| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 04/04/2006 | US7021881 Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections |
| 04/04/2006 | US7020981 comprises two reaction chambers, inlets and exhaust lines and a flow control system configured to alternately constrict flow through the first and second exhausts; diffusion barrier forms between first inlet and the substrate; atomic layer deposition |
| 03/30/2006 | WO2006033731A2 Atomic layer deposition of copper using surface-activating agents |
| 03/30/2006 | WO2006033268A1 Transparent conductive film |
| 03/30/2006 | WO2006033166A1 Organic el light emitting element, manufacturing method thereof and display |
| 03/30/2006 | WO2006032963A2 Methods for producing noble metal films, noble metal oxide films, and noble metal silicide films |
| 03/30/2006 | WO2006032480A1 Machining tool and method for the production thereof |
| 03/30/2006 | US20060068992 Method for growing thin oxide films |
| 03/30/2006 | US20060068598 Film formation apparatus and method of using the same |
| 03/30/2006 | US20060068173 Methods for forming and patterning of metallic films |
| 03/30/2006 | US20060068126 Method for making an aligned carbon nanotube |
| 03/30/2006 | US20060068107 Surface and composition enhancements to high aspect ratio C-MEMS |
| 03/30/2006 | US20060068106 Methods for coating gemstones and other decorative objects |
| 03/30/2006 | US20060068105 Film forming method and film forming apparatus |
| 03/30/2006 | US20060068104 Thin-film formation in semiconductor device fabrication process and film deposition apparatus |
| 03/30/2006 | US20060068103 Film forming method |
| 03/30/2006 | US20060068101 Film forming method |
| 03/30/2006 | US20060068100 Film forming method |
| 03/30/2006 | US20060068099 Grading PrxCa1-xMnO3 thin films by metalorganic chemical vapor deposition |
| 03/30/2006 | US20060068098 Deposition of ruthenium metal layers in a thermal chemical vapor deposition process |
| 03/30/2006 | US20060068097 Passivation on metal layer with exposure to oxygen and process with rhenium carbonyl precursor |
| 03/30/2006 | US20060068096 Method of synthesising carbon nano tubes |
| 03/30/2006 | US20060068081 Leak judgment method, and computer-readable recording medium with recorded leak-judgment-executable program |
| 03/30/2006 | US20060068080 Combinatorial discovery of nanomaterials |
| 03/30/2006 | US20060065635 Deposition chamber surface enhancement and resulting deposition chambers |
| 03/30/2006 | US20060065368 Gas delivery device for improved deposition of dielectric material |
| 03/30/2006 | US20060065289 Method of cleaning a film-forming apparatus and film-forming apparatus |
| 03/30/2006 | US20060065197 Vapor deposition apparatus |
| 03/30/2006 | US20060065196 Susceptor |
| 03/30/2006 | US20060065195 Microwave plasma generating device |
| 03/30/2006 | US20060065194 Diffuser and semiconductor device manufacturing equipment having the same |
| 03/30/2006 | DE102004046287A1 Automotive headlamp installation frame has multi-layered structure incorporating metalized intermediate layer on plastic |
| 03/30/2006 | CA2580814A1 Apparatus and process for surface treatment of substrate using an activated reactive gas |
| 03/29/2006 | EP1641031A2 Deposition of TiN films in a batch reactor |
| 03/29/2006 | EP1640481A1 rotatable substrate holder |
| 03/29/2006 | EP1640479A1 Conductive diamond electrode and process for producing the same |
| 03/29/2006 | EP1640475A2 Precursor compounds for deposition of ceramic and metal films and preparation methods thereof |
| 03/29/2006 | EP1640474A1 Thin film forming device and thin film forming method |
| 03/29/2006 | EP1639150A2 Apparatus and method for controlled application of reactive vapors to produce thin films and coatings |
| 03/29/2006 | EP1638701A2 Ion beam-assisted high-temperature superconductor (hts) deposition for thick film tape |
| 03/29/2006 | EP1638700A2 Ultraviolet (uv) and plasma assisted metalorganic chemical vapor deposition (mocvd) system |
| 03/29/2006 | EP1432843B1 Method for making carbon doped oxide film |
| 03/29/2006 | EP1404903B1 Process chamber with a base with sectionally different rotational drive and layer deposition method in such a process chamber |
| 03/29/2006 | EP1205964B1 Plasma process device, electrode structure thereof, and stage structure |
| 03/29/2006 | EP1153157B1 Thermal barrier coating resistant to sintering |
| 03/29/2006 | EP0953204B1 Capacitively coupled rf-plasma reactor and method for manufacturing workpieces |
| 03/29/2006 | CN1754252A Method for producing hydrogenated silicon oxycarbide films |
| 03/29/2006 | CN1754251A Method of improving interlayer adhesion |
| 03/29/2006 | CN1754008A Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition |
| 03/29/2006 | CN1754007A Method for depositing silicon |
| 03/29/2006 | CN1753730A Catalyst structure particularly for the production of field emission flat screens |
| 03/29/2006 | CN1753720A Method and system for supplying high purity fluid |
| 03/29/2006 | CN1753152A High density electro thick fluid chemical gaseous phase sedimentation process and method of improving film thickness unifomity |
| 03/29/2006 | CN1752282A Annealing technique for eliminating titanium nitride film stress and decreasing film resistance |
| 03/29/2006 | CN1752281A RF grounding of cathode in process chamber |
| 03/29/2006 | CN1752280A System for CD glow plasma CVD zin oxide film and preparing process |
| 03/29/2006 | CN1752279A Apparatus for treating thin film and method of treating thin film |
| 03/29/2006 | CN1752278A Method for mfg. diamond coating on spherical substrate and device thereof |
| 03/29/2006 | CN1752277A System for continuous batch preparing diamond film |
| 03/29/2006 | CN1248549C Induction coupling plasma generating equipment containing zigzag coil antenna |
| 03/29/2006 | CN1248289C Inductive coupling type plasma device |
| 03/29/2006 | CN1247813C Film including several components and its forming process |
| 03/29/2006 | CN1247423C Distributed control method for transported material motion in material transport system |
| 03/29/2006 | CN1247323C Material liquid supply apparatus having a cleaning function and method for detaching material container thereof |
| 03/28/2006 | US7020173 Surface emitting semiconductor laser and method of fabricating the same |
| 03/28/2006 | US7019399 Copper diffusion barriers made of diamond-like nanocomposits doped with metals |
| 03/28/2006 | US7019263 Substrate heating apparatus and multi-chamber substrate processing system |
| 03/28/2006 | US7019253 includes chamber and coil system for converting field-generating current into radio frequency magnetic field in the chamber containing ionized gas which reacts with the magnetic plasma |
| 03/28/2006 | US7019159 Reacting hexachlorodisilane in an organic solvent with >6-fold moles of monohydrocarbylamine (C1-4 hydrocarbyl group); chemical vapor deposition of the disilane and oxygen gas to form silicon oxynitrides as dielectric films for semiconductors; good film deposition rates at low temperature |
| 03/28/2006 | US7018947 Low resistivity silicon carbide |
| 03/28/2006 | US7018940 Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processes |
| 03/28/2006 | US7018789 Photostimulable phosphor crystal and an activation metal |
| 03/28/2006 | US7018729 For thin-film diamond-like carbon (DLC) mechanical/corrosion protection layer formed by low energy magnetron sputtering; magnetic media hard disk drive; nitrogen enhanced DLC layer in which nitrogen ion implantation into the magnetic layer is minimized |
| 03/28/2006 | US7018683 Electron beam processing method |
| 03/28/2006 | US7018676 Method and device for manufacturing ceramics, semiconductor device and piezoelectric device |
| 03/28/2006 | US7018675 reacting ruthenium precursor and oxygen to form ruthenium oxide layer and heating ruthenium oxide layer in presence of a hydrogen-rich gas to convert ruthenium oxide layer to a smooth-surfaced ruthenium metal layer; conductive material for semiconductor capacitor plates |
| 03/28/2006 | US7018553 Optical monitoring and control system and method for plasma reactors |
| 03/28/2006 | US7018517 Transfer chamber for vacuum processing system |
| 03/28/2006 | US7018506 Plasma processing apparatus |
| 03/28/2006 | US7018505 Apparatus including chuck and matching box |
| 03/28/2006 | US7018504 Loadlock with integrated pre-clean chamber |
| 03/28/2006 | US7018479 Rotating semiconductor processing apparatus |
| 03/28/2006 | US7018478 Method of growing a thin film onto a substrate |
| 03/28/2006 | US7018469 Atomic layer deposition methods of forming silicon dioxide comprising layers |
| 03/28/2006 | US7017652 Method and apparatus for transferring heat from a substrate to a chuck |
| 03/28/2006 | US7017514 Method and apparatus for plasma optimization in water processing |
| 03/28/2006 | US7017269 Suspended gas distribution plate |
| 03/23/2006 | WO2006030918A1 Method for fabrication of group iii nitride semiconductor |
| 03/23/2006 | WO2006030762A1 Transparent conductive film, process for producing the same, transparent conductive base material and luminescent device |
| 03/23/2006 | WO2006030663A1 Surface-coated cutting tool having coating film on base |
| 03/23/2006 | WO2006030617A1 METHOD OF VAPOR-PHASE GROWING, AND VAPOR-PHASE GROWING APPARATUS, FOR AlGaN |
| 03/23/2006 | WO2006029747A2 Cutting tool with oxide coating |
| 03/23/2006 | WO2006029743A1 Method and device for applying an electrically conductive transparent coating to a substrate |
| 03/23/2006 | WO2006015072A3 Closed loop clean gas methods and systems |
| 03/23/2006 | WO2005121388A9 Al2o3 ceramic tools with diffusion bonding enhanced layer |
| 03/23/2006 | US20060063346 Method of forming a layer and method of forming a capacitor of a semiconductor device having the same |
| 03/23/2006 | US20060063074 Thin-film battery having ultra-thin electrolyte |
| 03/23/2006 | US20060062952 Dispensing package |
| 03/23/2006 | US20060062931 Method and device for microwave plasma deposition of a coating on a thermoplastic container surface |
| 03/23/2006 | US20060062930 Plasma-assisted carburizing |