| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/08/2006 | DE102005056936A1 Bor-dotierte Diamantbeschichtung und diamantbeschichtetes Werkzeug Boron-doped diamond coating and diamond coated tool |
| 06/08/2006 | DE102004058426A1 Hochtemperaturbeständiger Belag aus TiOx High temperature resistant coating of TiO x |
| 06/08/2006 | DE102004057234A1 Substrate holder, has substrate holding plate and spring catching unit engaged at counter plate for attaching holder at counter plate such that upper surface of substrate holding plate rests upon lower surface of counter plate |
| 06/07/2006 | EP1667217A1 Gas treatment device and heat readiting method |
| 06/07/2006 | EP1666638A1 Protection of thermal barrier coating by an impermeable barrier coating |
| 06/07/2006 | EP1666632A2 Porous low dielectric constant compositions and methods for making and using same |
| 06/07/2006 | EP1666625A1 Method of coating a component inside an apparatus |
| 06/07/2006 | EP1665354A2 Methods of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition |
| 06/07/2006 | EP1665339A2 High-purity crystal growth |
| 06/07/2006 | EP1665323A2 Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates |
| 06/07/2006 | EP1664394A2 Ultrahard diamonds and method of making thereof |
| 06/07/2006 | EP1664380A2 Method and device for depositing single component or multicomponent layers and series of layers using non-continuous injection of liquid and dissolved starting material by a multi-channel injection unit |
| 06/07/2006 | EP1664379A1 Metallization of substrate (s) by a liquid/vapor deposition process |
| 06/07/2006 | EP1664378A2 Replaceable plate expanded thermal plasma apparatus and method |
| 06/07/2006 | EP1664377A1 Method and an apparatus for applying a coating on a substrate |
| 06/07/2006 | EP1664376A2 Apparatus for conveying gases to and from a chamber |
| 06/07/2006 | EP1664375A2 Precursor delivery system |
| 06/07/2006 | EP1664374A2 Atomic layer deposition methods of forming silicon dioxide comprising layers |
| 06/07/2006 | EP1664373A2 Annealing single crystal chemical vapor deposition diamonds |
| 06/07/2006 | EP1664372A1 Hollow nickel shapes by vapor deposition |
| 06/07/2006 | EP1664371A1 Device for coating the inside of hollow bodies |
| 06/07/2006 | EP1663892A1 Method for producing substrates comprising temperature-resistant protective coatings |
| 06/07/2006 | EP1663866A2 Tough diamonds and method of making thereof |
| 06/07/2006 | EP1663518A2 Glow discharge-generated chemical vapor deposition |
| 06/07/2006 | EP1532289B1 Zirconium complex used for the cvd method and preparation method of a thin film using thereof |
| 06/07/2006 | EP1390157A4 Method and apparatus for temperature controlled vapor deposition on a substrate |
| 06/07/2006 | EP1300380A4 Adhesive composite coating for diamond and diamond-containing materials and method for producing said coating. |
| 06/07/2006 | EP1198283A4 Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
| 06/07/2006 | EP1086355B1 Ellipsometric method and control device for making a thin-layered component |
| 06/07/2006 | CN1784773A Atomic layer deposited dielectric layers |
| 06/07/2006 | CN1784767A Substrate transfer device for thin-film deposition apparatus |
| 06/07/2006 | CN1784765A Wide temperature range chuck system |
| 06/07/2006 | CN1783436A Method and apparatus for treating article to be treated |
| 06/07/2006 | CN1783431A Plasma processing apparatus |
| 06/07/2006 | CN1783430A Capacitive coupling plasma processing apparatus |
| 06/07/2006 | CN1783429A Plasma control method and plasma control apparatus |
| 06/07/2006 | CN1783423A High-rate etching using high pressure F2 plasma with argon diluent |
| 06/07/2006 | CN1782133A Sulfur hexafluoride remote plasma source clean |
| 06/07/2006 | CN1782130A Method for removing and re-coating diamond-like carbon film and its finished product |
| 06/07/2006 | CN1782125A Method for forming dielectric film and dielectric film |
| 06/07/2006 | CN1782124A Porous low dielectric constant compositions and methods for making and using same |
| 06/07/2006 | CN1782123A Diamond-like carbon film and its preparing method |
| 06/07/2006 | CN1782119A Method of coating a component inside an apparatus |
| 06/07/2006 | CN1781608A Shower head of a wafer treatment apparatus having a gap controller |
| 06/07/2006 | CN1258804C Method for growing p type zinc oxide crystal film by real-time nitrogen doping |
| 06/07/2006 | CN1258803C Gaseous fluid conveying system and fluid heating and injecting device in said system |
| 06/07/2006 | CN1258617C Method for depositing coating having relatively high dielectric constant onto substrate |
| 06/07/2006 | CN1258500C Adhesive composite coating for diamond and diamond-containing materials and method for producing coating |
| 06/07/2006 | CN1258420C Surface coated super hard alloy cutting tool |
| 06/06/2006 | US7057335 Barrier coatings and methods in discharge lamps |
| 06/06/2006 | US7056842 Method and apparatus for non-aggressive plasma-enhanced vapor deposition of dielectric films |
| 06/06/2006 | US7056839 Method of forming a silica insulation film with a reduced dielectric constant |
| 06/06/2006 | US7056835 Surface preparation prior to deposition |
| 06/06/2006 | US7056834 Forming a plurality of thin-film devices using imprint lithography |
| 06/06/2006 | US7056833 Methods of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition |
| 06/06/2006 | US7056806 Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces |
| 06/06/2006 | US7056763 Composite structure for electronic microsystems and method for production of said composite structure |
| 06/06/2006 | US7056560 Reacting organosilicon compound and hydrocarbon; vapor phase; aftertreatment with electron beams |
| 06/06/2006 | US7056479 Depositing a metal catalyst on carbon paper, and passing feedstock carbon containing source over the substrate while applying electrical current to heat |
| 06/06/2006 | US7056416 Atmospheric pressure plasma processing method and apparatus |
| 06/06/2006 | US7056389 Method and device for thermal treatment of substrates |
| 06/06/2006 | US7056388 Reaction chamber with at least one HF feedthrough |
| 06/06/2006 | US7055809 Vaporizing reactant liquids for chemical vapor deposition film processing |
| 06/06/2006 | US7055808 Vaporizing reactant liquids for chemical vapor deposition film processing |
| 06/06/2006 | US7055263 Method for cleaning deposition chambers for high dielectric constant materials |
| 06/06/2006 | US7055236 Joining method for high-purity ceramic parts |
| 06/06/2006 | US7055212 Clean gas injector system for reactor chamber |
| 06/06/2006 | CA2156301C Safety document and process for producing the same |
| 06/03/2006 | CA2489199A1 Ceramic thin film on various substrates, and process for producing same |
| 06/01/2006 | WO2006058240A1 Gas distribution system for improved transient vapor phase deposition |
| 06/01/2006 | WO2006058061A1 Automatic reconstitution injector device |
| 06/01/2006 | WO2006057959A1 High resolution substrate holder leveling device and method |
| 06/01/2006 | WO2006057829A2 Scratch resistant coated article and method of making |
| 06/01/2006 | WO2006057711A2 Method for preparing solid precursor tray for use in solid precursor evaporation system |
| 06/01/2006 | WO2006057710A1 A solid precursor delivery system comprising replaceable stackable trays |
| 06/01/2006 | WO2006057709A2 Method for deposition of metal layers from metal carbonyl precursors |
| 06/01/2006 | WO2006057708A2 Method and system for measuring a flow rate in a solid precursor delivery system |
| 06/01/2006 | WO2006057707A1 Method and system for performing in-situ cleaning of a deposition system |
| 06/01/2006 | WO2006057706A2 Method for deposition of metal layers from metal carbonyl precursors |
| 06/01/2006 | WO2006057659A1 Growth of carbon nanotubes at low temperature on a transition metal layer |
| 06/01/2006 | WO2006057436A1 Amorphous carbon film, process for forming the same, and high wear-resistant sliding member with amorphous carbon film provided |
| 06/01/2006 | WO2006056091A1 Vacuum processing chamber for very large area substrates |
| 06/01/2006 | WO2006056090A1 Method for applying selectively a layer to a structured substrate by the usage of a temperature gradient in the substrate |
| 06/01/2006 | WO2006024808A3 Method for transferring a functional organic molecule onto a transparent substrate |
| 06/01/2006 | WO2006003322A3 Ion implanter operating in pulsed plasma mode |
| 06/01/2006 | US20060115957 Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces |
| 06/01/2006 | US20060115683 For milling of grey cast iron with or without cast skin under dry conditions at high cutting speeds and milling of nodular cast iron and compacted graphite iron with or without cast skin under dry conditions at high cutting speeds; cemented carbide cutting tool |
| 06/01/2006 | US20060115662 enhanced wear resistance and toughness; utilizing short pulses of precursors followed by purging steps with an inert gas such as Ar |
| 06/01/2006 | US20060115660 Durable thermal barrier coatings |
| 06/01/2006 | US20060115600 Substrate table, production method therefor and plasma treating device |
| 06/01/2006 | US20060115596 Solution/suspension of precursors of lead, zirconium and titanium, which do not undergo ligand exchange (2,2,6,6-tetramethyl-3,5-heptanedione complexes); vaporized including Ar, N2, H2, He, or NH3 as a carrier and O2, N2O, or O3 as an oxidizing reactant |
| 06/01/2006 | US20060115595 Organometallic compounds |
| 06/01/2006 | US20060115594 Apparatus for the efficient coating of substrates including plasma cleaning |
| 06/01/2006 | US20060115593 Method for preparing solid precursor tray for use in solid precursor evaporation system |
| 06/01/2006 | US20060115591 Pentaborane(9) storage and delivery |
| 06/01/2006 | US20060115590 Method and system for performing in-situ cleaning of a deposition system |
| 06/01/2006 | US20060115589 Method and system for measuring a flow rate in a solid precursor delivery system |
| 06/01/2006 | US20060115588 System and method of fabrication and application of thin-films with continuously graded or discrete physical property parameters to functionally broadband monolithic microelectronic optoelectronic/sensor/actuator device arrays |
| 06/01/2006 | US20060115580 Chemical vapor deposition (CVD) apparatus usable in the manufacture of superconducting conductors |
| 06/01/2006 | US20060115577 Photoresist supply apparatus and method of controlling the operation thereof |