| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/17/2007 | EP1743953A1 Method for forming copper film |
| 01/17/2007 | EP1743360A2 Method for depositing high-quality microcrystalline semiconductor materials |
| 01/17/2007 | EP1743359A1 Methods for producing ruthenium film and ruthenium oxide film |
| 01/17/2007 | EP1743043A2 High throughput discovery of materials through vapor phase synthesis |
| 01/17/2007 | EP1565592B1 Method for cleaning a process chamber |
| 01/17/2007 | EP1437328B1 Method for creating silicon dioxide film |
| 01/17/2007 | EP1266043B1 Cemented carbide tool and method of making |
| 01/17/2007 | EP1203108B1 Cooled window |
| 01/17/2007 | CN1898783A Plasma processing apparatus |
| 01/17/2007 | CN1898412A Carrier body and method for coating cutting tools |
| 01/17/2007 | CN1898411A Exhaust conditioning system for semiconductor reactor |
| 01/17/2007 | CN1898410A Deposition of titanium nitride film |
| 01/17/2007 | CN1898409A Method and apparatus for forming a high quality low temperature silicon nitride layer |
| 01/17/2007 | CN1898407A Method and apparatus for manufacturing a functional layer consisting of at least two components |
| 01/17/2007 | CN1898192A Metal compound, material for forming thin film and method for preparing thin film |
| 01/17/2007 | CN1897235A Production of thin-magnetic semiconductor epitaxial-thin-film of iron-doped cadmium sulfide |
| 01/17/2007 | CN1897224A Production of iron-doped zinc sulfide growth thin film by growth |
| 01/17/2007 | CN1896674A Improvement of metal radiating fin radiating speed by nano-carbon tube coating |
| 01/17/2007 | CN1896306A Thin-film depositer |
| 01/17/2007 | CN1896305A Production of multifunctional gas-phase depositer and solid oxide fuel single cell |
| 01/17/2007 | CN1896304A Preparation of Si-C-N nano-composite superhard thin film |
| 01/17/2007 | CN1896303A Diamond thin-film reinforcement on tantalum spinning head surface by chemical gas phase deposition |
| 01/17/2007 | CN1896079A Tantal and vanadium compounds and their use in chemical vapour deposition (CVD) |
| 01/17/2007 | CN1295756C Method of forming tungsten film on barrier film |
| 01/17/2007 | CN1295745C Method and device for thermally treating substrates |
| 01/16/2007 | US7164104 In-line heater for use in semiconductor wet chemical processing and method of manufacturing the same |
| 01/16/2007 | US7163901 Methods for forming thin film layers by simultaneous doping and sintering |
| 01/16/2007 | US7163849 Fabrication method of semiconductor integrated circuit device |
| 01/16/2007 | US7163749 Process for depositing finely dispersed organic-inorganic films and articles made therefrom |
| 01/16/2007 | US7163747 Turbine component having masking layer which can very easily be removed following coating of the components |
| 01/16/2007 | US7163735 Cutting tool insert; alternating nucleation, aluminizing; gradients in aluminum concentration |
| 01/16/2007 | US7163721 Method to plasma deposit on organic polymer dielectric film |
| 01/16/2007 | US7163719 Method of depositing thin film using hafnium compound |
| 01/16/2007 | US7163718 Method of selective region vapor phase aluminizing |
| 01/16/2007 | US7163608 Apparatus for synthesis of layers, coatings or films |
| 01/16/2007 | US7163607 Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system |
| 01/16/2007 | US7163603 Plasma source assembly and method of manufacture |
| 01/16/2007 | US7163602 Apparatus for generating planar plasma using concentric coils and ferromagnetic cores |
| 01/16/2007 | US7163587 Reactor assembly and processing method |
| 01/16/2007 | US7163586 Vapor deposition apparatus |
| 01/16/2007 | US7163585 Method and apparatus for an improved optical window deposition shield in a plasma processing system |
| 01/16/2007 | US7163197 Liquid substance supply device for vaporizing system, vaporizer, and vaporization performance appraisal method |
| 01/16/2007 | CA2161362C Vessel of plastic having a barrier coating and a method of producing the vessel |
| 01/11/2007 | WO2007005574A2 Method and system for energy returning ankle foot orthosis (erafo) |
| 01/11/2007 | WO2007005088A2 Vaporizable metalorganic compounds for deposition of metals and metal-containing thin films |
| 01/11/2007 | WO2007004647A1 Carbon film |
| 01/11/2007 | WO2007004576A1 Plasma treatment apparatus and plasma treatment method |
| 01/11/2007 | WO2007004550A1 Method and apparatus for manufacturing semiconductor wafer |
| 01/11/2007 | WO2007004443A1 Method for forming tungsten film, film-forming apparatus, storage medium and semiconductor device |
| 01/11/2007 | WO2007003882A1 Method of treating an exhaust gas |
| 01/11/2007 | WO2007003754A1 Low wetting hysteresis polysiloxane-based material and method for depositing same |
| 01/11/2007 | WO2007003720A1 Low wetting hysteresis hydrophobic surface coating, method for depositing same, microcomponent and use |
| 01/11/2007 | WO2007003648A1 Hard-coated body and method for production thereof |
| 01/11/2007 | WO2007003502A2 Parylene coating and method for the production thereof |
| 01/11/2007 | WO2006057828A3 Hydrophobic coating including underlayer(s) deposited via flame pyrolysis |
| 01/11/2007 | WO2006039211A3 Corrosion resistant apparatus for control of a multi-zone nozzle in a plasma processing system |
| 01/11/2007 | WO2005116291A3 Apparatus for directing plasma flow to coat internal passageways |
| 01/11/2007 | US20070010076 Polycrystalline SiGe junctions for advanced devices |
| 01/11/2007 | US20070010071 Method and apparatus for forming silicon oxynitride film |
| 01/11/2007 | US20070009717 Electron-beam treated CDO films |
| 01/11/2007 | US20070009660 Method for local application of diffusion aluminide coating |
| 01/11/2007 | US20070009659 Process for the self-limiting deposition of one or more monolayers |
| 01/11/2007 | US20070009658 Pulse nucleation enhanced nucleation technique for improved step coverage and better gap fill for WCVD process |
| 01/11/2007 | US20070009652 Continuous OLED coating machine |
| 01/11/2007 | US20070009651 Substrate treatment method and substrate treatment apparatus |
| 01/11/2007 | US20070009650 Paste dispenser and method of controlling the same |
| 01/11/2007 | US20070009649 Substrate processing apparatus |
| 01/11/2007 | US20070009345 Load port module |
| 01/11/2007 | US20070007646 Substrate treatment apparatus, substrate holding device, and semiconductor device manufacturing method |
| 01/11/2007 | US20070007128 Silicon film forming apparatus |
| 01/11/2007 | US20070007123 Silicon dot forming method and silicon dot forming apparatus |
| 01/11/2007 | US20070006807 Magnetic mask holder |
| 01/11/2007 | US20070006799 Silicon wafer support fixture with roughended surface |
| 01/11/2007 | DE102005032860A1 Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung A coated hard material body, and methods for their preparation |
| 01/11/2007 | DE102005030584A1 Technik zur Herstellung von Nickelsilizid durch Abscheiden von Nickel aus einem gasförmigen Vorstufenmaterial Technique for producing nickel silicide by depositing nickel from a gaseous precursor material |
| 01/11/2007 | CA2613091A1 Hard-coated body and method for production thereof |
| 01/10/2007 | EP1742273A1 Method of forming gate insulating film, storage medium and computer program |
| 01/10/2007 | EP1741803A2 Free radical initiator in remote plasma chamber clean |
| 01/10/2007 | EP1741802A1 Film-forming apparatus and film-forming method |
| 01/10/2007 | EP1741794A2 Surface strengthening method |
| 01/10/2007 | EP1741495A1 Method to obtain a composite material having a catalytic bonding layer |
| 01/10/2007 | EP1741128A2 Gas distribution system having fast gas switching capabilities |
| 01/10/2007 | EP1740737A1 Method for coating a base body, device for carrying out said method, and coated base body |
| 01/10/2007 | EP1740304A2 Tailored and uniform coatings in microchannel apparatus |
| 01/10/2007 | EP1740303A2 Protected alloy surfaces in microchannel apparatus and catalysts, alumina supported catalysts, catalyst intermediates, and methods of forming catalysts and microchannel apparatus |
| 01/10/2007 | EP1563116B1 Device for carrying out a surface treatment of substrates under vacuum |
| 01/10/2007 | EP1399967B1 Method of making full color display panels |
| 01/10/2007 | EP1040500A4 A plasma generating apparatus having an electrostatic shield |
| 01/10/2007 | CN1894438A Method and system for forming a film of material using plasmon assisted chemical reactions |
| 01/10/2007 | CN1894437A Playing field obstacle device |
| 01/10/2007 | CN1894192A Copper(I) formate complexes |
| 01/10/2007 | CN1893822A 抗微生物复合材料 Antimicrobial composite |
| 01/10/2007 | CN1893154A Silicon composite, making method, and non-aqueous electrolyte secondary cell negative electrode material |
| 01/10/2007 | CN1893040A Thermo-interface material producing method |
| 01/10/2007 | CN1892980A Chamber isolation valve RF grounding |
| 01/10/2007 | CN1891861A Process kit design particle generation |
| 01/10/2007 | CN1891859A Method and apparatus for forming silicon oxynitride film and program thereof |
| 01/10/2007 | CN1891858A Method and process for reactive gas cleaning of tool parts |
| 01/10/2007 | CN1891857A Carbonyl metal gas-phase deposition apparatus and method |
| 01/10/2007 | CN1891856A Free radical initiator in remote plasma chamber clean |