| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/22/2006 | US7094712 High performance MIS capacitor with HfO2 dielectric |
| 08/22/2006 | US7094710 Very low dielectric constant plasma-enhanced CVD films |
| 08/22/2006 | US7094708 Method of CVD for forming silicon nitride film on substrate |
| 08/22/2006 | US7094691 MOCVD of tungsten nitride thin films using W(CO)6 and NH3 for copper barrier applications |
| 08/22/2006 | US7094690 Deposition methods and apparatuses providing surface activation |
| 08/22/2006 | US7094685 Integration of titanium and titanium nitride layers |
| 08/22/2006 | US7094680 Formation of a tantalum-nitride layer |
| 08/22/2006 | US7094614 In-situ monitoring of chemical vapor deposition process by mass spectrometry |
| 08/22/2006 | US7094447 forming a coating of (Ti,Al)(C,),N) and modifying the as-formed coating by applying alternating aluminizing and oxidizing treatments, the coating is provided with an aluminium content which increases toward the surface; nucleated alpha -Al2O3 with a growth texture; chemical vapor deposition (CVD) |
| 08/22/2006 | US7094444 Method for repairing coated components using NiAl bond coats |
| 08/22/2006 | US7094316 Externally excited torroidal plasma source |
| 08/22/2006 | US7094315 Chamber configuration for confining a plasma |
| 08/22/2006 | US7094313 Universal mid-frequency matching network |
| 08/22/2006 | US7094312 Focused particle beam systems and methods using a tilt column |
| 08/22/2006 | US7094284 Source reagent compositions for CVD formation of high dielectric constant and ferroelectric metal oxide thin films and method of using same |
| 08/22/2006 | US7093560 Techniques for reducing arcing-related damage in a clamping ring of a plasma processing system |
| 08/22/2006 | US7093559 Method for PECVD deposition of selected material films |
| 08/17/2006 | WO2006086329A1 Processes for the production of organometallic compounds |
| 08/17/2006 | WO2006085994A2 Multi-component substances and apparatus for preparation thereof |
| 08/17/2006 | WO2006085925A2 Synthesis of a self assembled hybrid of ultrananocrystalline diamond and carbon nanotubes |
| 08/17/2006 | WO2006085887A1 Sealable biaxially oriented polypropylene film for packaging |
| 08/17/2006 | WO2006085752A1 Process for preparing a metal film on a substrate |
| 08/17/2006 | WO2006085635A1 Tantalum carbide-covered carbon material and process for producing the same |
| 08/17/2006 | WO2006085447A1 Thin film laminate structure, method for formation thereof, film formation apparatus, and storage medium |
| 08/17/2006 | WO2006085425A1 Method of forming film and film forming apparatus |
| 08/17/2006 | WO2006063171A3 Coated article with low-e coating including ir reflecting layer(s) and corresponding method |
| 08/17/2006 | WO2006050482A3 High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric cvd films |
| 08/17/2006 | WO2005104186A3 Method and processing system for plasma-enhanced cleaning of system components |
| 08/17/2006 | US20060183347 Method of depositing a silicon dioxide-comprising layer in the fabrication of integrated circuitry |
| 08/17/2006 | US20060183340 Coating and developing apparatus and coating and developing method |
| 08/17/2006 | US20060183322 Deposition methods and apparatuses providing surface activation |
| 08/17/2006 | US20060183055 Method for defining a feature on a substrate |
| 08/17/2006 | US20060182895 Substrate covered with an intermediate coating and a hard carbon coating |
| 08/17/2006 | US20060182891 Method and apparatus for producing biaxially oriented thin films |
| 08/17/2006 | US20060182886 Method and system for improved delivery of a precursor vapor to a processing zone |
| 08/17/2006 | US20060182885 Preparation of metal silicon nitride films via cyclic deposition |
| 08/17/2006 | US20060182884 Volatile copper(I) complexes for deposition of copper films by atomic layer deposition |
| 08/17/2006 | US20060182883 Abrasion resistant coatings with color component for gemstones and such |
| 08/17/2006 | US20060182874 Method of preparing an apparatus for positioning a molecule |
| 08/17/2006 | US20060181669 Diffusion barrier coatings having graded compositions and devices incorporating the same |
| 08/17/2006 | US20060180275 Methods of making gas distribution members for plasma processing apparatuses |
| 08/17/2006 | US20060180180 System and method for cleaning semiconductor fabrication equipment parts |
| 08/17/2006 | US20060180174 Method and system for treating a substrate with a high pressure fluid using a peroxide-based process chemistry in conjunction with an initiator |
| 08/17/2006 | US20060180087 Substrate susceptor for receiving a substrate to be deposited upon |
| 08/17/2006 | US20060180086 Susceptor and vapor growth device |
| 08/17/2006 | US20060180085 One piece shim |
| 08/17/2006 | US20060180084 Substrate susceptor for receiving a substrate to be deposited upon |
| 08/17/2006 | US20060180083 Positioning board for positioning heater lines during plasma enhanced CVD (PECVD) |
| 08/17/2006 | US20060180082 Film formation apparatus |
| 08/17/2006 | US20060180078 Gas reaction system and semiconductor processing apparatus |
| 08/17/2006 | US20060180076 Vapor deposition apparatus and vapor deposition method |
| 08/17/2006 | DE102004061464A1 Feinlaminare Barriereschutzschicht Feinlaminare barrier protective layer |
| 08/17/2006 | DE10200279B4 Gasinjektor-Anordnung mit Gasinjektoren aus einem Keramikmaterialblock mit Gasinjektorlöchern, die sich durch diesen erstrecken, und ein die Gasinjektor-Anordnung enthaltenes Ätzgerät Gas injector assembly with gas injectors of a ceramic block with Gasinjektorlöchern extending therethrough, and the gas injector arrangement contained etcher |
| 08/16/2006 | EP1691421A1 Process for preparing a metal film on a substrate |
| 08/16/2006 | EP1691400A1 Preparation of metal silicon nitride films via cyclic deposition |
| 08/16/2006 | EP1691396A2 Plasma reactor with overhead electrode having cylindrical gas outlets |
| 08/16/2006 | EP1690287A2 Method for depositing silicon carbide and ceramic films |
| 08/16/2006 | EP1689908A2 Plasma thin-film deposition method |
| 08/16/2006 | EP1689907A2 Plasma production device and method and rf driver circuit with adjustable duty cycle |
| 08/16/2006 | EP1689582A1 Novel polymer films and textile laminates containing such polymer films |
| 08/16/2006 | EP1488443B1 Device for confinement of a plasma within a volume |
| 08/16/2006 | EP1332241A4 Electrostatically clamped edge ring for plasma processing |
| 08/16/2006 | CN1820373A Gate insulating film forming method, computer-readable storage medium, and computer program |
| 08/16/2006 | CN1820091A Method for forming metal oxide coating film and vapor deposition apparatus |
| 08/16/2006 | CN1820090A Reactive deposition for electrochemical cell production |
| 08/16/2006 | CN1819885A Diamond film coated tool and process for producing the same |
| 08/16/2006 | CN1819123A High-throughput HDP-CVD processes for advanced gapfill applications |
| 08/16/2006 | CN1819120A Method for decreasing granule amount of material layer with low dielectric constant |
| 08/16/2006 | CN1819113A Vacuum processing apparatus and method of using the same |
| 08/16/2006 | CN1818132A Inductive plasma system with sidewall magnet |
| 08/16/2006 | CN1818131A Chemical gas-phase deposition for producing diamond thin filmon cutter with complex-formation |
| 08/16/2006 | CN1270384C Semiconductor suitable for forming semiconductor film coating such as platinum and its manufacturing method |
| 08/16/2006 | CN1270350C Method for epitaxial coating semiconductor chip, and semiconductor chip opitaxial coated |
| 08/16/2006 | CN1270349C Device and method for generating local plasma by micro-structure electrode discharges with microwaves |
| 08/16/2006 | CN1269989C Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof |
| 08/16/2006 | CN1269866C Production method for copolymer film, copolymer film for med therefrom, and semiconductor device using said copolymer film |
| 08/15/2006 | US7092607 Optical waveguide device, and method of manufacturing optical waveguide device |
| 08/15/2006 | US7091514 Non-polar (Al,B,In,Ga)N quantum well and heterostructure materials and devices |
| 08/15/2006 | US7091138 Forming method and a forming apparatus of nanocrystalline silicon structure |
| 08/15/2006 | US7091137 Bi-layer approach for a hermetic low dielectric constant layer for barrier applications |
| 08/15/2006 | US7091135 Method of manufacturing semiconductor device |
| 08/15/2006 | US7091133 Two-step formation of etch stop layer |
| 08/15/2006 | US7090889 Boride thin films on silicon |
| 08/15/2006 | US7090741 Semiconductor processing system |
| 08/15/2006 | US7090727 Heated gas line body feedthrough for vapor and gas delivery systems and methods for employing same |
| 08/15/2006 | US7090705 Electronic device, production method thereof, and plasma process apparatus |
| 08/15/2006 | US7090394 Temperature gauge and ceramic susceptor in which it is utilized |
| 08/10/2006 | WO2006083909A2 Method of making substitutionally carbon-highly doped crystalline si-layers by cvd |
| 08/10/2006 | WO2006083821A1 Selective deposition of silicon-containing films |
| 08/10/2006 | WO2006083725A2 Vacuum deposition of coating materials on powders |
| 08/10/2006 | WO2006083600A1 High aspect ratio performance coatings for biological microfludics |
| 08/10/2006 | WO2006083557A2 High yield spray application |
| 08/10/2006 | WO2006083481A2 Chemical vapor deposition of chalcogenide materials |
| 08/10/2006 | WO2006083363A2 Pentaborane(9) storage and delivery |
| 08/10/2006 | WO2006082769A1 Glass member, reader, and image forming apparatus |
| 08/10/2006 | WO2006082746A1 FILM OF SEMICONDUCTOR SINGLE CRYSTAL OF n-TYPE (100) FACE ORIENTED DIAMOND DOPED WITH PHOSPHORUS ATOM AND PROCESS FOR PRODUCING THE SAME |
| 08/10/2006 | WO2006082739A1 Tantalum compound, method for producing same, tantalum-containing thin film and method for forming same |
| 08/10/2006 | WO2006082731A1 Film-forming apparatus, matching unit, and impedance control method |
| 08/10/2006 | WO2006082717A1 Apparatus for forming thin film |
| 08/10/2006 | WO2006082367A1 Trap device |