| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/14/2006 | EP1670044A1 Production method for silicon epitaxial wafer, and silicon epitaxial wafer |
| 06/14/2006 | EP1670015A1 sp sp 3 /sp BONDING BORON NITRIDE THIN FILM HAVING SELF-FORMING SURFACE SHAPE BEING ADVANTAGEOUS IN EXHIBITING PROPERTY OF EMITTING ELECTRIC FIELD ELECTRONS, METHOD FOR PREPARATION THEREOF AND USE THEREOF |
| 06/14/2006 | EP1669474A1 Delivery device |
| 06/14/2006 | EP1669361A1 Precursors for silica or metal silicate films |
| 06/14/2006 | EP1668682A2 Growth of high-k dielectrics by atomic layer deposition |
| 06/14/2006 | EP1668668A2 Deposition of silicon-containing films from hexachlorodisilane |
| 06/14/2006 | EP1668167A2 Protection of metallic surfaces against thermally-induced wrinkling (rumpling) |
| 06/14/2006 | EP1667850A2 Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing system |
| 06/14/2006 | EP1278825B1 Methods of producing membrane vesicles |
| 06/14/2006 | EP1258234B1 Plastic container for liquid medicine |
| 06/14/2006 | EP1171245B1 Coating medical devices using air suspension |
| 06/14/2006 | EP1158070A4 Tungsten carbide coatings and method for producing the same |
| 06/14/2006 | EP0956142B1 Liquid cooled trap |
| 06/14/2006 | DE102005056937A1 Harte Beschichtung und Bearbeitungswerkzeug mit darauf aufgebrachter harter Beschichtung Hard coating and machining tools with hard coating applied thereto |
| 06/14/2006 | DE102004058521A1 Verfahren und Vorrichtung zum Abscheiden von dicken Gallium-Nitrit-Schichten auf einem Saphirsubstrat und zugehörigen Substrathalter Method and apparatus for depositing thick gallium nitride layers on a sapphire substrate and associated substrate holder |
| 06/14/2006 | CN2788350Y 扩散器框架 Diffuser frame |
| 06/14/2006 | CN1788336A Method of forming barrier film and method of forming electrode film |
| 06/14/2006 | CN1788334A Film forming apparatus |
| 06/14/2006 | CN1788112A High purity electrolytic sulfonic acid solutions |
| 06/14/2006 | CN1788108A Method for curing low dielectric constant film using direct current bias |
| 06/14/2006 | CN1788107A Cvd涂敷装置 Cvd coating device |
| 06/14/2006 | CN1788106A Treating device using raw material gas and reactive gas |
| 06/14/2006 | CN1788105A Method and apparatus for chemical plasma processing of plastic container |
| 06/14/2006 | CN1788104A Thin film forming device and thin film forming method |
| 06/14/2006 | CN1786263A Plasma reaction chamber |
| 06/14/2006 | CN1786262A Method of atmospheric pressure plane discharge chemical gaseous phase depositing nano-particular film and its device |
| 06/14/2006 | CN1786261A Portective ring |
| 06/14/2006 | CN1259707C Method for detecting deposition temperature in chemical vapour deposition chamber |
| 06/14/2006 | CN1259450C Chemical vapour deposition device and method |
| 06/14/2006 | CN1259326C Process for preparing trialkyl group VA metal compound |
| 06/13/2006 | US7062411 Method for process control of semiconductor manufacturing equipment |
| 06/13/2006 | US7062347 Maintenance method and system for plasma processing apparatus |
| 06/13/2006 | US7062344 Fabrication system and fabrication method |
| 06/13/2006 | US7062141 Deposition of thick BPSG layers as upper and lower cladding for optoelectronics applications |
| 06/13/2006 | US7061181 Gas discharge panel and its production method |
| 06/13/2006 | US7060944 Heat treatment device and heat treatment method |
| 06/13/2006 | US7060638 Method of forming low dielectric constant porous films |
| 06/13/2006 | US7060614 Method for forming film |
| 06/13/2006 | US7060514 Process for fabricating films of uniform properties on semiconductor devices |
| 06/13/2006 | US7060422 Method of supercritical processing of a workpiece |
| 06/13/2006 | US7060330 Chemical vapor deposition; low dielectric constant (k) |
| 06/13/2006 | US7060323 Method of forming interlayer insulating film |
| 06/13/2006 | US7060322 Method of making heat treatable coated article with diamond-like carbon (DLC) coating |
| 06/13/2006 | US7060234 F2 abatement is efficiently performed by directly injecting H2 in line with a foreline exiting the processing chamber. |
| 06/13/2006 | US7060134 One piece shim |
| 06/13/2006 | US7060132 Method and apparatus of growing a thin film |
| 06/13/2006 | US7059811 Cutting tool coated with diamond |
| 06/13/2006 | US7059269 Pulsed electric field system for decontamination of biological agents on a dielectric sheet material |
| 06/13/2006 | US7059268 Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma |
| 06/13/2006 | US7059267 Use of pulsed grounding source in a plasma reactor |
| 06/08/2006 | WO2006060827A2 Methods and apparatus for downstream dissociation of gases |
| 06/08/2006 | WO2006060134A2 Restricted radiated heating assembly for high temperature processing |
| 06/08/2006 | WO2006059602A1 Method of forming film, film forming apparatus and storage medium |
| 06/08/2006 | WO2006059187A1 Liquid precursor refill system |
| 06/08/2006 | WO2006058847A1 Method and device for the deposition of gallium nitrite layers on a sapphire substrate and associated substrate holder |
| 06/08/2006 | WO2006058547A1 Method for manufacturing a pecvd carbon coated polymer article and article obtained by such method |
| 06/08/2006 | WO2006058353A1 Machining tool |
| 06/08/2006 | WO2006037844A3 Cvd doped structures |
| 06/08/2006 | WO2006005907A3 Pump cleaning |
| 06/08/2006 | WO2005124827A3 Improved method and apparatus for the etching of microstructures |
| 06/08/2006 | WO2005083151A3 Pressure gradient cvi/cvd apparatus and method |
| 06/08/2006 | US20060121746 Semiconductor device manufacturing method and semiconductor manufacturing apparatus |
| 06/08/2006 | US20060121744 Top surface roughness reduction of high-k dielectric materials using plasma based processes |
| 06/08/2006 | US20060121707 Ion implantation system and method of monitoring implant energy of an ion implantation device |
| 06/08/2006 | US20060121704 Plasma ion implantation system with axial electrostatic confinement |
| 06/08/2006 | US20060121689 Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces |
| 06/08/2006 | US20060121307 Film deposition method |
| 06/08/2006 | US20060121280 Continuous encapsulation process |
| 06/08/2006 | US20060121211 Chemical vapor deposition apparatus and chemical vapor deposition method using the same |
| 06/08/2006 | US20060121210 Plasma processing equipment and method of operating the same |
| 06/08/2006 | US20060121198 Delivery device |
| 06/08/2006 | US20060121197 Method for silane coating of indium tin oxide surfaced substrates |
| 06/08/2006 | US20060121196 CVC process with coated substrates |
| 06/08/2006 | US20060121195 Plasma processing apparatus and method for manufacturing electrostatic chuck |
| 06/08/2006 | US20060121194 Method for cleaning a deposition chamber |
| 06/08/2006 | US20060121193 Process and apparatus for depositing semiconductor layers using two process gases, one of which is preconditioned |
| 06/08/2006 | US20060121192 Liquid precursor refill system |
| 06/08/2006 | US20060121191 Method for coating motor vehicle rims |
| 06/08/2006 | US20060120940 Ceramic and method of manufacturing the same, dielectric capacitor, semiconductor device, and element |
| 06/08/2006 | US20060119367 Apparatus for Inspecting the front side and backside of a disk-shaped object |
| 06/08/2006 | US20060119252 Organic EL panel manufacturing method |
| 06/08/2006 | US20060118891 Precursor for hafnium oxide layer and method for forming hafnium oxide film using the precursor |
| 06/08/2006 | US20060118414 Method and apparatus for forming combinatorial film |
| 06/08/2006 | US20060118242 Atmospheric pressure plasma system |
| 06/08/2006 | US20060118241 Plasma processing apparatus |
| 06/08/2006 | US20060118049 Vacuum-generating apparatus and thin film processing apparatus having the same |
| 06/08/2006 | US20060118048 Susceptor system |
| 06/08/2006 | US20060118047 Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM) |
| 06/08/2006 | US20060118046 Metal film vapor phase deposition method and vapor phase deposition apparatus |
| 06/08/2006 | US20060118045 Method and apparatus for improved baffle plate |
| 06/08/2006 | US20060118044 Capacitive coupling plasma processing apparatus |
| 06/08/2006 | US20060118043 Method for producing coated workpieces, uses and installation for the method |
| 06/08/2006 | US20060118042 Bolt and plasma processing apparatus provided with same |
| 06/08/2006 | US20060118041 Guard ring |
| 06/08/2006 | US20060118040 Chemical vapor deposition apparatus having a reaction chamber condition detection function and a detection method thereof |
| 06/08/2006 | US20060117988 Ultra-bright passivated aluminum nano-flake pigments |
| 06/08/2006 | DE19503876B4 Mehrschichten-Kalibermessungen unter Verwendung von Photoisomeren Multilayer caliper measurements using photoisomers |
| 06/08/2006 | DE10335099B4 Verfahren zum Verbessern der Dickengleichförmigkeit von Siliziumnitridschichten für mehrere Halbleiterscheiben A method for improving the thickness uniformity of silicon nitride layers for multiple semiconductor wafers |
| 06/08/2006 | DE10224934B4 Vorrichtung und Verfahren für CVD-Beschichtungen Apparatus and method for CVD coatings |
| 06/08/2006 | DE10211738B4 Verfahren und Anordnung zur Erzeugung einer ultrareinem Mischung aus Wasserdampf und Sauerstoff Method and apparatus for generating an ultra-pure mixture of water vapor and oxygen |