| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 02/22/2007 | US20070042185 Diamond diaphragm |
| 02/22/2007 | US20070042178 Pulverized organic semiconductors and method for vapor phase deposition onto a support |
| 02/22/2007 | US20070042153 Free-standing silicon carbide articles formed by chemical vapor deposition and methods for their manufacture |
| 02/22/2007 | US20070042139 Luminescent coating |
| 02/22/2007 | US20070042131 Non-intrusive plasma monitoring system for arc detection and prevention for blanket CVD films |
| 02/22/2007 | US20070042123 Application robot with multiple application devices |
| 02/22/2007 | US20070042121 carbon fiber reinforcement, densified by a matrix composed of the carbon phase and of a ceramic phase ( e.g SiC), and a refractory solid filler. Two monolithic ceramic shells cover the intermediate layers in order to give stiffness to the entire structure; ujsing polycarbosilane for forming SiC |
| 02/22/2007 | US20070042120 Method of forming semiconductor layer |
| 02/22/2007 | US20070042119 Vaporizer for atomic layer deposition system |
| 02/22/2007 | US20070042118 Encapsulated thermal processing |
| 02/22/2007 | US20070042117 Method and apparatus to control semiconductor film deposition characteristics |
| 02/22/2007 | US20070042116 Adding carrier to gold bromide solution with deionized water, immersing carrier into solution for darkness, drying, grinding, then heating in argon atmosphere; cost efficiency |
| 02/22/2007 | US20070040207 Electronic devices including dielectric layers with different densities of titanium |
| 02/22/2007 | US20070039942 Active cooling substrate support |
| 02/22/2007 | US20070039754 Method of providing a printed circuit board using laser assisted metallization and patterning of a microelectronic substrate |
| 02/22/2007 | US20070039666 Copper base for electronic component, electronic component, and process for producing copper base for electronic component |
| 02/22/2007 | US20070039550 Pulsed mass flow delivery system and method |
| 02/22/2007 | US20070039549 Pulsed mass flow delivery system and method |
| 02/22/2007 | DE19828843B4 Verfahren zur Herstellung von beschichteten Kurzfasern A process for the production of coated short fibers |
| 02/22/2007 | DE102005050374A1 Wear resistant sliding layer of silicon-containing aluminum alloy, e.g. for crankshaft bearings, is formed by gas phase deposition and heat treated to form macrocrystalline silicon deposits |
| 02/21/2007 | EP1755160A1 Copper base for electronic component, electronic component, and process for producing copper base for electronic component |
| 02/21/2007 | EP1754800A1 Material for chemical vapor deposition and thin film forming method |
| 02/21/2007 | EP1754690A1 Glazing unit and method for its production |
| 02/21/2007 | EP1754684A1 Method for treating surface of base, surface-treated base, material for medical use and instrument for medical use |
| 02/21/2007 | EP1754533A2 The combinatorial synthesis of novel materials |
| 02/21/2007 | EP1754254A1 Lift pin with roller glide for reducing friction |
| 02/21/2007 | EP1753958A1 Gas supply system for a pumping arrangement |
| 02/21/2007 | EP1753890A1 AI<sb>2</sb>O<sb>3</sb> CERAMIC TOOLS WITH DIFFUSION BONDING ENHANCED LAYER |
| 02/21/2007 | EP1753549A2 Methods for wet cleaning quartz surfaces of components for plasma processing chambers |
| 02/21/2007 | EP1654754B1 Gas-supply assembly, in particular for a cvd process reactor for growing an epitaxial layer |
| 02/21/2007 | EP1638701A4 Ion beam-assisted high-temperature superconductor (hts) deposition for thick film tape |
| 02/21/2007 | EP1397529B1 Application of dense plasmas generated at atmospheric pressure for treating gas effluents |
| 02/21/2007 | EP1305838B1 Low-temperature fabrication of thin-film energy-storage devices |
| 02/21/2007 | CN1918697A Process for producing monocrystal thin film and monocrystal thin film device |
| 02/21/2007 | CN1918324A Process kit design for deposition chamber |
| 02/21/2007 | CN1918323A Silicon compounds for producing sio2-containing insulating layers on chips |
| 02/21/2007 | CN1918322A Barrier layer process and arrangement |
| 02/21/2007 | CN1918321A Thin film forming apparatus |
| 02/21/2007 | CN1917932A Method and apparatus for treating a fluorocompound-containing gas stream |
| 02/21/2007 | CN1917164A Electrostatically clamped edge ring for plasma processing |
| 02/21/2007 | CN1916238A Metal plating layer |
| 02/21/2007 | CN1916234A Copper base for electronic component, electronic component, and process for producing copper base for electronic component |
| 02/21/2007 | CN1916233A Organic metal compound supplying container |
| 02/21/2007 | CN1301343C Vacuum exhaust system and monitoring and controlling method thereof |
| 02/21/2007 | CN1301342C Application of dense plasmas generated at atmospheric pressure for treating gas effluents |
| 02/20/2007 | US7180242 Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
| 02/20/2007 | US7180163 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 02/20/2007 | US7180129 Semiconductor device including insulating layer |
| 02/20/2007 | US7180095 Display device and manufacturing method thereof |
| 02/20/2007 | US7179923 N-sulfonylaminocarbonyl containing compounds |
| 02/20/2007 | US7179527 Substrate with transparent conductive oxide film, process for its production and photoelectric conversion element |
| 02/20/2007 | US7179505 Manufacturing method of MoSi2-SiC nanocomposite coating |
| 02/20/2007 | US7179397 Plasma processing methods and apparatus |
| 02/20/2007 | US7179352 Vacuum treatment system and process for manufacturing workpieces |
| 02/20/2007 | US7179334 System and method for performing semiconductor processing on substrate being processed |
| 02/20/2007 | US7179022 Cutting tool coated with diamond |
| 02/20/2007 | US7178584 Plasma polymerization enhancement of surface of metal for use in refrigerating and air conditioning |
| 02/15/2007 | WO2007019449A1 In-situ atomic layer deposition |
| 02/15/2007 | WO2007019437A1 Atomic layer deposition of ruthenium-containing films using surface-activating agents and selected ruthenium complexes |
| 02/15/2007 | WO2007019436A2 Atomic layer deposition of tantalum-containing films using surface-activating agents and novel tantalum complexes |
| 02/15/2007 | WO2007019435A2 Atomic layer deposition of metal-containing films using surface-activating agents |
| 02/15/2007 | WO2007018268A1 Material for insulating film, method of film formation therefrom and insulating film |
| 02/15/2007 | WO2007018235A1 Method for forming w-based film, method for forming gate electrode, and method for manufacturing semiconductor device |
| 02/15/2007 | WO2007018157A1 Substrate processing apparatus and substrate stage used therein |
| 02/15/2007 | WO2007018121A1 Method for forming film of group iii nitride such as gallium nitride |
| 02/15/2007 | WO2007018003A1 Method of forming metallic film and program-storing recording medium |
| 02/15/2007 | WO2006107944A3 Improved method and apparatus for treating bacterial infections in devices |
| 02/15/2007 | WO2006053129A3 Method and apparatus for forming a thin-film solar cell using a continuous process |
| 02/15/2007 | WO2006052277A3 Gas turbine engine components with aluminide coatings and method of forming such aluminide coatings on gas turbine engine components |
| 02/15/2007 | US20070037409 Composite dielectric forming methods and composite dielectrics |
| 02/15/2007 | US20070037408 Method and apparatus for plasma processing |
| 02/15/2007 | US20070037407 Method of cleaning semiconductor device fabrication apparatus |
| 02/15/2007 | US20070036921 Diamond |
| 02/15/2007 | US20070036914 Transparent conductive layer forming method, transparent conductive layer formed by the method, and material comprising the layer |
| 02/15/2007 | US20070036896 Mosaic diamond substrates |
| 02/15/2007 | US20070036895 Deposition methods utilizing microwave excitation |
| 02/15/2007 | US20070036894 Atomic layer deposition of tantalum-containing films using surface-activating agents and novel tantalum complexes |
| 02/15/2007 | US20070036893 Method for reproducible manufacturing of storage phosphor plates |
| 02/15/2007 | US20070036892 Enhanced deposition of noble metals |
| 02/15/2007 | US20070036890 Method of making a fuel cell component using a mask |
| 02/15/2007 | US20070036887 Method for making a thin film layer |
| 02/15/2007 | US20070034337 Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system |
| 02/15/2007 | US20070034159 Semiconductor manufacturing device and its heating unit |
| 02/15/2007 | US20070034158 Substrate processing apparatus and semiconductor device producing method |
| 02/15/2007 | US20070034157 Plasma processing apparatus and plasma processing method |
| 02/15/2007 | US20070034156 Method and apparatus for precision coating of molecules on the surfaces of materials and devices |
| 02/15/2007 | US20070034155 Apparatus for processing substrate and apparatus for processing electron source substrate |
| 02/15/2007 | US20070034154 Plasma source assembly and method of manufacture |
| 02/15/2007 | US20070034153 Thermal management of inductively coupled plasma reactors |
| 02/15/2007 | US20070034146 Silicon manufacturing apparatus |
| 02/15/2007 | DE112005000134T5 Alkoxidverbindung, Material für die Bildung eines dünnen Films und Verfahren für die Bildung eines dünnen Films Alkoxide compound, material for the formation of a thin film and method for the formation of a thin film |
| 02/15/2007 | DE102005037822A1 Vakuumbeschichtung mit Kondensatentfernung Vacuum coating with condensate removal |
| 02/15/2007 | DE10048210B4 Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung Apparatus and method for introducing a workpiece through a pre-vacuum chamber in a high vacuum chamber and their use |
| 02/14/2007 | EP1752991A1 Apparatus for manufacturing coated fuel particle for high temperature gas-cooled reactor |
| 02/14/2007 | EP1752912A2 Fingerprint detection device and method of its manufacture, and apparatus for f orming a projective film |
| 02/14/2007 | EP1752567A1 Process for producing wafer of silicon carbide single-crystal |
| 02/14/2007 | EP1752566A1 Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film |
| 02/14/2007 | EP1752423A2 Method for spraying of glass particles |
| 02/14/2007 | EP1752167A2 Resorbable implant with titanium coating |
| 02/14/2007 | EP1751587A2 Films for optical use and methods of making such films |