Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
07/2007
07/04/2007CN1993812A Material for forming capacitor film
07/04/2007CN1993805A Liquid quantity monitor, semiconductor manufacturing equipment provided with liquid quantity monitor and method for monitoring liquid material and liquid quantity
07/04/2007CN1993496A Thin film forming method and thin film forming apparatus
07/04/2007CN1993495A Heated gas box for pecvd applications
07/04/2007CN1993494A Method for production of reactors for the decomposition of gases
07/04/2007CN1993493A DLC film-forming apparatus
07/04/2007CN1993490A Apparatus for directing plasma flow to coat internal passageways
07/04/2007CN1993172A Method and apparatus to help promote contact of gas with vaporized material
07/04/2007CN1990910A Film forming apparatus, operating method thereof and storage medium for operating the method
07/04/2007CN1990909A Method of forming carbon fibers using metal-organic chemical vapor deposition
07/04/2007CN1990908A Multi-zone resistive heater
07/04/2007CN1990903A Heater for depositing thin film
07/04/2007CN1990898A Cleaning method of apparatus for depositing ai-containing metal film and ai-containing metal nitride film
07/04/2007CN1990492A Ti, ta, hf, zr and related metal silicon amides for ald/cvd of metal-silicon nitrides, oxides or oxynitrides
07/04/2007CN1990491A Volatile metal beta-ketoiminate complexes
07/04/2007CN1990230A Coated cutting tool for deep hole drilling
07/04/2007CN1324689C Novel pretreatment method for alumina atom illuvium
07/04/2007CN1324648C Apparatus and method to confine plasma and reduce flow resistance in plasma reactor
07/04/2007CN1324617C Formation of thin film resistors
07/04/2007CN1324163C Chemical vapor deposition unit
07/04/2007CN1324162C Method for improving nucleation and adhesion of cvd and ald films deposited onto low-dielectric-constant dielectrics
07/03/2007US7239804 Cooling device, and apparatus and method for manufacturing image display panel using cooling device
07/03/2007US7239444 Display front plane, display lenticular lens, and display fresnel lens
07/03/2007US7238822 Ruthenium compound and process for producing a metal ruthenium film
07/03/2007US7238820 Free of impurities, to produce integrated circuits
07/03/2007US7238629 Deposition method, method of manufacturing semiconductor device, and semiconductor device
07/03/2007US7238616 Photo-assisted method for semiconductor fabrication
07/03/2007US7238552 Method and apparatus for depositing tungsten after surface treatment to improve film characteristics
07/03/2007US7238429 Ultra-hard low friction coating based on A1MgB14 for reduced wear of MEMS and other tribological components and system
07/03/2007US7238420 Fully crystalline alpha Al2O3 grains having average lateral diameter of 100 - 200 nanometers applied at a thickness of 100 nanometers directly to a metal alloy surface, especially a superalloy developed for high temperature gas turbine applications, particularly thermal barrier coatings for aircraft
07/03/2007US7238393 Overcoating substrates; using organosilicon compound and carbon mixture with inert gases; applying high and low radio frequency
07/03/2007US7238389 Directing a stream of metered fluidized powder onto a first member; heating the member to vaporize the powder; collecting the vapors in a manifold; providing a second member an aperture(s) to direct the vapors onto the surface to form a film; and interrupting the vaporization to reduce wall deposits
07/03/2007US7238382 Method and system for characterizing porous materials
07/03/2007US7238262 Forming a bulbous light emitting chamber intermediate tubular end portions from a lamp burner envelope; coating the chamber surface; and sealing the ends with a heat source while shielding the coated surface to prevent degradation to the performance of the coating.
07/03/2007US7238241 Method of producing high aspect ratio domes by vapor deposition
07/03/2007US7238240 Method of applying hydrocarbon barrier to a plastic fuel tank
07/03/2007US7238238 Gasification monitor, method for detecting mist, film forming method and film forming apparatus
07/03/2007US7237606 Wafer supporter
07/03/2007US7237565 Fluid feeding apparatus
07/03/2007CA2305938C Filtered cathodic arc deposition method and apparatus
06/2007
06/28/2007WO2007072984A1 Semiconductor substrate manufacturing method and element structure manufacturing method
06/28/2007WO2007072867A1 Feedstock supply unit and vapor deposition equipment
06/28/2007WO2007072855A1 Apparatus for manufacturing semiconductor thin film
06/28/2007WO2007047715A3 System for improving the wearability of a surface and related method
06/28/2007WO2006020424A3 Multi-gas distribution injector for chemical vapor deposition reactors
06/28/2007US20070148990 Methods and apparatus for forming a high dielectric film and the dielectric film formed thereby
06/28/2007US20070148920 Fabrication method and fabrication apparatus of group III nitride crystal substance
06/28/2007US20070148497 Coated cutting tool insert
06/28/2007US20070148463 Method of coating the surface of an inorganic substrate with an organic material and the product obtained
06/28/2007US20070148451 Method of forming carbon fibers using metal-organic chemical vapor deposition
06/28/2007US20070148374 Method of incorporating a mark in cvd diamond
06/28/2007US20070148368 Apparatus for plasma treatment of dielectric bodies
06/28/2007US20070148367 Chemical vapor deposition apparatus and methods of using the apparatus
06/28/2007US20070148352 Antireflective film and production method thereof
06/28/2007US20070148351 superior uniformity in electroluminescence( EL) layer film thickness, superior throughput, and improved utilization efficiency of EL materials
06/28/2007US20070148350 Enhanced thin film deposition
06/28/2007US20070148349 Showerhead, film forming apparatus including showerhead and method for manufacturing ferroelectric film
06/28/2007US20070148348 Evaporation source and method of depositing thin film using the same
06/28/2007US20070148347 Process for producing oxide films
06/28/2007US20070148346 Systems and methods for deposition of graded materials on continuously fed objects
06/28/2007US20070148345 Process for the deposition by cvd of a silver film on a substrate
06/28/2007US20070148337 Flame-perforated aperture masks
06/28/2007US20070148336 Photovoltaic contact and wiring formation
06/28/2007US20070148327 Phenolic resin, which comprises a phenolic monomeric unit of which the phenyl group is substituted by an imide or thioimide group; chemical resistance of the heat-sensitive coating against printing liquids and press chemicals is improved
06/28/2007US20070148261 Cancer treatment method
06/28/2007US20070148079 Thick single crystal diamond layer method for making it and gemstones produced from the layer
06/28/2007US20070146713 Method for identifying effect pigments in a paint film for field color matching
06/28/2007US20070145900 RF Plasma Supply Device
06/28/2007US20070145006 Plasma etching apparatus
06/28/2007US20070144889 Machine for treating substrates and method
06/28/2007US20070144673 Apparatus for fabricating flat panel display and method for preventing substrate damage using the same
06/28/2007US20070144672 Plasma producing method and apparatus as well as plasma processing apparatus
06/28/2007US20070144671 Shower plate, plasma processing apparatus, and product manufacturing method
06/28/2007US20070144442 Susceptor
06/28/2007US20070144441 Methods and arrangement for implementing highly efficient plasma traps
06/28/2007US20070144440 Plasma producing method and apparatus as well as plasma processing apparatus
06/28/2007US20070144439 Cartesian cluster tool configuration for lithography type processes
06/28/2007US20070144438 Systems and methods of forming refractory metal nitride layers using disilazanes
06/28/2007US20070144437 Epitaxial apparatus
06/28/2007US20070144436 Gas coupler for substrate processing chamber
06/28/2007US20070144435 Adjusting mechanism and adjusting method thereof
06/28/2007DE102005061900A1 Verfahren zur Isolierung des Aluminiumantels eines Elektrolytkondensators mit einer Folie A process for the isolation of the aluminum Antel an electrolytic capacitor with a film
06/28/2007DE102005061248A1 Halbleiterbauteil mit in Kunststoffgehäusemasse eingebetteten Halbleiterbauteilkomponenten Semiconductor device having embedded in plastic housing compound semiconductor device components
06/27/2007EP1801620A2 Installation and coating method for ophthalmic lens
06/27/2007EP1801261A1 Chemical vapor deposition apparatus and methods of using the apparatus
06/27/2007EP1801260A1 Cutting tool made of surface-coated cubic boron nitride-based ultrahigh pressure sintered material
06/27/2007EP1800067A1 Method and system for wafer temperature control
06/27/2007EP1799879A1 Plasma enhanced chemical vapor deposition apparatus and method
06/27/2007EP1799877A2 Sioc:h coated substrates and methods for their preparation
06/27/2007EP1532292B1 Atomic deposition layer methods
06/27/2007EP1525336B1 Titania coatings by plasma cvd at atmospheric pressure
06/27/2007EP1425433A4 Protective shield and system for gas distribution
06/27/2007EP1244821A4 Articles coated with aluminum nitride by chemical vapor deposition
06/27/2007CN1989595A Gallium nitride-based semiconductor stacked structure, production method thereof, and compound semiconductor and light-emitting device each using the stacked structure
06/27/2007CN1989587A Blocker plate bypass to distribute gases in a chemical vapor deposition system
06/27/2007CN1989345A Gas abatement
06/27/2007CN1989271A Film forming equipment and film forming method
06/27/2007CN1989270A Deposition of nano-crystal silicon using a single wafer chamber
06/27/2007CN1989269A Ion implanter operating in pulsed plasma mode
06/27/2007CN1989080A Nanostructured coatings and related methods