| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/06/2006 | US20060148269 Semiconductor devices and methods for depositing a dielectric film |
| 07/06/2006 | US20060148252 Method for producing hydrogenated silicon-oxycarbide films |
| 07/06/2006 | US20060148241 System for and method of forming via holes by use of selective plasma etching in a continuous inline shadow mask deposition process |
| 07/06/2006 | US20060148202 Method for forming shallow trench isolation in semiconductor device |
| 07/06/2006 | US20060148193 Methods for forming ruthenium films with beta-diketone containing ruthenium complexes and method for manufacturing metal-insulator-metal capacitor using the same |
| 07/06/2006 | US20060147784 Low- contact-resistance interface structure between separator and carbon material for fuel cell, separator and carbon material used therein, and production method for stainless steel separator for fuel cell |
| 07/06/2006 | US20060147755 Coating layers of titanium carbde-oxynitride, aluminum oxide and titanium nitride on cemented carbide substrate including tungsten nitride; for dry milling of extremely highly alloyed grey cast iron, grey cast iron, can withstand or delay comb crack formation, reliable and stable tool life |
| 07/06/2006 | US20060147734 Aqueous coating solutions and method for the treatment of a metal surface |
| 07/06/2006 | US20060147648 Generating atmospheric glow discharge plasma (APG), wherein plurality of electrodes are arranged defining a discharge space for forming said plasma; stable uniform low-temperature glow discharge plasma at high operating frequencies of AC-voltage with outstanding surface treatment capabilities |
| 07/06/2006 | US20060147640 Method for producing tamper-proof identification elements |
| 07/06/2006 | US20060147630 Process for coating components in the interior of an apparatus |
| 07/06/2006 | US20060147629 Method for producing vapor-grown carbon fibers having 3-D linkage structure |
| 07/06/2006 | US20060147628 Controlling effusion cell of deposition system |
| 07/06/2006 | US20060147627 Method of forming a metal oxide thin film |
| 07/06/2006 | US20060147626 Method of pulsing vapor precursors in an ALD reactor |
| 07/06/2006 | US20060147625 Method and device for the cvd coating of workpieces |
| 07/06/2006 | US20060147613 Deposition system and method for measuring deposition thickness in the deposition system |
| 07/06/2006 | US20060147282 Cubic boron nitride/diamond composite layers |
| 07/06/2006 | US20060144702 Diamond-coated electrode and method for producing same |
| 07/06/2006 | US20060144584 Cooling device for vacuum treatment device |
| 07/06/2006 | US20060144520 Viewing window cleaning apparatus |
| 07/06/2006 | US20060144516 Apparatus for spatial and temporal control of temperature on a substrate |
| 07/06/2006 | US20060144418 Components for film forming device and method of washing the component |
| 07/06/2006 | US20060144338 High accuracy vapor generation and delivery for thin film deposition |
| 07/06/2006 | US20060144337 Heater for heating a wafer and method for preventing contamination of the heater |
| 07/06/2006 | US20060144336 Heater of chemical vapor deposition apparatus for manfuacturing a thin film |
| 07/06/2006 | US20060144335 Methods and devices for monitoring and controlling thin film processing |
| 07/06/2006 | US20060144334 Method and apparatus for deposition of low dielectric constant materials |
| 07/06/2006 | US20060144333 Atomic layer deposition apparatus and method |
| 07/06/2006 | US20060144332 Controlled flow of source material via droplet evaporation |
| 07/06/2006 | US20060144331 Liquid portioning method and device |
| 07/06/2006 | US20060144330 Coating process method and coating process apparatus |
| 07/06/2006 | US20060144293 Coating solutions for use in forming bismuth-based ferroelectric thin films and a method of forming bismuth-based ferroelectric thin films using the coating solutions |
| 07/06/2006 | US20060144234 Trapping device, processing system, and method removing impurities |
| 07/06/2006 | US20060143913 Very low moisture o-ring and method for preparing the same |
| 07/06/2006 | DE10328578B4 Verfahren zum reaktiven Ionenätzen unter Verwendung einer Hartmaske aus einer amorphen Kohlenstoff-Wasserstoff-Schicht A method of reactive ion etching using a hard mask of an amorphous carbon-hydrogen layer |
| 07/06/2006 | DE102004063703A1 Vakuumbeschichtungssystem Vacuum Coating System |
| 07/06/2006 | DE102004062553A1 CVD-Reaktor mit RF-geheizter Prozesskammer CVD reactor with RF-heated process chamber |
| 07/05/2006 | EP1676936A2 Improved dielectric coating for surfaces exposed to high temperature water |
| 07/05/2006 | EP1676935A2 Yttrium-containing ceramic coating |
| 07/05/2006 | EP1676934A1 Chemical vapor deposition chamber for depositing titanium silicon nitride films for forming phase change memories |
| 07/05/2006 | EP1676850A1 Volatile beta-ketoiminate and metal beta-diiminate complexes |
| 07/05/2006 | EP1676849A1 Volatile metal beta-ketoiminate complexes |
| 07/05/2006 | EP1676309A1 Electro-static chuck with non-sintered aln and a method of preparing the same |
| 07/05/2006 | EP1676306A2 Synergetic sp-sp2-sp3 carbon materials and deposition methods thereof |
| 07/05/2006 | EP1676294A2 Thermal processing system with cross flow injection system with rotatable injectors |
| 07/05/2006 | EP1507892B1 High-power microwave window |
| 07/05/2006 | EP1383938B1 Method for production of a metallic or metal-containing layer |
| 07/05/2006 | EP1370709A4 A chemical vapor deposition process and apparatus thereof |
| 07/05/2006 | EP1305823A4 Process for growing a magnesium oxide film on a silicon (100) substrate coated with a cubic silicon carbide buffer layer |
| 07/05/2006 | EP0841838B1 Plasma treatment apparatus and plasma treatment method |
| 07/05/2006 | CN2794031Y Low-current pulsing arc power supply of metal steaming vacuum arc |
| 07/05/2006 | CN2793101Y Chemical vapor-phase depositor with DC strong current arc plasma |
| 07/05/2006 | CN2793100Y Organic chemical vapor-phase depositor with low-pressure metal for zinc oxide |
| 07/05/2006 | CN1799128A Stress reduction of SIOC low K films |
| 07/05/2006 | CN1798876A Fabricated titanium article having improved corrosion resistance |
| 07/05/2006 | CN1798867A Deposition chamber surface enhancement and resulting deposition chambers |
| 07/05/2006 | CN1798866A Methods for forming aluminum containing films utilizing amino aluminum precursors |
| 07/05/2006 | CN1798865A Method for forming thin film and article with thin film |
| 07/05/2006 | CN1798864A Plasma uniformity |
| 07/05/2006 | CN1798863A Adaptable processing element for a processing system and a method of making the same |
| 07/05/2006 | CN1798862A Disk coating system |
| 07/05/2006 | CN1798697A Plasma reactor and process for producing lower-energy hydrogen species. |
| 07/05/2006 | CN1798618A Ultraviolet (UV) and plasma assisted metalorganic chemical vapor deposition (MOCVD) system |
| 07/05/2006 | CN1798617A Ion beam-assisted high-temperature superconductor (HTS) deposition for thick film tape |
| 07/05/2006 | CN1797711A Equipment for producing substrate of nitrides in III family |
| 07/05/2006 | CN1796599A Apparatus for treating thin film and method of treating thin film |
| 07/05/2006 | CN1796598A Inverse baking deposition structure in chemical vapor deposition equipment for metal organic matter |
| 07/05/2006 | CN1796597A Structure of reaction chamber in multiple laminar flows in chemical vapor deposition equipment for metal organic matter |
| 07/05/2006 | CN1796005A Plastic container having a carbon-treated internal surface |
| 07/05/2006 | CN1263097C Film processing method and film processing system |
| 07/05/2006 | CN1263092C Gas supply device |
| 07/05/2006 | CN1262684C Method for production of coated substrates |
| 07/05/2006 | CN1262683C Method for depositing metal oxide thin film by MOCVD |
| 07/05/2006 | CN1262508C Pre-polysilicon coating of glass substrates |
| 07/05/2006 | CN1262391C Coated blade with nm crystal CVD coating having cutter edge tenacity increased and reducing friction |
| 07/04/2006 | US7072798 Semiconductor fabricating apparatus |
| 07/04/2006 | US7071562 Interconnects with improved barrier layer adhesion |
| 07/04/2006 | US7071128 Plasma CVD method |
| 07/04/2006 | US7071127 Methods for improving quality of semiconductor oxide composition formed from halogen-containing precursor |
| 07/04/2006 | US7071118 Method and apparatus for fabricating a conformal thin film on a substrate |
| 07/04/2006 | US7071117 Semiconductor devices and methods for depositing a dielectric film |
| 07/04/2006 | US7071087 Technique to grow high quality ZnSe epitaxy layer on Si substrate |
| 07/04/2006 | US7071081 Method of forming semiconductor device |
| 07/04/2006 | US7071053 Method of forming capacitor with ruthenium top and bottom electrodes by MOCVD |
| 07/04/2006 | US7071022 Silicon crystallization using self-assembled monolayers |
| 07/04/2006 | US7070916 Radiation image conversion panel and production method thereof |
| 07/04/2006 | US7070833 Method for chemical vapor deposition of silicon on to substrates for use in corrosive and vacuum environments |
| 07/04/2006 | US7070661 Uniform gas cushion wafer support |
| 07/04/2006 | US7070660 Wafer holder with stiffening rib |
| 07/04/2006 | US7070659 System for filling openings in semiconductor products |
| 07/04/2006 | US7070657 Method and apparatus for depositing antireflective coating |
| 07/04/2006 | US7070650 Diamond film and method for producing the same |
| 06/29/2006 | WO2006068260A1 Magnetic fluid sealing unit for semiconductor wafer vertical heat treating apparatus |
| 06/29/2006 | WO2006068241A1 Substrate surface treating apparatus |
| 06/29/2006 | WO2006067995A1 Film-forming method and recording medium |
| 06/29/2006 | WO2006067956A1 Surface-coated cutting tool |
| 06/29/2006 | WO2006000561A3 Container-treatment machine comprising controlled gripping means for seizing containers by the neck |
| 06/29/2006 | WO2005076814A3 Injector for plasma mass filter |
| 06/29/2006 | US20060141806 Apparatus and process for treating dielectric materials |