Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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07/04/2007 | CN1993812A Material for forming capacitor film |
07/04/2007 | CN1993805A Liquid quantity monitor, semiconductor manufacturing equipment provided with liquid quantity monitor and method for monitoring liquid material and liquid quantity |
07/04/2007 | CN1993496A Thin film forming method and thin film forming apparatus |
07/04/2007 | CN1993495A Heated gas box for pecvd applications |
07/04/2007 | CN1993494A Method for production of reactors for the decomposition of gases |
07/04/2007 | CN1993493A DLC film-forming apparatus |
07/04/2007 | CN1993490A Apparatus for directing plasma flow to coat internal passageways |
07/04/2007 | CN1993172A Method and apparatus to help promote contact of gas with vaporized material |
07/04/2007 | CN1990910A Film forming apparatus, operating method thereof and storage medium for operating the method |
07/04/2007 | CN1990909A Method of forming carbon fibers using metal-organic chemical vapor deposition |
07/04/2007 | CN1990908A Multi-zone resistive heater |
07/04/2007 | CN1990903A Heater for depositing thin film |
07/04/2007 | CN1990898A Cleaning method of apparatus for depositing ai-containing metal film and ai-containing metal nitride film |
07/04/2007 | CN1990492A Ti, ta, hf, zr and related metal silicon amides for ald/cvd of metal-silicon nitrides, oxides or oxynitrides |
07/04/2007 | CN1990491A Volatile metal beta-ketoiminate complexes |
07/04/2007 | CN1990230A Coated cutting tool for deep hole drilling |
07/04/2007 | CN1324689C Novel pretreatment method for alumina atom illuvium |
07/04/2007 | CN1324648C Apparatus and method to confine plasma and reduce flow resistance in plasma reactor |
07/04/2007 | CN1324617C Formation of thin film resistors |
07/04/2007 | CN1324163C Chemical vapor deposition unit |
07/04/2007 | CN1324162C Method for improving nucleation and adhesion of cvd and ald films deposited onto low-dielectric-constant dielectrics |
07/03/2007 | US7239804 Cooling device, and apparatus and method for manufacturing image display panel using cooling device |
07/03/2007 | US7239444 Display front plane, display lenticular lens, and display fresnel lens |
07/03/2007 | US7238822 Ruthenium compound and process for producing a metal ruthenium film |
07/03/2007 | US7238820 Free of impurities, to produce integrated circuits |
07/03/2007 | US7238629 Deposition method, method of manufacturing semiconductor device, and semiconductor device |
07/03/2007 | US7238616 Photo-assisted method for semiconductor fabrication |
07/03/2007 | US7238552 Method and apparatus for depositing tungsten after surface treatment to improve film characteristics |
07/03/2007 | US7238429 Ultra-hard low friction coating based on A1MgB14 for reduced wear of MEMS and other tribological components and system |
07/03/2007 | US7238420 Fully crystalline alpha Al2O3 grains having average lateral diameter of 100 - 200 nanometers applied at a thickness of 100 nanometers directly to a metal alloy surface, especially a superalloy developed for high temperature gas turbine applications, particularly thermal barrier coatings for aircraft |
07/03/2007 | US7238393 Overcoating substrates; using organosilicon compound and carbon mixture with inert gases; applying high and low radio frequency |
07/03/2007 | US7238389 Directing a stream of metered fluidized powder onto a first member; heating the member to vaporize the powder; collecting the vapors in a manifold; providing a second member an aperture(s) to direct the vapors onto the surface to form a film; and interrupting the vaporization to reduce wall deposits |
07/03/2007 | US7238382 Method and system for characterizing porous materials |
07/03/2007 | US7238262 Forming a bulbous light emitting chamber intermediate tubular end portions from a lamp burner envelope; coating the chamber surface; and sealing the ends with a heat source while shielding the coated surface to prevent degradation to the performance of the coating. |
07/03/2007 | US7238241 Method of producing high aspect ratio domes by vapor deposition |
07/03/2007 | US7238240 Method of applying hydrocarbon barrier to a plastic fuel tank |
07/03/2007 | US7238238 Gasification monitor, method for detecting mist, film forming method and film forming apparatus |
07/03/2007 | US7237606 Wafer supporter |
07/03/2007 | US7237565 Fluid feeding apparatus |
07/03/2007 | CA2305938C Filtered cathodic arc deposition method and apparatus |
06/28/2007 | WO2007072984A1 Semiconductor substrate manufacturing method and element structure manufacturing method |
06/28/2007 | WO2007072867A1 Feedstock supply unit and vapor deposition equipment |
06/28/2007 | WO2007072855A1 Apparatus for manufacturing semiconductor thin film |
06/28/2007 | WO2007047715A3 System for improving the wearability of a surface and related method |
06/28/2007 | WO2006020424A3 Multi-gas distribution injector for chemical vapor deposition reactors |
06/28/2007 | US20070148990 Methods and apparatus for forming a high dielectric film and the dielectric film formed thereby |
06/28/2007 | US20070148920 Fabrication method and fabrication apparatus of group III nitride crystal substance |
06/28/2007 | US20070148497 Coated cutting tool insert |
06/28/2007 | US20070148463 Method of coating the surface of an inorganic substrate with an organic material and the product obtained |
06/28/2007 | US20070148451 Method of forming carbon fibers using metal-organic chemical vapor deposition |
06/28/2007 | US20070148374 Method of incorporating a mark in cvd diamond |
06/28/2007 | US20070148368 Apparatus for plasma treatment of dielectric bodies |
06/28/2007 | US20070148367 Chemical vapor deposition apparatus and methods of using the apparatus |
06/28/2007 | US20070148352 Antireflective film and production method thereof |
06/28/2007 | US20070148351 superior uniformity in electroluminescence( EL) layer film thickness, superior throughput, and improved utilization efficiency of EL materials |
06/28/2007 | US20070148350 Enhanced thin film deposition |
06/28/2007 | US20070148349 Showerhead, film forming apparatus including showerhead and method for manufacturing ferroelectric film |
06/28/2007 | US20070148348 Evaporation source and method of depositing thin film using the same |
06/28/2007 | US20070148347 Process for producing oxide films |
06/28/2007 | US20070148346 Systems and methods for deposition of graded materials on continuously fed objects |
06/28/2007 | US20070148345 Process for the deposition by cvd of a silver film on a substrate |
06/28/2007 | US20070148337 Flame-perforated aperture masks |
06/28/2007 | US20070148336 Photovoltaic contact and wiring formation |
06/28/2007 | US20070148327 Phenolic resin, which comprises a phenolic monomeric unit of which the phenyl group is substituted by an imide or thioimide group; chemical resistance of the heat-sensitive coating against printing liquids and press chemicals is improved |
06/28/2007 | US20070148261 Cancer treatment method |
06/28/2007 | US20070148079 Thick single crystal diamond layer method for making it and gemstones produced from the layer |
06/28/2007 | US20070146713 Method for identifying effect pigments in a paint film for field color matching |
06/28/2007 | US20070145900 RF Plasma Supply Device |
06/28/2007 | US20070145006 Plasma etching apparatus |
06/28/2007 | US20070144889 Machine for treating substrates and method |
06/28/2007 | US20070144673 Apparatus for fabricating flat panel display and method for preventing substrate damage using the same |
06/28/2007 | US20070144672 Plasma producing method and apparatus as well as plasma processing apparatus |
06/28/2007 | US20070144671 Shower plate, plasma processing apparatus, and product manufacturing method |
06/28/2007 | US20070144442 Susceptor |
06/28/2007 | US20070144441 Methods and arrangement for implementing highly efficient plasma traps |
06/28/2007 | US20070144440 Plasma producing method and apparatus as well as plasma processing apparatus |
06/28/2007 | US20070144439 Cartesian cluster tool configuration for lithography type processes |
06/28/2007 | US20070144438 Systems and methods of forming refractory metal nitride layers using disilazanes |
06/28/2007 | US20070144437 Epitaxial apparatus |
06/28/2007 | US20070144436 Gas coupler for substrate processing chamber |
06/28/2007 | US20070144435 Adjusting mechanism and adjusting method thereof |
06/28/2007 | DE102005061900A1 Verfahren zur Isolierung des Aluminiumantels eines Elektrolytkondensators mit einer Folie A process for the isolation of the aluminum Antel an electrolytic capacitor with a film |
06/28/2007 | DE102005061248A1 Halbleiterbauteil mit in Kunststoffgehäusemasse eingebetteten Halbleiterbauteilkomponenten Semiconductor device having embedded in plastic housing compound semiconductor device components |
06/27/2007 | EP1801620A2 Installation and coating method for ophthalmic lens |
06/27/2007 | EP1801261A1 Chemical vapor deposition apparatus and methods of using the apparatus |
06/27/2007 | EP1801260A1 Cutting tool made of surface-coated cubic boron nitride-based ultrahigh pressure sintered material |
06/27/2007 | EP1800067A1 Method and system for wafer temperature control |
06/27/2007 | EP1799879A1 Plasma enhanced chemical vapor deposition apparatus and method |
06/27/2007 | EP1799877A2 Sioc:h coated substrates and methods for their preparation |
06/27/2007 | EP1532292B1 Atomic deposition layer methods |
06/27/2007 | EP1525336B1 Titania coatings by plasma cvd at atmospheric pressure |
06/27/2007 | EP1425433A4 Protective shield and system for gas distribution |
06/27/2007 | EP1244821A4 Articles coated with aluminum nitride by chemical vapor deposition |
06/27/2007 | CN1989595A Gallium nitride-based semiconductor stacked structure, production method thereof, and compound semiconductor and light-emitting device each using the stacked structure |
06/27/2007 | CN1989587A Blocker plate bypass to distribute gases in a chemical vapor deposition system |
06/27/2007 | CN1989345A Gas abatement |
06/27/2007 | CN1989271A Film forming equipment and film forming method |
06/27/2007 | CN1989270A Deposition of nano-crystal silicon using a single wafer chamber |
06/27/2007 | CN1989269A Ion implanter operating in pulsed plasma mode |
06/27/2007 | CN1989080A Nanostructured coatings and related methods |