Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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06/27/2007 | CN1989069A Hydrogen-containing carbon film |
06/27/2007 | CN1989046A Container-treatment machine comprising controlled gripping means for seizing containers by the neck |
06/27/2007 | CN1986888A Method of coating internal passages of gas turbine components |
06/27/2007 | CN1986879A Double heater and chemical vapor deposition process for preparing super conductive film therein |
06/27/2007 | CN1986878A Active atom beam spraying DC discharging process for preparing nano carbon nitride film |
06/27/2007 | CN1986877A Organometallic composition |
06/27/2007 | CN1986876A Improved carbon beam deposition chamber for reduced defects |
06/26/2007 | US7235853 Fingerprint detection device and method of its manufacture, and apparatus for forming a protective film |
06/26/2007 | US7235701 Process for producing aldehyde |
06/26/2007 | US7235486 Method for forming tungsten materials during vapor deposition processes |
06/26/2007 | US7235484 Nanolayer thick film processing system and method |
06/26/2007 | US7235281 forming collar which narrows opening and applying heat/pressure, then reflowing sealing layer; chemical/physical vapor deposition; for use in microelectronics, microelectromechanical systems |
06/26/2007 | US7235155 Method and apparatus for monitoring plasma conditions using a monitoring ring |
06/26/2007 | US7235139 Wafer carrier for growing GaN wafers |
06/26/2007 | US7235138 Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces |
06/26/2007 | US7235137 Conductor treating single-wafer type treating device and method for semi-conductor treating |
06/26/2007 | US7235130 Apparatus and method for diamond production |
06/26/2007 | US7234476 Method of cleaning CVD equipment processing chamber |
06/26/2007 | US7234413 Plasma processing apparatus |
06/26/2007 | US7234412 Semiconductor substrate deposition processor chamber liner apparatus |
06/22/2007 | CA2571993A1 Chemical vapor deposition apparatus and methods of using the apparatus |
06/21/2007 | WO2007069973A1 Coated cutting tool insert |
06/21/2007 | WO2007069599A1 Method for precoating film forming apparatus |
06/21/2007 | WO2007069523A1 PROCESS FOR PRODUCING InGaN |
06/21/2007 | WO2007069438A1 Metal film decarbonizing method, film forming method and semiconductor device manufacturing method |
06/21/2007 | WO2007069419A1 Copper based composite base material for electronic part, electronic part and process for producing copper based composite base material for electronic part |
06/21/2007 | WO2007069011A1 Alkylsilanes as solvents for low vapor pressure precursors |
06/21/2007 | WO2007053553A3 Method and system for forming a nitrided germanium-containing layer using plasma processing |
06/21/2007 | WO2007048937B1 Method for monitoring a plasma, device for carrying out this method, use of this method for depositing a film onto a pet hollow body |
06/21/2007 | WO2007038710A3 Intra-cavity gettering of nitrogen in sic crystal growth |
06/21/2007 | WO2007019581A3 Weldable ultrahard materials and associated methods of manufacture |
06/21/2007 | WO2006133123A3 Shadow mask deposition of materials using reconfigurable shadow masks |
06/21/2007 | WO2005029542A3 Apparatus and method for point-of-use treatment of effluent gas streams |
06/21/2007 | US20070142956 Method for adjoining adjacent coatings on a processing element |
06/21/2007 | US20070141855 Methods of modifying interlayer adhesion |
06/21/2007 | US20070141851 System and method of reducing particle contamination of semiconductor substrates |
06/21/2007 | US20070141846 Rapid thermal processing system |
06/21/2007 | US20070141347 Hard carbon film, production method thereof, and sliding member |
06/21/2007 | US20070141274 Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus |
06/21/2007 | US20070141272 Methods and apparatus for coating gas turbine components |
06/21/2007 | US20070141258 Methods of growing nitride-based film using varying pulses |
06/21/2007 | US20070141257 Method and apparatus for forming metal silicate film, and method for manufacturing semiconductor device |
06/21/2007 | US20070141256 Methods for elimination or reduction of oxide and/or soot deposition in carbon containing layers |
06/21/2007 | US20070141255 Method and apparatus for strengthening a porous substrate |
06/21/2007 | US20070141233 EB-PVD system with automatic melt pool height control |
06/21/2007 | US20070140947 making a nanotube growing mat in a predetermined pattern of nanosized catalytic metal particles whose pattern produces nanotubes in a highly ordered forms; substrate comprising carbon and silicon in alternating layers; chemical vapor deposition |
06/21/2007 | US20070140671 Cooling Device, and Apparatus and Method for Manufacturing Image Display Panel Using Cooling Device |
06/21/2007 | US20070138000 Concentration-modulated coatings |
06/21/2007 | US20070137794 Thermal processing system with across-flow liner |
06/21/2007 | US20070137793 Processing apparatus |
06/21/2007 | US20070137671 Fluorine based cleaning of an ion source |
06/21/2007 | US20070137576 Technique for providing an inductively coupled radio frequency plasma flood gun |
06/21/2007 | US20070137575 Plasma processing apparatus |
06/21/2007 | US20070137574 Low-cost and high performance solar cell manufacturing machine |
06/21/2007 | US20070137573 Apparatus for an optimized plasma chamber grounded electrode assembly |
06/21/2007 | US20070137572 Plasma processing apparatus |
06/21/2007 | US20070137571 Deposition apparatus |
06/21/2007 | US20070137570 Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same |
06/21/2007 | US20070137569 Electrode assembly for a non-equilibrium plasma treatment |
06/21/2007 | US20070137568 Reciprocating aperture mask system and method |
06/21/2007 | US20070137567 Apparatus for manufacturing a semiconductor device |
06/21/2007 | US20070137566 Modular device for coating surfaces |
06/21/2007 | DE19721677B4 Elektrische Leitung und Herstellungsverfahren dafür Electrical Conduction and manufacturing method thereof |
06/21/2007 | DE112005002005T5 Clusterfreier amorpher Siliziumfilm, und Verfahren und Vorrichtung zu dessen Herstellung Cluster-free amorphous silicon film, and method and apparatus for its production |
06/21/2007 | DE102006010512A1 Verfahren zur Eliminierung oder Verringerung der Oxid- und/oder Russabscheidung in kohlenstoffhaltigen Schichten Process for the elimination or reduction of the oxide and / or carbon black deposition in carbonaceous layers |
06/21/2007 | DE102005061327A1 Plasma CVD coating, is formed by locating the component to be coated in a vacuum chamber, evacuating the chamber, supplying a process gas, and creating a plasma |
06/21/2007 | DE102005061134A1 Bauteil eines Stahlwerks, wie Stranggussanlage oder Walzwerk, Verfahren zur Herstellung eines solchen Bauteils sowie Anlage zur Erzeugung oder Verarbeitung von metallischen Halbzeugen Component of a steel plant, such as continuous casting plant or mill, process for producing such a component and plant for the production or processing of semi-finished metal |
06/20/2007 | EP1798309A2 Coated cutting tool insert |
06/20/2007 | EP1798307A1 Organometallic composition |
06/20/2007 | EP1797581A1 Precursor for film formation and method for forming ruthenium-containing film |
06/20/2007 | EP1797217A1 Method and device for applying an electrically conductive transparent coating to a substrate |
06/20/2007 | EP1797216A2 Heated gas box for pecvd applications |
06/20/2007 | EP1796875A1 Focussing nozzle |
06/20/2007 | EP1796850A2 Method of cryogenically coating a device |
06/20/2007 | EP1680528A4 Heat treatable coated article with diamond-like carbon (dlc) coating |
06/20/2007 | EP1390968B1 Smooth multipart substrate support member for cvd |
06/20/2007 | EP1346074B1 Coated cutting tool insert with iron-nickel based binder phase |
06/20/2007 | EP1254249B1 Deposited thin films and their use in detection, attachment, and bio-medical applications |
06/20/2007 | EP1044074B1 Photoresist coating process control with solvent vapor sensor |
06/20/2007 | CN2914322Y Heat insulation wall, heating element structure holding body, heating device and substrate board processing device |
06/20/2007 | CN1985364A Method of evaluating characteristics of an insulating film for a semiconductor device and method of forming the insulating film |
06/20/2007 | CN1985083A Piston ring, piston, cylinder and piston pin having amorphous and hard carbon film |
06/20/2007 | CN1985028A Common rack for electroplating and pvd coating operations |
06/20/2007 | CN1984839A Methods of forming alpha and beta tantalum films with controlled and new microstructures |
06/20/2007 | CN1984523A Plasma processing apparatus and method |
06/20/2007 | CN1982242A 光学材料及光学装置 Optical materials and optical means |
06/20/2007 | CN1982020A Mould core and its production |
06/20/2007 | CN1981981A Modified welding torch cathode for use in roughening a surface and related method |
06/20/2007 | CN1322793C Surface wave plasma treatment apparatus using multi-slot antenna |
06/20/2007 | CN1322559C Plasma processor |
06/20/2007 | CN1322558C Cleaning method of substrate treating apparatus, and substrate treating apparatus |
06/20/2007 | CN1322557C Processing apparatus and gas discharge suppressing member |
06/20/2007 | CN1322551C Vapor phase epitaxial apparatus and vapor phase epitaxial method |
06/20/2007 | CN1322178C Coloured diamond |
06/20/2007 | CN1321886C Method for controlling carbon nanometer tube three-dimension graphics type growth by spray plating precious metal membrane |
06/20/2007 | CN1321885C Method for preparing film of tube of directed nano carbon on soft base |
06/20/2007 | CN1321752C Coating method on inner walls of reaction tubes in hydrocarbon pyrolysis reactor |
06/20/2007 | CN1321717C Filtering unit |
06/19/2007 | US7232774 Polycrystalline silicon layer with nano-grain structure and method of manufacture |
06/19/2007 | US7232772 Substrate processing method |