| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/21/2006 | US20060211270 Methods for improving quality of high temperature oxide (HTO) formed from halogen-containing precursor and products thereof and apparatus therefor |
| 09/21/2006 | US20060211244 Clustered surface preparation for silicide and metal contacts |
| 09/21/2006 | US20060210766 Enhanced friction treatment for flexible panels and articles made thereby |
| 09/21/2006 | US20060210723 Plasma enhanced atomic layer deposition system and method |
| 09/21/2006 | US20060210713 Plasma enhanced atomic layer deposition system and method |
| 09/21/2006 | US20060210712 Method of depositing thin film on substrate using impulse ALD process |
| 09/21/2006 | US20060208634 Diffusion barrier coatings having graded compositions and devices incorporating the same |
| 09/21/2006 | US20060208215 Method for hafnium nitride deposition |
| 09/21/2006 | US20060207691 Metal layer forming methods and capacitor electrode forming methods |
| 09/21/2006 | US20060207630 Device for cleaning cvd device and method of cleaning cvd device |
| 09/21/2006 | US20060207509 Gas providing member and processing device |
| 09/21/2006 | US20060207508 Film deposition using a spring loaded contact finger type shadow frame |
| 09/21/2006 | US20060207507 Substrate supporting member and substrate processing apparatus |
| 09/21/2006 | US20060207506 Heated gas line body feedthrough for vapor and gas delivery systems and methods of employing same |
| 09/21/2006 | US20060207505 Method and apparatus for forming multi-layered thin film by using photolysis chemical vapor deposition |
| 09/21/2006 | US20060207504 Film formation method and apparatus for semiconductor process |
| 09/21/2006 | US20060207503 Vaporizer and method of vaporizing a liquid for thin film delivery |
| 09/21/2006 | US20060207502 Plasma confinement ring assemblies having reduced polymer deposition characteristics |
| 09/21/2006 | US20060207294 Method of forming a phosphorus doped optical core using a pecvd process |
| 09/21/2006 | DE102005011940A1 Verfahren zur Herstellung von beschichteten Kohlenstoffpartikel und deren Verwendung in Anodenmaterialien für Lithium-Ionenbatterien A process for preparing coated carbon particles and their use in anode materials for lithium-ion batteries |
| 09/20/2006 | EP1703550A1 Vapor growth device and production method for epitaxial wafer |
| 09/20/2006 | EP1703549A1 Vapor growth device and porduction method for epitaxial wafer |
| 09/20/2006 | EP1703546A2 Processing device |
| 09/20/2006 | EP1702999A1 Method of depositing thin film on substrate using impulse ALD process |
| 09/20/2006 | EP1702998A2 amorphous-carbon coated member |
| 09/20/2006 | EP1702351A2 Exhaust conditioning system for semiconductor reactor |
| 09/20/2006 | EP1702088A1 Free-standing silicon carbide articles formed by chemical vapor deposition and methods for their manufacture |
| 09/20/2006 | CN2818496Y Fast heater |
| 09/20/2006 | CN1836317A Method for forming film, method for manufacturing semiconductor device, semiconductor device and substrate treatment system |
| 09/20/2006 | CN1836316A Production of insulating film with low dielectric constant |
| 09/20/2006 | CN1836060A Method and an apparatus for applying a coating on a substrate |
| 09/20/2006 | CN1835961A Organic iridium compound, method for producing the compound and method for producing film |
| 09/20/2006 | CN1835200A Vacuum apparatus, method for measuring a leak rate thereof, program used in measuring the leak rate and storage medium storing the program |
| 09/20/2006 | CN1834289A A method for depositing thin film on wafer using impulse ALD |
| 09/20/2006 | CN1834288A Low temp chemical gaseous deposition for preparing silicon nitride thin film |
| 09/20/2006 | CN1834287A Method of preparing carbon-carbon composite material surface silicon carbide nano wire |
| 09/20/2006 | CN1834286A Growth appts. of Chemical gaseous phase deposition |
| 09/20/2006 | CN1834006A Growth appts. of carson nanotube array and growth method of multi-wall carbon nanotube array |
| 09/20/2006 | CN1276478C Coating agent, plasma-resistant component having coating film fomed by the coating agent, plasma processing device provided with the plasma-resistant component |
| 09/20/2006 | CN1276474C Method of improving flatness of wafer surface |
| 09/20/2006 | CN1276473C Thermal treatment apparatus and thermal treatment method |
| 09/20/2006 | CN1276472C Heat generator CVD device and heat generator CVD method adopting same |
| 09/20/2006 | CN1276466C Substrate support member |
| 09/20/2006 | CN1276125C Wedge shaped reaction tube in use for equipment of metal organic chemical vapor deposition |
| 09/20/2006 | CN1276124C Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases |
| 09/20/2006 | CN1276123C Equipment for fabricating nesa of stannic oxide |
| 09/20/2006 | CN1276122C Heating unit in use for metal-organic chemical vapor deposition system |
| 09/20/2006 | CN1275851C Preparation method of carbon nano-pipe |
| 09/19/2006 | US7109660 Plasma processing device and baffle plate thereof |
| 09/19/2006 | US7109375 Co-polymer comprising: one or more di- tertiary amines including an amide or thioamide functional group linked to unsaturated tertiary amine compound; |
| 09/19/2006 | US7109132 High density plasma chemical vapor deposition process |
| 09/19/2006 | US7109131 System and method for hydrogen-rich selective oxidation |
| 09/19/2006 | US7109114 HDP-CVD seasoning process for high power HDP-CVD gapfil to improve particle performance |
| 09/19/2006 | US7109113 Solid source precursor delivery system |
| 09/19/2006 | US7109095 Method for fabricating semiconductor device |
| 09/19/2006 | US7109070 Production of a composite material having a biodegradable plastic substrate and at least one coating |
| 09/19/2006 | US7108771 Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin films |
| 09/19/2006 | US7108753 Staggered ribs on process chamber to reduce thermal effects |
| 09/19/2006 | US7108751 Method and apparatus for determining consumable lifetime |
| 09/19/2006 | US7108748 Low temperature load and bake |
| 09/19/2006 | US7108747 Method for growing oxide thin films containing barium and strontium |
| 09/19/2006 | US7108746 Silicon fixture with roughened surface supporting wafers in chemical vapor deposition |
| 09/19/2006 | US7108041 Hollow nickel shapes by vapor deposition |
| 09/19/2006 | US7108009 Semiconductor manufacturing apparatus enabling inspection of mass flow controller maintaining connection thereto |
| 09/19/2006 | US7107998 Method for preventing and cleaning ruthenium-containing deposits in a CVD apparatus |
| 09/19/2006 | CA2341861C Plastic container having a carbon-treated internal surface |
| 09/19/2006 | CA2299225C Method and apparatus for manufacturing ceramic-based composite member |
| 09/14/2006 | WO2006096659A2 Method and system for coating sections of internal surfaces |
| 09/14/2006 | WO2006096641A1 Method and system for coating internal surfaces using reverse-flow cycling and other techniques |
| 09/14/2006 | WO2006095772A1 Method of forming zinc oxide layer, zinc oxide layer forming apparatus and zinc oxide layer |
| 09/14/2006 | WO2006095560A1 Method of substrate treatment, recording medium and substrate treating apparatus |
| 09/14/2006 | WO2006081104A3 Semiconductor wafer boat for a vertical furnace |
| 09/14/2006 | WO2006034130B1 Apparatus and process for surface treatment of substrate using an activated reactive gas |
| 09/14/2006 | WO2005103333A3 Wafer heater assembly |
| 09/14/2006 | WO2003015129A3 Low-k dielectric thin films and chemical vapor deposition method of making same |
| 09/14/2006 | US20060205230 Surface preparation prior to deposition |
| 09/14/2006 | US20060205228 Atomic layer deposition methods |
| 09/14/2006 | US20060205227 Atomic layer deposition methods |
| 09/14/2006 | US20060205213 Substrate treating apparatus and method for manufacturing semiconductor device |
| 09/14/2006 | US20060205194 Methods of depositing electrically active doped crystalline Si-containing films |
| 09/14/2006 | US20060205191 Substrate processing method |
| 09/14/2006 | US20060205187 Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces |
| 09/14/2006 | US20060205185 Method of epitaxial deoposition of an n-doped silicon layer |
| 09/14/2006 | US20060205142 Methods of forming semiconductor constructions |
| 09/14/2006 | US20060204904 Metal mask and manufacturing method thereof |
| 09/14/2006 | US20060204662 Methods of making monolayers |
| 09/14/2006 | US20060204660 As precursor for preparing iridium-based films on substrates |
| 09/14/2006 | US20060204659 Copper-indium-selenium-containing thin films; Metal Organic Chemical Vapor Deposition |
| 09/14/2006 | US20060204656 Systems and methods of applying ozone-depleting catalysts to air stream components |
| 09/14/2006 | US20060204649 Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition |
| 09/14/2006 | US20060204648 Multiple vacuum evaporation coating device and method for controlling the same |
| 09/14/2006 | US20060204647 De-icing system for driveways, walkways, sidewalks and other surfaces |
| 09/14/2006 | US20060204645 Method of coating a surgical instrument |
| 09/14/2006 | US20060201624 Method of in-situ chamber cleaning |
| 09/14/2006 | US20060201623 Low temperature wafer backside cleaning |
| 09/14/2006 | US20060201533 Cvd apparatus and method for cleaning cvd apparatus |
| 09/14/2006 | US20060201428 Shower head and method of fabricating the same |
| 09/14/2006 | US20060201427 CVD coating device |
| 09/14/2006 | US20060201426 Reactor for Producing Reactive Intermediates for Transport Polymerization |
| 09/14/2006 | US20060201425 Precursor preparation for controlled deposition coatings |