| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/29/2006 | US7097901 bodies comprising cemented carbides and binders, and multilayer coatings comprising oxycarbonitrides and alumina, used for turning or machining cast iron and steels at high speeds |
| 08/29/2006 | US7097886 Deposition process for high aspect ratio trenches |
| 08/29/2006 | US7097878 Mixed alkoxy precursors and methods of their use for rapid vapor deposition of SiO2 films |
| 08/29/2006 | US7097775 Coated microfluidic delivery system |
| 08/29/2006 | US7097750 Device for fixing substrate for thin film sputter and method of fixing substrate using the same |
| 08/29/2006 | US7097735 Plasma processing device |
| 08/29/2006 | US7097713 Method for removing a composite coating containing tantalum deposition and arc sprayed aluminum from ceramic substrates |
| 08/29/2006 | US7097712 Apparatus for processing a semiconductor |
| 08/29/2006 | US7097685 Toughness improved between the surface of antimony carbide/iron family metal phase and an inner region of one or more compounds of a metal or metals of group 4, 5 or 6 having an sodium chloride-type cubic crystal structure: plastic deformation resistance; both superior wear and chipping resistance |
| 08/29/2006 | US7096819 Inductive plasma processor having coil with plural windings and method of controlling plasma density |
| 08/29/2006 | US7096692 Visible-light-responsive photoactive coating, coated article, and method of making same |
| 08/29/2006 | US7096656 Ring traveler and method for producing it |
| 08/24/2006 | WO2006089080A2 Abrasion resistant coatings with color component for gemstones and such |
| 08/24/2006 | WO2006088697A2 Methods of making gas distribution members for plasma processing apparatuses |
| 08/24/2006 | WO2006088562A2 A method and system for improved delivery of a precursor vapor to a processing zone |
| 08/24/2006 | WO2006088463A1 Atmospheric pressure molecular layer cvd |
| 08/24/2006 | WO2006088448A1 Wafer carrier for growing gan wafers |
| 08/24/2006 | WO2006088284A1 Method of depositing thin film |
| 08/24/2006 | WO2006087958A1 Nitride semiconductor material and method for manufacturing nitride semiconductor crystal |
| 08/24/2006 | WO2006087941A1 Gas-barrier film, process for producing gas-barrier film, resin base with the gas-barrier film for organic electroluminescent element, and organic electroluminescent element |
| 08/24/2006 | WO2006087833A1 Hydrogen atom generation source in vacuum treatment apparatus, and hydrogen atom transportation method |
| 08/24/2006 | WO2006087588A2 Apparatus and methods for growing nanofibres and nanotips |
| 08/24/2006 | WO2006087495A1 Method for the densification of thin porous substrates by means of vapour phase chemical infiltration and device for loading such substrates |
| 08/24/2006 | WO2006060827A3 Methods and apparatus for downstream dissociation of gases |
| 08/24/2006 | WO2006055984A3 Substrate processing apparatus using a batch processing chamber |
| 08/24/2006 | WO2006049794A3 Abrasion resistant coatings by plasma enhanced chemical vapor deposition |
| 08/24/2006 | WO2006032963A3 Methods for producing noble metal films, noble metal oxide films, and noble metal silicide films |
| 08/24/2006 | WO2006011991A3 Apparatus for an optimized plasma chamber top piece |
| 08/24/2006 | WO2005102952A3 Photocatalytic substrate active under a visible light |
| 08/24/2006 | WO2005052179A3 Method of making carbon nanotube arrays, and thermal interfaces using same |
| 08/24/2006 | US20060189170 Plasma treatment apparatus and method for plasma treatment |
| 08/24/2006 | US20060189168 Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device |
| 08/24/2006 | US20060189165 Method and apparatus for non-aggressive plasma-enhanced vapor deposition of dielectric films |
| 08/24/2006 | US20060189162 Adhesion improvement for low k dielectrics |
| 08/24/2006 | US20060189161 Method and apparatus for treating organosiloxane coating film |
| 08/24/2006 | US20060189159 Methods of depositing a silicon dioxide comprising layer in the fabrication of integrated circuitry, and methods of forming trench isolation in the fabrication of integrated circuitry |
| 08/24/2006 | US20060189158 Method of depositing a silicon dioxide-comprising layer in the fabrication of integrated circuitry |
| 08/24/2006 | US20060189138 Method of processing substrate, post-chemical mechanical polishing cleaning method, and method of and program for manufacturing electronic device |
| 08/24/2006 | US20060189046 Thin film forming method and forming device therefor |
| 08/24/2006 | US20060188687 One piece shim |
| 08/24/2006 | US20060188647 Process for producing probe carrier and apparatus thereof |
| 08/24/2006 | US20060188646 System and method for detecting remaining amount of precursor in vessel during CVD process |
| 08/24/2006 | US20060188645 Deposition device having a thermal control system |
| 08/24/2006 | US20060186354 Apparatus and method for thermal processing |
| 08/24/2006 | US20060186084 Patterning nanoline arrays with spatially varying pitch |
| 08/24/2006 | US20060185795 Anodized substrate support |
| 08/24/2006 | US20060185600 Multi-zone chuck |
| 08/24/2006 | US20060185599 Effusion Cell Valve |
| 08/24/2006 | US20060185598 Film precursor tray for use in a film precursor evaporation system and method of using |
| 08/24/2006 | US20060185597 Film precursor evaporation system and method of using |
| 08/24/2006 | US20060185596 Vapor phase growth method by controlling the heat output in the gas introduction region |
| 08/24/2006 | US20060185595 Apparatus and process for carbon nanotube growth |
| 08/24/2006 | US20060185594 Plasma treating apparatus and its electrode structure |
| 08/24/2006 | US20060185593 Chemical vapor deposition system and method of exhausting gas from the system |
| 08/24/2006 | US20060185592 Vertical batch processing apparatus |
| 08/24/2006 | US20060185591 High temperature chemical vapor deposition apparatus |
| 08/24/2006 | US20060185590 High temperature chemical vapor deposition apparatus |
| 08/24/2006 | US20060185589 Silicon gas injector and method of making |
| 08/24/2006 | US20060185588 Vapor deposition apparatus measuring film thickness by irradiating light |
| 08/24/2006 | DE10064096B4 Verfahren zur dauerstabilen Hydrophilisierung einer Kontaktlinsenoberfläche und beschichtete Silikon-Kontaktlinse A method for permanently stable hydrophilisation a contact lens surface and coated silicone hydrogel contact lens |
| 08/24/2006 | CA2597253A1 A method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates |
| 08/23/2006 | EP1692323A2 Method of producing nanostructure tips |
| 08/23/2006 | EP1691939A1 Method and device for cleaning at least one process chamber used for coating at least one substrate |
| 08/23/2006 | EP1691938A2 Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon |
| 08/23/2006 | EP1691606A1 Antimicrobial composite material |
| 08/23/2006 | EP1335829A4 Multilayered optical structures |
| 08/23/2006 | EP1301341B1 Method for applying polymer coatings |
| 08/23/2006 | EP1289807B1 Method and device for coating at least one wiper-blade element |
| 08/23/2006 | EP1269225B1 Selective deposition of material on a substrate according to an interference pattern |
| 08/23/2006 | EP1049813B1 Cvd reactor and process |
| 08/23/2006 | CN2808933Y Combiner of remote plasma reactor |
| 08/23/2006 | CN1823404A Process for producing semiconductor device and substrate treating apparatus |
| 08/23/2006 | CN1823180A Capacitively coupled plasma reactor with uniform radial distribution of plasma |
| 08/23/2006 | CN1822725A Anti-active oxygen corrosion new plane antenna radiation heater |
| 08/23/2006 | CN1822426A Thin film lithium ion cell using silver selenide film as anode material and its preparing method |
| 08/23/2006 | CN1822331A Method for preparing titanium silicide nano line by chemical gas phase deposition method |
| 08/23/2006 | CN1822330A Method for producing gate stack sidewall spacers |
| 08/23/2006 | CN1822320A Method for preparing GaN base diluted magnetic semiconductor material |
| 08/23/2006 | CN1822319A Method for preparing poly crystal germanium silicon film |
| 08/23/2006 | CN1822318A Semiconductor device and method for producing the same |
| 08/23/2006 | CN1822317A Electrode subassembly |
| 08/23/2006 | CN1822315A Substrate processing apparatus, control method adopted in substrate processing apparatus and program |
| 08/23/2006 | CN1821441A Exhaust pipe with reactive by-product adhesion preventing means and method of preventing the adhesion |
| 08/23/2006 | CN1821440A Preparation of metal silicon nitride films via cyclic deposition |
| 08/23/2006 | CN1821439A Organic zinc source for preparing zinc oxide thin film and its preparing method |
| 08/23/2006 | CN1821251A Precursors for silica or metal silicate films |
| 08/23/2006 | CN1821053A Method for preparing four needle shape zinc oxide nano stick by low temperature catalyst-free gas phase deposition |
| 08/23/2006 | CN1271701C Coating method for internal part with holes and internal part with holes |
| 08/23/2006 | CN1271690C 等离子体清洗气体和等离子体清洁方法 Plasma cleaning gas and plasma cleaning methods |
| 08/23/2006 | CN1271679C Semiconductor mfg. device and method for mfg. semiconductor |
| 08/23/2006 | CN1271251C Method of preparing ZnO crystal whisker adopting atmosphere open type MOCVD and apparatus therefor |
| 08/23/2006 | CN1271250C Method of preparing one-dimensional array material adopting atmosphere open type MOCVD and apparatus therefor |
| 08/23/2006 | CN1271244C Method and device for preparing crystalized carbon film azotized |
| 08/23/2006 | CN1271243C Nano crystallitic film of diamond, and preparation method |
| 08/23/2006 | CN1271242C Plasma decomposition method and apparatus for preparing diamond-like film |
| 08/23/2006 | CN1270946C Semiconductor substrate processing system and throughput enhancement method of the same |
| 08/22/2006 | US7095179 generator comprising enclosures for confining gases, anodes, cathodes and power sources, used for ionization |
| 08/22/2006 | US7095178 Plasma processing apparatus, method for operating the same, designing system of matching circuit, and plasma processing method |
| 08/22/2006 | US7095157 Cast diamond tools and formation thereof by chemical vapor deposition |
| 08/22/2006 | US7094994 Heat treatment apparatus and method of semiconductor wafer |