12/28/2004 | US6835919 Uniform radial distribution of radicals emanating from a plasma source is improved; for chemical vapor deposition |
| 12/28/2004 | US6835674 Methods for treating pluralities of discrete semiconductor substrates |
| 12/28/2004 | US6835671 Method of making an integrated circuit using an EUV mask formed by atomic layer deposition |
| 12/28/2004 | US6835669 Film forming method, semiconductor device and semiconductor device manufacturing method |
| 12/28/2004 | US6835663 Hardmask of amorphous carbon-hydrogen (a-C:H) layers with tunable etch resistivity |
| 12/28/2004 | US6835658 Method of fabricating capacitor with hafnium |
| 12/28/2004 | US6835613 Method of producing an integrated circuit with a carbon nanotube |
| 12/28/2004 | US6835523 Introducing an optical disk having a surface protected by a protective hard carbon film having thickness of 500 A or less, irradiating a semiconductor laser light on the disk through such hard carbon coating |
| 12/28/2004 | US6835446 Surface-coated carbide alloy cutting tool |
| 12/28/2004 | US6835425 Layer-forming method using plasma state reactive gas |
| 12/28/2004 | US6835417 Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes |
| 12/28/2004 | US6835416 Apparatus for growing thin films |
| 12/28/2004 | US6835414 Low energy plasma discharges; generation high frequency electromagnetic radiation in container |
| 12/28/2004 | US6835278 Plasma is ignited from gases fed into a chamber that is located remotely from the processing chamber; activated species are introduced into the processing chamber via a dedicated inlet port, increasing conductance; efficiency |
| 12/28/2004 | US6835275 Reducing deposition of process residues on a surface in a chamber |
| 12/28/2004 | US6835221 Exhaust gas filtration device and auxiliary filtration device |
| 12/28/2004 | US6834848 Atomizer |
| 12/28/2004 | CA2128188C Gas producing apparatus and method and apparatus for manufacturing optical waveguide and optical fiber preform |
| 12/23/2004 | WO2004112118A1 A method of fault detection in manufaturing equipment |
| 12/23/2004 | WO2004112114A1 Process for depositing film, process for fabricating semiconductor device, semiconductor device and system for depositing film |
| 12/23/2004 | WO2004112092A2 Adjustable gas distribution system |
| 12/23/2004 | WO2004111300A2 Method for processing surfaces of aluminium alloy sheets and strips |
| 12/23/2004 | WO2004111297A1 Treatment gas supply mechanism, film-forming device, and film-forming method |
| 12/23/2004 | WO2004111296A2 Stress reduction of sioc low k film by addition of alkylenes to omcts based processes |
| 12/23/2004 | WO2004110737A2 High rate deposition for the formation of high quality optical coatings |
| 12/23/2004 | WO2004093163A3 Method and apparatus for silicone oxide deposition on large area substrates |
| 12/23/2004 | WO2004092672A3 Amorphous carbon layer for heat exchangers |
| 12/23/2004 | WO2004070817A3 Method of eliminating residual carbon from flowable oxide fill material |
| 12/23/2004 | WO2004063417A3 Method to improve cracking thresholds and mechanical properties of low-k dielectric material |
| 12/23/2004 | WO2004063416A3 Apparatus and method for solution plasma spraying |
| 12/23/2004 | WO2004044963B1 Atomic layer deposition methods |
| 12/23/2004 | WO2003097532A8 Process for manufacturing a gallium rich gallium nitride film |
| 12/23/2004 | US20040260109 Method for preparing bis(cyclopentadienly)ruthenium and bis(cyclopentadienyl)ruthenium prepared by the method |
| 12/23/2004 | US20040259385 Method of forming insulating film improved in electric insulating property |
| 12/23/2004 | US20040259383 Method of forming a metal oxide film |
| 12/23/2004 | US20040259275 Method of forming ferroelectric film |
| 12/23/2004 | US20040258926 coating substrates with layer of crystal structure carbon, zirconium, multilayer coating comprising silver and/or nickel chromium alloys, then heat treating in an atmosphere including oxygen, for times sufficient for bending and/or tempering; carbiding; windshields; protective coatings |
| 12/23/2004 | US20040258918 Diamond films and methods of making diamond films |
| 12/23/2004 | US20040258851 Apparatus for high-throughput ion beam-assisted deposition (IBAD) |
| 12/23/2004 | US20040258840 [method of stabilizing material layer] |
| 12/23/2004 | US20040258547 Pump piston and/or elements sealing the pump piston, in particular a sealing ring of elastomeric material, and a device and method for coating an object of elastomeric material |
| 12/23/2004 | US20040256351 Integration of ALD/CVD barriers with porous low k materials |
| 12/23/2004 | US20040255868 Plasma etch resistant coating and process |
| 12/23/2004 | US20040255864 ICP antenna and plasma generating apparatus using the same |
| 12/23/2004 | US20040255863 Plasma process apparatus |
| 12/23/2004 | US20040255862 Reactor for producing reactive intermediates for low dielectric constant polymer thin films |
| 12/23/2004 | US20040255860 Rapid thermal processing apparatus and methods |
| 12/23/2004 | US20040255859 Method and apparatus for delivering precursors |
| 12/23/2004 | US20040255858 Gas valve assembly and apparatus using the same |
| 12/23/2004 | US20040255856 Method and device for depositing a plurality of layers on a substrate |
| 12/23/2004 | US20040255855 Metalorganic chemical vapor deposition (MOCVD) process and apparatus to produce multi-layer high-temperature superconducting (HTS) coated tape |
| 12/23/2004 | US20040255854 Cvd apparatus and method of cleaning the cvd apparatus |
| 12/23/2004 | US20040255843 Susceptor gaseous phase growing device, device and method for manufacturing epitaxial wafer, and epitaxial wafer |
| 12/23/2004 | US20040255751 Musical instrument strings with polymer treated surface |
| 12/23/2004 | CA2528702A1 Method for processing surfaces of aluminium alloy sheets and strips |
| 12/22/2004 | EP1489651A1 Substrate processing device and substrate processing method, fast rotary valves, cleaning method |
| 12/22/2004 | EP1489646A1 Cvd apparatus and method of cleaning the cvd apparatus |
| 12/22/2004 | EP1489645A1 Cvd apparatus and method of cleaning the cvd apparatus |
| 12/22/2004 | EP1489197A1 Method of manufacturing semiconductor device |
| 12/22/2004 | EP1488443A1 Device for confinement of a plasma within a volume |
| 12/22/2004 | EP1488023A1 Method for coating a substrate and device for carrying out the method |
| 12/22/2004 | EP1488022A1 Method of forming a diamond coating on an iron-based substrate and use of such an iron-based substrate for hosting a cvd diamond coating |
| 12/22/2004 | EP1487619A1 Self-sharpening cutting tool with hard coating |
| 12/22/2004 | EP1487531A2 Coated microfluidic delivery system |
| 12/22/2004 | EP1412552B1 Method for the production of coated substrates |