| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 04/14/2005 | US20050077512 Nitride semiconductors on silicon substrate and method of manufacturing the same |
| 04/14/2005 | US20050077280 LED heat lamp arrays for CVD heating |
| 04/14/2005 | DE19520961B4 Verfahren zum Bilden einer ferroelektrischen Schicht A method of forming a ferroelectric layer |
| 04/14/2005 | DE10342398A1 Schutzschicht für einen Körper sowie Verfahren und Anordnung zur Herstellung von Schutzschichten Protective layer for a body as well as methods and apparatus for the production of protective layers |
| 04/14/2005 | DE10132882B4 Verfahren zum Ausbilden einer Dünnschicht unter Verwendung einer Atomschichtabscheidung A method for forming a thin film using an atomic layer deposition |
| 04/14/2005 | CA2540592A1 Polysulfide thermal vapour source for thin sulfide film deposition |
| 04/13/2005 | EP1523034A2 Method of manufacturing silicon carbide film |
| 04/13/2005 | EP1522611A1 Diamond composite substrate and process for producing the same |
| 04/13/2005 | EP1522603A1 Method for coating an object and object |
| 04/13/2005 | EP1522535A2 Environmental barrier coating |
| 04/13/2005 | EP1522403A2 Gas barrier film |
| 04/13/2005 | EP1522090A2 Thermal processing system and configurable vertical chamber |
| 04/13/2005 | EP1521604A2 Coatings |
| 04/13/2005 | EP1268879A4 Supplying and exhausting system in plasma polymerizing apparatus |
| 04/13/2005 | EP1264005A4 Plasma polymerization system and method for plasma polymerization |
| 04/13/2005 | CN1606634A Method for monitoring the course of a process using a reactive gas containing one or several hydrocarbons |
| 04/13/2005 | CN1606632A Vaporiser/delivery vessel for volatile/thermally sensitive solid and liquid compounds |
| 04/13/2005 | CN1606145A Particle sticking prevention apparatus and plasma processing apparatus |
| 04/13/2005 | CN1606131A Fluid feeding apparatus |
| 04/13/2005 | CN1605460A Nano-multilayered structures, components and associated methods of manufacture |
| 04/13/2005 | CN1197131C Plasma etching device using plasma confining device |
| 04/13/2005 | CN1197125C Method for producing thermal plate and semi-conductor device |
| 04/13/2005 | CN1197121C Method and apparatus for reducing diffuseness of perfluoro compound in process of semiconductor mfg. |
| 04/13/2005 | CN1196655C Compositions for coating glass and the coated glass |
| 04/12/2005 | US6879778 Batch furnace |
| 04/12/2005 | US6879051 Systems and methods to determine seed layer thickness of trench sidewalls |
| 04/12/2005 | US6879042 Semiconductor device and method and apparatus for manufacturing the same |
| 04/12/2005 | US6878921 Photovoltaic device and manufacturing method thereof |
| 04/12/2005 | US6878625 Method for manufacturing semiconductor device |
| 04/12/2005 | US6878419 Plasma treatment of porous materials |
| 04/12/2005 | US6878405 Or a vapor; combination causes a contact angle theta of the layer comprising DLC to decrease by at least 20%. |
| 04/12/2005 | US6878402 Method and apparatus for improved temperature control in atomic layer deposition |
| 04/12/2005 | US6878395 Average surface temperature measured optically and level of the gas cushions regulated by varying the individually controlled gas flow producing the cushions; variations lie within a predetermined temperature window. |
| 04/12/2005 | US6878248 Method of manufacturing an object in a vacuum recipient |
| 04/12/2005 | US6878234 Plasma processing device and exhaust ring |
| 04/12/2005 | US6878233 Workpiece holding mechanism |
| 04/12/2005 | US6878211 Supporting structure for a ceramic susceptor |
| 04/12/2005 | US6878210 Surface-treating holder having tubular structure and method using the same |
| 04/12/2005 | US6878207 Gas gate for isolating regions of differing gaseous pressure |
| 04/12/2005 | US6878206 Lid assembly for a processing system to facilitate sequential deposition techniques |
| 04/12/2005 | US6877458 Apparatus for forming deposited film |
| 04/07/2005 | WO2005031841A2 Methods of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition |
| 04/07/2005 | WO2005031831A1 Vaporizer |
| 04/07/2005 | WO2005031830A1 Plasma processing device |
| 04/07/2005 | WO2005031813A2 Method for forming pentacene film |
| 04/07/2005 | WO2005031803A2 Thermal processing system with cross flow injection system with rotatable injectors |
| 04/07/2005 | WO2005031233A2 Thermal processing system with cross-flow liner |
| 04/07/2005 | WO2005031044A1 Susceptor for induction-heated epitaxial reactors |
| 04/07/2005 | WO2005031042A2 Method and facility for the production of a band on a substrate band |
| 04/07/2005 | WO2005031033A1 Method of making enhanced cvd diamond |
| 04/07/2005 | WO2005031032A2 Apparatus for conveying gases to and from a chamber |
| 04/07/2005 | WO2005031031A1 Metal thin film chip production method and metal thin film chip production device |
| 04/07/2005 | WO2005008746A3 Methods of forming a phosphorus doped silicon dioxide layer |
| 04/07/2005 | WO2005006350A3 Apparatus for consecutive deposition of high-temperature superconducting (hts) buffer layers |
| 04/07/2005 | US20050074984 Method of forming silicon oxide layer and method of manufacturing thin film transistor thereby |
| 04/07/2005 | US20050074983 Substrate processing apparatus and substrate processing method, high speed rotary valve, and cleaning method |
| 04/07/2005 | US20050074980 Method for forming a ruthenium metal layer |
| 04/07/2005 | US20050074676 Chromium oxide film serves as etching stopper formed on diamond film serving as transmitter, and absorptive tungsten layer |
| 04/07/2005 | US20050074554 In situ etch back of low-k dielectric layer of organofluorosilicate glass, organosilicate glass or black diamond; reaction with process gas to form an extra element; nitrogen fluoride (NF3) provides nitrogen and carbon fluoride gas provides carbon; nitriding, carbiding; high speed cleaning; semiconductor |
| 04/07/2005 | US20050073803 Methods of manufacturing integrated circuit devices that include a metal oxide layer disposed on another layer to protect the other layer from diffusion of impurities and integrated circuit devices manufactured using same |
| 04/07/2005 | US20050072991 Method of manufacturing insulating layer and semiconductor device including insulating layer, and semiconductor device formed thereby |
| 04/07/2005 | US20050072498 Chemical vapor deposition production of high density replacements for depleted uranium ballistic materials; environmental and human safety |
| 04/07/2005 | US20050072361 Multi-layered radiant thermal evaporator and method of use |
| 04/07/2005 | US20050072360 Submicron size metal deposit apparatus |
| 04/07/2005 | US20050072359 Mask frame assembly for depositing a thin layer of an organic electroluminescent device and method for depositing a thin layer using the same |
| 04/07/2005 | US20050072357 Sublimation bed employing carrier gas guidance structures |
| 04/07/2005 | US20050072356 Easily loaded and unloaded getter device for reducing evacuation time and contamination in a vacuum chamber and method for use of same |
| 04/07/2005 | DE10342448A1 Korrosionsschutzbeschichtung Anti-corrosion coating |
| 04/07/2005 | DE10342401A1 Vacuum deposition process for enhancement of hardness of plastic substrate with involves application of layer to change the structure of functional layers applied onto substrate |
| 04/07/2005 | DE10341020A1 Vorrichtung zum Innenbeschichten von Hohlkörpern An apparatus for coating the inside of hollow bodies |
| 04/07/2005 | CA2542819A1 Metal thin film chip production method and metal thin film chip production device |
| 04/06/2005 | EP1521509A2 Method arrangement and electrode for generating an atmospheric pressure glow plasma |
| 04/06/2005 | EP1521297A1 Plasma processing equipment |
| 04/06/2005 | EP1521293A1 Submicron size metal deposit apparatus |
| 04/06/2005 | EP1519914A1 Novel alkaline earth metal complexes and use thereof |
| 04/06/2005 | EP1294640A4 Method and apparatus for production of high purity silicon |
| 04/06/2005 | EP1254278B1 Modulator with liquid crystal cell having a layer which influences the orientation of the liquid crystal |
| 04/06/2005 | EP1155164A4 In situ chemical generator and method |
| 04/06/2005 | EP1019945B1 Method and device for surface-treating substrates |
| 04/06/2005 | CN1605116A Apparatus and method for heat treating semiconductor |
| 04/06/2005 | CN1604270A Particle removal apparatus and method and plasma processing apparatus |
| 04/06/2005 | CN1603464A Auxiliary grid hot wire chemical vapor deposition process for preparing nano-diamond thin film |
| 04/06/2005 | CN1603463A Non-linear hot wire structure used for preparing large area uniform thin film |
| 04/06/2005 | CN1603462A Surface modification method for alloy and intermetallic compound |
| 04/06/2005 | CN1603455A Thin-film deposition system |
| 04/06/2005 | CN1603231A Method for controlling growth density of carbon nanometer tube |
| 04/06/2005 | CN1196383C Microwave plasma processor and processing method thereof |
| 04/06/2005 | CN1196177C Combination of heating furnace and loading tool of semiconductor substrate and mfg. method of semiconductor device |
| 04/06/2005 | CN1196173C Device and method for manufacture of liquid crystal display |
| 04/06/2005 | CN1196168C Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process |
| 04/06/2005 | CN1196156C Field emission device using improved carbon film |
| 04/06/2005 | CN1195694C Transparent matrix having at least a silicon nitride or silicon nitride oxide base thin layer and preparation method therefor |
| 04/05/2005 | US6876442 Method of calibrating and using a semiconductor processing system |
| 04/05/2005 | US6875708 Method of producing diamond film and diamond film produced thereby |
| 04/05/2005 | US6875687 Capping layer for extreme low dielectric constant films |
| 04/05/2005 | US6875677 Method to control the interfacial layer for deposition of high dielectric constant films |
| 04/05/2005 | US6875558 Integration scheme using self-planarized dielectric layer for shallow trench isolation (STI) |
| 04/05/2005 | US6875468 Method and device for treating and/or coating a surface of an object |
| 04/05/2005 | US6875366 Semiconductors |
| 04/05/2005 | US6875280 Substrate processing apparatus and substrate processing method |